• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.563-567
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• 2004

In this paper, a remote temperature sensor based on surface acoustic wave is introduced and the issues on design, manufacturing, and test of the sensor are addressed. SAW sensors having single and double electrode are prepared on the 128$^{\circ}$ YX-LiNbO$_3$ Substrate. The frequency responses of SAW sensors on the temperature change are compared. To measure the change of center frequency, two center frequencies on the 3dB and 20dB are measured and compared. Since the center frequency on the temperature change from -30$^{\circ}C$ to 80$^{\circ}C$ is linearly changed, the SAW sensor is applicable to the temperature sensor.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2008.11a
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• pp.43-44
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• 2008

실리콘 웨이퍼 위에 마이크로웨이브 플라즈마 화학증착법으로 나노결정질 다이아몬드 박막을 형성하고 그 위에 RF 마그네트론 스퍼터로 ZnO 박막을 적층한 후 SAW(Surface Acoustic Wave) 필터를 제작하여 평가하였다. 기판온도, 작업압력, Ar/$CH_4$ 비율을 변화시켜 최적공정 조건에서 30nm 수준의 결정립을 갖는 $4{\mu}m$ 두께의 다이아몬드 박막을 얻었고, RF 인가전력, 기판온도, Ar/$O_2$ 비율을 조정하여 결정성이 우수하고, 표면 거칠기가 좋으며, 높은 비저항을 갖는 $2.2{\mu}m$ 두께의 ZnO 박막을 얻었다. 박막의 특성은 FESEM과 XRD로 평가하였다. Lift-off 식각공정을 이용하여 일정한 선폭과 간격(Line/Space : 1.5/$1.5{\mu}m$)을 갖는 구리 전극 패턴을 형성하였다. Network Analyzer를 이용하여 측정한 SAW 필터의 중심주파수는 1.67GHz이었다.

• Journal of the Korean institute of surface engineering
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• v.42 no.5
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• pp.216-219
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• 2009

A surface acoustic wave (SAW) filter structure was fabricated employing $4{\mu}m$ thick nanocrystalline diamond (NCD) and $2.2{\mu}m$ thick ZnO films on Si wafer. The NCD film was deposited in an $Ar/CH_4$ gas mixture by microwave plasma chemical vapor deposition method. The ZnO film was formed over the NCD film in an RF magnetron sputter using ZnO target and $Ar/O_2$ gas. On the top of the two layers, copper film was deposited by the RF sputter and inter digital transducer (IDT) electrode pattern (line/space : $1.5/1.5{\mu}m$) was defined by the photolithography including a lift-off etching process. The fabricated SAW filter exhibited the center frequency of 1.66 GHz and the phase velocity of 9,960 m/s, which demonstrated that a giga Hertz SAW filter can be realized by utilizing the nanocrystalline diamond thin film.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.49.3-49
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• 2002

$\textbullet$ Surface Acoustic Wave $\textbullet$ Tactile Display Principle $\textbullet$ Installed on PC Mouse Button $\textbullet$ Vibration Measurement $\textbullet$ Demonstration on PC Screen $\textbullet$ Comparison Tests

• Journal of the Korean Institute of Telematics and Electronics A
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• v.32A no.7
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• pp.94-103
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• 1995

Thin film acoustooptic beam deflector in proton-exchanged Y-cut LiNbO$_{3}$ was fabricated and measured. The planar waveguide was fabricated by using the proton-exchanged and annealing method in Y0cut LiNbO$_{3}$. Interdigital transducer for SAW(surface acoustic wave) was made by the laser lithography. Using above method, the thin film acoustooptic beam deflector was constructed. Its SAW wavelength was 20.mu.m at 174MHz center frequency. The interaction length between guided optical wave and SAW was 2.16mm. The measured 3dB bandwidth was 17MHz using He-Ne laser. And 70% diffraction efficiency was obtained at 970mW RF driving power.

• Korean Chemical Engineering Research
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• v.49 no.2
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• pp.224-229
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• 2011

In this study, we have developed shear horizontal(SH) surface acoustic wave(SAW) sensors for the detection of immunoglobulin G(IgG) on the gold coated delay line of SH-SAW devices. As the result of the experiment, we could uniformly immobilize anti-MIgG(mouse IgG) conjugate on the surface of gold. When displaying results of immobilization on the surface of gold using G-anti MIgG conjugate and blocking buffer in frequency shift, G-anti MIgG conjugate showed frequency shift of 75.1 kHz in the initial frequency, and blocking buffer showed frequency shift of 215.7 kHz. When various concentrations of MIgG was added in 100MHz type sensor, the sensor showed 46.3, 127.45, 161.21 and 262.39 kHz frequency shift at 25, 50, 75 and 100 ${\mu}g$ MIgG concentration, respectively.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.15 no.5
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• pp.100-108
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• 2016

In various industries, many researches studies have been done in using nano thin film fabrication technology. In the field of printed electronics, various electronic devices can be fabricated using a direct printing process of on multiple functional materials. It has the advantages of low prices, environment-friendly environmentally friendly, flexibleility, large scale, mass production produced, simple process and so on. In this study, a viable thin film fabrication technology has beenwas introduced using the surface acoustic wave mechanism for thin film deposition. Fabrication of thin films using organic, inorganic and composite of organic/inorganic materials have been were analyzed through the experimental research. In this experiment, organic material MEH:PPV, inorganic material ZnO and composite material MEH:PPV/ZnO have been depo sited as thin films.

• Proceedings of the KIEE Conference
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• 2015.07a
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• pp.1243-1244
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• 2015

Finding solutions for the disabled is a major challenge for our society. In the case of a disability due to a malfunction of the nervous system, the origin may be accidental, genetic, or induced by environmental factors. This type of loss can cause loss or movement disorders (paraplegia, hemiplegia, quadriplegia, epilepsy, Parkinson's disease, multiple sclerosis, etc.) or malfunction of certain sensory functions (blindness, deafness, chronic pain, etc.). Many alternatives, more technology, have been imported to create interfaces between the human body and an artificial prosthesis in order to restore some functions of the human body. A wireless system, battery neurons probe was developed for one hand reading neural signals in the brain, and on the other hand also able to excite the neuron in the brain using a surface acoustic wave one ports (SAW) delay line reflection.

• Journal of Sensor Science and Technology
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• v.9 no.4
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• pp.327-333
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• 2000

Transversal SAW(Surface Acoustic Wave) filters of 340MHz were fabricated on piezoelectric substrates of the LN $128^{\circ}$ Y-X wafers. Both of spacing and width of IDT were $1.435{\mu}m$. For improving the power durability characteristics, titanium layer was inserted between aluminum electrode and piezoelectric substrate since it has high density, low thermal expansion coefficient, and good adhesive properties. Power durability was evaluated with respect to the thickness of inserted titanium layer and the temperature of heat treatment. Power durability is improved with increasing the thickness of the inserted titanium layer. Moreover, it is remarkably improved by heat treatment at the temperature of $300^{\circ}C$.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.2
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• pp.83-90
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• 2005

In this paper, we proposed the newly design method for extracting of the saw resonator characteristic. For the parameters of the proposed equivalent model, we adjusted and optimized the variables of several functions. As verification of proposed method, we firstly designed and fabricated cellular saw resonator by using the proposed model resonator. As the simulated and measured results of the proposed design method are almost equaled, we confirmed the usefulness of this method. we knew the usefulness of this method. Finally we designed the 800MHz cellular Tx/Rx band pass filter by using this designed resonator.