• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.25 no.12
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• pp.1219-1227
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• 2014

For development of the surface acoustic wave bandpass filter(SAW-BPF), we fabricated the high quality ZnO thin films through the step-by-step(double) deposition using two different deposition methods which are pulsed laser deposition(PLD) and RF sputtering techniques. The second growth of ZnO thin films was completed by RF sputtering method on the first ZnO thin films pre-deposited by PLD method. The characteristics of ZnO thin films were analyzed by XRD, SEM and AFM systems. The FWHM of ${\omega}$-scan analysis and the minimum RMS value of surface roughness of step-by-step grown ZnO thin films were $0.79^{\circ}$ and 1.108 nm respectively. As a result, the crystallinity and the preferred orientation of the grown ZnO thin films were kept good quality and the surface roughnesses of those were improved by post-annealing process as comparison with ZnO thin film fabricated by the conventional PLD technique only. Using these proposed ZnO thin films, we demonstrated the RF device such as SAW-BPF, built by the proposed ZnO thin films, shows that it has the bandwidth of 2.98 MHz and the insertion loss of 36.5 dB at the center frequency of 260.8 MHz, respectively.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.26 no.7
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• pp.1032-1039
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• 2022

In this paper, we designed and implemented a cavity bandpass filter combined with a cross-coupling equalizer structure to enhance Group delay for 5G mobile network repeater, which can replace the SAW (Surface Acoustic Wave) type bandwidth filter used in the existing mobile communication system. Using the 3D EM simulation tool (HFSS), the resonance frequency, the coupling coefficient between resonators, and external quality coefficient between resonators were calculated. Based on this, a 12th bandpass filter was constructed to have attenuation characteristics of more than 20dB at the edge end of both sides of the band with a metal cavity structure with a frequency band of 3500MHz to 3600MHz and bandwidth of 97.85MHz. The designed bandpass filter satisfies the group delay time requirement for the 5G mobile communication standard and the in-band and out-band frequency responses.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.4 no.2
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• pp.134-138
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• 1994

$LiTaO_3 (LT)$ single crystals (Y, X-axis) were grown from the congruent composition, 48.65 mole %, $Li_2O$ for SAW (Surface Acoustic Wave) applications. Basic SAW filters were fabricated on the RIST prepared LT wafers (Y-cut) using phtolithography. SAW filter performance was evaluated. The results were compared of the SAW characteristics between RIST prepared LT wafer (Y-cut) and commercial Yamaju wafer (Y-cut). The SAW filter prepared on the RIST grown LT wafer was shown better SAW performances than that of Yamaju wafer.

• 한국전산유체공학회:학술대회논문집
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• 2003.10a
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• pp.77-79
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• 2003

The stability of flows induced by a surface acoustic wave (SAW) propagating along the deformable walls in a confined parallel-plane microchannel or slab in the laminar flow regime is investigated. The governing equation which was derived by considering the nonlinear coupling between the deformable or waving interface and viscous fluids is linearized and then the problem is solved by a verified code based on the spectral method together with the associated interface and boundary conditions. The value of the critical Reynolds number was found to be near 1439 which is much smaller than the rigid-wall case: 5772 for conventional pressure-driven flows.

• Proceedings of the KIEE Conference
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• 2009.07a
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• pp.1515_1516
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• 2009

A 440MHz wireless and passive surface acoustic wave (SAW) based micro-sensor was developed for simultaneous measurement of temperature and humidity. The developed sensor is composed of a SAW reflective delay lines structured by an IDT (Inter-Digital Transducer), four reflectors and humidity sensitive film (polyimide). Polyimide was dry-ecthed by RIE (Reactive Ion Etching) to obtain high roughness, which gives the large reaction area resulting in high sensitivity. In wireless testing using a network analyzer, sharp reflection peaks with high S/N ratio, small signal attenuation, and few spurious peaks were observed in the time domain. High sensitivity towards the temperature and humidiy were also observed in the large concentration range. The obtained sensitivity was $16.8^{\circ}/^{\circ}C$ for temperature sensor and $15.8^{\circ}$/%RH for humidity sensor.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.11a
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• pp.187-189
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• 1995

A Surface Acoustic Wave Gas sensor for NO, CO, H$_2$gas detection was designed fabricated, and tested. A delay line device was designed to composite a single mode SAW oscillator which enables to measure a SAW velocity. To reduce the effect of temperature and humidity, dual delay line oscillator circuit was used. And final output was measured by digital frequency counter. NO, CO, H$_2$gas were detected by WO$_3$thin film deposited on the path of the Delay Line.

• Proceedings of the IEEK Conference
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• 1998.06a
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• pp.367-370
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• 1998

A hybrid-integrated SAW(surface acoustic wave) douplexer including transmitter(Tx) filter, receiver(Rx) filter an dantenna terminal has been studied. The prototype duplxer was designed for CDMA system application in the 800 MHz-band. Ladder type SAW filters consisting of one port SAW resonators wer integrated on epoxy substrate to demonstrate the feasiblity of antenna duplexer. In order to perform the duplexing function, a strip line for impedance transformaton with length of .gamma./4 was inserted at rx path. The fabricted duplexer has an insertion loss of 3.0 dB at Tx path and 3.7 dB at Rx path. The attenuation has more than 40dB.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1390-1392
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• 2001

ZnO-based SAW(surface acoustic wave) filters are fabricated with the configuration of IDT/ZnO/$SiO_2$/Si(100) using various IDT materials such as Al, Cu/Ti, and Cu/Al. Their frequency response characteristics are measured and compared. The thickness of Al IDT is varied to examine the mass loading effect. In addition, effects of thermal treatment and electrical stress on the frequency responses of the fabricated SAW filters are investigated.

• Proceedings of the IEEK Conference
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• 2001.06a
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• pp.241-244
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• 2001

The design and fabrication of the surface acoustic wave(SAW) bandpass filters using slanted finger interdigital electrode transducers(IDTs) is investigated. The slanted finger IDTs are used to design SAW filters with good shape factor, a flat passband, and good out-of-band rejection characteristic. The slanted finger IDTS filter was simulated of three kind of IDTs structure. uniform-uniform IDT, uniform-withdrawal weighting IDTS, withdrawal weighting-withdrawal weighting IDTS. Uniform-withdrawal weighting IDTs structure SAW filters was designed and fabricated on 112$^{\circ}$ LiTaO$_3$, 128$^{\circ}$LiNbO$_3$ substrates. Designed SAW filter has about a 30% fractional bandwidth and a 70MHz center frequency.

• Transactions of the Society of Information Storage Systems
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• v.8 no.1
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• pp.16-21
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• 2012

SAW device is widely used as filters, sensors, actuators in various technologies. And capacitive sensor is tremendously used to measure pressure, gap, etc. The application of SAW device as signal conditioner of capacitive sensor reduces noise level and enables high precision measurement. The response increase of SAW based capacitive sensor is produced just before the two capacitive electrode contacts by the existence of parasitic resistance of capacitive electrode. In this paper, we analyze the effects of parasitic resistance and propose the calibrating method using lumped component and execute the high precision gap measurement using calibrated system. And xx nm resolution and yy ${\mu}m$ stroke was attained.