Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Fabrication and characterization of ZnO-based SAW filters using various IDT metals

다양한 IDT 금속막을 이용한 ZnO-SAW 필터의 제작 및 특성 분석

  • Lee, Myung-Ho (Dept. of Electrical Engineering, Hanyang University) ;
  • Lee, Hye-Jung (Dept. of Electrical Engineering, Hanyang University) ;
  • Lee, Jin-Bock (Dept. of Electrical Engineering, Hanyang University) ;
  • Park, Jin-Seok (Dept. of Electrical Engineering, Hanyang University)
  • 이명호 (한양대학교 전자전기제어계측 공학과) ;
  • 이혜정 (한양대학교 전자전기제어계측 공학과) ;
  • 이진복 (한양대학교 전자전기제어계측 공학과) ;
  • 박진석 (한양대학교 전자전기제어계측 공학과)
  • Published : 2001.07.18
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Abstract

ZnO-based SAW(surface acoustic wave) filters are fabricated with the configuration of IDT/ZnO/$SiO_2$/Si(100) using various IDT materials such as Al, Cu/Ti, and Cu/Al. Their frequency response characteristics are measured and compared. The thickness of Al IDT is varied to examine the mass loading effect. In addition, effects of thermal treatment and electrical stress on the frequency responses of the fabricated SAW filters are investigated.

Keywords