• Title/Summary/Keyword: Suction force

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Silicon/Pad Pressure Measurements During Chemical Mechanical Polishing

  • Danyluk, Steven;Ng, Gary;Yoon, In-Ho;Higgs, Fred;Zhou, Chun-Hong
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.10b
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    • pp.433-434
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    • 2002
  • Chemical mechanical polishing refers to a process by which silicon and partially-processed integrated circuits (IC's) built on silicon substrates are polished to produce planar surfaces for the continued manufacturing of IC's. Chemical mechanical polishing is done by pressing the silicon wafer, face down, onto a rotating platen that is covered by a rough polyurethane pad. During rotation, the pad is flooded with a slurry that contains nanoscale particles. The pad deforms and the roughness of the surface entrains the slurry into the interface. The asperities contact the wafer and the surface is polished in a three-body abrasion process. The contact of the wafer with the 'soft' pad produces a unique elastohydrodynamic situation in which a suction force is imposed at the interface. This added force is non-uniform and can be on the order of the applied pressure on the wafer. We have measured the magnitude and spatial distribution of this suction force. This force will be described within the context of a model of the sliding of hard surfaces on soft substrates.

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Complete denture fabrication of edentulous patient with severe alveolar bone resorption using suction mechanism: A case report (치조제 흡수가 심한 무치악 환자에서 흡착원리를 이용한 총의치 수복 증례)

  • Kim, Hyun-Ah;Yun, Kwi-Dug;Jo, Yu-Jin;Yang, Hongso;Park, Sang-Won;Park, Chan
    • The Journal of Korean Academy of Prosthodontics
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    • v.58 no.2
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    • pp.130-136
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    • 2020
  • Fabrication of complete denture with suction mechanism was introduced to enhance the retention and stability of denture by sealing around the denture border by forming negative pressure on the inner side of denture base during functional movement such as swallowing or masticating. Mandibular suction dentures reduce denture dislodging force during opening by taking preliminary impression without pressure on retromolar pad area in rest position. In this case, fabrication of complete denture using suction mechanism for an edentulous patient with severe alveolar bone resorption allowed us to clinically enhance retention and stability of denture and improve satisfaction of patient.

Multi-dimensional wind vibration coefficients under suction for ultra-large cooling towers considering ventilation rates of louvers

  • Ke, S.T.;Du, L.Y.;Ge, Y.J.;Tamura, Y.
    • Structural Engineering and Mechanics
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    • v.66 no.2
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    • pp.273-283
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    • 2018
  • Currently, the dynamic amplification effect of suction is described using the wind vibration coefficient (WVC) of external loads. In other words, it is proposed that the fluctuating characteristics of suction are equivalent to external loads. This is, however, not generally valid. Meanwhile, the effects of the ventilation rate of louver on suction and its WV are considered. To systematically analyze the effects of the ventilation rate of louver on the multi-dimensional WVC of ultra-large cooling towers under suctions, the 210 m ultra-large cooling tower under construction was studied. First, simultaneous rigid pressure measurement wind tunnel tests were executed to obtain the time history of fluctuating wind loads on the external surface and the internal surface of the cooling tower at different ventilation rates (0%, 15%, 30%, and 100%). Based on that, the average values and distributions of fluctuating wind pressures on external and internal surfaces were obtained and compared with each other; a tower/pillar/circular foundation integrated simulation model was developed using the finite element method and complete transient time domain dynamics of external loads and four different suctions of this cooling tower were calculated. Moreover, 1D, 2D, and 3D distributions of WVCs under external loads and suctions at different ventilation rates were obtained and compared with each other. The WVCs of the cooling tower corresponding to four typical response targets (i.e., radial displacement, meridional force, Von Mises stress, and circumferential bending moment) were discussed. Value determination and 2D evaluation of the WVCs of external loads and suctions of this large cooling tower at different ventilation rates were proposed. This study provides references to precise prediction and value determination of WVC of ultra-large cooling towers.

Cyriax's Lumbar Traction for Reduction of Nuclear Protrusion (수핵 탈출증에 대한 Cyriax 요추 견인법)

  • Park, Ji-Whan
    • The Journal of Korean Academy of Orthopedic Manual Physical Therapy
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    • v.1 no.1
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    • pp.75-83
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    • 1995
  • Traction is the treatment of choice for a small nuclear protrusion. The nucleus is soft and can be influenced by suction. Traction provides a method of improving on recumbency-the only effective treatment before traction was devised. The intention is to achieve rapid reduction by distraction the joint surfaces mechanically-a positive purpose-instead of merely avoiding the compression of the upright posture by putting the patient to bed and leaving him there. Recumbency, usually successful in the end, wastes an endless amount of the patient's time and money. Traction carries the further advantage of enabling the patient to be up and about, attending to his bussiness, during treatment. Traction brings the joint surfaces much farther apart than just lying in bed, a greater centripetal force acts on the protruded part of the nucleus. Traction has three beneficial effects; 1. Suction : a sub-atmospheric pressure induces a centripetal effect on the contents. 2. Distraction : increases the distance between the articular edges. X -rays have shown an increase in width of the joint of 2.5 mm. 3. Ligamentous tightening : the posterior longitudinal ligament tightens which then exerts centipetal force on a central protrusion.

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Study on Chucking Force and Substrate Deformation Characteristics of Electrostatic Chuck for Deposition According to Substrate Sizes (증착용 정전척의 기판 크기에 따른 척킹력 및 기판 변형 특성 연구)

  • Seong Bin Kim;Dong Kyun Min
    • Journal of the Semiconductor & Display Technology
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    • v.23 no.2
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    • pp.12-18
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    • 2024
  • A Electrostatic chuck is a device that fixes the substrate, using the force between charges applied between two parallel plates to attract substrates such as wafers or OLED panels. Unlike mechanical suction methods, which rely on physical fixation, this method utilizes the force of electrostatics for fixation, making it important to verify the adhesion force. As the size of the substrate increases, deformations due to gravity or chucking force also increase, and the adhesion force decreases rapidly as the distance between the chuck and the substrate increases. The outlook for displays is shifting from small to large OLEDs, necessitating consideration of substrate deformations. In this paper, to confirm the deformation of the substrate through various patterns, a simplified 2D model using Ansys' electromagnetic field analysis program, Maxwell, and the static structural analysis program, Mechanical, was utilized to observe changes in adhesion force according to the variation in the air gap between the substrate and the chuck. Additionally, the chucking force was analyzed for the size of the substrate, and the deformation of the substrate was confirmed when gravity and chucking force act simultaneously.

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Compatible Anchors of Silt Protector in Shallow Sea with Mud Seafloor Material (천해역 점성토 지반에 적합한 오탁방지막 기초 앵커)

  • KWEON GI-CHUL;HONG NAM-SEEG;SONG Mu-HYO;CHOI CHANG-GYU
    • Journal of Ocean Engineering and Technology
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    • v.17 no.3 s.52
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    • pp.7-12
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    • 2003
  • The Navy has tested the holding capacity of many kinds of anchors in order to propose the design chart for the holding capacity of drag-embedment anchors. The design chart is only applicable up to the cable bottom angle 60 when load is raised to the ultimate weight. However, the anchor experiences a significant uplift force when the angle is above 60 in shallow seas. In this paper, the procedure for the estimation of the holding capacity of anchors in mud is proposed. Drag-embedment anchors do not function well when there is a significant uplift component of load in soft seafloor materials, such as mud. Under these loading and seafloor conditions, gravity anchors seems to be more efficient. However, they are too heavy for their holding capacity. Therefore, suction pile (hollow concrete block) is more beneficial to the foundntion of silt protector in shallow sea with mud seafloor materials.

Optimal Design of Vacuum Cleaner with a Multi Cyclone (멀티사이클론을 이용한 진공청소기의 최적설계에 관한 연구)

  • Ha, Gun-Ho;Kim, Eung-Dal;Yang, Byung-Sun;Ahn, Young-Chull
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.23 no.2
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    • pp.126-131
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    • 2011
  • Cyclone, a type of particle collector widely used in the field of ambient sampling and industrial particulate control, is the principal type of gas-solids separator that uses a centrifugal force. The goal of this study is to design and evaluate the cyclone that can be used for the household vacuum cleaners. A multi cyclone with a 1st cyclone and several 2nd cyclones is designed to improve dust collection efficiency. The dust collection efficiency and the suction power of 1st cyclone are evaluated. And the dust collection efficiency and the suction power of multi cyclone are evaluated according to various sizes of inlet and vortex finder. As a result, a cone shape porous filter has better dust collection efficiency than a cylinder shape porous filter. The dust collection efficiency of a multi cyclone is 3.5% greater than that of a single cyclone.

A Study on the Influence of Design Parameters on the Automotive Shock Absorber Performance (차량용 충격흡수기의 설계변수에 따른 성능고찰)

  • 이춘태;이진걸
    • Journal of the Korean Society for Precision Engineering
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    • v.20 no.6
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    • pp.167-177
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    • 2003
  • In this study, a mathematical nonlinear dynamic model is introduced to predict the damping force of automotive shock absorber. And 11 design parameters were proposed for the sensitivity analysis of damping force. Design parameters consist of 5 piston valve design parameters, 5 body valve design parameters and 1 initial pressure of reservoir chamber air. All of these design parameters are main design parameters of shock absorber in the procedure of shock absorber design. The simulation results of this paper offer qualitative information of damping force variation according to variation of design parameters. Therefore, simulation results of this paper can be usefully use in the design procedure of shock absorber

Finite Element Analysis of Piston Slap Phenomenon in Reciprocating Compressors Considering Coolant Circulation (냉매순환을 고려한 왕복동형 압축기의 피스톤 슬랩현상에 대한 유한요소 해석)

  • Moon, Seung-Ju;Cho, Jin-Rae;Kim, Hyun-Ok
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.27 no.7
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    • pp.1087-1094
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    • 2003
  • The piston slap phenomenon occurs when the piston collides with the internal wall of the cylinder. Impact force caused by piston slap is one of the major mechanical noise sources in reciprocating compressors. In response to public demand, strict regulations are increasingly being imposed on the allowable noise level which is caused mostly by household electric appliances. In this paper, forces acting on piston by considering the dynamic behavior of suction and discharge valves are analytically calculated and the piston slap caused by the piston secondary motion is investigated by the finite element method.