• 제목/요약/키워드: Substrate loss

검색결과 801건 처리시간 0.03초

시간영역유한차분법을 이용한 극초고주파용 CPW의 최적화 설계 (Optimum Design of EHF CPW using FDTD)

  • 장인범;이준웅
    • 한국전기전자재료학회논문지
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    • 제18권12호
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    • pp.1129-1132
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    • 2005
  • The purpose of this reserch is to establish the new design technology for microwave Coplanar structure. The components in microwave circuit are classified to transmission devices, EM devices, and quasi-TEM devices. After design of these devices, we analyzed these CPWs electromagnetically using FDTD method, and suggested optimum CPW structure. In oder to realize a CPW module up to 30 GHz-100 GHz band, we research on a technology of 3-dimensional microwave CPW, and GaAs substrate with Si layer for ohmic loss. As a result this research, we suppressed the leakage, resonance, coupling, and radiation of CPW EMI, and improved resonance quality of CPW.

표면 마이크로머시닝을 이용한 압전 박막 공진기 제작 (Film Bulk Acoustic Wave Resonator using surface micromachining)

  • 김인태;박은권;이시형;이수현;이윤희
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.156-159
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    • 2002
  • Film Bulk Acoustic wave Resonator (FBAR) using thin piezoelectric films can be fabricated as monolithic integrated devices with compatibility to semiconductor process, leading to small size, low cost and high Q RF circuit elements with wide applications in communications area. This paper presents a MMIC compatible Suspended FBAR using surface micromachining. It is possible to make Si$_3$N$_4$/SiO$_2$/Si$_3$N$_4$membrane by using surface micromachining and its good effect is to remove the substrate silicon loss. FBAR was made on 2$\mu\textrm{m}$ multi-layered membrane using CVD process. According to our result, Fabricated film bulk acoustic wave resonator has two adventages. First, in the respect of device Process, our Process of the resonator using surface micromachining is very simple better than that of resonator using bull micromachining. Second, because of using the multiple layer, thermal expansion coefficient is compensated, so, the stress of thin film is reduced.

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Bi 첨가량에 따른 BLT 박막의 유전특성 (Dielectric properties of $Bi_{3.25}La_{0.75}Ti_3O_{12}$ thin films with Bi contents)

  • 김경태;김창일;강동희;심일운
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.371-374
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    • 2002
  • Bismuth lanthanum titanate thin films with excess Bi contents were prepared onto Pt/Ti/$SiO_2$/Si substrate by metalorganic decomposition (MOD) technique. The structure and morphology of the films were analyzed using X-ray diffraction (XRD) and atomic force microscopy (AFM), respectively. From the XRD analysis, BLT thin films show polycrystalline structure and the layered-perovskite phase was obtained over 10% excess of Bi contents. As a result of ferroelectric characteristics related to the Bi content of the BLT thin film, the remanent polarization and dielectric constant decreased with increasing over Bi content of 10 % excess. The BLT film with Bi content of 10% excess was measured to have a dielectric constant of n9 and dielectric loss of 1.85[%]. The BLT thin films showed little polarization fatigue test up to 3.5 x $10^{9}$ bipolar switching cycling.

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Tunable 소자 응용을 위한 Sol-gel 법으로 제작된 $(Pb_{0.5},Sr_{0.5})TiO_3$ 박막의 stain 과 유전 관계 (Correction between Dielectric and Strain in PST Thin Films prepared by Sol-gel method for Tunable application)

  • 김경태;김창일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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    • pp.582-585
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    • 2004
  • Pb0.5Sr0.5TiO3 (PST) thin films were fabricated by the alkoxide-based sol-gel process using spin-coating method on Pt/Ti/SiO2/Si substrate. The PST films annealed from 500C to 650C for 1h show a perovskite phase and dense microstructure with a smooth surface. The grain size and dielectric constant of PST films increases with the increase in annealing temperature, which reduces the SiO2 equivalent thickness of the PST film. The crystallinity or internal strain in the PST thin films analyzed from the diffraction-peak widths correlate well with the decrease in the dielectric losses. The dielectric constants and dielectric loss (%) of the PST films annealed at 650c (teq : 0.89 nm) were 549 and 0.21%, respectively.

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Investigation of carbon nanotube growth termination mechanism by in-situ transmission electron microscopy approaches

  • Kim, Seung Min;Jeong, Seojeong;Kim, Hwan Chul
    • Carbon letters
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    • 제14권4호
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    • pp.228-233
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    • 2013
  • In this work, we report in-situ observations of changes in catalyst morphology, and of growth termination of individual carbon nanotubes (CNTs), by complete loss of the catalyst particle attached to it. The observations strongly support the growth-termination mechanism of CNT forests or carpets by dynamic morphological evolution of catalyst particles induced by Ostwald ripening, and sub-surface diffusion. We show that in the tip-growth mode, as well as in the base-growth mode, the growth termination of CNT by dissolution of catalyst particles is plausible. This may allow the growth termination mechanism by evolution of catalyst morphology to be applicable to not only CNT forest growth, but also to other growth methods (for example, floating-catalyst chemical vapor deposition), which do not use any supporting layer or substrate beneath a catalyst layer.

고속응답 마이크로 유량센서의 제작 (Fabrication of Micro-Flow Sensors with High-response Time)

  • 정귀상;홍석우
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 영호남학술대회 논문집
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    • pp.17-20
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    • 2000
  • This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD's and micro-heaters on the Si substrate, in which MgO thin-films were used as medium layer in order to improve adhesion of Pt thin-films to $SiO_2$ layer, The MgO layer improved adhesion of Pt thin-films to $SiO_2$ layer without any chemical reactions to Pt thin-films under high annealing temperatures. In investigating output characteristics of the fabricated micro-flowsensors, the output voltages increased as gas flow rate and its conductivity increased due to increase of heat-loss from sensor to external. Output voltage was 82 mV at $N_2$ flow rate of 2000 seem/min, heating power of 1.2W.

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Design of an extremely miniaturized branch-line coupler

  • Kang, In Ho;Li, Xi Qiang
    • Journal of Advanced Marine Engineering and Technology
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    • 제38권8호
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    • pp.995-999
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    • 2014
  • In this paper, a new size-reduction approach for branch-line coupler is introduced which uses parallel end-shorted coupled lines with lumped capacitors. The characteristic of the new design was analyzed using even-odd mode method, and simulated on HFSS before fabricated on the FR4 epoxy glass cloth copper-clad plat (CCL) PCB substrate at center frequency of 1 GHz. The electrical length of transmission line was reduced to 15 degrees, therefore the size of branch-line coupler was largely reduced approximately maintaining the same characteristic around the stable center frequency. The insertion loss of the branch-line coupler filter was -4.39 dB. The size of the overall hybrid is $20mm{\times}20mm$. Measurements results were well agreed with the simulated ones.

공진 주파수 측정방법을 이용한 Coplanar Waveguide 용량성 불연속 구조 설계 (Modeling of Capacitive Coplanar Waveguide Discontinuities Characterized with a Resonance Method)

  • 김동영;지용
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2001년도 하계종합학술대회 논문집(2)
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    • pp.181-184
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    • 2001
  • A coplanar waveguide(CPW) on a dielectric substrate consists of a center strip conductor with semi-infinite ground planes on either side. This type of waveguide offers several advantages over microstrip line. It facilitates easy shunt as well as series mounting of active and passive devices. It eliminates the need for wraparound and via holes, and it has a low radiation loss. These, as well as several other advantages, make CPW ideally suited for microwave integrated circuit applications. However, very little information is available in the literature on models for CPW discontinuities. This lack of sufficient discontinuity models for CPW has limited the application of CPW in microwave circuit design. We presented for the characteristics of coplanar waveguide open end capacitance and series gap capacitance. Measurements by utilizing the resonance method were made and the experimental data confirmed the validity of theories. The relationships between the CPW capacitances and the physical dimensions were studied.

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실리콘 공정에서 패턴으로 삭각된 접지(PGS)를 이용한 인터컨넥션의 전송선 특성분석 및 RF/초고주파 집적회로에의 응용 (Transmission Line Characteristics of Silicon Based Interconnections with Patterned Ground Shields and its Implication for RF/Microwave ICs)

  • 곽혁용;이상국;조윤석
    • 대한전자공학회논문지SD
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    • 제37권6호
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    • pp.50-56
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    • 2000
  • 초고주파에서 집적회로용 연결선(interconnect)에 PGS(Patterned Grouned Shield)를 적용하는 실험을 하였다. PGS는 신호선으로부터 비절연 실리콘 기판을 차폐시킴으로써 광대역에 걸쳐 전송선의 실리콘기판을 통한 전력손실을 크게 줄일 수 있음을 측정결과를 통해 보였다. 또한 PGS를 이용한 전송선의 특성을 분석하고 PGS가 전송선의 파장을 줄여주는 효과가 있음을 확인하였다.

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다중대역 무선 USB 동글 장치를 위한 사각 패치를 이용한 폴디드 모노폴 안테나 (Folded Monopole Antenna Using the Rectangular Patch for Multi-band Wireless USB Dongle Applications)

  • 이윤민;이재춘
    • 디지털산업정보학회논문지
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    • 제9권2호
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    • pp.11-15
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    • 2013
  • We in order to use WLAN communication device planned wireless USB dongle internal antenna of 2.4 GHz/5.8 GHz band. So it uses square patch dual-wideband and quality is satisfactory and it designed print folded monopole antenna of the shape which is simple. The thickness of the antenna was fed by a $50{\Omega}$ coaxial cable feeding 1mm dielectric constant 4.4 FR4 substrate was used. The overall size of the antenna is $20mm{\times}50mm$. So the internal antenna is suitable. Measurement results of the fabricated antenna, the return loss of more than 10 dB in the two bands could be obtained. Radiation pattern has a maximum gain of 3.75 dBi value.