• Tribology and Lubricants
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• 제32권2호
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• pp.56-60
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• 2016

Sapphire has a high hardness and strength and chemical stability as a superior material. It is used mainly as a material for a semiconductor as well as LED. Recently, the cover glass industry used by a sapphire is getting a lot of attention. The sapphire substrate is manufactured through ingot sawing, lapping, diamond mechanical polishing (DMP) and chemical mechanical polishing (CMP) process. DMP is an important process to ensure the surface quality of several nm for CMP process as well as to determine the final form accuracy of the substrate. In DMP process, the material removal is achieved by using the mechanical energy of the relative motion to each other in the state that the diamond slurry is disposed between the sapphire substrate and the polishing platen. The polishing platen is one of the most important factors that determine the material removal characteristics in DMP. Especially, it is known that the geometric characteristics of the polishing platen affects the material removal amount and its distribution. This paper investigated the material removal characteristics and the effects of the polishing platen groove in sapphire DMP. The experiments were preliminarily carried out to evaluate the sapphire material removal characteristics according to process parameters such as pressure, relative velocity and so on. In the experiment, the monitoring apparatus was applied to analyze process phenomena in accordance with the processing conditions. From the experimental results, the correlation was analyzed among process parameters, polishing phenomena and the material removal characteristics. The material removal equation based on phenomenological factors could be derived. And the experiment was followed to investigate the effects of platen groove on material removal characteristics.

• Tribology and Lubricants
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• 제33권3호
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• pp.106-111
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• 2017

Sapphire is an anisotropic material with excellent physical and chemical properties and is used as a substrate material in various fields such as LED (light emitting diode), power semiconductor, superconductor, sensor, and optical devices. Sapphire is processed into the final substrate through multi-wire saw, double-side lapping, heat treatment, diamond mechanical polishing, and chemical mechanical polishing. Among these, chemical mechanical polishing is the key process that determines the final surface quality of the substrate. Recent studies have reported that the material removal characteristics during chemical mechanical polishing changes according to the crystal orientations, however, detailed analysis of this phenomenon has not reported. In this work, we carried out chemical mechanical polishing of C(0001), R($1{\bar{1}}02$), and A($11{\bar{2}}0$) substrates with different sapphire crystal planes, and analyzed the effect of crystal orientation on the material removal characteristics and their correlations. We measured the material removal rate and frictional force to determine the material removal phenomenon, and performed nano-indentation to evaluate the material characteristics before and after the reaction. Our findings show that the material removal rate and frictional force depend on the crystal orientation, and the chemical reaction between the sapphire substrate and the slurry accelerates the material removal rate during chemical mechanical polishing.

• 환경위생공학
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• 제9권1호
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• pp.29-37
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• 1994

Anaerobic treatment of wastewater of the red- bean processing industry was carried out and discussed an anaerobic sludge bed reactor( ASBR) as a preliminary study to evaluate applicability of given processes. The dimension of reactor were same as 0.09m- ID$\times $1.5m- height. The type of substrate and the hydraulic retention time( HRT) were considered as experimental variables. The synthetic wastewater with glucose in the laboratory, the wastewater from the red bean processing industry mixed with synthetic wastewater with variation of mixing percent were fed as substrate. The hydraulic retention time was changed from one day to five days. The gas production, the methane content in produced gas, efficiencies of COD removal and 55 removal were evaluated as principal characteristics. With synthetic wastewater as a substrate and at a hydraulic retention time of one day, characteristics of ASBR was the gas production(12$\ell$/day ), the methane content of produced gas(60%), the efficiency of COD removal(92%) and 55 removal(30%). With the real wastewater and at a hydraulic retention time of one day, the gas production and the efficiency of COD removal of the ASBR decreased with the proportion of real wastewater. The gas production and the efficiency of COD removal with real wastewater only was decreased to 70% and 87% of those with synthetic wastewater only, respectively. However, the methane content in produced gas and the efficiency of 55 removal with real wastewater only was increased significantly by 1.25 times and two times of those with synthetic wastewater only, respectively. However, the methane content in produced gas and the efficiency of 55 removal with real wastewater only was increased significantly by 1.25 times and two times of those with synthetic wastewater only, respectively. With real wastewater only as a substrate in the ASBR, the gas production was decreased with an increase of HRT, but the efficiency of COD removal increased with HRTI like the usual trend reported. As a conclusion, the wastewater of the red- bean Processing industry could be treated by anaerobic digestion successfully in the ASBR.Anaerobic treatment of wastewater of the red- bean processing industry was carried out and discussed an anaerobic sludge bed reactor( ASBR) as a preliminary study to evaluate applicability of given processes. The dimension of reactor were same as 0.09m- ID$\times $1.5m- height. The type of substrate and the hydraulic retention time( HRT) were considered as experimental variables. The synthetic wastewater with glucose in the laboratory, the wastewater from the red bean processing industry mixed with synthetic wastewater with variation of mixing percent were fed as substrate. The hydraulic retention time was changed from one day to five days. The gas production, the methane content in produced gas, efficiencies of COD removal and 55 removal were evaluated as principal characteristics. With synthetic wastewater as a substrate and at a hydraulic retention time of one day, characteristics of ASBR was the gas production(12$\ell$/day ), the methane content of produced gas(60%), the efficiency of COD removal(92%) and 55 removal(30%). With the real wastewater and at a hydraulic retention time of one day, the gas production and the efficiency of COD removal of the ASBR decreased with the proportion of real wastewater. The gas production and the efficiency of COD removal with real wastewater only was decreased to 70% and 87% of those with synthetic wastewater only, respectively. However, the methane content in produced gas and the efficiency of 55 removal with real wastewater only was increased significantly by 1.25 times and two times of those with synthetic wastewater only, respectively. However, the methane content in produced gas and the efficiency of 55 removal with real wastewater only was increased significantly by 1.25 times and two times of those with synthetic wastewater only, respectively. With real wastewater only as a substrate in the ASBR, the gas production was decreased with an increase of HRT, but the efficiency of COD removal increased with HRTI like the usual trend reported. As a conclusion, the wastewater of the red- bean Processing industry could be treated by anaerobic digestion successfully in the ASBR.

• Tribology and Lubricants
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• 제34권6호
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• pp.209-216
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• 2018

Sapphire is a substrate material that is widely used in optical and electronic devices. However, the processing of sapphire into a substrate takes a long time owing to its high hardness and chemical inertness. In order to process the sapphire ingot into a substrate, ingot growth, multiwire sawing, lapping, and polishing are required. The lap grinding process using pellets is known as one of the ways to improve the efficiency of sapphire substrate processing. The lap grinding process ensures high processing efficiency while utilizing two-body abrasion, unlike the lapping process which utilizes three-body abrasion by particles. However, the lap grinding process has a high material removal rate (MRR), while its weakness is in obtaining the required surface roughness for the final polishing process. In this study, we examine the effects of free abrasives in lap grinding on the material removal characteristics of sapphire substrate. Before conducting the lap grinding experiments, it was confirmed that the addition of free abrasives changed the friction force through the pin-on-disk wear test. The MRR and roughness reduction rate are experimentally studied to verify the effects of free abrasive concentration on deionized water. The addition of free abrasives (colloidal silica) in the lap grinding process can improve surface roughness by three-body abrasion along with two-body abrasion by diamond grits.

• 한국미생물·생명공학회지
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• 제24권5호
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• pp.597-603
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• 1996

This study was carried out to examine degradation characteristics of microalgae Chlorella vulgaris in methane fermentation. We measured COD and VS reduction, gas and methane productivity, VFA (volatile fatty acid), respectively. Then we calculated material balance and hydrolysis rates in soluble and solid material. The substrate concentration was controlled from 14 gCOD$_{cr}$/l to 64 gCOD$_{cr}$/l in batch cultures, and HRT (hydraulic retention time) controlled from 2 days to 30 days in continuous experi- ments. The results were as follows. In batch culture, accumulated gas productivity increased with the increase of the substrate concentration. The SS and VSS was removed all about 30% increase of substrate concentration and the most of the degradable material removed during the first 10 days. The curve of gas and methane production rate straightly increased until substrate concentration is 26 gCOD$_{cr}$/l. In continuous culture experiments, the removal rates at HRT 10days were 20% for total COD and TOC, respectively. At longer HRT, there was no increase in the removal efficiency. At HRT 15 days, the removal rates were 30% for SS and VSS, respectively. Soluble organic materials were rapidly degraded, and so there was no accumulated. Soluble COD concentration was not increase regardless of HRT-increasing. That meaned the hydrolysis was one of the rate-limiting stage of methane fermentation. The first-order rate constants of hydrolysis were 0.23-0.28 day$^{-1}$ for VSS, and 0.07-0.08 day$^{-1}$ for COD.

• 한국물환경학회지
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• 제22권3호
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• pp.566-571
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• 2006

A sequencing batch biofilm reactor (SBBR) operated with a cycle of anaerobic - aerobic - anoxic - aerobic has been evaluated for the nutrient removal characteristics. The sponge-like moving media was filled to about 10% of reactor volume. The sewage was the major substrate while external synthetic carbon substrate was added to the anoxic stage to enhance the nitrogen removal. The operational results indicated that maximum T-N and T-P removal efficiencies were 97% and 94%, respectively were achieved, while COD removal of 92%. The observations of significant nitrogen removal in the first aerobic stage indicated that nitrogen removal behaviour in this SBBR was different to conventional SBR. Although the reasons for aerobic nitrogen removal has speculated to either simultaneous nitrification and denitrification or anoxic denitrification inside of the media, further researches are required to confirm the observation. The specific oxygen uptake rate (SOUR) test with biofilm and suspended growth sludge indicated that biofilm in SBBR played a major role to remove substrates.

• 한국광학회지
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• 제19권5호
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• pp.381-385
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• 2008

InGaN/Sapphire LED에서 기판 제거와 패키지 방식이 광출력 특성에 미치는 영향을 분석하였다. Sapphire 기판의 제거는 반도체 접합에서 발생된 열의 방출에 도움이 되지만, 반대로 광추출효율이 손상되는 문제점이 수반된다. Sapphire 기판이 제거된 칩을 열전도율이 좋은 금속의 마운트 위에 부착하면, 최대 구동전류는 현저히 증가하고 광출력도 상당히 증가됨으로써, 광추출효율이 손상되는 문제점이 어느 정도 보상된다. 하지만, sapphire 기판이 제거된 칩을 상대적으로 열전도율이 낮은 유전체의 마운트 위에 부착하는 경우에는, 거의 모든 입력전류 범위에서 sapphire 기판이 남아 있는 일반형 칩보다 낮은 광출력을 나타낸다. 따라서, 작은 광출력이 요구되는 응용분야에서는 사용된 칩 마운트의 종류에 무관하게, 일반형 칩이 sapphire 기판이 제거된 칩 보다 유리한 것으로 분석된다.

• KSBB Journal
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• 제6권2호
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• pp.115-121
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• 1991

본 연구의 목적은 생물막 유동층 반응기내에서 높은 유기물 부하를 처리하는데 있어 지지체에 부착된 미생울의 특성과 유기물의 처리효율을 조사하는데 있다. 실험은 글루코오즈를 주 기질로 한 합성폐수를 이용하여, 상향유속은 0.47cm / sec, 체류시간을 5시간, 운전 온도는 $22{\pm}1{\circ}C$, pH는 $7{\pm}0.1$로 일정하게 하고 유기물 부하를 $10kgCOD\;/\;{\textrm{m}^3}$.day에서 $80kgCOD\;/\;{\textrm{m}^3}$.day로 증가시켰을 때, 각각 95%, 73%의 높은 COD 처리효율을 얻었다. 고정 생물막 반응기에 사용된 Andrew의 유기물 제거율 모델을 본 생물막 유동층 반응기에 적용시켜본 결과, 실제 유기물 제거율과 예측한 유기물 제거율은 85% 정도로 일치하였다.

• Environmental Engineering Research
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• 제11권3호
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• pp.156-163
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• 2006

In this study, substrate removal characteristics were analyzed to reduce the cost of external carbon dosage at Sudokwon Landfill Site Management Corporation in Korea by utilizing oxygen uptake rate (OUR) and nitrate uptake rate (NUR) tests. To estimate and evaluate the substrate removal characteristics obtained by the batch tests, the lab-scale MLE process was operated. By-products of J Co. (sugar manufactory) and S Co. (fine chemical industry) were selected as the concerned carbon sources through a comparison of carbon and nitrogen contents. MeOH was tested as a control experiment. Until the steady state, the fraction of $RBDCOD_{OUR}$ concentration to COD concentration of J Co., S Co. by-products and MeOH increased and reached levels of 98%, 82%, and 100%, respectively. During the 20th operating day, the fraction of $RBDCOD_{NUR}$ concentration to COD concentration was 95%, 81%, and 83%, respectively. These fractions of $RBDCOD_{NUR}$ concentration to $RBDCOD_{OUR}$ concentration increased according to acclimation periods and reached levels of 99%, 97%, and 81%, respectively, on the 20th day. The results obtained from the lab-scale MLE process operation using the concerned carbon sources as external carbon were similar to that observed by OUR and NUR tests.

• 한국환경과학회지
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• 제14권12호
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• pp.1163-1170
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• 2005

The microbial adsorption characteristics of two different media for biological treatment were studied using attached diverse microbes onto activated carbon and ceramic. The results in the experiments of the characteristics of physical adhesion on two different media with addition of high and low concentrated substrate in the culture were observed that the efficient of adhesion onto F-400 activated carbon was higher over that of ceramic due to the surface area of media. The irradiation treatment by ultrasonication with 400 W power and 3 min retention time on the media without addition substrate conditions and subsequent mixing throughly the culture showed the highest efficiency of cell detachment on the media. Three different microbes, P. ovalis, A calcoaceticus, and B. subtillis were used for the study of the characteristics of microbial adhesion on the media. p ovalis showed the highest adhesion capability while B. subtillis showed the lowest capability adhesion onto media either addition of substrate in the culture. The mixed bacterial culture showed $10\%$ lower removal efficiency of DOC in the low concentrated substrate culture compared to the single pure culture. Whileas, it did not show significant difference between two cultures at high concentrated substrate. It was also observed same population density of microorganism by counting of microbes adhered to microbial media with an ultrasound treatment.