• Title/Summary/Keyword: Substrate Removal Characteristics

Search Result 91, Processing Time 0.035 seconds

A Study of Material Removal Characteristics by Friction Monitoring System of Sapphire Wafer in Single Side DMP (사파이어 웨이퍼 DMP에서 마찰력 모니터링을 통한 재료 제거 특성에 관한 연구)

  • Jo, Wonseok;Lee, Sangjik;Kim, Hyoungjae;Lee, Taekyung;Lee, Seongbeom
    • Tribology and Lubricants
    • /
    • v.32 no.2
    • /
    • pp.56-60
    • /
    • 2016
  • Sapphire has a high hardness and strength and chemical stability as a superior material. It is used mainly as a material for a semiconductor as well as LED. Recently, the cover glass industry used by a sapphire is getting a lot of attention. The sapphire substrate is manufactured through ingot sawing, lapping, diamond mechanical polishing (DMP) and chemical mechanical polishing (CMP) process. DMP is an important process to ensure the surface quality of several nm for CMP process as well as to determine the final form accuracy of the substrate. In DMP process, the material removal is achieved by using the mechanical energy of the relative motion to each other in the state that the diamond slurry is disposed between the sapphire substrate and the polishing platen. The polishing platen is one of the most important factors that determine the material removal characteristics in DMP. Especially, it is known that the geometric characteristics of the polishing platen affects the material removal amount and its distribution. This paper investigated the material removal characteristics and the effects of the polishing platen groove in sapphire DMP. The experiments were preliminarily carried out to evaluate the sapphire material removal characteristics according to process parameters such as pressure, relative velocity and so on. In the experiment, the monitoring apparatus was applied to analyze process phenomena in accordance with the processing conditions. From the experimental results, the correlation was analyzed among process parameters, polishing phenomena and the material removal characteristics. The material removal equation based on phenomenological factors could be derived. And the experiment was followed to investigate the effects of platen groove on material removal characteristics.

Effect of Crystal Orientation on Material Removal Characteristics in Sapphire Chemical Mechanical Polishing (사파이어 화학기계적 연마에서 결정 방향이 재료제거 특성에 미치는 영향)

  • Lee, Sangjin;Lee, Sangjik;Kim, Hyoungjae;Park, Chuljin;Sohn, Keunyong
    • Tribology and Lubricants
    • /
    • v.33 no.3
    • /
    • pp.106-111
    • /
    • 2017
  • Sapphire is an anisotropic material with excellent physical and chemical properties and is used as a substrate material in various fields such as LED (light emitting diode), power semiconductor, superconductor, sensor, and optical devices. Sapphire is processed into the final substrate through multi-wire saw, double-side lapping, heat treatment, diamond mechanical polishing, and chemical mechanical polishing. Among these, chemical mechanical polishing is the key process that determines the final surface quality of the substrate. Recent studies have reported that the material removal characteristics during chemical mechanical polishing changes according to the crystal orientations, however, detailed analysis of this phenomenon has not reported. In this work, we carried out chemical mechanical polishing of C(0001), R($1{\bar{1}}02$), and A($11{\bar{2}}0$) substrates with different sapphire crystal planes, and analyzed the effect of crystal orientation on the material removal characteristics and their correlations. We measured the material removal rate and frictional force to determine the material removal phenomenon, and performed nano-indentation to evaluate the material characteristics before and after the reaction. Our findings show that the material removal rate and frictional force depend on the crystal orientation, and the chemical reaction between the sapphire substrate and the slurry accelerates the material removal rate during chemical mechanical polishing.

Anaerobic treatment of red-bean processing wastewater in a sludge bed reactor (슬러지반응기에서 팥가공폐수의 철기성 처리)

  • 안재동;금재우;홍종향
    • Journal of environmental and Sanitary engineering
    • /
    • v.9 no.1
    • /
    • pp.29-37
    • /
    • 1994
  • Anaerobic treatment of wastewater of the red- bean processing industry was carried out and discussed an anaerobic sludge bed reactor( ASBR) as a preliminary study to evaluate applicability of given processes. The dimension of reactor were same as 0.09m- ID$\times $1.5m- height. The type of substrate and the hydraulic retention time( HRT) were considered as experimental variables. The synthetic wastewater with glucose in the laboratory, the wastewater from the red bean processing industry mixed with synthetic wastewater with variation of mixing percent were fed as substrate. The hydraulic retention time was changed from one day to five days. The gas production, the methane content in produced gas, efficiencies of COD removal and 55 removal were evaluated as principal characteristics. With synthetic wastewater as a substrate and at a hydraulic retention time of one day, characteristics of ASBR was the gas production(12$\ell$/day ), the methane content of produced gas(60%), the efficiency of COD removal(92%) and 55 removal(30%). With the real wastewater and at a hydraulic retention time of one day, the gas production and the efficiency of COD removal of the ASBR decreased with the proportion of real wastewater. The gas production and the efficiency of COD removal with real wastewater only was decreased to 70% and 87% of those with synthetic wastewater only, respectively. However, the methane content in produced gas and the efficiency of 55 removal with real wastewater only was increased significantly by 1.25 times and two times of those with synthetic wastewater only, respectively. However, the methane content in produced gas and the efficiency of 55 removal with real wastewater only was increased significantly by 1.25 times and two times of those with synthetic wastewater only, respectively. With real wastewater only as a substrate in the ASBR, the gas production was decreased with an increase of HRT, but the efficiency of COD removal increased with HRTI like the usual trend reported. As a conclusion, the wastewater of the red- bean Processing industry could be treated by anaerobic digestion successfully in the ASBR.Anaerobic treatment of wastewater of the red- bean processing industry was carried out and discussed an anaerobic sludge bed reactor( ASBR) as a preliminary study to evaluate applicability of given processes. The dimension of reactor were same as 0.09m- ID$\times $1.5m- height. The type of substrate and the hydraulic retention time( HRT) were considered as experimental variables. The synthetic wastewater with glucose in the laboratory, the wastewater from the red bean processing industry mixed with synthetic wastewater with variation of mixing percent were fed as substrate. The hydraulic retention time was changed from one day to five days. The gas production, the methane content in produced gas, efficiencies of COD removal and 55 removal were evaluated as principal characteristics. With synthetic wastewater as a substrate and at a hydraulic retention time of one day, characteristics of ASBR was the gas production(12$\ell$/day ), the methane content of produced gas(60%), the efficiency of COD removal(92%) and 55 removal(30%). With the real wastewater and at a hydraulic retention time of one day, the gas production and the efficiency of COD removal of the ASBR decreased with the proportion of real wastewater. The gas production and the efficiency of COD removal with real wastewater only was decreased to 70% and 87% of those with synthetic wastewater only, respectively. However, the methane content in produced gas and the efficiency of 55 removal with real wastewater only was increased significantly by 1.25 times and two times of those with synthetic wastewater only, respectively. However, the methane content in produced gas and the efficiency of 55 removal with real wastewater only was increased significantly by 1.25 times and two times of those with synthetic wastewater only, respectively. With real wastewater only as a substrate in the ASBR, the gas production was decreased with an increase of HRT, but the efficiency of COD removal increased with HRTI like the usual trend reported. As a conclusion, the wastewater of the red- bean Processing industry could be treated by anaerobic digestion successfully in the ASBR.

  • PDF

Effect of Free Abrasives on Material Removal in Lap Grinding of Sapphire Substrate

  • Seo, Junyoung;Kim, Taekyoung;Lee, Hyunseop
    • Tribology and Lubricants
    • /
    • v.34 no.6
    • /
    • pp.209-216
    • /
    • 2018
  • Sapphire is a substrate material that is widely used in optical and electronic devices. However, the processing of sapphire into a substrate takes a long time owing to its high hardness and chemical inertness. In order to process the sapphire ingot into a substrate, ingot growth, multiwire sawing, lapping, and polishing are required. The lap grinding process using pellets is known as one of the ways to improve the efficiency of sapphire substrate processing. The lap grinding process ensures high processing efficiency while utilizing two-body abrasion, unlike the lapping process which utilizes three-body abrasion by particles. However, the lap grinding process has a high material removal rate (MRR), while its weakness is in obtaining the required surface roughness for the final polishing process. In this study, we examine the effects of free abrasives in lap grinding on the material removal characteristics of sapphire substrate. Before conducting the lap grinding experiments, it was confirmed that the addition of free abrasives changed the friction force through the pin-on-disk wear test. The MRR and roughness reduction rate are experimentally studied to verify the effects of free abrasive concentration on deionized water. The addition of free abrasives (colloidal silica) in the lap grinding process can improve surface roughness by three-body abrasion along with two-body abrasion by diamond grits.

미세조류의 Methane 발효특성

  • 강창민;최명락
    • Microbiology and Biotechnology Letters
    • /
    • v.24 no.5
    • /
    • pp.597-603
    • /
    • 1996
  • This study was carried out to examine degradation characteristics of microalgae Chlorella vulgaris in methane fermentation. We measured COD and VS reduction, gas and methane productivity, VFA (volatile fatty acid), respectively. Then we calculated material balance and hydrolysis rates in soluble and solid material. The substrate concentration was controlled from 14 gCOD$_{cr}$/l to 64 gCOD$_{cr}$/l in batch cultures, and HRT (hydraulic retention time) controlled from 2 days to 30 days in continuous experi- ments. The results were as follows. In batch culture, accumulated gas productivity increased with the increase of the substrate concentration. The SS and VSS was removed all about 30% increase of substrate concentration and the most of the degradable material removed during the first 10 days. The curve of gas and methane production rate straightly increased until substrate concentration is 26 gCOD$_{cr}$/l. In continuous culture experiments, the removal rates at HRT 10days were 20% for total COD and TOC, respectively. At longer HRT, there was no increase in the removal efficiency. At HRT 15 days, the removal rates were 30% for SS and VSS, respectively. Soluble organic materials were rapidly degraded, and so there was no accumulated. Soluble COD concentration was not increase regardless of HRT-increasing. That meaned the hydrolysis was one of the rate-limiting stage of methane fermentation. The first-order rate constants of hydrolysis were 0.23-0.28 day$^{-1}$ for VSS, and 0.07-0.08 day$^{-1}$ for COD.

  • PDF

Evaluation of SBBR Process Performance Focused on Nitrogen Removal with External Carbon Addition (외부탄소원을 사용한 SBBR의 공정 특성 및 질소제거)

  • Han, Hyejeong;Yun, Zuwhan
    • Journal of Korean Society on Water Environment
    • /
    • v.22 no.3
    • /
    • pp.566-571
    • /
    • 2006
  • A sequencing batch biofilm reactor (SBBR) operated with a cycle of anaerobic - aerobic - anoxic - aerobic has been evaluated for the nutrient removal characteristics. The sponge-like moving media was filled to about 10% of reactor volume. The sewage was the major substrate while external synthetic carbon substrate was added to the anoxic stage to enhance the nitrogen removal. The operational results indicated that maximum T-N and T-P removal efficiencies were 97% and 94%, respectively were achieved, while COD removal of 92%. The observations of significant nitrogen removal in the first aerobic stage indicated that nitrogen removal behaviour in this SBBR was different to conventional SBR. Although the reasons for aerobic nitrogen removal has speculated to either simultaneous nitrification and denitrification or anoxic denitrification inside of the media, further researches are required to confirm the observation. The specific oxygen uptake rate (SOUR) test with biofilm and suspended growth sludge indicated that biofilm in SBBR played a major role to remove substrates.

Analysis of the Effect of the Substrate Removal and Chip-Mount Type on Light Output Characteristics in InGaN/Sapphire LEDs (InGaN/Sapphire LED에서 기판 제거 유무와 칩 마운트 타입이 광출력 특성에 미치는 영향)

  • Hong, Dae-Woon;Yoo, Jae-Keun;Kim, Jong-Man;Yoon, Myeong-Jung;Lee, Song-Jae
    • Korean Journal of Optics and Photonics
    • /
    • v.19 no.5
    • /
    • pp.381-385
    • /
    • 2008
  • We have analyzed the effect of the substrate removal and packaging schemes on light output characteristics in InGaN/Sapphire LEDs. The removal of the sapphire substrate helps to dissipate the heat generated in the junction, but the advantage comes only with the detrimental effect of degrading the photon extraction efficiency. If the substrate-removed chip is attached to a metallic mount with good thermal conductivity, the maximum driving current is increased drastically, producing significantly increased light output and therefore compensating the photon extraction efficiency degradation. On a dielectric mount with a relatively poor thermal conductivity, however, it produces smaller light output, over most input current range, than the regular type of chips with the sapphire substrate remaining. Thus, for low power applications, the regular chips may be preferred over the substrate-removed chips, regardless of the chip mounts employed.

A Kinetic Study with Biomass Characteristics in Fluidized-Bed Biofilm Reactor. (생물막 유동층 반응기에서 미생물 성상에 따른 속도론적 고찰)

  • 김동석;안갑환이민규송승구
    • KSBB Journal
    • /
    • v.6 no.2
    • /
    • pp.115-121
    • /
    • 1991
  • A number of experiments were conducted in order to investigate the COD removal rate according to the biofilm thickness in a Fluidized-Bed Biofilm Reactor(FBBR). The following conditions were fixed during the experiments: superficial upflow velocity was 0.47cm/sec, operating temperature was $22{\pm}1{\circ}C$ and pH was about $7{\pm}0.1$. The synthetic wastewater based on glucose was used as a substrate. The COD removal efficiencies were shown as 73% and 95%, respectively, when organic loading rate was increased from $10kgCOD\;/\;{\textrm{m}^3}$.day to $80kgCOD\;/\;{\textrm{m}^3}$.day. Andrew's model of substrate removal rate which was commonly used in fixed-biofilm reactor was transformed and applied in this FBBR experiment to predict substrate removal rate and gave 85% agreement with the experimental values.

  • PDF

ASSESSMENT OF SUBSTRATE REMOVAL CHARACTERISTICS ACCORDING TO ACCLIMATION PERIODS BY OUR AND NUR TESTS

  • Jung, Jung-Eun;Lee, Sung-Hak;Im, Jeong-Hoon;Poo, Kyoung-Min;Kim, Jong-Rock;Kim, Chang-Won
    • Environmental Engineering Research
    • /
    • v.11 no.3
    • /
    • pp.156-163
    • /
    • 2006
  • In this study, substrate removal characteristics were analyzed to reduce the cost of external carbon dosage at Sudokwon Landfill Site Management Corporation in Korea by utilizing oxygen uptake rate (OUR) and nitrate uptake rate (NUR) tests. To estimate and evaluate the substrate removal characteristics obtained by the batch tests, the lab-scale MLE process was operated. By-products of J Co. (sugar manufactory) and S Co. (fine chemical industry) were selected as the concerned carbon sources through a comparison of carbon and nitrogen contents. MeOH was tested as a control experiment. Until the steady state, the fraction of $RBDCOD_{OUR}$ concentration to COD concentration of J Co., S Co. by-products and MeOH increased and reached levels of 98%, 82%, and 100%, respectively. During the 20th operating day, the fraction of $RBDCOD_{NUR}$ concentration to COD concentration was 95%, 81%, and 83%, respectively. These fractions of $RBDCOD_{NUR}$ concentration to $RBDCOD_{OUR}$ concentration increased according to acclimation periods and reached levels of 99%, 97%, and 81%, respectively, on the 20th day. The results obtained from the lab-scale MLE process operation using the concerned carbon sources as external carbon were similar to that observed by OUR and NUR tests.

An Experimental Study on Bacterial Adhesion onto Activated Carbon and Ceramic (활성탄 및 세라믹 재질에의 세균 부착성에 대한 연구)

  • Kwon Sung-Hyun;Cho Dae-Chul;Rhee In-Hyoung
    • Journal of Environmental Science International
    • /
    • v.14 no.12
    • /
    • pp.1163-1170
    • /
    • 2005
  • The microbial adsorption characteristics of two different media for biological treatment were studied using attached diverse microbes onto activated carbon and ceramic. The results in the experiments of the characteristics of physical adhesion on two different media with addition of high and low concentrated substrate in the culture were observed that the efficient of adhesion onto F-400 activated carbon was higher over that of ceramic due to the surface area of media. The irradiation treatment by ultrasonication with 400 W power and 3 min retention time on the media without addition substrate conditions and subsequent mixing throughly the culture showed the highest efficiency of cell detachment on the media. Three different microbes, P. ovalis, A calcoaceticus, and B. subtillis were used for the study of the characteristics of microbial adhesion on the media. p ovalis showed the highest adhesion capability while B. subtillis showed the lowest capability adhesion onto media either addition of substrate in the culture. The mixed bacterial culture showed $10\%$ lower removal efficiency of DOC in the low concentrated substrate culture compared to the single pure culture. Whileas, it did not show significant difference between two cultures at high concentrated substrate. It was also observed same population density of microorganism by counting of microbes adhered to microbial media with an ultrasound treatment.