• 제목/요약/키워드: Substrate Dependence

검색결과 424건 처리시간 0.026초

$SnO_2$박막저항의 전기적 특성에 미치는 첨가제의 영향 (Effect of Dopants on Electrical Properties of $SnO_2$Thin Film Resistors)

  • 구본급;강병돈
    • 한국전기전자재료학회논문지
    • /
    • 제13권8호
    • /
    • pp.658-666
    • /
    • 2000
  • Sb and Sb-Fe doped SnO$_2$film resistors were prepared by spray pyrolysis technique. The effects of Sb and Sb-Fe addition on TCR and electrical properties of SnO$_2$film resistors were studied. Also the dependence of electrical properties on the substrate temperature and substrate-nozzle distance was investigated. The Sn-Sb system with 7.9 mol% SbCl$_3$(STO-406) and Sn-Sb-Fe systems with 7.3 mol% SbCl$_3$+7.3 mol% FeCl$_3$(STO-407) and with 3.4 mol% SbCl$_3$+7.7mol% FeCl$_3$(STO-408) were prepared. Both of the systems Sn-Sb and Sn-Sb-Fe represented nonlinearity of TCR with temperature. As the amount of Fe increased TCR was shifted to positive direction. Decreasing Sb or increasing Fe caused resistivity to increase. Also increasing Fe caused the crystallization degree of rutile structure in SnO$_2$film to decrease. The electrical resistivity decreased with increasing substrate temperature The resistivity decreased with increasing substrate-nozzle distance in the ranges from 15 to 25 cm and increased rapidly at the distance over 25cm.

  • PDF

Bias 전압에 따른 ZnO:Al 투명전도막의 전기적 특성 (Substrate Bias Voltage Dependence of Electrical Properties for ZnO:Al Film by DC Magnetron Sputtering)

  • 박강일;김병섭;임동건;이수호;곽동주
    • 한국전기전자재료학회논문지
    • /
    • 제17권7호
    • /
    • pp.738-746
    • /
    • 2004
  • Recently zinc oxide(ZnO) has emerged as one of the most promising transparent conducting films with a strong demand of low cost and high performance optoelectronic devices, ZnO film has many advantages such as high chemical and mechanical stabilities, and abundance in nature. In this paper, in order to obtain the excellent transparent conducting film with low resistivity and high optical transmittance for Plasma Display Pannel(PDP), aluminium doped zinc oxide films were deposited on Corning glass substrate by dc magnetron sputtering method. The effects of the discharge power and doping amounts of $Al_2$$O_3$ on the electrical and optical properties were investigated experimentally. Particularly in order to lower the electrical resistivity, positive and negative bias voltages were applied on the substrate, and the effect of bias voltage on the electrical properties of ZnO:Al thin film were also studied and discussed. Films with lowest resistivity of $4.3 \times 10 ^{-4} \Omega-cm$ and good transmittance of 91.46 % have been achieved for the films deposited at 1 mtorr, $400^{\circ}C$, 40 W, Al content of 2 wt% with a substrate bias of +30 V for about 800 nm in film thickness.

유기절연막으로의 경사진 이온빔조사가 유기막 표면에서의 편광발생과 액정배향에 미치는 영향에 관한 연구 (Study of Liquid Crystal Alignment and Polarization-dependence on organic surface with slanted ion beam irradiation)

  • 한정민;최대섭;황종선
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2010년도 춘계학술대회 논문집
    • /
    • pp.15-16
    • /
    • 2010
  • We used Brewster's Law to examine the mechanism of liquid crystal (LC) alignment on an organic insulation layer when subjected to ion-beam irradiation. Brewster's Law implies that the maximum rate polarized rayon a slanted insulation layers on the substrate and it illustrates the dependence of polarization and themechanical structure on the ion beam irradiation process. The pretilt angle of nematic LCs on the organic insulation surface was about $1.13^{\circ}$ for an ion beam exposure of $45^{\circ}$ for 1 minute at 1800eV. This shows the dependence of LC alignment on the polarization ratio in a slanted organic insulation layer. We also discussed the electro-optical characteristic of twisted nematic (TN) LCD using ion beam irradiation on organic overcoat layer.

  • PDF

진공증착된 금속박막의 전기전도성에 대한 온도와 분위기 의존성 (Temperature and Atmosphere Dependence of the Electrical Conduction of the Vacuum Evaporated Thin Metal Films on Glass Substrate)

  • 김명균;박현수
    • 한국세라믹학회지
    • /
    • 제28권6호
    • /
    • pp.437-442
    • /
    • 1991
  • Temperature and atmosphere dependence of electrical conduction of the metal Cu, Ag, Au films, vaccum evaporated on glass, was investigated. The structural changes of the metal films were examined by SEM and high temperature XRD. The electrical resistance slightly increased with initial temperature increase up to the inflection point and decreased to minimum value, after this rapidly increased with further temperature increased below minimum. These phenomena were caused by the thermally induced film failure as a result of the mass transport. The temperature for the film failure increased in the order of O2, Air, Vacuum, N2, Ar in Cu, Ag films and Air, Vacuum, N2, Ar in Au film. The increase of resistance at the lower temperature range was attributed to the lattice distortion by disordered crystal structure, while the decreasing resistance was attributed to the removal of structural defects and film densification.

  • PDF

LDD MOSFET의 유효 채널길이 측정법에 관한 연구 (A Method for Effective Channel Length Extraction on Lightly Doped Drain MOSFET's)

  • 박근영;허윤종;이계신;성영권
    • 대한전기학회:학술대회논문집
    • /
    • 대한전기학회 1992년도 하계학술대회 논문집 B
    • /
    • pp.825-828
    • /
    • 1992
  • In this paper, a Hybrid method for an effective channel length($L_{eff}$) on lightly doped drain(LDD) MOSFET's is proposed. In order to investigate the difference of the gate bias and substrate bias defendence of the $L_{eff}$ among various LDD structures, the $L_{eff}$ of the LDD's are extensively examined using simulations and measurement. one group is proposed for conventional MOSFET and the other group Is proposed for LDD MOSFET. It is shown that the $V_{bs}$-dependence of the n-region is different from $V_{gs}$-dependence of it.

  • PDF

GaAs (311)A 기판 위에 성장된 탄소 도핑된 GaAs 에피층의 광여기 발광 (Photoluminescence in Carbon-doped GaAs Epilayers Grown on GaAs (311)A)

  • 조신호
    • 한국전기전자재료학회논문지
    • /
    • 제15권3호
    • /
    • pp.208-213
    • /
    • 2002
  • We present the temperature and excitation power density dependence of the photoluminescence from carbon-doped GaAs epilayers grown on GaAs (311)A substrate by atmospheric pressure metalorganic chemical vapor deposition. The measured temperature dependence of the PL peak energy is well expressed by an empirical formula proposed by Varshni. The thermal quenching mechanism of the intensity of 16 K luminescence peak at 1.480 eV is described with the dominant activation energy of 27$\pm$2 meV. The activation energy shows an evidence that the emission band involves the carbon acceptor in the recombination process.

SBN 세라믹 박막의 유전특성에 관한 연구

  • 김진사;최영일;김형곤;오용철;신철기
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2010년도 춘계학술대회 논문집
    • /
    • pp.7-7
    • /
    • 2010
  • The SBN thin films were deposited at substrate temperature of 300[$^{\circ}C$] on Pt-coated electrode (Pt/Ti/$SiO_2$/Si(100)) using RF sputtering method. The grain and crystallinity of SBN thin films were increased with the increase of annealing temperature. The dielectric constant(150) of SBN thin film was obtained by annealing temperature above 750[$^{\circ}C$]. The frequency dependence of dielectric loss showed a value within 0.03 in frequency ranges of 1~1000[kHz].

  • PDF

Charge Transfer between STM Tip and Au(100) in Dry, H2O, and D2O Atmospheres

  • Utami, Anggi;Chung, Yonghwa;Lee, Chi-Woo
    • Journal of Electrochemical Science and Technology
    • /
    • 제4권4호
    • /
    • pp.153-156
    • /
    • 2013
  • Charge transfer between STM tip and Au(100) has been investigated by using a Scanning Tunneling Microscopy (STM) technique in dry, $H_2O$, and $D_2O$ atmospheres. Dry atmosphere was indicated by humidity as low as 5 % and high humidity as high as 98% was managed by injecting $H_2O$ and $D_2O$ to the chamber. The current decayed more slowly in high humidity than in dry atmosphere. The plateau currents were found to appear at separations larger than ca. $5{\AA}$ where the current decay stopped depending on applied bias voltages. The polarity dependence was observed at the STM junction between Pt-Ir tip and the gold. On the contrary, little dependence was seen at the one between Au tip and the substrate electrode.

STM Study of Nb Clusters on Ag(110)

  • 윤홍식;이준희;양경득;여인환
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
    • /
    • pp.173-173
    • /
    • 1999
  • The initial growth mode of Nb on Ag(110) in sub-monolayer region is studied using Scanning Tunneling microscopy. E-beam evaporated Nb is deposited onto the substrate at RT, and STM measurements are carried out at RT and 78K. With Nb being immiscible in bulk Ag, 3D islands formation begins at early stage and no particular ordered structure is found. At very low coverages, however, many interesting phenomena are observed in association with Nb clusters. Small Nb clusters as deposited displays very strong size dependence against atom-manipulation by the STM tip. In addition, the apparent corrugation of clusters below the critical size exhibits dramatic dependence on the imaging bias, disappearing completely over a wide range of the bias. Possible physical mechanism responsible for such behavior will be discussed.

  • PDF

Enzymatic Properties of Protease from the Hepatopancreas of Shrimp, Penaeus japonicus

  • Kim Hyeung-Rak
    • Fisheries and Aquatic Sciences
    • /
    • 제3권3_4호
    • /
    • pp.188-194
    • /
    • 2000
  • A protease purified from hepatopancreas of shrimp, Penaeus japonicus, had maximum activity at $70^{\circ}C$ and in neutral and alkaline pH ranges. Specific activity at optimum reaction condition of the protease was estimated to be approximately 12 U/mg/min. The protease was stable in neutral and alkaline pH ranges and activity was retained after heat treatment at $50^{\circ}C$ for 30 min. Apparent $K_m$ and $V_{max}$ value against casein substrate were estimated to be $0.29\%$ and $7.8see^{-1}$, respectively, and those against N-CBZ-L-tyrosine p-nitropheny1 ester (CBZ­Tyr-NE) were 0.38 mM and $2,400 see^{-1}$, respectively. The N-termina1 sequence of the protease showed high homology to the trypsin from same species and the proteases from shrimp. Myosin heavy chain (MHC) from shrimp tail meat was the most susceptible to the protease and actin/tropomyosin were degraded progressively during 4 hr incubation, but to a lesser degree than MHC.

  • PDF