• 제목/요약/키워드: Substrate

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나노구조기판의 형상 및 온도변화에 따른 액체 클러스터의 거동에 대한 분자동역학적 연구 (Molecular Dynamics Study on Behaviors of Liquid Cluster with Shape and Temperature of Nano-Structure Substrate)

  • 고선미;정흥철;;최경민;김덕줄
    • 한국분무공학회지
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    • 제13권1호
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    • pp.34-41
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    • 2008
  • Molecular dynamic simulations have been carried out to study the effect of the nano-structure substrate and its temperature on cluster laminating. The interaction between substrate molecules and liquid molecules was modeled in the molecular scale and simulated by the molecular dynamics method in order to understand behaviors of the liquid cluster on nano-structure substrate. In the present model, the Lennard-Jones potential is applied to mono-atomic molecules of argon as liquid and platinum as nano-structure substrate to perform simulations of molecular dynamics. The effect of wettability on a substrate was investigated for the various beta of Lennard-Jones potential. The behavior of the liquid cluster and nano-structure substrate depends on interface wettability and function of molecules force, such as attraction and repulsion, in the collision progress. Furthermore, nano-structure substrate temperature and beta of Lennard-Jones potential have effect on the accumulation ratio. These results of simulation will be the foundation of coating application technology for micro fabrication manufacturing.

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RF 스퍼터링법에 의한 BN박막 증착시 기판 바이어스전압의 영향에 관한 연구 (The Effect of Substrate Bias Voltage during the Formation of BN film by R. F. Sputtering Method)

  • 이은국;김도훈
    • 한국표면공학회지
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    • 제29권2호
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    • pp.93-99
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    • 1996
  • In this work BN thin films were deposited on Si substrate by R. F. sputtering method at $200^{\circ}C$ and in Ar + $N_2$ mixed gas atmosphere. In order to investigate the effect of ion bombardment on substrate for c-BN bonding, substrate bias voltage was applied. The optimum substrate bias voltage for c-BN bonding was determined by FTIR analysis on specimens which were deposited with various bias voltages. Then BN thin film was deposited with this optimum condition and its phase, morphology, chemical composition, and refractive index were compared with those of BN film which was deposited without bias voltage. FTIR results showed that BN films deposited with substrate bias voltage were composed of mixed phases of c-BN and h-BN, while those deposited without bias voltage were h-BN only. When pure Ar gas was used for sputtering gas, BN films were delaminated easily from substrate in air, while when 10% $N_2$ gas was added to the sputtering gas, although c-BN specific infrared peak was reduced, delamination did not occur. GXRD and TEM results showed that BN films were amorphous phases regardless of substrate bias voltage, and AES results showed that the chemical compositions of B/N were about 1.7~1.8. The refractive index of BN film deposited with bias voltage was higher than that without bias voltage. The reason is believed to be the existence of c-BN bonding in BN film and the higher density of film that deposited with the substrate bias voltage.

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Fruitbody Development of Pleurotus ostreatus via Bottle Cultivation Using Recycled Substrate

  • Jo, Woo-Sik;Kim, Jong-Soo;Cho, Doo-Hyun;Park, So-Deuk;Jung, Hee-Young
    • Mycobiology
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    • 제36권3호
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    • pp.157-160
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    • 2008
  • This study was carried out to determine the possibility of bottle cultivation utilizing recycled oyster mushroom culture waste as a cultivating substrate for P. ostreatus. Total nitrogen percentage was 0.76%, 1.13%, 1.16%, 1.36%, and 1.38% in the 1-, 2-, 3-, 4-, and 5-time mixed substrate, respectively; 0.95%, 1.04%, 1.34%, 1.36%, and 1.25% in the 1-, 2-, 3-, 4-, and 5-time postharvest substrate, respectively; and 0.72% and 0.68% in the 2- and 3-time nonadditive substrate, respectively. Weight of the fresh fruiting body harvest was 115 g, 120 g, 117 g, 118 g, and 114 g on 1-, 2-, 3-, 4-, and 5-time mixed substrate, respectively; and 105 g and 45 g on 2- and 3-time nonadditive substrate, respectively. The first mixed substrate (fresh) and recycled substrates generated no significant difference in the weight of fresh fruiting bodies harvested.

미생물 성장 공정에서의 기질 저해에 관한 modified Haldane 모델의 이론적 고찰 (Theoretical Consideration of the Modified Haldane Model of the Substrate Inhibition in the Microbial Growth Processes)

  • 황영보
    • 공업화학
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    • 제19권3호
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    • pp.277-286
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    • 2008
  • 본 논문은 미생물 성장 공정에서의 기질 저해에 관한 modified Haldane 모델의 이론적 유도를 다룬다. 생물학적 개념인 기질-수용체 복합체의 작동 메커니즘을 바탕으로 새로운 미생물학적 동특성인 N-중첩된 다중 기질 저해 모델의 유도와 더불어 일반화가 이론적으로 고찰되었는데, 이것은 효소 반응에서의 단순 기질 저해 메커니즘이 자연스럽게 확장된 것이다. 결과적으로, 본 기질 저해에 관한 modified Haldane 모델은 완전저해 기질농도라는 생물학적 상수를 포함하고 있는, 잘 설계된 4-파라메터 동특성 모델임이 밝혀졌다.

CVD 장비 Up Time 향상을 위한 기판 지지대의 재질 및 구조 최적화 (Material and Structure Optimization of Substrate Support for Improving CVD Equipment Up Time)

  • 우람;김원경
    • 한국재료학회지
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    • 제29권11호
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    • pp.670-676
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    • 2019
  • We study substrate support structures and materials to improve uptime and shorten preventive maintenance cycles for chemical vapor deposition equipment. In order to improve the rolling of the substrate support, the bushing device adopts a ball transfer method in which a large ball and a small ball are mixed. When the main transfer ball of the bushing part of the substrate support contacts the substrate support, the small ball also rotates simultaneously with the rotation of the main ball, minimizing the resistance that can be generated during the vertical movement of the substrate support. As a result of the improvement, the glass substrate breakage rate is reduced by more than 90 ~ 95 %, and the equipment preventive maintenance and board support replacement cycles are extended four times or more, from once a month to more than four months, and the equipment uptime is at least 15 % improved. This study proposes an optimization method for substrate support structure and material improvement of chemical vapor deposition equipment.

Estimation of the Substrate Size with Minimum Mutual Coupling of a Linear Microstrip Patch Antenna Array Positioned Along the H-Plane

  • Kwak, Eun-Hyuk;Yoon, Young-Min;Kim, Boo-Gyoun
    • Journal of Electrical Engineering and Technology
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    • 제10권1호
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    • pp.320-324
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    • 2015
  • Mutual coupling between antenna elements of a linear microstrip patch antenna array positioned along the H-plane including the effect of edge reflections is investigated. Simple formulas are presented for the estimation of the grounded dielectric substrate size with minimum mutual coupling. The substrate sizes calculated by these formulas are in good agreement with those obtained by the full-wave simulation and experimental measurement. The substrate size with minimum mutual coupling is a function of the effective dielectric constant for surface waves and the distance between the antenna centers. The substrate size with minimum mutual coupling decreases as the effective dielectric constant for surface waves on a finite grounded dielectric substrate increases.

RF magnetron sputtering법으로 ZnO박막 제조시 기판온도에 따른 c축 배향성에 관한 연구 (A study on c-axis preferred orientation at a various substrate temperature of ZnO thin film deposited by RF magnetron sputtering)

  • 이종덕;송준태
    • E2M - 전기 전자와 첨단 소재
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    • 제9권2호
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    • pp.196-203
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    • 1996
  • The highly c-axis oriented zinc oxide thin films were deposited on Sapphire(0001) substrates by reactive RF magnetron sputtering. The characteristics of zinc oxide thin films on RF power, substrate-target distance, and substrate temperature were investigated by XRD, SEM and EDX analyses. The physical characteristics of zinc oxide thin films changed with various deposition conditions. The higher substrate temperatures were, The better crystallinity of zinc oxide thin films. The highly c-axis oriented zinc oxide thin films were obtained at sputter pressure 5mTorr, rf power 200W, substrate temperature 350.deg. C, substrate-target distance 5.5cm. In these conditions, the resistivity of zinc oxide thin films deposited on pt/sapphire was 12.196*10$^{9}$ [.ohm.cm].

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역확산화염과 촉매금속 기판을 이용한 탄소 나노튜브와 나노섬유의 연소합성 (Synthesis of Carbon Nanotubes and Nanofibers on a Catalytic Metal Substrate by an Inverse Diffusion Flame)

  • 이교우;정종수;황정호
    • 한국연소학회지
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    • 제7권4호
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    • pp.21-28
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    • 2002
  • Synthesis of carbon nanotubes and nanofibers on a metal substrate by an ethylene fueled inverse diffusion flame was illustrated. Stainless steel plates were used for the catalytic metal substrate. Multi-walled carbon nanotubes and nanofibers with a diameter range of 30-80nm were found on the substrate. The temperature of the substrate played an important role in the formation of carbon nanotubes and nanofibers. The pathway to the nanotubes and nanofibers could be determined by the temperature history of the substrate.

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Analysis of Kinetic Data of Pectinases with Substrate Inhibition

  • Gummadi, Sathyanarayana-N.;Panda, T.
    • Journal of Microbiology and Biotechnology
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    • 제13권3호
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    • pp.332-337
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    • 2003
  • Enzyme kinetics data play a vital role in the design of reactors and control of processes. In the present study, kinetic studies on pectinases were carried out. Partially purified polymethylgalacturonase (PMG) and polygalacturonase (PG) were the two pectinases studied. The plot of initial rate vs. initial substrate concentration did not follow the conventional Michaelis-Menten kinetics, but substrate inhibition was observed. For PMG, maximum rate was attained at an initial pectin concentration of 3 g/l, whereas maximum rate was attained when the initial substrate concentration of 2.5 g/l of polygalacturonic acid for PG I and PG II. The kinetic data were fitted to five different kinetic models to explain the substrate inhibition effect. Among the five models tested, the combined mechanism of protective diffusion limitation of both high and inhibitory substrate concentrations (semi-empirical model) explained the inhibition data with 96-99% confidence interval.

비정질 기판위에 증착한 KLN 박막의 기판온도에 의한 영향 (Influence of Substrate Temperature of KLN Thin Film Deposited on Amorphoous Substrate)

  • 박성근;최병진;홍영호;전병억;김진수;백민수
    • 한국전기전자재료학회논문지
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    • 제14권1호
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    • pp.34-42
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    • 2001
  • The influences of substrate temperature were studied when fabricating KLN thin film on amorphous substrate using an rf-magnetron sputtering method. Investigating the vaporization temperature of the each element, the excess ratio of target and the optimum deposition conditions were effectively selected when thin filmizing a material which have elements with large difference fo vaporization temperature. In order to compensate K and Li which have lower vaporization temperatures than Nb, KLN target of composition excess with K of 60% and Li of 30% was used. KLN thin film fabricated on Corning 1737 glass substrate had single KLN phase above 58$0^{\circ}C$ of substrate temperature and crystallized to c-axis direction. The optimum conditions were rf power of 100W, process pressure of 150mTorr, and substrate temperature of $600^{\circ}C$.

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