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http://dx.doi.org/10.3740/MRSK.2019.29.11.670

Material and Structure Optimization of Substrate Support for Improving CVD Equipment Up Time  

Woo, Ram (School of Nano Engineering, Inje University)
Kim, Won Kyung (School of Nano & Materials Science and Engineering, Kyungpook National University)
Publication Information
Korean Journal of Materials Research / v.29, no.11, 2019 , pp. 670-676 More about this Journal
Abstract
We study substrate support structures and materials to improve uptime and shorten preventive maintenance cycles for chemical vapor deposition equipment. In order to improve the rolling of the substrate support, the bushing device adopts a ball transfer method in which a large ball and a small ball are mixed. When the main transfer ball of the bushing part of the substrate support contacts the substrate support, the small ball also rotates simultaneously with the rotation of the main ball, minimizing the resistance that can be generated during the vertical movement of the substrate support. As a result of the improvement, the glass substrate breakage rate is reduced by more than 90 ~ 95 %, and the equipment preventive maintenance and board support replacement cycles are extended four times or more, from once a month to more than four months, and the equipment uptime is at least 15 % improved. This study proposes an optimization method for substrate support structure and material improvement of chemical vapor deposition equipment.
Keywords
substrate support; chemical vapor deposition(CVD); bushing; ball transfer;
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