• 한국입자에어로졸학회지
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• 제10권3호
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• pp.99-108
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• 2014

Liquid filtration by membrane filters is essential for the preparation of ultrapure water in semiconductor manufacturing processes. The separation of submicrometer particles suspended in ultrapure water with a laminated fibrous membrane filter was studied numerically and experimentally in the present work. We found that an electrical double layer around a single fiber expanded to a large extent at a low ion concentration, as in ultrapure water, and deformed toward the upstream of the fiber with increasing filtration velocity. Since an increase in the electrical double-layer thickness leads to a decrease in the electrical potential gradient, particles with the same polarity as the fiber approach the fiber more easily and are captured at a high filtration velocity. Experimental results also confirmed that the collection efficiency of polystyrene latex(PSL) particles through a PTFE filter became higher as the filtration velocity increased.

• Bulletin of the Korean Chemical Society
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• 제18권6호
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• pp.600-603
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• 1997

Spherical, submicrometer particles of barium-titanyl oxalate were homogeneously precipitated by thermal decomposition of diethyl oxalate in acidic aqueous solutions. The rates of oxalate ion generations, determined by various combinations of temperature and initial concentration of diethyl oxalate had a very important effect on the particle size distribution. Monosized, bimodal, or broad unimodal powders were obtained under certain combinations of experimental variables.

• The Korean Journal of Ceramics
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• 제1권1호
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• pp.1-6
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• 1995

Submicrometer, monosized ceramic powder of $Al_2TiO_5$$Al_2O_3$ ethanolic solutions. All particles produced by sol-gel-process were amprphous, monodispersed and with a narrow particle-size distribution. Compacts fired above $1300^{\circ}C$ formed aluminium titanate. Mullite formed first at $1480^{\circ}C$. After decomposition test at $1100^{\circ}C$, and cyclic thermal decomposition test at 750-1400-$750^{\circ}C$ for 100hrs., aluminium titanate was well stablized by composition with mullite.

• 마이크로전자및패키징학회지
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• 제21권4호
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• pp.133-137
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• 2014

직경 수 마이크론급의 Ag 코팅 Cu 플레이크를 제조하기 위한 선행공정으로 습식 화학적 합성법으로 제조된 서브마이크론급의 Cu 입자를 볼 밀링 공정을 통해 프레이크화 하였다. 입자들의 산화 및 응집을 막기 위해 볼 밀링 유체로는 에틸렌글리콜을 사용하였고, 에틸아세테이트 표면개질제도 첨가하였다. 용기의 회전수에 따른 실험 결과를 통해 회전수에 따른 회전 모드의 변화가 밀링 후 Cu 입자들의 평균적인 형상과 형상 균일도를 크게 변화시킴을 확인할 수 있었다. 또한 첨가한 지르코니아 볼의 직경 역시 Cu 입자들의 플레이크화 균일도를 결정하는 대표 공정변수임을 확인할 수 있었다. 그 결과 다소간의 응집체를 포함한 서브마이크론급의 Cu 입자를 사용했음에도 불구하고, 회전수, 표면개질제 첨가량, 그리고 지르코니아 볼의 직경 등의 대표 공정변수들을 최적화한 볼 밀링 공정을 통해 분산성이 우수한 수 마이크론급의 Cu 플레이크를 성공적으로 제조할 수 있었다.

• 한국결정성장학회지
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• 제12권2호
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• pp.73-79
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• 2002

코발트, 니켈, 구리 그리고 귀금속분말에 적용할 수 있는 polyol법은 균질한 크기와 형상을 갖는 금속분말합성에 매우 효과적인 공정이다 이 때 polyol은 용매, 환원제 그리고 보호제의 역학을 한다 $AgNO_3$글 촉매제로 첨가하여 비균질계 핵생성 반응을 야기할 경우 서브마이크폰 크기(0.5$\mu$m)의 코발트 분말을 한성학 수 있었다. 또한 촉매제인 Ag 핵의 수출 변화시키므로써 코발트 분말의 입도를 제어할 수 있음을 확인하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 춘계학술대회 논문집
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• pp.743-746
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• 2000

The removal of contaminants of silicon wafers has been investigated by various methods. Laser cleaning is the new dry cleaning technique to replace wafer wet cleaning in the near future. A dry laser cleaning uses inert gas jet to remove contaminant particles lifted off by the action of a KrF excimer laser. A laser cleaning model is developed to simulate the cleaning process and analyze the influence of contaminant particles and experimental parameters on laser cleaning efficiency. The model demonstrates that various types of submicrometer-sized particles from the front sides of silicon wafer can be efficiently removed by laser cleaning. The laser cleaning is explained by a particle adhesion model. including van der Waals forces and hydrogen bonding, and a particle removal model involving rapid thermal expansion of the substrate due to the thermoelastic effect. In addition, the experiment of wafer laser cleaning using KrF excimer laser was conducted to remove various contaminant particles.

• 한국대기환경학회지
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• 제15권5호
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• pp.657-665
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• 1999

Particulate matter produced by diesel engines is of concern to cngine manufactures because of its environmental impact. The majority of diesel particles are in the range of smaller than 1 ${\mu}{\textrm}{m}$. Because of their tiny volume, ultrafine diesel particles contribute very little to the total mass concentration which is currently regulated for automobile emissions. Ultrafinc particles are known to have deleterious effects upon human health cspecially because they penetrate deeply human respiratory tract and have negative effects on the health. In this study, the engine exhaust gas was diluted in a dilution tunnel and the particle size distribution was measured using the scanning mobility particel sizer system. Measurements of the number and the mass concentrations of the diesel exhaust were made under different engine ooperating conditions. The dilution sampling system provided a common basis for collection of the exhaust by cooling and diluting the source emission prior to the measurement. The measurement results showed that the particle size distributions of the exhaust from the diesel vehicles equipment with either heavy-duty or lignt-duty diesel engines, were similar in the particle size range of 0.08~0.2${\mu}{\textrm}{m}$.

• 한국고분자학회:학술대회논문집
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• 한국고분자학회 2006년도 IUPAC International Symposium on Advanced Polymers for Emerging Technologies
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• pp.330-330
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• 2006

The elaboration of fluorescent submicronic polymer particles exhibiting narrow particle size distribution as well as good photostability is of particular interest in various biomedical applications. In the frame of this work, labeled polystyrene latexes have been synthesized by miniemulsion polymerization using luminescent semiconductor nanoparticles (quantum dots, QD). The influence of incorporation of QDs on the polymerization kinetics as well as on the optical properties of the obtained latexes will be discussed.

• Bulletin of the Korean Chemical Society
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• 제24권5호
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• pp.600-604
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• 2003

The light pressure force from an optical standing wave (SW) can focus an atomic beam to submicrometer dimensions. To make the best of this technique it is necessary to find a set of optimal experimental parameters. In this paper we consider theoretically the chromium atoms focusing and demonstrate that the focusing performance depends not only on the strength of but also on the time atoms take to traverse the force field. The general conclusions drawn can easily be applied to other atoms. To analyze the problem we numerically integrate a coupled time-dependent $Schr{\"{o}}dinger$ equation over a wide range of experimental parameters. It is found that an optimal atomic beam speed-laser intensity pair does exist, which could give substantially improved focusing over the one with the experimental parameters given in the literature. It is also shown that the widely used classical particle optics approach can lead to erroneous predictions.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2000년도 International Symposium on Magnetics The 2000 Fall Conference
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• pp.200-206
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• 2000

We have investigated the activation magnetic moment, which characterizes the basis magnetic moment acting as a single magnetic particle during magnetization reversal. The activation magnetic moment was measured from each local area on continuous ferromagnetic thin films, by analyzing the magnetic field dependence of magnetization reversal of the corresponding local area based on a thermally activated relaxation process. It was found that the activation magnetic moment was nonuniform on submicrometer scale; the fluctuation increased with increasing the number of layers in Co/Pd multilayers. The distribution could be well analyzed by exp($\delta$m$\^$3/2/), where $\delta$m is the deviation of the activation magnetic moment from the mean value.