The Reliability Test using SILC of Gate Dielectrics Made of ($HfO_2-Al_2O_3$ ) Multilayers
(SILC(Stress Induced Leakage Current)를 이용한 하프늄산화막-알루미나($HfO_2-Al_2O_3$ ) 적층 유전반막의 전기적 신뢰성 실험)
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- Proceedings of the Korean Ceranic Society Conference
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- 2003.04a
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- pp.37.2-37
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- 2003