• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.11-11
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• 2011

In this talk, I will discuss roles of pseudo vector and scalar potential in changing physical properties of graphene systems. First, graphene under small uniaxial strain is shown to be described by the generalized Weyl's Hamiltonian with inclusion of pseudo vector and scalar potential simultaneously [1]. Thus, strained graphene is predicted to exhibit velocity anisotropy as well as work function enhancement without any gap. Second, if homogeneous strains with different strengths are applied to each layer of bilayer graphene, transverse electric fields across the two layers can be generated without any external electronic sources, thereby opening an energy gap [2]. This phenomenon is made possible by generation of inequivalent pseudo scalar potentials in the two graphene layers. Third, when very tiny lateral interlayer shift occurs in bilayer graphene, the Fermi surfaces of the system are shown to undergo Lifshitz transition [3]. We will show that this unexpected hypersensitive electronic topological transition is caused by a unique interplay between the effective non-Abelian vector potential generated by sliding motions and Berry's phases associated with massless Dirac electrons.

• 한국진공학회지
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• 제16권2호
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• pp.145-152
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• 2007

자외선 광여기 전자현미경 (Ultraviolet - Photoelectron Emission Microscopy: UV-PEEM)을 이용하여 Si (001)과 (113) 표면에 Ge을 증착하면서 실시간으로 나노구조의 형성과 크기 및 형태 변화과정을 조사하였다. Ge은 PBEM에 부착된 e-beam 증착기를 이용하여 $450-550^{\circ}C$ 온도에서 in situ로 증착하면서 표면의 변화를 PEEM으로 관찰하였다. Ge을 ${\sim}0.4\;ML/min$의 증착율로 ${\sim}4\;ML$ 이상 두께로 증착했을 때, 두 Si 표면에서 Ge의 균일한 변형층(strained layer) 위에 island 구조가 형성되었다. 초기에 형성된 원형 모양의 island는 연속적인 Ge 증착에 따라, ripening 과정에 의해 크기가 점차 성장되었고 밀도는 감소하였으나, 형태는 원형 모양을 유지하였다. 시료 성장 후 공기 중 AFM 측정 결과, Si(001) 표면에는 dome 형태의 Ge island가 Si(113) 표면에는 윗면이 평판하고 다면의 옆면을 지닌 island 구조가 형성됨이 확인되었다. 반면에 ${\sim}0.15\;ML/min$의 낮은 증착율로 Ge을 증착했을 때, Si(113) 표면에서 원형의 Ge island가 길죽한(elongated) 형태의 나노선 구조로 변형됨이 관찰되었다. 또한, 계속적인 Ge 증착 두께를 증가시킴에 따라 표면에는 새로운 island가 형성되지 않고, 기존의 island들이 점차 길이 방향으로 크기가 증가하면서 [$33\bar{2}$] 방향으로 배열하였다. 이와 같은 Ge 나노구조의 형성과 형태 변화는 나노구조 형성과정에서 변형이완(strain relaxation)과 가원자(adatom)의 표면 동역학적 효과와 깊은 관련이 있는 것으로 분석된다.

• 한국광학회지
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• 제18권5호
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• pp.333-336
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• 2007

[ $-40^{\circ}C$ ]에서 $85^{\circ}C$의 온도에서 냉각장치 없이 동작하는 1.31 um 비냉각 DFB-LD가 유기 금속 화학 증착법에 의해 성장되었다. 높은 전광변환효율을 갖는 레이저의 제작은 스트레인이 인가된 다중양자우물 구조의 최적화를 통해 가능하며, 특히 스트레인의 양, 양자 우물의 두께, 전위장벽의 두께, 양자 우물의 수, 활성층의 폭에 주로 영향을 받는다. 본 연구에서 제작된 DFB-LD는 $25^{\circ}C$와 $85^{\circ}C$에서 전광변환효율은 0.38[mW/mA]와 0.26[mW/mA], 발진개시전류는 각각 7.1[mA]와 19.8[mA]의 값을 가졌다.

• 한국전기전자재료학회논문지
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• 제17권9호
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• pp.916-923
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• 2004

In this paper, the strained Si$_{0.9}$Ge$_{0.1}$ epitaxial layers grown by a reduced pressure chemical vapor deposition (RPCVD) on Si (100) were characterized by Rutherford backscattering spectrometery (RBS) for the fabrication of an SiGe heterojunction bipolar transistor(HBT). RBS spectra of the ${Si}_0.9{Ge}_0.1$epitaxial layers grown on the Si substrates which were implanted with the phosphorus (P) ion and annealed at a temperature between $850^{\circ}C$ - $1000^{\circ}C$ for 30min were analyzed to investigate the post thermal annealing effect on the grown${Si}_0.9{Ge}_0.1$epitaxial layer quality. Although a damage of the substrates by P ion-implantation might be cause of the increase of RBS yield ratios, but any defects such as dislocation or stacking fault in the grown ${Si}_0.9{Ge}_0.1$ epitaxial layer were not found in transmission electron microscope (TEM) photographs. The post high temperature rapid thermal annealing (RTA) effects on the crystalline quality of the ${Si}_0.9{Ge}_0.1$ epitaxial layers were also analyzed by RBS. The changes in the RBS yield ratios were negligible for RTA a temperature between $900^{\circ}C$ - $1000^{\circ}C$for 20 sec, or $950^{\circ}C$for 20 sec - 60 sec. A SiGe HBT array shows a good Gummel characteristics with post RTA at $950^{\circ}C$ for 20 sec.sec.sec.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.272.1-272.1
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• 2016

In a three-dimensional topological insulator Bi2Se3, a stress control for band gap manipulation was predicted but no systematic investigation has been performed yet due to the requirement of large external stress. We report herein on the strain-dependent results for Bi2Se3 films of various thicknesses that are grown via a self-organized ordering process. Using small angle X-ray scattering and Raman spectroscopy, the changes of d-spacings in the crystal structure and phonon vibration shifts resulted from stress are clearly observed when the film thickness is below ten quintuple layers. From the UV photoemission/inverse photoemission spectroscopy (UPS/IPES) results and ab initio calculations, significant changes of the Fermi level and band gap were observed. The deformed band structure also exhibits a Van Hove singularity at specific energies in the UV absorption experiment and ab initio calculations. Our results, including the synthesis of a strained ultrathin topological insulator, suggest a new direction for electronic and spintronic applications for the future.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.128.2-128.2
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• 2014

Long-wave infrared detectors using the type-II InAs/GaSb strained superlattice (T2SL) material system with the nBn structure were designed and fabricated. The band gap energy of the T2SL material was calculated as a function of the thickness of the InAs and GaSb layers by the Kronig-Penney model. Growth of the barrier material (Al0.2Ga0.8Sb) incorporated Te doping to reduce the dark current. The full width at half maximum (FWHM) of the 1st satellite superlattice peak from the X-ray diffraction was around 45 arc sec. The cutoff wavelength of the fabricated device was ${\sim}10.2{\mu}m$ (0.12eV) at 80 K while under an applied bias of -1.4V. The measured activation energy of the device was ~0.128 eV. The dark current density was shown to be $1.2{\times}10^{-5}A/cm^2$ at 80 K and with a bias -1.4 V. The responsivity was 1.9 A/W at $7.5{\mu}m$ at 80K and with a bias of -1.9V.

• 한국재료학회지
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• 제16권10호
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• pp.656-662
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• 2006

We fabricated thermal evaporated 10 nm-$Ni_xCo_{1-x}$ (x=0.2, 0.5 and 0.8) /(poly)Si films to form nanothick cobalt nickel composite silicides by a rapid thermal annealing at $700{\sim}1100^{\circ}C$ for 40 seconds. A field emission scanning electron microscope and a micro-Raman spectrometer were employed for microstructure and silicon residual stress characterization, respectively. We observed self-aligned micro-pinholes on single crystal silicon substrates silicidized at $1100^{\circ}C$. Raman silicon peak shift indicates that the residual tensile strain of $10^{-3}$ in single crystal silicon substrates existed after the silicide process. We propose thermal stress from silicide exothermic reaction and high temperature silicidation annealing may cause the pinholes. Those pinholes are expected to be avoided by lowering the silicidation temperature. Our results imply that we may use our newly proposed composite silicides to induce the appropriate strained layer in silicion substrates.

• 대한전자공학회논문지SD
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• 제43권3호
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• pp.1-8
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• 2006

본 논문에서는 채널 stress에 따른 Nano-scale CMOSFET의 소자 및 신뢰성 (HCI, NBTI)특성을 분석하였다. 잘 알려져 있듯이 NMOS는 tensile, PMOS는 compressive stress가 인가된 경우에 소자의 특성이 개선되었으며, 이는 전자와 정공의 이동도 증가에 의한 것임을 확인하였다. 그러나 신뢰성인 경우에는 소자 특성과는 다른 특성을 나타냈는데, NMOS와 PMOS 모두 tensile stress가 인가된 경우에 hot carrier 특성이 더 열화 되었으며, PMOS의 PBTI 특성도 tensile에서 더 열화 되었음을 확인하였다. 신뢰성을 분석한 결과, 채널의 tensile stress로 인하여 $Si/SiO_2$ 계면에서 interface trap charge의 생성과 산화막 내 positive fixed charge의 생성에 많은 영향을 끼침을 알 수 있었다. 그러므로 나노급 CMOSFET에 적용되는 strained-silicon MOSFET의 개발을 위해서는 소자의 성능 뿐 만 아니라 신뢰성 또한 고려되어야 한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.223-223
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• 2012

Surface engineering plays a significant role in fabricating highly functionalized materials applicable to industrial and biomedical fields. Surface wrinkles and folds formed by ion beam or plasma treatment are buckling-induced patterns and controlled formation of those patterns has recently gained considerable attention as a way of creating well-defined surface topographies for a wide range of applications. Surface wrinkles and folds can be observed when a stiff thin layer attached to a compliant substrate undergoes compression and plasma treatment is one of the techniques that can form stiff thin layers on compliant polymeric substrates, such as poly (dimethylsiloxane) (PDMS). Here, we report two effective methods using plasma modification techniques for controlling the formation of surface wrinkles and folds on flat or patterned PDMS substrates. First, we show a method of creating wrinkled diamond-like carbon (DLC) film on grooved PDMS substrates. Grooved PDMS substrates fabricated by a molding method using a grooved master prepared by photolithography and a dry etching process were treated with argon plasma and subsequently coated with DLC film, which resulted in the formation of wrinkled DLC film aligning perpendicular to the steps of the pre-patterned ridges. The wavelength and the amplitude of the wrinkled DLC film exhibited variation in the submicron- to micron-scale range according to the duration of argon plasma pre-treatment. Second, we present a method for controlled formation of folds on flat PDMS substrates treated with oxygen plasma under large compressive strains. Flat PDMS substrates were strained uniaxially and then treated with oxygen plasma, resulting in the formation of surface wrinkles at smaller strain levels, which evolved into surface folds at larger strain levels. Our results demonstrate that we can control the formation and evolution of surface folds simply by controlling the pre-strain applied to the substrates and/or the duration of oxygen plasma treatment.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.391-392
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• 2012

Graphene is a perfectly two-dimensional (2D) atomic crystal which consists of sp2 bonded carbon atoms like a honeycomb lattice. With its unique structure, graphene provides outstanding electrical, mechanical, and optical properties, thus enabling wide variety of applications including a strong potential to extend the technology beyond the conventional Si based electronic materials. Currently, the widespread application for electrostatically switchable devices is limited by its characteristic of zero-energy gap and complex process in its synthesis. Several groups have investigated nanoribbon, strained, or nanomeshed graphenes to induce a band gap. Among various techniques to synthesize graphene, chemical vapor deposition (CVD) is suited to make relatively large scale growth of graphene layers. Direct growth of graphene on hexagonal boron nitride (h-BN) using CVD has gained much attention as the atomically smooth surface, relatively small lattice mismatch (~1.7％) of h-BN provides good quality graphene with high mobility. In addition, induced band gap of graphene on h-BN has been demonstrated to a meaningful value about ~0.5 eV.[1] In this paper, we report the synthesis of grpahene / h-BN bilayer in a chemical vapor deposition (CVD) process by controlling the gas flux ratio and deposition rate with temperature. The h-BN (99.99％) substrate, pure Ar as carrier gas, and $CH_4$ are used to grow graphene. The number of graphene layer grown on the h-BN tends to be proportional to growth time and $CH_4$ gas flow rate. Epitaxially grown graphene on h-BN are characterized by scanning electron microscopy, atomic force microscopy, and Raman spectroscopy.