• Journal of the Korean Society for Precision Engineering
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• v.31 no.5
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• pp.423-430
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• 2014

In this study, the five-DOF motion at ultra-precision linear stage under static and dynamic conditions are evaluated through the extending application of ISO 230-2. As the performance factors, the bi-directional accuracy and repeatability of the five-DOF motion are quantitatively evaluated with the measurement uncertainties which are determined using the standard uncertainty of equipment used in experiment. The motion under static condition are analyzed using geometric errors. The five geometric errors except the linear displacement error are measured using optimal measurement system which is designed to enhance the standard uncertainty of geometric errors. In addition, the motion under dynamic conditions are analyzed with respect to the conditions with different feed rate of the stage. The experimental results shows that the feed rate of stage has a significant effect on straightness motions.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.8
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• pp.1029-1034
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• 2010

In this paper, we present the roundness profile and run-out error measurement for a rotating shaft. The devices for measuring the roundness require a precision rotation table which is used as a reference to obtain the circular profile. Therefore, the roundness measuring system is expensive and requires precision manufacturing. The two-point method for succession measurement has been used to obtain a linear profile or used in straightness measurement using two displacement measuring devices. In this paper, the method is used for measuring the circular profile of a rotating shaft. A method to remove the vibration of the shaft, i.e., the run-out, is used, and the original circular profile is obtained from the measured raw data that excludes the run-out error of the rotating shaft. This method will be useful for obtaining the precise circular profile without using a precision reference circular artifact.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.2
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• pp.109-117
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• 2009

This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.