• 한국정밀공학회지
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• 제31권5호
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• pp.423-430
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• 2014

In this study, the five-DOF motion at ultra-precision linear stage under static and dynamic conditions are evaluated through the extending application of ISO 230-2. As the performance factors, the bi-directional accuracy and repeatability of the five-DOF motion are quantitatively evaluated with the measurement uncertainties which are determined using the standard uncertainty of equipment used in experiment. The motion under static condition are analyzed using geometric errors. The five geometric errors except the linear displacement error are measured using optimal measurement system which is designed to enhance the standard uncertainty of geometric errors. In addition, the motion under dynamic conditions are analyzed with respect to the conditions with different feed rate of the stage. The experimental results shows that the feed rate of stage has a significant effect on straightness motions.

• 대한기계학회논문집A
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• 제34권8호
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• pp.1029-1034
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• 2010

본 논문은 회전체의 진원도 및 흔들림 정밀도 측정에 관한 연구이다. 일반적으로 가공물 진원도 측정은 정밀한 회전테이블 또는 기준 원형 디스크를 필요로 하여, 고가의 비용이 소요된다. 축차2점법은 2개의 변위센서를 사용하여 직선가이드 등에서진직도 측정을 위하여 사용되었으며, 본 연구에서는 이 방법을 회전체에 적용하였다. 한 개의 디스크를 이용하여 측정된 회전체 변위 측정값에서 장치의 회전시 흔들림 오차를 제거하여 회전체의 순수한 진원도 프로파일을 측정하였다. 본 연구는 정밀한 기준 디스크 (Artifact)를 사용하지 않고 원형 가공물의 진원도 프로파일 측정에 유용할 것이다.

• 한국정밀공학회지
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• 제26권2호
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• pp.109-117
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• 2009

This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.