• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.551-552
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.04b
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• pp.400-407
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• 1995

The straightness property is one of fundamental geometric tolerances to be strictly controlled for guideways of machine tools and measuring machines. The staightness measurement for long guideways was usually difficult to perform, and it needed additional equipments or special treatment with limited application. In this paper, a new approach is proposed using the profile matching technique for the long guideways, which can be applicable to most of straghtness measurements. An edge of relativelly sthort length is located along a divided section of a long guideway, and the local straightness measurement is performed. The edge is then moved to the next section with several positions overlap. After thelocal straightness profile is measured for every section along the long guideway with overlap, the global straightness profile is constructed using the profile matching technique based on theleast squares method. The proposed techinique is numerically tested for two cases of known global straightness profile arc profile and irregular profile and those profiles with and without random error intervention, respectively. When norandom errors are involved, the constructed golval profile is identical to the original profile. When the random errors are involved, the effect of the number of overlap points are investigated, and it is also found that the difference between the difference between the constructed and original profiles is very close to the limit of random uncertainty with juist few overlap points. The developed technique has been practically applied to a vertical milling machine of moving table type, and showed good performance. Thus the accuracy and efficiency of the proposed method are demonstrated, and shows great potential for variety of application for most of straightness measuirement cases using straight edges, laser optics, and angular measurement equipments.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1133-1139
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• 2014

This paper proposes a simple method to improve a sensitivity of a straightness measurement system for a linear stage, which is applied to a system based on a geometric optic method. An optical system for this method is composed of a corner-cube retro-reflector, a ball-lens and a twodimensional position sensitive detector (2D PSD). The effectiveness of the proposed method was examined theoretically, and verified experimentally using a prototype measurement system. The results show that the measuring sensitivity was dependent on the size of the ball-lens and the setup position of PSD from the ball-lens, and that the proposed method is efficient method to improve the measuring sensitivity.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.863-872
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• 2012

The squareness measurement of driving axes of a machine tool is very important to evaluate the performance of the machine. Laser interferometer measurement system is one of the most reliable equipment to measure the squareness. However, squareness measurement using laser system with an optical square result in restriction of straightness optics setup and Abbe's offset. This offset combines with angular errors during the motion of an axis to cause Abbe's error. In addition, the difficulty in optical square setup causes restriction of other optics and limitation of measurable range. In this paper, mathematical approaches are presented to eliminate the Abbe's error and to estimate squareness for full range by using the best fit of straightness data measured without an optical square. Experiments for squareness measurement of 3 axis machine tool were conducted and the proposed techniques were used for squareness evaluation with elimination of Abbe's error and squareness estimation for the full travel range.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.91-92
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.375-378
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• 1995

Although laser interferometer measurement system has the advantage of range and accuracy, the traditional error measurement methods for geometric errors(two straightness and three angular errors) of a machine tool measures error components one at a time. It may also create an optical path difference and affect the measurement accuracy. In order to identify and compensate for geometric error of a moving body, an on-line measurement system for simultaneous detection of the five error components of a moving axis is required. An on-line measurement system with 5 degrees of freedom was developed for geometric error detection. Performance verification of the system was performed on an error generating mechanism. Experimental results show the feasibility of this system for identifying geometric errors of a side of machine tool.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.599-603
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• 2003

This paper present an error compensation system and On-Machine Measurement(OMM) system for improving the machining accuracy of ultra-precision lathe. The Fast-Tool-Servo(FTS) driven by a piezoelectric actuator is applied for error compensation system. The controller is implemented on the 32bit DSP for feedback control of piezoelectric actuator. The control system is designed to compensates three kinds of machining errors such as the straightness error of X-axis slide, the thermal growth error of the spindle. and the squareness between spindle and X-axis slide. OMM is preposed to measure the finished profile of workpiece on the machine-tool using capacitive sensor with highly accurate ruby tip probe guided by air bearing. The data acquisition system is linked to the CNC controller to get the position of each axis in real-time. Through the experiments, it is founded that the thermal growth of spindle and tile squareness error between spindle and X-axis slide influenced to machining error more than straightness error of X-axis slide in small travel length. These errors were simulated as a sinusoidal signal which has very low frequency and the FTS could compensate the signal less than 30 m. The implemented OMM system has been tested by measuring flat surface of 50 mm diameter and shows measurement error less than 400 mm

• Journal of the Korean Society for Precision Engineering
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• v.27 no.5
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• pp.7-13
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• 2010

The integrity and accuracy of the drilling hole are decided by positional error, diameter error, the roundness, the straightness, the cylindericity, size of the burr, the surface roundness and others. Among these parameters, positional error and diameter error have the most important parameters. The diameter error has been widely studied, but there has been little research done about the positional error due to the difficulty of measuring it. The measurement of hole location and diameter would be performed by CMM(Coordinate Measurement Machine). However, the usage of CMM requires much time and cost. In order to overcome the difficulties, we have developed a hole location and diameter error measuring device using machine vision. The developed measurement device attached to a CNC machine can determine hole quality quickly and easily.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.5
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• pp.93-99
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• 1998

Although laser interferometer measurement system has advantages of measurement range and accuracy, it has some disadvantages when measurement of multi degrees of freedom of motion are required. Because the traditional error measurement methods for geometric errors (two straightness and three angular errors) of a slide of machine tools measures error components one at a time. It may also create an optical path difference and affect the measurement accuracy. In order to identify and compensate for geometric errors of a moving rigid body in real time processes, an on-line error measurement system for simultaneous detection of the five error components of a moving object is required. Using laser alignment technique and some optoelectronic components, an on-line measurement system with 5 degrees of freedom was developed for the geometric error detection in this study Performance verification of the system has been performed on an error generating mechanism. Experimental results show the feasibility of this system for identifying geometric errors of a slide of machine tools.