• 제목/요약/키워드: Stick-Slip Friction

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CMP에서의 스틱-슬립 마찰특성에 관한 연구 (A Study on the Characteristics of Stick-slip Friction in CMP)

  • 이현섭;박범영;서헌덕;박기현;정해도
    • 한국전기전자재료학회논문지
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    • 제18권4호
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    • pp.313-320
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    • 2005
  • Stick-slip friction is one of the material removal mechanisms in tribology. It occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction monitoring of chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. In this paper, an attempt to show the similarity between stick-slip friction and the friction of CMP was conducted. The prepared hard pa(IC1000/Suba400 stacked/sup TM/) and soft pad(Suba400/sup TM/) were tested with SiO₂ slurry. The friction force was measured by piezoelectric sensor. According to this experiment, it was shown that as the head and table velocity became faster, the stick-slip time shortened because of the change of real contact area. And, the gradient of stick-slip period as a function of head and table speed in soft pad was more precipitous than that of hard one. From these results, it seems that the fluctuating friction force in CMP is stick-slip friction caused by viscoelastic behavior of the pad and the change of real contact area.

마찰력 규명을 통한 상한절환 오차 모델링 (Quadrant Protrusion error Modeling Through the Identification of Friction)

  • 김민석
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 1999년도 추계학술대회 논문집 - 한국공작기계학회
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    • pp.371-376
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    • 1999
  • Stick-slip friction is present to some degree in almost all actuators and mechanisms and is often responsible for performance limitations. Simulation of stick-slip friction is difficult because of strongly nonlinear behavior in the vicinity of zero velocity. A straightforward method for representing and simulating friction effects is presented. True zero velocity sticking is represented without equation reformulation or the introduction of numerical stiffness problems. Stick-slip motion is investigated experimentally, and the fundamental characteristics of the stick-slip motion are clarified. Based on these experimental results, the characteristics of static in the period of stick and kinetic friction in the period of slip are studied concretely so as to clarify the stick-slip process.

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Cu CMP에서 스틱-슬립 마찰과 스크래치에 관한 연구 (A Study on Stick-slip Friction and Scratch in Cu CMP)

  • 이현섭;박범영;정석훈;정재우;서헌덕;정해도
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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    • pp.653-654
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    • 2005
  • Stick-slip friction is one of the material removal mechanisms in tribology. This stick-slip friction occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction force monitoring system for chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. It seems that the stick-slip friction causes scratches on the surface of moving parts. In this paper, A study on the scratches which occur during copper CMP was conducted in a view of stick-slip friction.

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프레팅 조건 하에서 스틱-슬립 현상이 마찰력에 미치는 영향 (Influence of Stick-Slip Behavior on the Friction Force under Fretting Conditions)

  • 이영제;정성훈;용석주
    • Tribology and Lubricants
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    • 제21권1호
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    • pp.16-20
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    • 2005
  • Friction and wear characteristics between two steel surfaces under fretting condition are investigated experimentally. The fretting damage caused by low-amplitude oscillatory sliding can be classified into three regimes of gross-slip, mixed-slip and partial-slip due to stick-slip phenomenon. One of the most important characteristics of fretting wear is the transition from gross-slip to mixed-slip. This study was focused on getting the degree of stick-slip out of the friction transition under fretting condition. Fretting wear is divided into three conditions of gross-slip/mixed-slip/partial-slip. The criteria for the division are friction and displacement amplitude, wear scar morphology and dissipated energy. In this test, friction force and displacement were measured for detecting the transition from mixed-slip to gross-slip and qualitatively predicting the degree of the wear.

On the Motion of the Structure Varying Multibody Systems with Two-Dimensional Dry Friction

  • Xie Fujie;Wolfs Peter;Cole Colin
    • Journal of Mechanical Science and Technology
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    • 제19권4호
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    • pp.927-935
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    • 2005
  • In the present paper the dynamics of the structure varying multibody systems caused by stick-slip motion with two-dimensional dry friction are analyzed. The methods to determine friction force both in stick and slip states are described. The direct method of considering the wagon bogie system as a structure varying system was used to consider two dimensional friction at the wheelset-side frame connection. The concept of friction direction angle used to determine the friction force components of two-dimensional dry friction both in the stick and slip motion states was used. A speed depended friction coefficient was used and described approximately by hyperbolic secant function. All switch conditions were derived and friction forces both for stick and slip states. Some simulation results are provided.

회전축계에서 발생하는 스틱슬립 현상 연구 (Study of stick-slip phenomena on spinning shaft)

  • 김보형;정진태
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2014년도 추계학술대회 논문집
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    • pp.250-251
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    • 2014
  • This paper investigates the stick-slip phenomena on spinning shaft. The modeling of the shaft is considered only torsional direction with nonlinear friction. The friction is adopted a negative friction-velocity slope. Based on the model, a nonlinear equation of motion is derived and analyze the stick-slip phenomena. In order to analyze the time dependent response, the nonlinear formulations are numerically solved by nonlinear Newmark method. The numerical results reveal the stick-slip phenomena on the spinning shaft system.

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Stick-Slip 마찰이 있는 비선형 진동 시스템의 규명에 관한 연구 (A Study on the Identification of Nonlinear Vibration System with Stick Slip Friction)

  • 허인호;이병림;이재응
    • 소음진동
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    • 제10권3호
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    • pp.451-456
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    • 2000
  • In this paper a discrete time model for the identification of nonlinear vibration system with stick-slip friction is proposed. The proposed model can handle the highly nonlinear behavior of the friction such as stick-slip phenomenon and Stribeck effect. The basic idea of the proposed model is as follows : If the nonlinearity of the system can be predicted as a simple function then this nonlinear function term cab be directly used in the discrete time model. By doing this the number of nonlinear terms in the model can be much less than those of NARMAX model which is widely used nonlinear discrete model. The simulation result shows that the proposed model can estimate the response of the nonlinear vibration system with stick-slip friction very well with less computational effort.

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공작기계 이송시 스틱슬립에 관한 고찰 (A Study of th stick-slip by feed of the machining center)

  • 정성택;박종남;조규재
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1997년도 추계학술대회 논문집
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    • pp.420-424
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    • 1997
  • n the ballscrew slide system the ~najor problems in accomplishing the high-speed and high-precision are the friction between elements and the decrease of axial stiffness. Especially the friction on the guide have a bad effect on the precision of slidlng. Furthermore stick-slip occur when the low stiffness of slide system. The sticli-slip have a bad influence on the precision. In this research, the affection of stick-slip friction to the precision of the slide system is studied and the possible solution of the precision is proixjsed.

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통계적 마찰 모델을 활용한 stick-slip 진동 해석과 정확성 검증 (Stick-slip vibration analysis by using statistical friction model and accuracy verification of the friction model)

  • 유홍희;강원석
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2014년도 추계학술대회 논문집
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    • pp.830-832
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    • 2014
  • In this study, friction stick-slip vibration're interpretation of the phenomenon, we used a statistical model of friction. In a previous study using a definite friction factor, but to a dynamic simulation using a constantly changing during the integration time by a Monte Carlo simulation method, not the average coefficient of friction and the dynamic friction coefficient and a constant value in this study.

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공작기계 이송계의 Stick-Slip 특성에 관한 연구 (A study on the Stick-slip Characteristic of Machine Tool Feeding System.)

  • 박종권;이후상
    • 한국기계연구소 소보
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    • 통권18호
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    • pp.29-35
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    • 1988
  • When low sliding velocities in the boundary lubrication range are operating, irregular movements frequently occur which are a result of the stick-slip phenomenon. Such slide motions are undesirable in precision machine tools, particularly with feed back systems used in numerical and adaptive control machine tools. Accordingly, this paper reports analytical and experimental studies in the stick-slip characteristic of machine tool feeding system. The main conclusions of this study are as follows; The tendency towards stick-slip effects may be reduced by; 1). Reducing the drop in friction coefficient in the Stribeck curve(on the rising part of the friction characteristic at higher sliding speeds, the system is stable all the time) 2). Reducing the transition velocity by the use of a higher viscosity lubricating oil. 3). Increasing the stiffness(Damping)and reducing normal load(Sliding mass) Therefore, the Critical velocity is decided from the above conclusions and in designing of machine tool, feed rates(sliding velocity)must be design the more than critical velocity.

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