• Title/Summary/Keyword: Steam Humidification

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An Assessment of Energy Consumption in Steam-Humidification- and Water-Spray-Humidification-Type Outdoor Air Conditioning Systems for Semiconductor Manufacturing Clean Rooms (반도체 클린룸용 증기가습 및 수분무가습 외기공조시스템의 에너지소비량 평가)

  • Kim, Ki-Cheol;Song, Gen-Soo;Kim, Hyung-Tae;Yoo, Kyung-Hoon;Shin, Dae-Kun;Park, Dug-Jun
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.25 no.2
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    • pp.55-63
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    • 2013
  • For a large-scale semiconductor manufacturing clean room, the energy consumed in an outdoor air conditioning system to heat, humidify, cool and dehumidify incoming outdoor air is very large. In particular, the energy requirement to humidify outdoor air in the winter season is generally known to be high. Recently, in order to overcome the high energy consumption nature of a steam generator in a conventional steam humidification type outdoor air conditioning system, an air washer is often introduced instead of the steam generator in the outdoor air conditioning system, which can be called a water spray humidification type outdoor air conditioning system. Therefore, the assessment and comparison of the annual energy consumed in the steam humidification type and the water spray humidification type outdoor air conditioning systems deserves to be examined in order to reduce the outdoor air conditioning load of a clean room. In the present study, a numerical analysis was conducted to obtain the annual electric power consumption of the two outdoor air conditioning systems. It was shown from the comparison of the numerical results that the water spray humidification type outdoor air conditioning system can reduce about 30% of annual electric power consumption of the steam humidification type outdoor air conditioning system.

Comparative Study on Energy Consumption in Steam-Humidification- and Water-Spray-Humidification-Type Outdoor Air-Conditioning Systems for Semiconductor Manufacturing Clean Rooms (반도체 클린룸용 증기가습 및 수분무가습 외기공조시스템의 에너지소비량 비교연구)

  • Kim, Hyung-Tae;Song, Gen-Soo;Kim, Ki-Cheol;Yoo, Kyung-Hoon;Son, Seung-Woo;Shin, Dae-Kun;Park, Dug-Jun;Kwon, Oh-Myung
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.35 no.12
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    • pp.1249-1255
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    • 2011
  • In modern large-scale semiconductor manufacturing clean rooms, the energy consumed by the outdoor air-conditioning system during heating, humidification, cooling, and dehumidification of the incoming outdoor air represents about 45% of the total air-conditioning load required to maintain a clean-room environment. In particular, the energy required for humidification of the outdoor air in winter is very high. Therefore, evaluation and comparison of the energy consumption in key humidification systems, viz., steam-humidification and water-spray-humidification systems, used in outdoor air-conditioning systems would be useful to reduce the outdoor air-conditioning load in clean rooms. In the present study, an experiment with an outdoor air flow of 1000 $m^3$/h was conducted to compare the air-conditioning process and energy consumption in outdoor air-conditioning systems with electrodeboiler steam humidifiers and air-washer water spray humidification systems. The experimental results showed that the water-spray-humidification-type outdoor air-conditioning system consumed less electrical power than did the steam-humidification-type system and was more energy efficient during winter.

A Study on Energy Reduction in an Outdoor Air Conditioning System for Semiconductor Manufacturing Cleanrooms Using Water Spray Humidification (반도체 클린룸용 외기공조시스템의 수분무 가습을 이용한 에너지절감에 관한 연구)

  • Song, Won-Il;Kim, Ki-Cheol;Yoo, Kyung-Hoon;Shin, Dae-Kun;Tae, Kyung-Eung;Kim, Yong-Sik;Park, Dug-Jun
    • Particle and aerosol research
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    • v.13 no.2
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    • pp.65-77
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    • 2017
  • In recent large-scale semiconductor manufacturing cleanrooms, the energy consumption in outdoor air conditioning (OAC) systems to heat, humidify, cool and dehumidify outdoor air(OA) represents about 40~50 % of the total cleanroom power consumption required to maintain cleanroom environment. Therefore, the assessment of energy consumption in outdoor air conditioning systems is essential for reducing the outdoor air conditioning load for a cleanroom. In the present study, an experiment with an outdoor air flow rate of $1,000m^3/h$ was conducted to compare the energy consumption in steam humidification, simple air washer, exhaust air heat recovery type air washer and dry cooling coil(DCC) return water heat recovery type air washer OAC systems. Besides, a numerical analysis was carried out to evaluate the annual energy consumption of the aforementioned four OAC systems. It was shown that the simple air washer, exhaust air heat recovery type air washer and DCC return water heat recovery type air washer OAC systems using water spray humidification were more energy-efficient than the steam humidification OAC system. Furthermore the DCC return water heat recovery type air washer OAC system was the most energy-efficient.

Study on PEM-Fuel-Cell Humidification System Consisting of Membrane Humidifier and Exhaust Air Recirculation Units (막가습기와 공기극 재순환을 사용한 고분자 전해질 연료전지의 가습특성 해석)

  • Byun, Su-Young;Kim, Beom-Jun;Kim, Min-Soo
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.35 no.4
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    • pp.337-344
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    • 2011
  • The humidification of reactant gases is crucial for efficiently operating PEM (polymer electrolyte membrane) fuel cell systems and for improving the durability of these systems. The recycle of the energy and water vapor of exhaust gas improves the system performance especially in the case of automotive application. The available humidification methods are steam injection, nozzle spray, humidification by enthalpy wheel, membrane humidifier, etc. However, these methods do not satisfy certain requirements such as compact design, efficient operation and control. In this study, a hybrid humidification system consisting of a membrane humidifier and exhaust-air recirculation units was developed and the humidification performance of this hybrid humidifier was analyzed. Finally, a new practical method for optimal design of PEM-fuel-cell humidification system is proposed.

Moisture Permeation Characteristics of Hollow Fiber Membrane Tube for Humidification According to Input Conditions of Wet Steam (습증기 투입 조건에 따른 가습용 중공사막 튜브 수분 투과 특성)

  • CHAE, JONGMIN;YU, SANGSEOK
    • Transactions of the Korean hydrogen and new energy society
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    • v.29 no.6
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    • pp.620-626
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    • 2018
  • Recently, fuel cell field is receiving much attention as an environmentally friendly energy in the world. Among the various types of fuel cells, in the case of PEMFC, ions move through the membrane in the middle of the unit cell. Therefore, proper moisture is required inside the PEMFC. In the case of membrane type humidifier, flat membrane or hollow fiber membrane is mainly used. Since various parameters can change the performance, the performance investigation has to be carried out with parameters. In this study, water transport of hollow fiber membrane was investigated in terms of principle operating conditions such as temperature and flow rate.

Emission Characteristics of Volatile Organic Compounds by Humidifier with Using Hinoki Cypress Extracts (편백잎추출수의 실내 가습시 휘발성유기화합물 방출 특성)

  • Lee, Min;Park, Sang-Bum;Lee, Sang-Min;Lee, Hee-Young;Kil, Duck-Han
    • Journal of the Korean Wood Science and Technology
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    • v.42 no.6
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    • pp.747-757
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    • 2014
  • Since the air contamination by air pollutants from indoor construction materials and daily supplies has been increased in recent decades, the public interest of using environmentally friendly products and improving indoor air quality also attracted much attention. As known as effects of phytoncide, it has been used in construction materials and daily supplies with various method. In this study, hinoki cypress (Chamaecyparis obtusa) was used because of its high contents of phytoncide. The leaves of hinoki cypress (C. obtusa), which generated by pruning, were extracted by steam distillation, and then used as humidification water source. Volatile organic compound (VOC) from C. obtusa were characterized by GC-MS (Gas chromatograph-Mass spectrophotometry) in order to evaluate effects and risks of using C. obtusa extracts. Total 86 types and 116 types of VOC were detected from distilled water (DI water) and C. obtusa extracts, respectively. Aromatic compounds (DI water: 13 types, 53%; C. obtusa extracts: 13 types, 38%) and terpenoids (DI water: 16 types, 23%; C. obtusa extracts: 23 types, 33%) were detected more diverse types and higher amount than other compound categories. No additional aromatic compounds were found from C. obtusa extracts, so C. obtusa extracts did not affect on aromatic compounds emission. However, in terpenoids, total amount of emission from C. obtusa extracts increased to 33% from 23% (DI water) and 7 more types of compounds were found from C. obtusa extracts. Especially, from C. obtusa extracts, terpinen-4-ol was emitted 71 times higher than DI water. During the humidification with C. obtusa extracts, emitted terpenoid compounds were well known for higher anti-bacterial, anti-insect, and anti-septic functions, but also these had anti-hypertensive and anti-cancer activities. Therefore, terpenoids from C. obtusa extracts can help to improve public health by using humidifier.

Mean Size of Droplets Ejected from Humidifier and Distributions of Relative Humidity As Affected by Different Humidifying Methods in Graft-taking Enhancement System (가습 방식에 따른 가습입자의 평균 입경 및 활착촉진 시스템 내의 상대습도 분포)

  • 박현수;최유화;김용현
    • Journal of Bio-Environment Control
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    • v.12 no.1
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    • pp.12-16
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    • 2003
  • The effect of humidifying methods on the mean size of droplets ejected from humidifier and distributions of relative humidity in a graft-taking enhancement system (GTES) was investigated. The mean sizes of droplets ejected from an ultrasonic humidifier and a steam humidifier with electrodes were 7.58$\pm$0.14 and 9.01$\pm$0.06 $\mu$m, respectively. Assuming that the particles ejected from humidifiers were mutually combined with distance, the mean diameter of droplets became larger as the distance apart from the outlet of humidifiers increased. When the relative humidity in GRS was controlled at 90% using the ultrasonic humidifiers, the average relative humidity at the height of 0.4, 1.1 and 1.8 m were 92.1$\pm$5.3, 90.9$\pm$5.6, and 89.7$\pm$6.8%, respectively. However, the average relative humidity using the steam humidifier with electrodes showed 93.4 $\pm$5.4, 90.7$\pm$5.9, and 89.3$\pm$7.0%, respectively. Therefore, it was concluded that humidification by ultrasonic humidifier would be appropriate for the uniform distribution of relative humidity in GTES.