• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.244-247
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• 1999

The(Sr$\sub$0.85/Ca$\sub$0.15/) TiO$_3$(SCT) thin films are deposited on Pt-coated electrode(Pt/TiN/SiO$_2$/Si) using RF sputtering method. The composition of SCT thin films deposited on Si substrate at room temperature is close to stoichiometry(1.102 in A/B ratio). Also, SCT thin films deposited on Pt-coated electrodes have the cubic perovskite structure and polycrystalline state. The maximum dielectric constant of SCT thin films is obtained by annealing at 600[$^{\circ}C$].The dielectric constant changes almost linearly in temperature ranges of -80~+90[$^{\circ}C$].

• Proceedings of the Korean Magnestics Society Conference
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• 2007.05a
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• pp.77.1-77.1
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• 2007

• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 2010.04a
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• pp.204-204
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• 2010

• Proceedings of the Materials Research Society of Korea Conference
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• 1998.08a
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• pp.130.3-130
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• 1998

• Proceedings of the Materials Research Society of Korea Conference
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• 1998.08a
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• pp.47.3-47
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• 1998

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.38 no.7
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• pp.473-478
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• 2001

Ferroelectric P $b_{0.99}$［(Z $r_{0}$ 6S $n_{0.4}$)/0.9/ $Ti_{0.1}$］0.98/N $b_{0.02}$ $O_3$(PNZST) thin films were deposited by a RF magnetron sputtering on L $a_{0.5}$S $r_{0.5}$Co $O_3$(LSCO)/Pt/Ti/ $SiO_2$/Si substrate using a PNZST target with excess PbO of 10 mole%. The crystallinity and electrical properties of the thin films annealed at various temperature and time were investigated. The thin films deposited at the substrate temperature of 500 $^{\circ}C$ and the power of 80 W were crystallized to a perovskite phase after rapid thermal annealing(RTA). The thin films annealed at 650 $^{\circ}C$ for 10 seconds in air exhibited the good crystal structures. The remanent polarization and coercive field of the PNZST capacitor were about 20 $\mu$C/$\textrm{cm}^2$ and 50 kV/cm, respectively. The reduction of the polarization after 2.2$\times$10$^{9}$ switching cycles was less than 10 %..10 %......

• Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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• 2003.10a
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• pp.120-122
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• 2003

BaZrO$_3$and SrTiO$_3$(STO) thin films were Pulsed laser deposited on biaxially textured Ni and Ni-W alloy substrates to be used as single buffer layer for coated conductor. The texture of the films were analysed using the GADDS (general area detector diffraction system). Both films deposited on the metal tape were strongly (001) oriented, and in-plane textured (Δø (BZO) =9$^{\circ}$, Δø (STO) = 10$^{\circ}$).

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.6
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• pp.501-506
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• 2019

To overcome the limitations of the conventional Ni anode-supported SOFCs, various types of ceramic anodes have been studied. However, these ceramic anodes are difficult to commercialize because of their low cell performances and difficulty in manufacturing anode-support typed SOFCs. Therefore, in this study, to use these ceramic anodes and take advantage of anode-supported SOFC, which can minimize ohmic loss from the thin electrolyte, we fabricated cathode support-typed SOFC. The cathode-support of LSCF-YSZ was prepared by the acid treatment of conventional Ni-YSZ (Yttria-stabilized Zirconia) anode-support, followed by the infiltration of LSCF to YSZ scaffold. The composite of $La(Sr)Ti(Ni)O_3$ and $Ce(Mn,Fe)O_2$ was used as the ceramic anode. The fabricated cathode-supported button cell showed a relatively low power density of $0.207Wcm^{-2}$ at $850^{\circ}C$; however, it is expected to show better performance through the optimization of the infiltration rate and thickness of LSCF-YSZ cathode-support layer.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1400-1401
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• 2006

In this study, in order to develop low temperature sintering piezoelectric ceramics for multilayer piezoelectric actuator, $PbSr(Mn_{1/3}Nb_{2/3})O_3-(Mg_{1/3}Nb_{2/3})O_3-(ZrTi)O_3$ ceramics were fabricated using $Na_{2}CO_{3}-Li_{2}CO_{3}$ as sintering aids and their piezoelectric and dielectric characteristics were investigated according to the sintering tempo rature. At the sintering temperature of $900^{\circ}C$, the density, electrom echanical coupling factor(kp), mechanical quality factor(Qm) and dielectric constant(${\varepsilon}r$) of specimen showed the optimum value of $7.730[g/cm^2]$, 0.552, 1134, 1492 and 330[pC/N], respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.12-12
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• 2008

Ruthenium is one of the noble metals having good thermal and chemical stability, low resistivity, and relatively high work function(4.71eV). Because of these good physical, chemical, and electrical properties, Ru thin films have been extensively studied for various applications in semiconductor devices such as gate electrode for FET, capacitor electrodes for dynamic random access memories(DRAMs) with high-k dielectrics such as $Ta_2O_5$ and (Ba,Sr)$TiO_3$, and capacitor electrode for ferroelectric random access memories(FRAMs) with Pb(Zr,Ti)$O_3$. Additionally, Ru thin films have been studied for copper(Cu) seed layers for Cu electrochemical plating(ECP) in metallization process because of its good adhesion to and immiscibility with Cu. We investigated Ru thin films by thermal ALD with various deposition parameters such as deposition temperature, oxygen flow rate, and source pulse time. Ru thin films were grown by ALD(Lucida D100, NCD Co.) using RuDi as precursor and $O_2$ gas as a reactant at 200~$350^{\circ}C$.