• Tribology and Lubricants
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• 제36권4호
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• pp.215-231
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• 2020

The paper presents extensive survey and review of experimental and analytical researches on fluid film bearings and squeeze film dampers (SFDs) for turbomachinery available in open literature (major archival international journals) published recently (2018 and 2019 only). Over 60 published research works are reviewed based on the research topics and objectives, the types of bearings, size of bearings, and main design parameters with a brief summary of experiments and/or predictions in each work. Some important findings and general observations about the experimental and/or predictive data are also presented. There are several major trends observed throughout the survey. A large portion of the papers focuses on bearing surface textures and effect of operating and assembly conditions on static and/or dynamic forced performances, as well as bearing surface roughness and wear patterns. Researches on geometry of orifices and recesses in hydrostatic (or hybrid) bearings, as well as bearing system stability predictions using thermohydrodynamic analysis and computational fluid dynamics (CFD), are considered as significant topics. Studies on SFDs mainly focus on experimental identification of force coefficients for various SFD geometries and sealing conditions. Reliable experiments of fluid film bearings and SFDs along with the development of experimentally benchmarked predictive tools enable reinforcement of the path for reliable implementations of the bearing components into high performance rotating machinery operating at extreme and harsh conditions. The extensive list of sources of recent experiments in the available open literature is a welcome addition to the analytical community to gauge the accuracy of predictive tools.

• 대한기계학회논문집
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• 제6권3호
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• pp.289-299
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• 1982

동적운동 기구의 연결부분에 간극이 존재함으로 인해 발생하는 충격현상을 평면운동기구를 모델 로 하여 운동 역학적으로 해석하였다. 비정상 상태의 Reynolds 방정식을 적용하여 과도상태 및 정상 상태에 있어서 동하중과 유막 두께와의 관계를 압착 유막효과(squeeze film effect)에 중점을 두어 조사하였으며 탄성 변형을 고려하여 유도한 유막두께식과 Reynolds 방정식의 수치적분으로 는 무차원식으로 변형하여 Grubin의 간략해법을 이용하였다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2002년도 추계학술대회논문집
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• pp.381-387
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• 2002

In this work, the dynamic characteristics of an oil-lubricated, short SFD with a central feeding groove are derived based on a theoretical analysis considering the effect of a groove. The validity of the analysis is investigated experimentally using an Active Magnetic Bearing (AMB) system as an exciter. For the theoretical solution, the fluid film forces of a grooved SFD are analytically derived so that the dynamic coefficients of a SFD are expressed in terms of its design parameters. For the experimental validation of the analysis, a test rig using AMB as an exciter is proposed to identify the dynamic characteristics of a short SFD with a central groove. As an exciter, the AMB represents a mechatronic device to levitate and position the test journal without any mechanical contact, to generate relative motions of the journal inside the tested SFD and to measure the generated displacements during experiments with fairly high accuracy. Using this test rig, experiments are extensively conducted with different clearance, which is one of the most important design parameters, in order to investigate its effect on the dynamic characteristics and the performance of SFDs. Damping and inertia coefficients of the SFD that are experimentally identified are compared with the analytical results to demonstrate the effectiveness of the analysis. It is also shown that AMB is an ideal device for tests of SFDs.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.68-68
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• 2011

As feature size is smaller, new technology are needed in semiconductor factory such as gap-fill technology for sub 100nm, development of ALD equipment for Cu barrier/seed, oxide trench etcher technology for 25 nm and beyond, development of high throughput Cu CMP equipment for 30nm and development of poly etcher for 25 nm and so on. We are focus on gap-fill technology for sub-30nm. There are many problems, which are leaning, over-hang, void, micro-pore, delaminate, thickness limitation, squeeze-in, squeeze-out and thinning phenomenon in sub-30 nm gap fill. New gap-fill processes, which are viscous oxide-SOD (spin on dielectric), O3-TEOS, NF3 Based HDP and Flowable oxide have been attempting to overcome these problems. Some groups investigated SOD process. Because gap-fill performance of SOD is best and process parameter is simple. Nevertheless these advantages, SOD processes have some problems. First, material cost is high. Second, density of SOD is too low. Therefore annealing and curing process certainly necessary to get hard density film. On the other hand, film density by Flowable oxide process is higher than film density by SOD process. Therefore, we are focus on Flowable oxide. In this work, dielectric film were deposited by PECVD with TSA(Trisilylamine - N(SiH3)3) and NH3. To get flow-ability, the effect of plasma treatment was investigated as function of O2 plasma power. QMS (quadruple mass spectrometry) and FTIR was used to analysis mechanism. Gap-filling performance and flow ability was confirmed by various patterns.

• Journal of international Conference on Electrical Machines and Systems
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• 제2권4호
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• pp.436-440
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• 2013

An haptic tactile interface (HTI) is presented with its modeling. Its design is dedicated to perform friction coefficient measurement to characterize reachable feelings with that kind of interface. Friction measurements are presented and discussed.

• Tribology and Lubricants
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• 제24권5호
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• pp.241-249
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• 2008

This paper describes the tribological effects on the nonlinear behavior of a spur gear pair with one-way clutch according to the direct contact elastic deformation model over a wide range of speeds, considering the hydrodynamic effects. The effects of various lubrication parameters, such as viscosity, film width, and friction, on the nonlinear dynamic behavior were analyzed. Forces due to the entraining velocity and the hydrodynamic friction were about two orders smaller than normal forces over the whole speed range. While the viscosity has a strong effect on the behavior of gear pair systems, friction has very little effect on torsional behavior. The inclusion of the hydrodynamic effect facilitates nonlinearity by increasing the overlap and damping, as well as decreasing elastic deformation and tooth reaction forces.

• Tribology and Lubricants
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• 제24권6호
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• pp.326-331
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• 2008

The contact surfaces between mold and target should be in parallel for a proper imprinting process. However, large size of contacting area makes it difficult for both mating surfaces (mold and target planes) to be in all uniform contact with the expected precision level in terms of thickness and position. This is caused by the waviness of mold and target although it is very small relative to the area scale. The gripping force for both mold and target by the vacuum chuck is other major effect to interrupt the uniform contact, which must be avoided in imprinting mechanism. In this study, the cause of non-conformal contact mechanism between mold and target is investigated with the consideration of deformation due to the vacuum gripping for the size $470{\times}370\;mm^2$ LCD panel.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 춘계학술대회
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• pp.269-272
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• 2006

Surface contacts between mold and target should be in parallel for the imprinting mechanism. However, the size of contacting area makes it difficult for both mating surfaces to be in all contact because of precision level of the imprinting machine and the waviness of mold and target. The gripping force for both mold and target with the vacuum chuck is also major effect to interrupt the full contact, which must be avoided in imprinting mechanism. In this study, the preliminary study for the causes of non-uniformity of contacting surfaces such as mold and target is performed with $470{\times}370mm^2$ LCD panel size.

• Tribology and Lubricants
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• 제13권1호
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• pp.70-75
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• 1997

The lubrication characteristics of high-speed ball bearings at oil-starvation have been investigated empirically using the bearings employed in small industrial gas turbine engines. For the close structural simulation, experiments carried our with bearing mounting supports of real engines, such as bearing housings and oil nozzle assemblies with squeeze film dampers. Thus the results of tests can be applied to the design and the development of gas turbine engines. Testing was done by simulating the oil-starvation conditions in engines, such as stopping the oil-supply to the bearing during normal operating, starting without oil-supply at atmospheric temperature, and accelerating with oil-supply at atmospheric temperature. From this study, the relative comparison of the frictional resistance and the resistance due to the bearing cavity oil was demonstrated visually, and the resistance due to the bearing cavity oil was dominant in the resistance of bearing at high speed.

• Tribology and Lubricants
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• 제2권2호
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• pp.12-19
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• 1986

냉각성, 난연성, 그리고 경제성의 면에서 우수한 윤활특성을 갖고 있는 이멀션윤활제를 사용하여 로울러와 프레이트간의 선접촉 및 광간섭계의 실험장치를 통하여 탄성유체윤활 영역에서의 윤활기구 및 분산립자의 거동기구를 명확히 하여 다음과 같은 결론을 얻었다. 1. 스퀴즈 유막내의 유동은 윤활간극이 비교적 넓은 경우와 좁은 경우로 대별하여 전자의 경우에는, 입자분포 및 속도분포의 영향이 크게 나타나며, 후자의 경우는 이멀션입자가 간극내에 정지하여 유막두께의 감소와 더불어 변형되어 간다. 2. 스퀴즈 유막내의 O/W, W/O 각 이멀션의 유동은 간극이 클 경우, 입경에 의한 속도차가 역으로 나타나고, 작은 경우에는 잔류액적의 분포가 서로 다르며 그밖에 O/W 형은 W/O 형에 비하여 분산입자가 쉽게 변형하는 것을 알 수 있다. 3. EHL영역입구부에서는 입자의 유동속도가 극히 적은 정체영역이 존재하며, 그 부근에서의 입자의 거동은 입경에 따라서 다르다. 4. 2색광에 의한 광간섭선의 관찰에 의하여 탄성유체윤활 영역내를 통과하는 이멀션유를 확인함과 동시에 EHL영역입구부에서의 분열거동이 관찰되었다.