• International Journal of Precision Engineering and Manufacturing
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• 제9권4호
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• pp.11-15
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• 2008

Metrology tools with the ability to measure spindle motion error on the order of a nanometer are required due to recent advances in nanotechnology. We propose a direct measurement method for the radial motion error of a precision spindle using a regular crystalline lattice and a scanning tunneling microscope (STM). A highly oriented pyrolytic graphite (HOPG) crystal combined with an STM is used as a two-dimensional reference scale. The measurement principle and the preliminary experimental results are discussed in this article. The preliminary experimental results demonstrated that the proposed method has the capability to incorporate a two-dimensional encoder to measure the spindle motion error.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 춘계학술대회 논문집
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• pp.637-642
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• 1995

For measuring the error motion of ultra-precision spindle, eliminating the geometric errors is a must. Unless it is achieved, geometric errors will be dominant in data. Here, the roundness error and alignment error between spindle and sensor are to be removed. That's because typical error range of such spindle is muchless than geometric one. A capacitive transducer of cylidricalshape was developed, which takes full advantage of the spatial-averaging effect by using large area compared tpo the geometric error. This idea was first proposed by Chapman and here it is modified for better performance with nomical gap of 50 .mu. m and with newly designed guards which encompass the respective sensor to rectify the electrical field distribution in good shape. The measurement system is made to get the orbit of Ultra-Precision Air Spindle which is supposed to have its runout under 1 .mu. m. The Calibration data of this sensor is presented and the spindle orbit from 2000rpm to 5500rpm is showed. It is quite reasonable to use this sensor in the range of 60 .mu. m with an accuracy of several tens of nm.

• Tribology and Lubricants
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• 제15권3호
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• pp.257-264
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• 1999

Recently as electronics and semi-conductor industry develop, ultra-precision machine tools that use air-spindle with externally pressurized air bearing appear in need of ultra-precision products which demand high precision property. Effects of air compressibility absorbs the vibration of shaft, this is called averaging effect, however, the higher running accuracy is demanded by degrees, the more important factor is machining errors that affect running accuracy of shaft. Actually, it would be very important in the view points of running accuracy to understand effects of machining errors on the running accuracy of the spindle system quantitatively to design and manufacture precision spindle system in the aspect that efficiency in manufacturing spindle system and performance in operation. So fu, there are some researches on the effects that machining error affect running accuracy. However, because these researches deal with one bearing of spindle system, these results aren't enough to explain how much machining errors affect running accuracy in the typical spindle system overall. In this study, we investigate the effects of the perpendicularity error of bearing and shaft on running accuracy of spindle system that consists of journal and thrust bearing theoretically, and suggest design guideline about shape tolerances.

• 한국기계가공학회지
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• 제13권1호
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• pp.78-84
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• 2014

The rotation of a spindle unit must be accurate for high-quality machining and to improve the quality of the machine tools.Therefore, the proper measurement of the rotation accuracy and ensuring a proper analysis are very important. Separate processes are necessary because spindle errors and roundness errors associated with the test balls can both factor into the measured rotation error values. We used three methods to discern test ball errors and analyzed which could be deemed as the most proper technique in a test of the rotation accuracy of the main spindle of a machine tool.

• 한국정밀공학회지
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• 제32권2호
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• pp.127-133
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• 2015

The error motion of a machine tool spindle directly affects the surface errors of machined parts. Those are usually due to the imperfectness of bearings, stiffness of spindle, assembly errors, external force or unbalance of rotors. The error motions of the spindle have been needed to be decreased to desired goal of spindle's performance. The level of error motion is needed to be estimated during the design and assembly process of the spindle. In this paper, the estimation method for the five degree of freedom (5 D.O.F) error motions for rotary units such as a spindle and rotary table are suggested. To estimate the error motions of the rotary unit, waviness of bearings and external force model were used as input data. The estimation model considers geometric relationship and force equilibrium of the five degree of the freedom motions.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.333-337
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• 1996

The spindle directly affects parts accuracy during machining, or work piece in machine tools. In this paper a comprehensive study is performed combined mr performance of machine tool spindle. The developed methology has been practically applied to a spindle of machine tools.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.473-474
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• 2008

• 한국공작기계학회논문집
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• 제16권2호
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• pp.84-91
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• 2007

The radial error motion of a machine tool cutter/spindle system is critical to the dimensional accuracy of the parts to be machined. This paper presents an investigation into spindle run-out effects on cutting mark and surface roughness. We experimented the effects of spindle run-out on surface roughness in flat-end milling by cutting AL 7075 workpiece in various cutting conditions. In order to analyze the effects of run-out on the surface roughness, the spindle's radial error motions was measured by mounting a sphere target onto the spindle as a reference. From the experimental results, it was found that spindle un-out makes a directive effects on surface roughness in flat-end milling.

• 한국기계가공학회지
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• 제11권3호
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• pp.174-181
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• 2012

The spindle unit is a core part in high precision machine tool. Rotation accuracy of spindle unit is needed for high dignity cutting and improving the performance of machine tool. However, there are many factors to effect to rotational error motion(rotation accuracy). This study studied how rotational error motion is variation when unbalance amount is variation. Rotation accuracy of initial spindle unit is decided depending on parts and assembly such as bearing. When it is rotation, vibration and noise is appeared depending on volume of unbalance amount, so it works to decrease unbalance amount. The purpose of the study tests that unbalance amount how much effects to initial rotation condition. The result of the study shows that accuracy of parts and assembly is highly necessary to reach high rotation accuracy and unbalance amount hardly effects to initial rotation accuracy. However, it shorten spindle's life because vibration and noise is increasing by increasing unbalance amount and we can expect situation that rotation accuracy is falling by long time operation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1555-1558
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• 2005

In this study, we measured cylindricity and Runout of the air bearing spindle, and tested PCB(printed circuit boards) drilling with 0.4mm micro drill at 90,000rpm and 110,000rpm in order to obtain drilling hole error. Results are as follows; The air bearing spindle's Runout was not so high within $10\mu{m}$ from 20,000rpm to 80,000rpm but it grew after 80,000rpm. Drilling hole size error was 9% at 80,000rpm and 12% at 110,000rpm because of spindle's Run out. Drilled hole shape falsified more 110,000rpm than 90,000rpm.