• Journal of Welding and Joining
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• 제23권6호
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• pp.77-86
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• 2005

Low temperature bonding of the silicon and glass using the Spin-on Glass (SOG) has been conducted experimentally to figure out the effects of the SOG solution composition and process variables on bond strength using the Design of Experiment method. In order to achieve the high quality bond interface without rack, sufficient reaction time of the optimal SOG solution composition is needed along with proper pressure and annealing temperature. The shear strength under the optimal SOG solution composition and process condition was higher than that of conventional anodic bonding and similar to that of wafer direct bonding.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.605-606
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• 2013

• Journal of Magnetics
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• 제3권4호
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• pp.105-111
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• 1998

The low energy excitations of spin waves (SWR) in thin films can be used for determination of the surface anisotropy constant and the nonhomogeneities of magnetization in the close-to-surface layer. The dispersion relation in SWR is sensitive on the geometry of experiment. We report on temperature dependence of surface magnetic anisotropy energy constant in magnetic semiconductor thin films of$ CdCr_{2-2x}In_{2x}Se_4$ at spin glass state. Samples were deposited by rf sputtering technique on Corning glass substrate in controlled temperature conditions. Coexistence of the infinite ferromagnetic network (IFN) and finite spin slusters (FSC) in spin glass state (SG) is know phenomena. Some behavior typical for long range magnetic ordering is expected in samples at SG state. The spin wave resonance experiment (microwave spectrometer at X-band) with excited surface modes was applied to describe the energy state of surface spins. We determined the surface magnetic anisotropy energy constant versus temperature using the surface inhomogeneities model of magnetic thin films. It was found that two components contribute to the surface magnetic anisotropy energy. One originates from the exchange interaction term due to the lack of translation symmetry for surface spin as well as from the originates from the exchange interaction term due to the lack of translation symmetry for surface spin as well as from the stray field of the surface roughness. The second one comes from the demagnetizing field of close-to surface layer with grad M. Both term linearly decrease when temperature is increased from 5 to 123 K, but dominant contribution is from the first component.

• 전기전자학회논문지
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• 제27권1호
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• pp.78-84
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• 2023

본 논문에서는 컬러 용액을 사용하여 스핀 코팅 방식으로 Building Integrated Photovoltaic(BIPV) 시스템용 전면 컬러 유리를 구현하였다. 컬러 유리 구현을 위해 진주광택 안료와 다양한 용액를 사용하여 컬러 용액에 적합한 용액을 조사하였다. 조사한 용액 중 자외선 광 경화제인 NOA series의 경우 다른 용액보다 우수한 코팅성과 컬러 재현성을 가진 컬러 유리를 구현할 수 있었다. NOA 65 기반의 컬러 용액으로 스핀 코팅하여 구현한 컬러 유리는 가시광선 및 근적외선 파장 대역에서 최대 86%의 높은 투과율을 보였으며 시간에 따른 컬러 유리의 광학적 특성의 변화가 미미하여 BIPV용 컬러 유리 구현을 위한 컬러 용액으로 적합하였다. 스핀 코팅 방식을 활용한 용액 공정 방식은 기존의 물리적 증착 방식이나 나노 입자를 활용한 컬러 유리 제작 공정보다 쉽고 빠르게 컬러 유리를 제작할 수 있어 BIPV용 전면 컬러 유리 제작 공정이 용이해질 것으로 기대된다.

• 한국진공학회지
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• 제9권1호
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• pp.69-75
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• 2000

We have investigated the feasibility of spin on glass (SOG) film from polysilazane-type resin as a premetal dielectric (PMD) layer of the next-generation ultra-large scale integrated (ULSI) devices. A commercial polysilazane resin and a polysilazane-type resin with oxidizing agent were spin-coated and cured to form SOG films. In order to study the effect of oxidizing agent and annealing, the SOG films were characterized as cured and after annealing at $400^{\circ}C$ to $900^{\circ}C$. the density and the resistance against wet chemical of the SOG films were improved by the addition of oxidizing agent, because oxidizing agent enhanced the conversion from polysilazane polymer to $SiO_2$. The hole profile issue associated with insufficient curing of polysilazane in narrow gaps was also resolved by oxidizing agent, while the gapfill capability of SOG was not deteriorated by oxidizing agent.

• Bulletin of the Korean Chemical Society
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• 제23권12호
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• pp.1724-1728
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• 2002

The adsorption of proteins on the surface of glass slides is essential for the construction of protein chips. Here, we report that a Histidine (His)-tagged protein protein has been efficiently adsorbed on glass coated with nickel. A variety of nickel chloride-coated plates were prepared by the spin-coating method and adsorbed to the His-tagged protein. When the protein was adsorbed onto the surface of a variety of nickel chloride-coated glass slides, the efficiency of protein adsorption was dependent upon the coating conditions such as nickel chloride concentration, the spin speed and the drying temperature. The slides appropriate for protein adsorption were obtained when the slides were coated with 11%(w/w) of $NiCl_2$ at the spin speed of 4000 rpm for 20 sec and then dried at higher than 40°C. The physical properties of their nickel chloride thin layer were characterized by scanning electron microscopy. x-ray diffraction and atomic force microscopy, finding that the nickel chloride particles were around 10 nm in diameter and uniformly crystallized at 101 faces. These results show that nickel chloride-coated slides prepared by the spin-coating method are utilizable for the construction of Histagged protein chips.

• 한국표면공학회지
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• 제34권3호
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• pp.258-263
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• 2001

Siloxane thin films were fabricated on a silicon wafer by spin-coating using a siloxane solution made by the sol-gel process. Fluorine was doped using$ CF_4$ plasma treatment. The film was then annealed in-situ state in the nitrogen atmosphere. In order to examine the influence of annealing and fluorine doping on the siloxane thin film, thermogravimetric-differential thermal analysis (TG-DTA), Fourier transform-infrared spectroscopy (FT-IR) and X-ray photoelectron spectroscopy (XPS) were used and the dielectric constant was determined by the high-frequency capacitance-voltage method. Stable siloxane films could be obtained by in-situ annealing in a nitrogen atmosphere after $CF_4$ plasma treatment, and the dielectric value of the film was $\varepsilon$ 2.5.

• 한국표면공학회지
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• 제40권2호
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• pp.98-102
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• 2007

[ $NiCl_2$ ] and poly-L-lysine coated protein chip plates have been fabricated using a spin coating system. Water has been used as solvent and scratching effects on glass slides and ITO have been investigated. We also observed the surface properties of $NiCl_2$ and poly-L-lysine coated slides by using PSA(Particle size analyzer) and AFM(Atomic force microscope). The AFM results imply that the surface patterns created in the spin coating system determine the protein adsorption. Adsorption of histidine-tagged KRS proteins immobilized on glass slides and ITO was analyzed using a BAS image system. The results suggest that the scratching effect was increased ability of protein adsorption.

• 전기학회논문지
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• 제59권1호
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• pp.123-126
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• 2010

$Cu_2O$ nanoparticles-based films are fabricated by spin-coating on glass substrates and their optoelectronic characteristics are investigated in this study. The $Cu_2O$ films are nearly all-transparent as high as 98% in a wavelength range from 400 nm to 900 nm and three exciton peaks associated with the sublevels in the conduction band are observed at the wavelengths shorter than 400 nm in the absorption spectrum. Under the illumination of the 325 nm wavelength light, the photocurrent efficiency of the $Cu_2O$ film is $1.8\times10^5 {\mu}A/W$ at a voltage of 2.5 V in air.

• 한국결정성장학회지
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• 제12권1호
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• pp.7-10
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• 2002

$TiO_2$ 박막을 금속유기화합물인 Titanium-naphthenate의 코팅-열분해법으로 제조하였다. 출발물질은 Ti-naphthenate를 toluene에 희석한 용액을 사용하였으며 기판은 slide glass를 사용하였다 Titanium-naphthenate 용액을 spin-coating법으로 기판에 코팅하고 $450^{\circ}C$에서 열터리하여 $TiO_2$ 박막을 제조하였다 제조한 박막의 특성을 UV/Vis, XRD 및 SEM 등으로 박막의 투과율, 굴절률, 결정상 및 표면 형상을 분석하였다. Slide glass 위에 제조한 TiO$_2$ 박막은 투과율은 70~90%이며 420nm에서의 굴절율은 2.7이었다. $TiO_2$박막은 anatase상을 나타내었고 실타래 형상의 주름을 가진 표면을 나타내었다