• Title/Summary/Keyword: Spin on-Glass

Search Result 208, Processing Time 0.03 seconds

Low Temperature Bonding Process of Silicon and Glass using Spin-on Glass (Spin-on Glass를 이용한 실리콘과 유리의 저온 접합 공정)

  • Lee Jae-Hak;Yoo Choong-Don
    • Journal of Welding and Joining
    • /
    • v.23 no.6
    • /
    • pp.77-86
    • /
    • 2005
  • Low temperature bonding of the silicon and glass using the Spin-on Glass (SOG) has been conducted experimentally to figure out the effects of the SOG solution composition and process variables on bond strength using the Design of Experiment method. In order to achieve the high quality bond interface without rack, sufficient reaction time of the optimal SOG solution composition is needed along with proper pressure and annealing temperature. The shear strength under the optimal SOG solution composition and process condition was higher than that of conventional anodic bonding and similar to that of wafer direct bonding.

SWR as Tool for Determination of the Surface Magnetic Anisotropy Energy Constant

  • Maksymowicz, L.J.;Lubecka, M.;Jablonski, R.
    • Journal of Magnetics
    • /
    • v.3 no.4
    • /
    • pp.105-111
    • /
    • 1998
  • The low energy excitations of spin waves (SWR) in thin films can be used for determination of the surface anisotropy constant and the nonhomogeneities of magnetization in the close-to-surface layer. The dispersion relation in SWR is sensitive on the geometry of experiment. We report on temperature dependence of surface magnetic anisotropy energy constant in magnetic semiconductor thin films of$ CdCr_{2-2x}In_{2x}Se_4$ at spin glass state. Samples were deposited by rf sputtering technique on Corning glass substrate in controlled temperature conditions. Coexistence of the infinite ferromagnetic network (IFN) and finite spin slusters (FSC) in spin glass state (SG) is know phenomena. Some behavior typical for long range magnetic ordering is expected in samples at SG state. The spin wave resonance experiment (microwave spectrometer at X-band) with excited surface modes was applied to describe the energy state of surface spins. We determined the surface magnetic anisotropy energy constant versus temperature using the surface inhomogeneities model of magnetic thin films. It was found that two components contribute to the surface magnetic anisotropy energy. One originates from the exchange interaction term due to the lack of translation symmetry for surface spin as well as from the originates from the exchange interaction term due to the lack of translation symmetry for surface spin as well as from the stray field of the surface roughness. The second one comes from the demagnetizing field of close-to surface layer with grad M. Both term linearly decrease when temperature is increased from 5 to 123 K, but dominant contribution is from the first component.

  • PDF

Research on color coating technology of solution process method using spin coating (스핀 코팅을 이용한 용액 공정 방식의 컬러 코팅 기술 연구)

  • Seongmin Lim;Hyeon-Sik Ahn;Yoonseuk Choi
    • Journal of IKEEE
    • /
    • v.27 no.1
    • /
    • pp.78-84
    • /
    • 2023
  • In this paper, front color glass for Building Integrated Photovoltaic (BIPV) system was implemented by spin coating method using color solution. Solutions suitable for color solutions were investigated using pearlescent pigments and various solutions to implement color glass. One of investigated solutions, NOA 63 and NOA 65, which are ultraviolet light curing agents, were able to implement color glass with superior coating properties and color reproducibility than other solutions. Color glass realized by spin coating with a NOA 65 based color solution showed high transmittance of 86% in the visible and near-infrared wavelength bands, and the change in optical properties of color glass over time was insignificant, making it a suitable material for realizing color glass for BIPV Suitable as a color solution. The solution process method using the spin coating method is expected to facilitate the manufacturing process of front color glass for BIPV as it can produce color glass more easily and quickly than the existing physical deposition method or color glass manufacturing process using nanoparticles.

A study on the spin on glass (SOG) from polysilazane resin for the premetal dielectric (PMD) layer of sub-quarter micron devices (초고집적소자의 층간절연막용 polysilazane계 spin on glass (SOG)에 관한 연구)

  • 나사균;정석철;이재관;김진우;홍정의;이원준
    • Journal of the Korean Vacuum Society
    • /
    • v.9 no.1
    • /
    • pp.69-75
    • /
    • 2000
  • We have investigated the feasibility of spin on glass (SOG) film from polysilazane-type resin as a premetal dielectric (PMD) layer of the next-generation ultra-large scale integrated (ULSI) devices. A commercial polysilazane resin and a polysilazane-type resin with oxidizing agent were spin-coated and cured to form SOG films. In order to study the effect of oxidizing agent and annealing, the SOG films were characterized as cured and after annealing at $400^{\circ}C$ to $900^{\circ}C$. the density and the resistance against wet chemical of the SOG films were improved by the addition of oxidizing agent, because oxidizing agent enhanced the conversion from polysilazane polymer to $SiO_2$. The hole profile issue associated with insufficient curing of polysilazane in narrow gaps was also resolved by oxidizing agent, while the gapfill capability of SOG was not deteriorated by oxidizing agent.

  • PDF

Protein Adsorption on the Nickel-coated Glass Slide for Protein Chips

  • Hyun, June-Won;Kim, Shi-Yong;Lee, Sang-Hee;Park, Heon-Yong;Pyee, Jae-Ho;Kim, Sung-Hoon
    • Bulletin of the Korean Chemical Society
    • /
    • v.23 no.12
    • /
    • pp.1724-1728
    • /
    • 2002
  • The adsorption of proteins on the surface of glass slides is essential for the construction of protein chips. Here, we report that a Histidine (His)-tagged protein protein has been efficiently adsorbed on glass coated with nickel. A variety of nickel chloride-coated plates were prepared by the spin-coating method and adsorbed to the His-tagged protein. When the protein was adsorbed onto the surface of a variety of nickel chloride-coated glass slides, the efficiency of protein adsorption was dependent upon the coating conditions such as nickel chloride concentration, the spin speed and the drying temperature. The slides appropriate for protein adsorption were obtained when the slides were coated with 11%(w/w) of $NiCl_2$ at the spin speed of 4000 rpm for 20 sec and then dried at higher than 40°C. The physical properties of their nickel chloride thin layer were characterized by scanning electron microscopy. x-ray diffraction and atomic force microscopy, finding that the nickel chloride particles were around 10 nm in diameter and uniformly crystallized at 101 faces. These results show that nickel chloride-coated slides prepared by the spin-coating method are utilizable for the construction of Histagged protein chips.

Properties of Spin-On-Glass Siloxane Thin Films Fluorine-doped by CF$_4$ Plasma (CF$_4$ 플라즈마 처리로 불소를 첨가한 실록산 Spin-On-Glass 박막의 특성)

  • 김현중;김기호
    • Journal of the Korean institute of surface engineering
    • /
    • v.34 no.3
    • /
    • pp.258-263
    • /
    • 2001
  • Siloxane thin films were fabricated on a silicon wafer by spin-coating using a siloxane solution made by the sol-gel process. Fluorine was doped using$ CF_4$ plasma treatment. The film was then annealed in-situ state in the nitrogen atmosphere. In order to examine the influence of annealing and fluorine doping on the siloxane thin film, thermogravimetric-differential thermal analysis (TG-DTA), Fourier transform-infrared spectroscopy (FT-IR) and X-ray photoelectron spectroscopy (XPS) were used and the dielectric constant was determined by the high-frequency capacitance-voltage method. Stable siloxane films could be obtained by in-situ annealing in a nitrogen atmosphere after $CF_4$ plasma treatment, and the dielectric value of the film was $\varepsilon$ 2.5.

  • PDF

Effects of Scratching on the Surface of Protein Chip Plates (단백질 칩 기판의 표면 스크래칭 효과)

  • Hyun, June-Won;Hwang, Jeong-Il
    • Journal of the Korean institute of surface engineering
    • /
    • v.40 no.2
    • /
    • pp.98-102
    • /
    • 2007
  • [ $NiCl_2$ ] and poly-L-lysine coated protein chip plates have been fabricated using a spin coating system. Water has been used as solvent and scratching effects on glass slides and ITO have been investigated. We also observed the surface properties of $NiCl_2$ and poly-L-lysine coated slides by using PSA(Particle size analyzer) and AFM(Atomic force microscope). The AFM results imply that the surface patterns created in the spin coating system determine the protein adsorption. Adsorption of histidine-tagged KRS proteins immobilized on glass slides and ITO was analyzed using a BAS image system. The results suggest that the scratching effect was increased ability of protein adsorption.

Optoelectronic Characteristics of Transparent Cu2O Films Spin-coated on Glass Substrates (스핀코팅으로 제작된 Cu2O 필름의 광전기적 특성)

  • Kwak, Ki-Yeol;Cho, Kyoung-Ah;Kim, Sang-Sig
    • The Transactions of The Korean Institute of Electrical Engineers
    • /
    • v.59 no.1
    • /
    • pp.123-126
    • /
    • 2010
  • $Cu_2O$ nanoparticles-based films are fabricated by spin-coating on glass substrates and their optoelectronic characteristics are investigated in this study. The $Cu_2O$ films are nearly all-transparent as high as 98% in a wavelength range from 400 nm to 900 nm and three exciton peaks associated with the sublevels in the conduction band are observed at the wavelengths shorter than 400 nm in the absorption spectrum. Under the illumination of the 325 nm wavelength light, the photocurrent efficiency of the $Cu_2O$ film is $1.8\times10^5 {\mu}A/W$ at a voltage of 2.5 V in air.

Preparation of $TiO_2$ thin films by coating-pyrolysis process of Ti-naphthenate (Ti-naphthenate의 코팅-열분해에 의한$TiO_2$ 박막의 제조)

  • 김진영;김승원;장우석;김현태;최상원
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.12 no.1
    • /
    • pp.7-10
    • /
    • 2002
  • $TiO_2$ thin films were prepared by coating and subsequent pyrolysis processes using Titanium-naphthenate as a raw material. $TiO_2$ thin films were made by spin-coating technique on the glass substrates, and heat treated at 45$0^{\circ}C$, The transmittance, refractive index, crystallinity and surface morphology of the $TiO_2$ thin films were measured by UV/Vis spec trophotometer, x-ray diffractometer and scanning electron microscope. $TiO_2$thin films on the slide glass showed the trans mittance of 70-90% and refractive index of 2.6 at 420 nm. The results of XRD and SEM showed that the $TiO_2$ thin films exhibited the anatase phase and the thread-like surface morphology.