• 제목/요약/키워드: Spin Coating Method

검색결과 359건 처리시간 0.023초

증발을 고려한 Wafer Spin Coating 박막 예측에 관한 수치 해석적 연구

  • 노영미;임익태;김광선
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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    • pp.20-26
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    • 2002
  • The fluid flow, mass transfer, heat transfer and film thickness variation during the spin coating process are numerically studied. The model is said to be 1-dimensional because radial variations in film thickness, concentration and temperature are ignored. The finite difference method is employed to solve the equations that are simplified using the similarity transformation. In early time film thinning is due to the radial convective outflow. However that slows during the first seconds of spinning so the film thinning due to evaporation of solvent becomes sole. The time various film thickness is analyzed according to the var ious solvent fraction in the coating liquid and in the bulk of the overlying gas and the temperature variation in the liquid film during the spin coating is estimated.

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Preparation of Metal Film by Spin Coating Method

  • Kim, Hak-Ju;Lee, Jung-Ho;Sohn, Il-Hyun;Oh, Myoung-Hwan;Lee, Kwan-Yong
    • 한국유변학회:학술대회논문집
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    • 한국유변학회 2001년도 Australian-Korean Rheology Conference 2001
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    • pp.156.5-156
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    • 2001
  • (No abstract, see full-text)

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Protein Adsorption on the Nickel-coated Glass Slide for Protein Chips

  • Hyun, June-Won;Kim, Shi-Yong;Lee, Sang-Hee;Park, Heon-Yong;Pyee, Jae-Ho;Kim, Sung-Hoon
    • Bulletin of the Korean Chemical Society
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    • 제23권12호
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    • pp.1724-1728
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    • 2002
  • The adsorption of proteins on the surface of glass slides is essential for the construction of protein chips. Here, we report that a Histidine (His)-tagged protein protein has been efficiently adsorbed on glass coated with nickel. A variety of nickel chloride-coated plates were prepared by the spin-coating method and adsorbed to the His-tagged protein. When the protein was adsorbed onto the surface of a variety of nickel chloride-coated glass slides, the efficiency of protein adsorption was dependent upon the coating conditions such as nickel chloride concentration, the spin speed and the drying temperature. The slides appropriate for protein adsorption were obtained when the slides were coated with 11%(w/w) of $NiCl_2$ at the spin speed of 4000 rpm for 20 sec and then dried at higher than 40°C. The physical properties of their nickel chloride thin layer were characterized by scanning electron microscopy. x-ray diffraction and atomic force microscopy, finding that the nickel chloride particles were around 10 nm in diameter and uniformly crystallized at 101 faces. These results show that nickel chloride-coated slides prepared by the spin-coating method are utilizable for the construction of Histagged protein chips.

Spin-coating법에 의한 $TiO_2$의 광촉매 효율 (Photocatalytic Efficiency of $TiO_2$Thin Films by Spin-coating)

  • 김범준;변동진;이중기;박달근
    • 한국재료학회지
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    • 제10권4호
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    • pp.264-269
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    • 2000
  • $TiO_2$sol(30wt%, anatase)을 이용하여 스핀코팅으로 유리기판에 $TiO_2$박막을 제조하였다. 박막의 두께는 코팅주기의 횟수가 조절하였다. 한 코팅주기는 스핀코팅, 건조, 열처리를 포함한다. 박막의 반응성은 막 위에서의 자외선강도가 0.44와 2.mW/$\textrm{cm}^2$인 조건에서 벤젠기체의 광분해 속도를 통해 조사하였다. 박막의 두께가 증가할수록 표면적으로 증가로 인해 반응성은 증가하였으며, 0.44mW/$\textrm{cm}^2$일 때 4$\mu\textrm{m}$정도 이상의 두께에서 반응성은 더 이상 증가되지 않았다. porous한 $TiO_2$박막은 비교적 넓은 유효표면적을 가지고 있으며, 그것은 비교적 높은 자외선 강도하에서 박막두께에 따라 반응속도를 증가시키는 결과를 낳았다.

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스핀 코팅법으로 제작한 다공성 CuBr 필름의 암모니아 감응특성 (NH3 sensing properties of porous CuBr films prepared by spin-coating)

  • 김상권;유병훈;윤지욱
    • 센서학회지
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    • 제30권6호
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    • pp.451-455
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    • 2021
  • Porous copper bromide (CuBr) films are highly advantageous for detecting ammonia (NH3). The fabrication of porous CuBr films requires complex high-temperature processes or multistep processes. Herein, we report the uncomplicated preparation of porous CuBr films by a spin-coating method and the films' excellent NH3 sensing properties. The porous films were prepared by spin-coating 100, 150, and 200 mM CuBr solutions, and then dried in a vacuum oven for 2 h. All the films showed a high NH3 response; in particular, the film prepared using a 100 mM CuBr solution showed an extremely high response (resistance ratio = 852) to 5 ppm NH3. The film also showed fast response and recovery times, 272 s and 10 s respectively, even at room temperature. The outstanding NH3 sensing characteristics were explained in relation to the porosity and thickness of the prepared films. The high-performance NH3 sensors used in this study can be used for both indoor air quality and environmental monitoring applications.

Efficiency enhancement of spray QD solar cells

  • Park, Dasom;Lee, Wonseok;Jang, Jinwoong;Yim, Sanggyu
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.420.1-420.1
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    • 2016
  • Colloidal quantum dot (CQD) is emerging as a promising active material for next-generation solar cell applications because of its inexpensive and solution-processable characteristics as well as unique properties such as a tunable band-gap due to the quantum-size effect and multiple exciton generation. However, the most widely used spin-coating method for the formation of the quantum dot (QD) active layers is generally hard to be adopted for high productivity and large-area process. Instead, the spray-coating technique may potentially be utilized for high-throughput production of the CQD solar cells (CQDSCs) because it can be adapted to continuous process and large-area deposition on various substrates although the cell efficiency is still lower than that of the devices fabricated with spin-coating method. In this work, we observed that the subsequent treatment of two different ligands, halide ion and butanedithiol, on the lead sulfide (PbS) QD layer significantly enhanced the cell efficiency of the spray CQDSCs. The maximum power conversion efficiency was 5.3%, comparable to that of the spin-coating CQDSCs.

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Characterization of F- and Al-codoped ZnO Transparent Conducting Thin Film prepared by Sol-Gel Spin Coating Method

  • Nam, Gil Mo;Kwon, Myoung Seok
    • 한국세라믹학회지
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    • 제53권3호
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    • pp.338-342
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    • 2016
  • ZnO thin film co-doped with F and Al was prepared on a glass substrate via simple non-alkoxide sol-gel spin coating. For a fixed F concentration, the addition of Al co-dopant was shown to reduce the resistivity mainly due to an increase in electrical carrier density compared with ZnO doped with F only, especially after the second post-heat-treatment in a reducing environment. There was no effective positive contribution to the reduction in resistivity due to the mobility enhancement by the addition of Al co-dopant. Optical transmittance of the ZnO thin film co-doped with F and Al in the visible light domain was shown to be higher than that of the ZnO thin film doped with F only.

스핀 코팅에 의한 $In_{2}O_{3}$ 박막의 가스감지특성 (Gas sensing properties of $In_{2}O_{3}$ thin film prepared by spin-coating method)

  • 정완영;임준우;이덕동;노보루 야마조에
    • 센서학회지
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    • 제7권2호
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    • pp.117-123
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    • 1998
  • 알루미나 기판위에 스핀코팅에 의해 $In_{2}O_{3}$ 박막을 형성하고 그 박막의 미세구조와 가스감지특성을 조사하였다. 코팅용액은 $In(OH)_{3}$ 수용액에 초산을 첨가하여 합성되었다. 이 용액에 바인더로써 암모니아 카르복실 셀루로오스를 섞어서 코팅용액으로 사용하였다. 이 용액을 $1{\sim}7$회 스핀코팅하고 $110^{\circ}C$에서의 건조와 $600^{\circ}C$에서의 열처리에 의해 두께 $71{\sim}210nm$$In_{2}O_{3}$ 박막을 얻을 수 있었다. 제조된 박막은 미세한 $In_{2}O_{3}$ 결정입자($23{\sim}27nm$)가 적층된 형태의 구조를 가지고 알루미나 기판의 결정입위에 균일하게 코팅되었다. 박막의 두께는 스핀코팅의 횟수에 선형적으로 증가하였다. 제조된 박막은 CO, $H_{2}$ 가스에 대해 높은 감도와 빠른 응답특성을 나타내었다.

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산화그래핀(GO)의 플라스틱(PS) 표면 코팅방법에 대한 연구 (Investigation on the polystyrene surface coating method of graphene oxide)

  • 박재범;이지훈;허증수;박단비;임정옥
    • 한국표면공학회지
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    • 제54권2호
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    • pp.77-83
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    • 2021
  • In this study, we investigated various coating methods of graphene oxide on the surface of a petri dish made of polystyrene and analyzed the physical and chemical properties of the coated surface. For coating, spinning, spraying and pressing methods were attempted. The coated surface was characterized by SEM, Raman Spectroscopy, AFM, FT-IR, UV-Vis Spectroscopy and Contact Angle measurement. By spin coating and spray coating, well distributed graphene oxide in the form of multiple islands on the plastic surface with an average size of 5 to 20㎛ are observed by SEM, and high binding energy between graphene oxide and plastic surface is measured by AFM. In case of hand press coating, graphene oxide of 10㎛ or more was observed, and low surface energy was measured. By FT-IR and Raman Spectroscopy analysis, surface coating of graphene oxide was confirmed.

Indium Sulfide and Indium Oxide Thin Films Spin-Coated from Triethylammonium Indium Thioacetate Precursor for n-Channel Thin Film Transistor

  • Dao, Tung Duy;Jeong, Hyun-Dam
    • Bulletin of the Korean Chemical Society
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    • 제35권11호
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    • pp.3299-3302
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    • 2014
  • The In2S3 thin films of tetragonal structure and In2O3 films of cubic structure were synthesized by a spin coating method from the organometallic compound precursor triethylammonium indium thioacetate ($[(Et)_3NH]^+[In(SCOCH_3)_4]^-$; TEA-InTAA). In order to determine the electron mobility of the spin-coated TEA-InTAA films, thin film transistors (TFTs) with an inverted structure using a gate dielectric of thermal oxide ($SiO_2$) was fabricated. These devices exhibited n-channel TFT characteristics with a field-effect electron mobility of $10.1cm^2V^{-1}s^{-1}$ at a curing temperature of $500^{\circ}C$, indicating that the semiconducting thin film material is applicable for use in low-cost, solution-processed printable electronics.