• Title/Summary/Keyword: Spherical aberration corrected scanning transmission electron microscope

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Atomically sculptured heart in oxide film using convergent electron beam

  • Gwangyeob Lee;Seung-Hyub Baek;Hye Jung Chang
    • Applied Microscopy
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    • v.51
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    • pp.1.1-1.2
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    • 2021
  • We demonstrate a fabrication of an atomically controlled single-crystal heart-shaped nanostructure using a convergent electron beam in a scanning transmission electron microscope. The delicately controlled e-beam enable epitaxial crystallization of perovskite oxide LaAlO3 grown out of the relative conductive interface (i.e. 2 dimensional electron gas) between amorphous LaAlO3/crystalline SrTiO3.

High Speed and Sensitive X-ray Analysis System with Automated Aberration Correction Scanning Transmission Electron Microscope

  • Inada, Hiromi;Hirayama, Yoichi;Tamura, Keiji;Terauchi, Daisuke;Namekawa, Ryoji;Shichiji, Takeharu;Sato, Takahiro;Suzuki, Yuya;Ohtsu, Yoshihiro;Watanabe, Keitaro;Konno, Mitsuru;Tanaka, Hiroyuki;Saito, Koichiro;Shimoyama, Wataru;Nakamura, Kuniyasu;Kaji, Kazutoshi;Hashimoto, Takahito
    • Applied Microscopy
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    • v.45 no.1
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    • pp.1-8
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    • 2015
  • We have developed a new HD-2700 (Hitachi High-Technologies Corp., Japan) scanning transmission electron microscope (STEM) that includes an automatic aberration correction function, and a large-solid-angle energy-dispersive X-ray spectroscopy detector that enables high-resolution and sensitive analysis. For observation with atomic resolution, using spherical-aberration-corrected STEM, in order that satisfactory performance of the device can be achieved readily, and within a short time, irrespective of the operator's skill level, a spherical-aberration-correction device with an automatic aberration-correction function was developed. This automatic aberration-correction function carries out the entire correction-related process (aberration measurement, selection and correction) automatically, with automatic selection of the aberrations that require correction, and automatic measurement of the appropriate corrections.