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http://dx.doi.org/10.9729/AM.2015.45.1.1

High Speed and Sensitive X-ray Analysis System with Automated Aberration Correction Scanning Transmission Electron Microscope  

Inada, Hiromi (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Hirayama, Yoichi (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Tamura, Keiji (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Terauchi, Daisuke (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Namekawa, Ryoji (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Shichiji, Takeharu (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Sato, Takahiro (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Suzuki, Yuya (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Ohtsu, Yoshihiro (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Watanabe, Keitaro (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Konno, Mitsuru (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Tanaka, Hiroyuki (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Saito, Koichiro (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Shimoyama, Wataru (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Nakamura, Kuniyasu (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Kaji, Kazutoshi (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Hashimoto, Takahito (Division of Science & Medical Systems Design, Science & Medical Systems Business Group, Hitachi High-Technologies Corporation)
Publication Information
Applied Microscopy / v.45, no.1, 2015 , pp. 1-8 More about this Journal
Abstract
We have developed a new HD-2700 (Hitachi High-Technologies Corp., Japan) scanning transmission electron microscope (STEM) that includes an automatic aberration correction function, and a large-solid-angle energy-dispersive X-ray spectroscopy detector that enables high-resolution and sensitive analysis. For observation with atomic resolution, using spherical-aberration-corrected STEM, in order that satisfactory performance of the device can be achieved readily, and within a short time, irrespective of the operator's skill level, a spherical-aberration-correction device with an automatic aberration-correction function was developed. This automatic aberration-correction function carries out the entire correction-related process (aberration measurement, selection and correction) automatically, with automatic selection of the aberrations that require correction, and automatic measurement of the appropriate corrections.
Keywords
Aberration correction; Scanning transmission electron microscope; X-ray analysis;
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