• 제목/요약/키워드: Spectrometer

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질량분석기형 누출검출기를 이용한 헬륨투과형 표준 누출 비교 교정 장치 개발 (Development of Comparative Calibration System for Helium Leak Standard by Using Mass Spectrometer Type Leak Detector)

  • 홍승수;임인태;김진태;신용현
    • 비파괴검사학회지
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    • 제28권2호
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    • pp.151-156
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    • 2008
  • 반도체나 디스플레이 제조 등 진공공정의 리크검출에는 질량분석기형(mass spectrometer type) 헬륨 리크검출기(leak detector)가 사용되고 있다. 이 기기를 이용해서 안정된 측정값을 얻기 위해서는 장치 내부에 내장된 투과형(permeation type) 표준리크(standard leak)를 이용해서 자주 spectrometer를 교정해야 한다. 본 연구에서 질량분석기형 리크검출기의 비교교정 장치의 개발과 교정방법에 대한 연구결과를 언급하였다. 따라서 이 기술을 이용하면 질량분석기형 리크검출기를 구비하고 있는 현장에서도 표준리크의 비교교정이 가능하게 된다.

세 가지 방식의 근적외선 분광분석기를 이용한 글루코오스 수용액의 측정 (Aqueous Glucose Solution Measurement by Three Types NIR Spectrometer)

  • 백주현;강나루;우영아;김효진
    • 약학회지
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    • 제47권6호
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    • pp.461-468
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    • 2003
  • A method is described for measuring clinically relevant levels of glucose in a pH 7.4 phosphate buffer by nearinfrared (NIR) absorption spectroscopy. Three types of NIR spectrometer, dispersive type, photo-diode array (PDA) type, and fourier transform (FT) type spectrometer were used and the performance was compared. Spectra were collected with a cuvette cell or quartz liquid fiber of 1 mm or 2 mm optical pathlength as transmittance method. Glucose absorption band appeared at second overtone, first overtone, and combination region for all systems. By use of the multivariate technigue of partial least squares (PLS) regression, glucose concentrations can be determined with a 16, 44, and 9.1 mg/d l standard error of prediction for dispersive type, photo-diode array type, and fourier transform type system, respectively. Sensitivity of spectrometer was evaluated by absorbance for the difference of 10 mg/d l glucose. Three absorption bands, second overtone, first overtone, and combination region were suited to three types systems, dispersive type, photo-diode array type, and fourier transform type systems, respectively. This investigation showed that three types NIR spectrometer were proper method for identification and quantitative analysis of glucose and possible for noninvasive blood glucose monitoring.

400MHz 광대역 디지털 자기상관분광기 설계연구 (A DESIGN STUDY OF THB 400MHZ WIDE-BAND DIGITAL AUTOCORRELATION SPECTROMETER)

  • 이창훈;김광동;한석태;김태성;최한규;변도영;구본철
    • Journal of Astronomy and Space Sciences
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    • 제19권4호
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    • pp.327-340
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    • 2002
  • 본 연구에서는 전파천문 관측연구 분야에서 외부은하의 스펙트럼 선 관측연구와 특정 전파원의 조사 관측을 위해서 필요한 광대역 디지털 자기상관분광기 시스템을 연구 개발하기 위 한 설계 연구를 수행하였다. 본 연구에서 설계되는 자기상관분광기는 기존의 시스템과는 달리 신호 입력에 대한 입력전력의 동적 범위와 입력 주파수 범위를 확대하여 어떤 시스템의 전파 분광기로도 자유롭게 사용할 수 있도록 하였다. 또한 신호의 샘플링 방식 또한 일반의 신호 검출기와는 다르게 aliasing 샘플링 방식을 사용하여, 대역 손실을 최소화하고 있으며, 상관기를 통과한 신호에 대해서는 전용의 DSP소자를 이용하여, 적분 및 퓨리에 변환 등을 하드웨어적으로 처리하도록 하여 그 신호 처리속도를 빠르게 설계하여, 최근에 많은 연구가 진행되는 우주전파 관측연구인 “On the fly”방식 등의 측정 방식을 지원할 수 있도록 설계하였다.

The New X-ray Induced Electron Emission Spectrometer

  • Yu.N.Yuryev;Park, Hyun-Min;Lee, Hwack-Ju;Kim, Ju-Hwnag;Cho, Yang-Ku;K.Yu.Pogrebitsky
    • 한국결정학회:학술대회논문집
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    • 한국결정학회 2002년도 정기총회 및 추계학술연구발표회
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    • pp.5-6
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    • 2002
  • The new spectrometer for X-ray Induced Electron Emission Spectroscopy (XIEES) .has been recently developed in KRISS in collaboration with PTI (Russia). The spectrometer allows to perform research using the XAFS, SXAFS, XANES techniques (D.C.Koningsberger and R.Prins, 1988) as well as the number of techniques from XIEES field(L.A.Bakaleinikov et all, 1992). The experiments may be carried out with registration of transmitted through the sample x-rays (to investigate bulk samples) or/and total electron yield (TEY) from the sample surface that gives the high (down to several atomic mono-layers in soft x-ray region) near surface sensitivity. The combination of these methods together give the possibility to obtain a quantitative information on elemental composition, chemical state, atomic structure for powder samples and solids, including non-crystalline materials (the long range order is not required). The optical design of spectrometer is made according to Johannesson true focusing schematics and presented on the Fig.1. Five stepping motors are used to maintain the focusing condition during the photon energy scan (crystal angle, crystal position along rail, sample goniometer rail angle, sample goniometer position along rail and sample goniometer angle relatively of rail). All movements can be done independently and simultaneously that speeds up the setting of photon energy and allows the using of crystals with different Rowland radil. At present six curved crystals with different d-values and one flat synthetic multilayer are installed on revolver-type monochromator. This arrangement allows the wide range of x-rays from 100 eV up to 25 keV to be obtained. Another 4 stepping motors set exit slit width, sample angle, channeltron position and x-ray detector position. The differential pumping allows to unite vacuum chambers of spectrometer and x-ray generator avoiding the absorption of soft x-rays on Be foil of a window and in atmosphere. Another feature of vacuum system is separation of walls of vacuum chamber (which are deformed by the atmospheric pressure) from optical elements of spectrometer. This warrantees that the optical elements are precisely positioned. The detecting system of the spectrometer consists of two proportional counters, one scintillating detector and one channeltron detector. First proportional counter can be used as I/sub 0/-detector in transmission mode or by measuring the fluorescence from exit slit edge. The last installation can be used to measure the reference data (that is necessary in XANES measurements), in this case the reference sample is installed on slit knife edge. The second proportional counter measures the intensity of x-rays transmitted through the sample. The scintillating detector is used in the same way but on the air for the hard x-rays and for alignment purposes. Total electron yield from the sample is measured by channeltron. The spectrometer is fully controlled by special software that gives the high flexibility and reliability in carrying out of the experiments. Fig.2 and fig.3 present the typical XAFS spectra measured with spectrometer.

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대역 내 기준 파장을 갖는 근적외선 그리즘 실리콘 광 면 센서 분광기 설계 및 제작 (Design and Fabrication of an NIR Grism Si Optical Area Sensor Spectrometer with In-band Reference Wavelength)

  • 송재원
    • 센서학회지
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    • 제26권1호
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    • pp.28-34
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    • 2017
  • An NIR grism Si optical area sensor spectrometer with in-band reference wavelength is designed and fabricated. It is composed of a transmission type diffraction grating (spatial density 300 line/mm), a rectangular N-BK7 prism (apex angle 30 degree), NIR filter(cutoff wavelength 720 nm), an imaging convex lens(focal length 50 mm F1.8) and an IR modified DSLR camera (Canon EOS40D) of Si optical area sensor ($3,888{\times}2,592$ pixels, pixel size $5.710{\mu}m$). "In-band reference wavelength function" is implemented using non-dispersive 0th diffraction order optical beam. The NIR grism spectrometer is tested in a laboratory using a halogen lamp and a Neon lamp. And the spectrometer is used in an astronomy field for obtaining the planet Jupiter NIR spectrum. In-band reference wavelength i.e. un-deviation wavelength is 846 nm, an wavelength resolution is 0.3027 nm/pixel, an wavelength resolving power is 2,794 and an wavelength range is 650~1,000 nm.

Membrane Inlet-based Portable Time-of-flight Mass Spectrometer for Analysis of Air Samples

  • Kim, Tae-Kyu;Jung, Kyung-Hoon;Yoo, Seung-Kyo;Jung, Kwang-Woo
    • Bulletin of the Korean Chemical Society
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    • 제26권2호
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    • pp.303-308
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    • 2005
  • A miniaturized time-of-flight mass spectrometer with an electron impact ionization source and sheet membrane introduction has been developed. The advantages and features of this mass spectrometer include high sensitivity, simple structure, low cost, compact volume with field portability, and ease of operation. A mass resolution of 400 at m/z 78 has been obtained with a 25 cm flight path length. Under optimized conditions, the detection limits for the volatile organic compounds (VOCs) studied were 0.2-10 ppm by volume with linear dynamic ranges greater than three orders of magnitude. The response times for various VOCs using a silicone membrane of 127 $\mu$m thickness were in the range 4.5-20 s, which provides a sample analysis time of less than 1 minute. These results indicate that the membrane introduction/time-of-flight mass spectrometer will be useful for a wide range of field applications, particularly for environmental monitoring.

토마토 잎의 비파괴 계측에 의한 N, P, Ca 결핍 장해 진단법 비교 (Comparison of Non-destructive Measuring Methods of Tomato Plant to Detect N, P and Ca Deficient Stresses)

  • 서상룡;류육성;정갑채;성제훈;이성희
    • Journal of Biosystems Engineering
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    • 제25권6호
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    • pp.517-526
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    • 2000
  • A series of experiments was conducted to evaluate the capability of detecting nutrimental deficient stress of N, P and Ca of a tomato plant using several fast and intact type physiological properties measuring devices - a chlorophyll content meter an infra-red thermometer to measure leaf temperature a chlorophyll fluorescence meter a porometer an optical spectrometer a multi-scan radiometer and a canopy analyzer. to detect N deficient stress a chlorophyll content meter a spectrometer and a multi-scan radiometer were useful and their possibility to detect was estimated as about 50%, 100% and 100% respectively. To detect P deficient stress the infra-red thermometer the porometer and the spectrometer proved their usefulness an their possibility to detect was estimated as about 70%, 70% and 70% respectively. To detect Ca deficient stress an thermometer a porometer a spectrometer and a multi-scan radiometer were useful and their possibility to detect was estimated as about 60%, 70%,80% and 100% respectively. The experiments resulted that use of a spectrometer and a multi-scan radiometer in combination with a chlorophyll content meter an infra-red thermometer and a porometer were desirable to distinguish the nutrimental stress tested in the study.

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