• Journal of information and communication convergence engineering
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• v.10 no.3
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• pp.295-299
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• 2012

Defect generation during organic bottom anti-reflective coating (BARC) in the photo lithography process is closely related to humidity control in the BARC coating unit. Defects are related to the water component due to the humidity and act as a blocking material for the etching process, resulting in an extreme pattern bridging in the subsequent BARC etching process of the poly etch step. In this paper, the lower limit for the humidity that should be stringently controlled for to prevent defect generation during BARC coating is proposed. Various images of defects are inspected using various inspection tools utilizing optical and electron beams. The mechanism for defect generation only in the specific BARC coating step is analyzed and explained. The BARC defect-induced gate pattern bridging mechanism in the lithography process is also well explained in this paper.

• Journal of the Korean Society of Tobacco Science
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• v.5 no.2
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• pp.63-69
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• 1983

The tensile strength (Pm) . elongation percentage ($\varepsilon$) , elastic modulus (I) , and specific volume (Sv) were calculated from the data of tensile characteristics of By 104 .and Burley 21 tobacco leaves, which were measured over a relative humidity from 60 to 80% at $20\pm2^{\circ}C$.The important results obtained were as follows.(1) Tensile strength(Pm) The "Pm"of By 104 was greater than that of Burley at. The "Pm"in both varieties were increased toward the upper stalk position and according to the decrease of relative humidity. The "Pm" of parallel piece to tile vein in a leaf were greater than that of right angle piece to the vein. (2) Elongation percentage ($\varepsilon$). The "s" of By 104 was higher than that of Burley 21. The "s" in both varieties were increased toward the upper stalk position and according to the increase of relative humidity. The "s" of parallel Piece to the vein in a Burley leaf was greater than that of right angle piece to the vein. (3) Elastic modulus (E) The "E" of Burley 21 leaf was higher than that of By 104. The "E" in both varieties were increased toward the lower stalk position and according to decrease of relative humidity. The "E"of parallel piece to the vein in both varieties leaves were greater than that of right angle piece to tile vein. (4) Specific volume (Sv) The "Sv" of Burley 21 leaf was increased than that of By 104. The "Sv" in both varieties were increased toward the lower stalk position and according to the decrease of relative humidity.ot;Sv" in both varieties were increased toward the lower stalk position and according to the decrease of relative humidity.dity.

• Journal of the korean Society of Automotive Engineers
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• v.5 no.4
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• pp.41-46
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• 1983

The influence of inlet air humidity on the flame velocity and combustion of the spark ignition engine were described experimentally by means of the flame velocity measuring apparatus using ion-current. The flame velocity are greatly influenced air fuel ratio and engine speed, and linealy decrease according to the increasing of inlet air humidity. The flame travell curve is very similar to the rate of mass burned and combustion progressive is estimated mostly by only the rate of mass burned curve. The decreasing of the mean flame velocity is about 0.4m/s for increasing of 0.001 specific humidity and we think the reason is mainly decreasing of thermal conductivity.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2001.11a
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• pp.78-87
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• 2001

The friction and wear behaviors of WC/C multilayer coating were investigated by using a pin on disk type tester. The experiment was conducted by using silicon nitride (S $i_{3}$ $N_{4}$) as a pin material and WC/C multilayer coating on bearing steel (STB2) as a disk material, under various environments that are atmospheric conditions of high vacuum( 1,3$\times$10$^{-4}$ Pa), medium vacuum( 1.3$\times$10$^{-l}$Pa). ambient air( 10$^{5}$ pa)(3 types) and relative humidity(2~98%) conditions. The results showed that WC/C coating fracture was suddenly increased with increasing degree of vacuum, because of high adhesion. So, WC/C coating could not be displayed their ability as solid lubricant. WC/C coating could be displayed better abilitv as solid lubricant with increasing relative humidity. because of oxide film, size and shape of wear debris. The friction coefficient and specific wear rate became better about RH 50%.%.

• Korean Journal of Clinical Laboratory Science
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• v.55 no.3
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• pp.132-142
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• 2023

Human leukocyte antigen (HLA) typing was performed in the diagnostic immunology laboratory of the Seoul National University Hospital. Among 611 HLA-DR tests, specific bead reactions suspected of being false positive and false negative in Lot 20 reagents were found. Therefore, we aimed to identify the factors causing cut-off corrections by examining cases where cut-off corrections were not made for 533 test results and cases where cut-off corrections were made for 78 cases after the cut-off corrections of specific beads. Frequency analysis was conducted to verify the demographic characteristics, and descriptive statistics were used to assess the humidity in the laboratory as a variable. Cross-tabulation was done to examine the association between cut-off corrections and demographic characteristics. Independent samples t-tests were conducted to verify the difference in humidity based on cut-off corrections. Finally, logistic regression analysis was conducted to examine the relationship between humidity levels and the rate of cut-off corrections, and results showed as the humidity level in the laboratory highs, the number of cut-off corrections decreased by a factor of 0.986. This suggests cut-off corrections rate increases when the humidity lowers. Therefore, it indicates that humidity in the laboratory is also a factor that affects HLA typing results.

• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
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• v.4 no.2
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• pp.119-128
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• 1975

Natural draft and flow which low temperature moist gas produces in the chimney of an Ondol heating system were numerically analysed. Among several factors involved inlet gas temperature has the strongest influence on the chimney performance and then next specific humidity of the gas. Thermal conductivity of the chimney wall, however, has little influence on the performance of such a low temperature chimney. Under given flow conditions there exists an optimum chimney height which gives a maximum flow rate for a given chimney diameter. This optimum value of chimney height inereases with increase in chimney diameter, inlet gas temperature and specific humidity.

• Journal of the Korean Geotechnical Society
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• v.32 no.5
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• pp.49-55
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• 2016

This study aims to present the practical Nitrogen monoxide (NO) removal capacity of cement mortar with Titanium dioxide ($TiO_2$) which is one of the paving materials by considering the environment of pavement in urban areas. NO removal capacity test under designated conditions of humidity of inflow gas and the test with variation of the degree of saturation of specimen were conducted. In the test for humidity, dry specimen is subject to the test and NO removal ratio was observed. Humidity-NO removal ratio curve is a log normal distribution in shape, and the maximum NO removal ratio appears at specific humidity. NO removal capacity test relying on the degree of saturation was carried out with wet specimen to reflect the unsaturated pavement by rainfall and domestic sewage. Wet specimen presents less NO removal capacity than dry specimen and the recovering evolution of NO removal capacity follows evaporation. Moreover, $TiO_2$ under the specific depth of specimen hardly contributes to NO removal capacity.

• Journal of Sensor Science and Technology
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• v.26 no.3
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• pp.179-185
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• 2017

This article describes the characteristics of nondispersive infrared carbon dioxide gas sensor according to the temperatures and humidifies. In this researches, a thermopile sensor that included application-specific integrated circuit (ASIC) was used and the White-cell structure was implemented as an optical waveguide. The developed sensor modules were installed in gas chamber and then the temperature of gas chamber has been increased from 283 K to 313 K with 10K temperature step. In order to analyze the effects of humidity levels, the relative humidity levels were changed from 30 to 80%R.H. with small humidifier. Then, the characteristics of sensor modules were acquired with the increment of carbon dioxide concentrations from 0 to 2,000 ppm. When the initial voltages of sensors were compared before and after humidifying the chamber at constant temperature, the decrements of the output voltages of sensors are like these: 9mV (reference infrared sensor), 41 mV (carbon dioxide sensor), 2 mV (temperature sensor). With the increment of ambient temperature, the averaged output voltage of carbon dioxide sensor was increased 19 mV, however, when the humidity level was increased, it was decreased 14mV. Based upon the experimental results, the humidity effect could be alleviated by the increment of temperature, so the effects of humidity and temperature could be only compensated by the ambient temperature itself. The estimated carbon dioxide concentrations showed 10% large errors below 200 ppm, however, the errors of the estimations of carbon dioxide concentrations were less than ${\pm}5%$ from 400 to 2,000 ppm.

• Journal of the Korean Society of Safety
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• v.11 no.1
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• pp.84-89
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• 1996

The adsorption characteristics of active carbon used as a cartridge filler of organic vapor respirator were examined by humidity, particle size, challenge concentration and specific surface area. As a result, the 1% breakthrough time of Carbon Tetrachloride($CCl_4$) was decreased with increase of relative humidity, challenge concentration and particle size (0.6～2.0mm) of active carbon. The adsorbed amount of $CCl_4$ was about 1. 1mg/$m^2$ at RH 40% and 0. 5mg/$m^2$ at RH 80% . However in the case of prehumidified active carbon, humidity did not affected to 1% breakthrough time up to RH 40%.

• Journal of the Korean Ceramic Society
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• v.53 no.3
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• pp.362-366
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• 2016

In this study, humidity control ceramics with good adsorption/desorption capabilities and high strength were fabricated from drinking-water treatment sludge (DWTS) and Onggi soil. The DWTS powder heat-treated at $800^{\circ}C$ and Onggi soil were mixed at weight ratios of 40:60, 50:50, 60:40, and 70:30 and fired at $800-1000^{\circ}C$. With increasing DWTS content, density and flexural strength increased. For the sample with a DWTS:Onggi soil weight ratio of 70:30, porosity and specific surface area decreased with increasing firing temperature, attributed to densification and grain growth at high firing temperatures. From the results obtained, a firing temperature of $800^{\circ}C$ is the optimum condition for fabricating humidity control ceramics with good adsorption/desorption capabilities and strength. The maximum adsorbed amount for the sample fired at $800^{\circ}C$ was $439g/m^2$.