• 제목/요약/키워드: Specific Film Thickness

검색결과 90건 처리시간 0.025초

액적의 액막 충돌에 대한 수치해석 (A Numerical Analysis of a Drop Impact on the Liquid Surface)

  • 이상혁;허남건;손기헌
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2008년도 추계학술대회B
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    • pp.2568-2573
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    • 2008
  • A drop impact on the liquid film/pool generates several phenomena such as the drop floating, bouncing, formation of vortex ring, jetting, bubble entrapment and splashing. These phenomena depend on the impact velocity, the drop size, the drop properties and the liquid film/pool thickness. These parameters can be summarized by four main dimensionless parameters; Weber number, Ohnesorge number, Froude number and non-dimensional film/pool thickness. In the present study, the phenomena of the splashing and bubble entrapment due to the drop impact on the liquid film/pool were numerically investigated by using a Level Set method for the sharp interface tracking of two distinct phases. After the drop impact, the splashing phenomena with the crown formation and spreading were predicted. Under the specific conditions, the bubble entrapment at the base of the collapsing cavity due to the drop impact was also observed. The numerical results were compared to the available experimental data showing good agreements.

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신경회로망을 이용한 PECVD 산화막의 특성 모형화 (Modeling of PECVD Oxide Film Properties Using Neural Networks)

  • 이은진;김태선
    • 한국전기전자재료학회논문지
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    • 제23권11호
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    • pp.831-836
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    • 2010
  • In this paper, Plasma Enhanced Chemical Vapor Deposition (PECVD) $SiO_2$ film properties are modeled using statistical analysis and neural networks. For systemic analysis, Box-Behnken's 3 factor design of experiments (DOE) with response surface method are used. For characterization, deposited film thickness and film stress are considered as film properties and three process input factors including plasma RF power, flow rate of $N_2O$ gas, and flow rate of 5% $SiH_4$ gas contained at $N_2$ gas are considered for modeling. For film thickness characterization, regression based model showed only 0.71% of root mean squared (RMS) error. Also, for film stress model case, both regression model and neural prediction model showed acceptable RMS error. For sensitivity analysis, compare to conventional fixed mid point based analysis, proposed sensitivity analysis for entire range of interest support more process information to optimize process recipes to satisfy specific film characteristic requirements.

SiO/TiN 박막의 증착두께에 따른 유전율 특성 (Permittivity Characteristics of SiO/TiN Thin Film according to Coating Thickness)

  • 김창석;이우선;정천옥;김병인
    • E2M - 전기 전자와 첨단 소재
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    • 제10권6호
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    • pp.570-575
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    • 1997
  • In this days, the thinner film of dielectric materials is required while its capacitance is required to be still large at the VLSI process. Most of such VLSI have MOS structures. For the research on this requirement, MOS capacitors were fabricated on the silicon wafer in four different thickness groups by RF sputtering method. SiO of the SiO/TiN film is used as the insulating layer and TiN is chosen as the barrier against the diffusion of Al which is the terminal connected by ohmic contact because TiN has the advantageous properties such as good thermal stability and very low diffusion rate in spite of its relatively low specific resistance. In this study their electrical and optical characteristics are investigated to find refractive index, absorption coefficient and Permittivity.

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Preparation of Molecularly Imprinted Polymers Using Photocross-linkable Polyphosphazene and Selective Rebinding of Amino Acids

  • Lee, Seung-Cheol;Chang, Ji-Young
    • Macromolecular Research
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    • 제17권7호
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    • pp.522-527
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    • 2009
  • A photocrosslinkable polyphosphazene was used for molecular imprinting. We synthesized polyphosphazene (3) having urea groups for complexation with N-carbobenzyloxyglycin (Z-Gly-OH, template) and chalcone groups for cross-linking reaction. As substituents, 4-hydroxycha1cone (1) and N-(4-hydroxyphenyl)-N'-ethylurea (2) were prepared. Choloro groups of poly(dichlorophosphazene) were replaced by the sequential treatment with sodium salts of compounds 1 and 2, and trifluoroethanol. The template molecule was complexed with the urea groups on the polymer chains via hydrogen bonding. A thin polymer film was prepared by casting a solution of the complex of polymer 3 and the template in dimethylformamide on a quartz cell and irradiated with 365 nm UV light to yield a cross-linked film with a thickness of about $16{\mu}m$. The template molecules in the film were removed by Soxhlet extraction with methanol/acetic acid. The control polymer film was prepared in the same manner for the preparation of the imprinted polymer film, except that the template and triethylamine were omitted. In the rebinding test, the imprinted film exhibited much higher recognition ability for the template than the control polymer. We also investigated the specific recognition ability of the imprinted polymer for the template and its structural analogues. The rebinding tests were conducted using Z-Glu-OH, Z-Asp($O^tBu$)-OH, and Z-Glu-OMe. The imprinted film showed higher specific recognition ability for the template and the lowest response for Z-Asp($O^tBu$)-OH.

RF 마그네트론 스퍼터링법으로 합성된 Ga-doped ZnO 박막의 특성평가 (Characterization of Ga-doped ZnO thin films prepared by RF magnetron sputtering method)

  • 윤영훈
    • 한국결정성장학회지
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    • 제31권2호
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    • pp.73-77
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    • 2021
  • RF 마그네트론 스퍼터링 공정에 의해 Ga-doped ZnO 박막이 O2 및 Ar 분위기 하에서 증착 조건에 따라 합성되었으며, N2 분위기에서, 600℃에서 급속열처리(RTA)를 실시하였다. 증착된 ZnO : Ga 박막에 대해 두께를 측정하였고, XRD 패턴 분석에 의해 결정상을 조사하였으며, FE-SEM, AFM 이미지에 의해 박막의 미세구조를 관찰하였다. O2 및 Ar 분위기 기체 종류별로 형성된 박막들의 증착 조건에 따라 X-선 회절 패턴의 (002)면의 세기는 상당한 차이를 나타냈다. O2 조건에서는 Ga doping이 이루어진 단일 박막의 경우에서는 강한 세기의 회절피크가 관찰되었다. O2 및 Ar 조건에서는 Ga doping이 이루어진 다층박막의 경우에서는 다소 약한 세기의 (002) 면의 피크만을 나타내었다. FE-SEM image에서는 박막의 표면입자의 크기는 두께가 증가함에 따라 입자크기가 다소 증가하는 것으로 관찰되었다. O2 및 Ar 분위기 조건 하에서, Ga doping이 이루어진 다층박막의 경우에서는, 비저항은 6.4 × 10-4Ω·cm을 나타냈고, O2 분위기 조건하에서, Ga doping이 이루어진 단일 박막의 경우에서는 저항값이 감소하였고, Ga-doped ZnO 박막의 두께가 2 ㎛로 증가하면서 저항이 감소하였으며, 1.0 × 10-3 Ω·cm의 비교적 낮은 비저항 값을 나타내었다.

Electrical Capacitance of Polypyrrole-Perchlorate and Polypyrrole-Naflon Film Electrodes

  • 엄재웅;백운기
    • Bulletin of the Korean Chemical Society
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    • 제17권4호
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    • pp.349-352
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    • 1996
  • Electrical capacitance at the interface between electrolyte solution and conducting polypyrrole film electrode was measured by a simple electrochemical method. The polymer films were electropolymerized in the presence of perchlorate (PPy-ClO4) or Nafion (PPy-Nafion) anions as the dopant ions. Both polymers exhibited large double layer capacitances which were slightly potential dependent within the potential range where the polymers are conductive. The capacitance increased in proportion to the polymer thickness. The specific capacitance were about 10 Fg-1and 44 F g-1 for PPy-Nafion and PPy-ClO4, respectively.

Effect of Al2O3-ZrO2 Composite Oxide Thickness on Electrical Properties of Etched Al Foil

  • Chen, Fei;Park, Sang-Shik
    • 한국재료학회지
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    • 제26권3호
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    • pp.160-165
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    • 2016
  • To increase the capacitance of an Al electrolytic capacitor, the anodic oxide film, $Al_2O_3$, was partly replaced by an $Al_2O_3-ZrO_2$ (Al-Zr) composite film prepared by the vacuum infiltration method and anodization. The microstructure and composition of the prepared samples were investigated by scanning electron microscopy and transmission electron microscopy. The coated and anodized samples showed multi-layer structures, which consisted of an inner Al hydrate layer, a middle Al-Zr composite layer, and an outer $Al_2O_3$ layer. The thickness of the coating layer could go up to 220 nm when the etched Al foil was coated 8 times. The electrical properties of the samples, such as specific capacitance, leakage current, and withstanding voltages, were also characterized after anodization at 100 V and 600 V. The capacitances of samples with $ZrO_2$ coating were 36.3% and 27.5% higher than those of samples without $ZrO_2$ coating when anodized at 100 V and 600 V, respectively.

비용 효율적인 유연 디스플레이용 무색 투명 폴리이미드 필름 제작 (Cost-efficient Fabrication of Colorless and Optically Transparent Polyimide Film for Flexible Displays )

  • 조다운;김지호;오충석
    • 반도체디스플레이기술학회지
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    • 제22권1호
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    • pp.33-38
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    • 2023
  • As the demand for large flexible displays such as tablet computers continues to rise, there is an increasing need for cost-efficient colorless and optically transparent polyimide film that can meet the desired performance, particularly optical transmittance. In this study, we investigated a detailed procedure for achieving optimal optical transmittance using two different combinations of monomers: 6FDA+BAPB and 6FDA+BPA+TFDB. We employed a design of experiment method to systematically synthesize polymers, allowing for the optimization of optical transmittance. In addition, we were able to achieve uniform thickness in the films by using a doctor blade. By comparing the price and optical transmittance of four different monomer combinations, we obtained fundamental data on the production of polyimide films that can be customized to meet the specific price and performance requirements of manufacturers. This approach enables users to select the most suitable polyimide film based on their desired price and performance parameters while achieving optimal optical transmittance.

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아스팔트혼합물을 평가하기 위한 유효아스팔트 함량의 새로운 계산 모델 (The New Calculation Model of Film Thickness to Evaluat Asphalt Mixtures)

  • 김성호;김부일
    • 한국도로학회논문집
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    • 제9권1호
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    • pp.57-67
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    • 2007
  • 최근 아스팔트 혼합물의 VMA 혹은 그 외 다른 체적요소의 기준값을 대체하기 위해 유효아스팔트 함량(film thickness)에 대해 논의되어 왔다. 이들 중 일부는 유효 아스팔트 함량의 기준값을 제안하였으며, 일부는 새로운 개념 또는 계산 방법을 포함하는 새로운 모델을 즉, 인덱스 모델(index model) 또는 가상 모델(virtual model)을 소개하였다. 각각의 모델은 아스팔트혼합물의 체적특성을 설명하는데 있어서 형상, 크기 등 골재의 체적특성을 정량화하는 방법을 이용한다. 본 연구에서는 인덱스 모델과 가상 모델의 장점을 결합한 개선된 가상 모델 (modified virtual model)을 제안하였다. 개선된 가상 모델을 기존의 두 가지 모델과 비교평가하기 위하여 DASR 개념에 근거하여 제작된 총 8개의 혼합물을 대상으로 IDT 시험과 APA 시험을 수행하였다. 시험 결과, 아스팔트 혼합물의 공용성과 유효 아스팔트 함량의 관계를 계산함에 있어서 본 연구에서 제안된 가상 모델은 기존의 모델들에 비해 더 적절함을 알 수 있었다.

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양극산화 티타늄의 생체적합성에 관한 연구 (A Study on the Biocompatibility of Anodized Titanium)

  • 이민호;추용호
    • 대한의용생체공학회:의공학회지
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    • 제14권4호
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    • pp.333-340
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    • 1993
  • The high biocompatibility of titanium is connected with the high corrosion resistance of the surface oxide, its high dielectric constant, and some other specific biochemical properties of the oxide. The corrosion resistance of titanium can be improved with the formation of passive film by anodic oxidation. In other to characterize the titantium oxlde film formed by anodic oxidation, titanium plates were anodized in 0.5M $H_3SO_4$ electrolyte at voltages between 5V and 100v. The oxide film was examined by an X-Ray Diffractometer(XRD) and a Scanning Electron Microscope(SEM). In addition, the corrosion resistance of oxide film was tested by dipping in physiological NaCl,5% HCI,5% $H_3PO_4$ and its biocompatability was evaluated by the fibroblast-like cell culture. The results obtained are as follows : 1. The thickness of surface oxide and micropore are increased with the increase of electrode potential and formed deeply along the grain boundary. 2. The solubilities of titanium in electrolyte solution shows that the anodized titanium has more corrosion resistance than the untreated pure titanium. 3. The biocomatibility of anodized titanium is superior to untreated pure titanium.

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