• Title/Summary/Keyword: Solenoid actuator

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Development and Evaluation of Differential Pressure Type Mass Flow Controller for Semiconductor Fabrication Processing (반도체 공정용 차압식 질량 유량 제어 장치의 개발 및 성능 평가)

  • Ahn, Jin-Hong;Kang, Ki-Tai;Ahn, Kang-Ho
    • Journal of the Semiconductor & Display Technology
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    • v.7 no.3
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    • pp.29-34
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    • 2008
  • This paper describes the fabrication and characterization of a differential pressure type integrated mass-flow controller made of stainless steel for reactive and corrosive gases. The fabricated mass-flow controller is composed of a normally closed valve and differential pressure sensor. A stacked solenoid actuator mounted on a base-block is utilized for precise and rapid control of gas flow. The differential pressure flow sensor consisting of four diaphragms can detect a flow rate by deflection of diaphragm. By a feedback control from the flow sensor to the valve actuator, it is possible to keep the flow rate constant. This device shows a fast response less than 0.3 sec. Also, this device shows accuracy less than 0.1% of full scale. It is confirmed that this device is not attacked by toxic gas, so the integrated mass-flow controller can be applied to advanced semiconductor processes which need fine mass-flow control corrosive gases with fast response.

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Experimental Study of Solenoid Actuator's Characteristics according to Coil Shapes (코일 형상에 따른 솔레노이드 액츄에이터 특성의 실험적 고찰)

  • Sung, Baek-Ju;Lee, Eun-Woong;Kim, Hyoung-Eui
    • Proceedings of the KIEE Conference
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    • 2003.10b
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    • pp.48-50
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    • 2003
  • 개폐형(On/Off) 솔레노이드 액츄에이터의 설계에서는 온도상승을 고려한 권선수 산출이 가장 중요하고, 제작과정에서는 설계단계에서 산출된 권선수를 정확하게 정렬권선 형태로 구현해 내는 것이 가장 중요하다. 본 연구에서는, 비 정렬권선이 개폐식 솔레노이드 액츄에이터의 동작에 미치는 영향을 실험적으로 분석하였다. 실험은 하나의 정렬권선 코일과 비 정렬 상태가 다른 세권선을 사용하여 보빈과 연결된 요크가 있는 경우와 없는 경우를 각각 실험하고 그 때의 흡인력 온도상승 소비전력 등의 특성을 비교하였다. 특히, 온도상승 실험은 실제 사용시의 상황을 구현하기 위하여 권선상태가 다른 4종류의 코일 각각에 100만회의 내구성 시험을 실시하면서 작동횟수를 등분하여 코일, 요크, 몰딩부의 각 측정점 온도를 측정하였다.

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A Reliability Study of Direct Drive Type High Speed Solenoid Actuator (직구동방식 고속 솔레노이드 액추에이터의 신뢰성 연구)

  • Sung, Baek-Ju;Kim, Doh-Sik;Lee, Jong-Bae
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1035-1036
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    • 2011
  • 직구동방식 고속 솔레노이드 액추에이터는 자동차, 항공산업 등의 고정밀을 요구하는 산업시스템에 주요부품으로 사용되기 때문에 고신뢰성이 요구된다. 본 연구에서는 직구동방식 고속 솔레노이드 액추에이터의 신뢰성 평가를 위하여 2단계 품질기능전개를 통해 신뢰성시험항목을 결정하였다. 신뢰성평가 시험 중에서 가장 큰 우선도를 차지하는 수명시험에 대해 문헌, 연구계 및 현장실무자를 통한 무고장 수명시험 시간을 산출하였다. 또한 장기간 소요되는 무고장 수명시험 시간의 시간을 단축하기 위해 가속모델을 제안하고 실제 조건을 충족하는 가속수명 시험시간을 산출하였다.

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An Interactive Game with a Haptic Mouse (햅틱마우스를 이용한 인터랙티브 게임)

  • Cho, Seong-Man;Jung, Dong-June;Heo, Soo-Chul;Um, Yoo-Jin;Kim, Sang-Youn
    • 한국HCI학회:학술대회논문집
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    • 2009.02a
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    • pp.1-5
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    • 2009
  • In this paper, we develop a haptic mouse system for immersive human computer interaction. The proposed haptic mouse system can provide vibrotactile feedback as well as thermal feedback for realistic virtual experience. For vibrotactile and thermal feedback, we use eccentric motors, a solenoid, and a peltier actuator. In order to evaluate the proposed haptic mouse, we implement a racing game prototype system. The experimental result shows that our haptic mouse is expected to be useful in experiencing virtual world.

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The Analysis and Design of Electro-pneumatic Servo Valve (공기압 Servo Valve 설계 및 해석)

  • Ko, J.H.;Ryu, D.L.;Lee, J.H.;Kim, Y.S.;Kim, D.S.
    • Proceedings of the KSME Conference
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    • 2008.11a
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    • pp.1210-1214
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    • 2008
  • Electro-pneumatic servo valve is an electro-mechanical device which converts electric signal into pneumatic flow rate or pressure. In order to improve the overall performance of pneumatic servo systems, electro-pneumatic servo valves are required, which have fast dynamic characteristic, no air leakage at null, and can be fabricated at a low-cost. The first objective of this research is to design and fabricate a new electro-pneumatic servo valve which satisfies the above-mentioned requirements. In this paper, we has been modeled as a system consisting of coupled electro-mechanic and mechanical subsystems. The appropriateness of the model has been verified by simulation. The simulation model resolves the valve body motion and the solenoid current at high accuracy. Also, we are calculate the displacement of spool and computed results show winding currents, magnetic actuator force, flux density line, displacement, velocity, back EMF, eddy current etc.

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A Modeling and Control of Intelligent Cruise Control Systems (지능형 순항 제어 시스템 모델링 및 제어)

  • Lee, Se-Jin;Hong, Jin-Ho;Lee, Gyeong-Su
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.25 no.2
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    • pp.283-288
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    • 2001
  • A throttle/brake control law for the intelligent cruise control(ICC) systems has been proposed in this paper. The ICC system consists of a vehicle detection sensor, the control algorithm and a throttle/brake actuators. For the control of a throttle/brake system, we introduced a solenoid-valve-controlled electronic vacuum booster and a step-motor controlled throttle actuator. Nonlinear computer model for the electronic vacuum booster has been developed and the simulations were per formed using a complete nonlinear vehicle model. The results indicate the proposed throttle/brake control law can provide the ICC system with an optimized performance.

Throttle/Brake Combined Control for Vehicle-to-vehicle Distance and Speed Control (찻간 속도/거리제어를 위한 구동력/제동력 통합제어)

  • 이세진;이경수
    • Transactions of the Korean Society of Automotive Engineers
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    • v.9 no.2
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    • pp.137-142
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    • 2001
  • A throttle/brake control law for the intelligent cruise control(ICC) systems has been proposed in this paper. The ICC system consists of a vehicle detection sensor, the control algorithm and a throttle/brake actuators. The control performance has been investigated through vehicle tests. The test vehicle is equipped with a MMW radar sensor, a solenoid-valve-controlled Electronic-Vacuum-Booster(EVB) and a step-motor controlled throttle actuator. The results indicate the proposed throttle/brake control laws can provide satisfactory vehicle-to-vehicle distance and velocity control performance.

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Analysis of Line Regulator Valve and Ratio Control Valve Considering CVT Shift Dynamics (CVT 변속 동역학을 고려한 라인 레귤레이터 및 변속비 제어 밸브의 응답 특성 해석)

  • 정근수;김현수
    • Transactions of the Korean Society of Automotive Engineers
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    • v.8 no.2
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    • pp.81-91
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    • 2000
  • Dynamic models of line regulator valve(LRV) and ratio control valve (RCV) are obtained for an electronic controlled CVT. LRV and RCV are operated by variable force solenoid(VFS). Considering the CVT shift dynamics, oil pump's efficiency and saturation characteristics of VFS, simulations are performed and compared with test results. Simulation results are in good agreement with the experiments, which shows the validity of the dynamic models of LRV and RCV obtained. In addition, the effects of the orifice size in the exhaust port of RCV are investigated. Simulation results show that as the orifice size decreases, the residual pressure in the primary actuator increases which insures the large torque transmission capacity, meanwhile the duration time for the downshift increases.

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Design and characteristics analysis of micro-solenoid actuator using 3D finite element method (마이크로 솔레노이드 엑츄에이터의 설계 및 3차원 유한 요소법을 이용한 특성 해석)

  • Yoo, Hee-Sung;Koh, Chang-Seop;Ryu, Jae-Seop;Kim, Dong-Soo;Yun, So-Nam;Park, Sang-Woon
    • Proceedings of the KIEE Conference
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    • 2005.07b
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    • pp.1011-1013
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    • 2005
  • 솔레노이드 엑츄에이터의 초기 설계는 일반적으로 등가자기회로법을 이용하여 이루어지나, 프레임의 형상과 같은 국부적인 설계는 유한요소법 등을 이용하여 설계해야 한다. 본 논문에서는 등가자기회로법을 통하여 각형 마이크로 솔레노이드 엑츄에이터의 설계와 3차원 유한 요소법을 이용하여 특성을 해석하고 설계 결과의 타당성을 검증하고자 한다. 그리고 프레임 구조에 따른 특성 변화를 비교해본다.

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Study for Failure Cases on Engine Electronic Control Computer in Liquid Petroleum Gas vehicle (액화석유가스 자동차 엔진의 전자제어 컴퓨터의 고장사례 연구)

  • Lee, Il-Kwon;Kim, Young-Gyu;Kook, Chang-Ho
    • Journal of the Korean Institute of Gas
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    • v.15 no.6
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    • pp.28-33
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    • 2011
  • The purpose of this paper analyzes and studies to improve the failure cases on the computer that one of electronic control elements for engine in liquified petroleum gas vehicle. The first case, it certified the non-starting phenomenon of engine that it's electronic control unit didn't control the fuel for idle speed actuator because of no given action signal in slow-cut solenoid valve. The second case, it knew the bad condition phenomenon of engine and back-fire by the wire melting of ignition coil and firing of transistor being inside ECU. The third case, it certified the action stoping phenomenon of engine and malfunctioning signal for engine ECU because of leakage of current and an excess current by moisture inflowing inside ECU curcuit plate. Therefore, it is thought that will elevate the durability and reliability of engine computer throughout procure of quality.