• The Transactions of the Korean Institute of Electrical Engineers P
• /
• v.51 no.2
• /
• pp.77-81
• /
• 2002

In this study, PZT thin films were fabricated using sol-gel processing onto Si/$SiO_2$/Ti/Pt substrates. PZT sol with different Zr/Ti ratio(20/80, 30/70, 40/60, 52/48) were prepared, respectively. The films were fabricated by using the spin-coating method on substrates. The films were heat treated at $450^{\circ}C$, $650^{\circ}C$ by rapid thermal annealing(RTA). The preferred orientation of the PZT thin films were observed by X-ray diffraction(XRD), and Scanning electron microscopy(SEM). All of the resulting PZT thin films were crystallized with perovskite phase. The fine crystallinity of the films were fabricated. Also, we found that the ferroelectric properties from the dielectric constant of the PZT thin films were over 600 degrees, P-E hysteresis constant. And the leakage current densities of films were lower than $10^{-8}A/cm^2$. It is concluded that the PZT thin films by sol-gel process to be convinced of application for ferroelectric memory device.

• Electrical & Electronic Materials
• /
• v.7 no.4
• /
• pp.325-330
• /
• 1994

In this paper, $TiO_2$ thin films were fabricated by Sol-Gel method and their electrical conductivity and humidity sensing properties have been investigated. The structure of Sol can be changed by controlling for hydrolysis condition. The uniform surface of thin films was confirmed by SEM. The electrical conductivity of thin films decreased with increasing heat treatment temperature. The humidity sensing properties of thin films were good in high humidity and low frequency regions.

• Journal of the Korean Magnetics Society
• /
• v.13 no.1
• /
• pp.36-40
• /
• 2003

We have grown D $y_{x}$B $i_{3-x}$F $e_{5}$ $O_{12}$ (x = 0.5,1.0, 1.5,2.0) magnetic garnet thin films upon $Al_2$O3i and GGG substrate using Pechini process. The annealing temperature to get single phase D $y_{x}$B $i_{3-x}$F $e_{5}$ $O_{12}$ garnet is dependent on substrate, i.e. the annealing temperature for GGG substrate il 5$0^{\circ}C$ lower than that for $Al_2$ $O_3$ substrate. The grains of garnet thin film grown on GGG (111) plane align along [111] direction, and in this case the hysteresis curve does not saturate up to H : 5000 Oe. We attribute this phenomenon to rotation magnetization process. The maximum amount of Bi substitution in polycrystalline D $y_{x}$B $i_{3-x}$F $e_{5}$ $O_{12}$ thin film prepared by Pechini process is restricted to 2.0 Bi atom/unit cell, and this value is less than that in single garnet crystall grown by LPE method.own by LPE method.ethod.

• Transactions on Electrical and Electronic Materials
• /
• v.1 no.1
• /
• pp.17-21
• /
• 2000

In order to investigate the dependence of a content in lead lanthanum titanate (PLT) films and heat treatment, sol-gel process has been used. Four types of PLT thin films with the chemical formula, Pb$\_$1-x/ La$\_$x/Ti$\_$1-x/4/O$_3$(X=18, 21, 24 and 28 mole %) have been fabricated on Pt/Ti/SiO$_2$/Si multi-layers and ITO/glass substrates, The post-annealing temperature in the range of 400~700 $\^{C}$ is applied for the formation of perovskite structure in PLT films. The structureal, electrical and optical properties of PLT film with the addition of La content are estimated. The films orientation and surface structure of films are studied by XRD (X-ray diffraction) and SEM(scanning electron microscopy). The P-E hysteresis loop become narrower with increasing La content. The average transmittance of the films is about 80%.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1997.11a
• /
• pp.48-51
• /
• 1997

(Pb. La)TiO$_3$ thin films were fabricated by sol-gel Processing and spin-coated on the Pt substrate. The spin-coated PLT films were sintered at 75$0^{\circ}C$ for 5min by rapid thermal ann La content dependence of the electrical properties of the PLT thin films are discussed. Wit La mole% from 20 to 36mo1e%. the dielectric constant of the PLT thin films decreased f 570. P-E hysteresis loops changed from ferroelectric to paraelectric. and the charge storage charging time decreased. The Curie Point decreased with increasing La content. The leak density also decreased and La 36mo1% species shows mood characteristics less than 10- electric field 500 (KV/cm) Because of the broad range of composition-controlled ferroelectric PLT thin films are suitable for memory application.

• Electrical & Electronic Materials
• /
• v.9 no.2
• /
• pp.132-137
• /
• 1996

Pb(Zr$_{x}$Ti$_{1-x}$ )O$_{3}$ solutions prepared by sol-gel processing with different Zr/Ti ratio were coated on Pt/SiO$_{2}$/Si substrates using spin coating method. Coated films were annealed by rapid thermal annealing at 650.deg. C for 20sec to fabricate Pb(Zr, Ti)O$_{3}$ ferroelectric thin films. Electrical properties of the films such as dielectric constant and loss, ferroelectric hysteresis, fatigue, switching time, and leakage current were measured. Hysteresis of the films with different Zr/Ti ratio yield Pr ranging 10-21.mu.C/cm$^{2}$, E$_{c}$ ranging 37.5-137.5kV/cm. Hysteresis curve was changed from square-type to slim type according to increasing Zr contents. Switching time was faster than 180ns, and leakage current was about 20.mu.A/cm$^{2}$. The film underwent above 10$^{8}$ cycles of reversed polarization showed fatigue with increased coercive field and decreased remnant polarization.tion.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2003.03a
• /
• pp.207-207
• /
• 2003

최근 광촉매 재료로 각광받고 있는 TiO$_2$는 band gap 에너지가 3.0-3.2eV로 자외선 영역과 일부 가시광선 영역에서 활성을 갖는 것으로 알려져 있다. 따라서 용액 중에 결정화 및 안정화 되어있는 TiO$_2$의 band gap 에너지를 낮춘다면 가시광 영역의 광반응을 얻을 수 있다. 이에 본 연구는 G. Sato등이 제안한 방법으로 TiO$_2$ sol을 제조할 때 band gap 에너지를 낮추고자 천이 금속원소를 첨가하여 복합 및 담지된 TiO$_2$계 복합 sol을 합성하고자 하였다 출발원료는 TiC1$_4$를 가수분해하여 제조한 TiOCl$_2$에 천이금속원소인 V, Cr, Fe, Ni, Nb 등의 chloride 화합물을 첨가하여 중화 및 세척과정을 거친 후, 과산화수소수에 용해하여 전구체 용액인 titania peroxo용액을 제조하였다 제조된 전구체 용액은 온도와 시간을 변수로 각각 열처리하여 TiO$_2$계 복합 sol을 합성하였다. 제조된 시편은 X-선 회절 분석, 투과전자현미경, particle size analyzer, ζ-potential analyzer 및 UV-VIS Spectrometer 통을 이용하여 천이금속 첨가에 따른 TiO$_2$계 복합 sol의 형성과정과 특성변화를 관찰하였다.

• Korean Chemical Engineering Research
• /
• v.56 no.2
• /
• pp.156-161
• /
• 2018

$TiO_2$ photocatalyst powders were prepared by chlorination method and sol-gel method. Specific surface area and crystalline (i.e., anatase and rutile) of the catalyst varied depending on manufacture conditions and method. TTIP-sol photocatalyst had higher methylene blue (MB) decomposition characteristics than photocatalyst from chlorination method and TBOT-sol. MB removal efficiency from aqueous solution with TTIP-sol photocatalyst was over 90%. Experimental results showed that the $TiO_2$ photocatalyst with a single anatase phase and a large specific surface area had high decomposition characteristics of organic materials.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.07a
• /
• pp.315-318
• /
• 2001

The optical and dielectric properties of TiO$_2$ thin films prepared with mixtures of Epoxy, bits-(4, 4'-p-toluenesulfonylacidic isoproplylidene)-cyclohexadiol and UVI 6990 in dry sol-gel process were investigated. The absorption peak of the films was showed at 360nm. Photocurrent of the thin films doped with 50 wt% of TiO$_2$was higher than that of nondoped thin films. Energy gap was lowered from 3.6 to 3.3 eV with increasing amount of TiO$_2$. Relative dielectric constants of samples were 1.5 to 3 and showed a characteristics of lower dielectric materials.

• Bulletin of the Korean Chemical Society
• /
• v.23 no.8
• /
• pp.1078-1084
• /
• 2002

The formation temperature for the perovskite lead zirconate titanate [Pb(Zr,Ti)O3, PZT] derived from sol-gel route was lowered by more than $100^{\circ}C$ with the addition of crystallographically suitable seed particles, such as barium titanat e (BT) or PZT. We investigated the effect of seeding on the crystallization of perovskite phase and in the microstructure of the sol-gel derived PZT powder by varying the concentration, size and chemical species of seed particles. The phase transition as a function of temperature was monitored by DTA, XRD, and Raman spectroscopy, and the interface between the seed particle and grown PZT layer was analyzed by SEM and high resolution TEM techniques. It was found that both the heterogeneous and homogeneous nucleation contributes competitively in the formation of perovskite PZT grains.