• 제목/요약/키워드: Sol-gel spin coating

검색결과 235건 처리시간 0.027초

Sol-Gel법에서 Pb의 농도가 PbZrO3 박막 결정에 미치는 영향 (The Effect of Pb Mol Ratio in PbZrO3 Thin Films made by Sol-Gel Method)

  • 배세환;진병문;김성대
    • 한국전기전자재료학회논문지
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    • 제21권6호
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    • pp.552-555
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    • 2008
  • The purpose of this study was to find a best condition of fabricating lead zirconate thin film by sol-gel method, especially to find mol ratio and post annealing temperature. Lead zirconate thin film was made by spin coating method. The ratios of Pb and Zr of precursors were 1:0.8, 1:1.0, and 1:1.2. Annealing temperature of films were $600^{\circ}C$, $700^{\circ}C$, and $800^{\circ}C$ for 1 minute. Crystal structure was observed from XRD and antiferroelectricity was observed from hysteresis curves. The optimum mol ratio of Pb:Zr is 1:0.8 and annealing temperature is $800^{\circ}C$.

Sol-Gel법으로 제작한 X/65/35 (X=6~11) PLZT 박막의 전기 및 광학 특성 (Electrical and Optical Characteristics of X/65/35 (X=6~11) PLZT Thin Films Prepared by Sol-Gel Method)

  • 강종윤;장낙원;백동수;최형욱;박창엽
    • 한국전기전자재료학회논문지
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    • 제11권3호
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    • pp.237-241
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    • 1998
  • In this study, PLZT stock solutions around x/65/35 (x=6~11) ferroelectric region were prepared by Sol-Gel method and deposited on ITO-glass by spin-coating method. The thin films were annealed by RTA(rapid thermal annealing). The variations of crystallographic structure of the thin films were observed using XRD and hysteresis curves, dielectric characteristics, and optical transmittances were measured in order to investigate the characteristics of the thin films. The thin films were crystallized at $750^{\circ}C$ for 5 min by RTA. Relative dielectric constant and optical transmittance increased with increasing La content, Ec and Pr were higher for thin films than for bulk materials.

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Tunable 소자 응용을 위한 Sol-gel 법으로 제작된 $(Pb_{0.5},Sr_{0.5})TiO_3$ 박막의 stain 과 유전 관계 (Correction between Dielectric and Strain in PST Thin Films prepared by Sol-gel method for Tunable application)

  • 김경태;김창일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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    • pp.582-585
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    • 2004
  • Pb0.5Sr0.5TiO3 (PST) thin films were fabricated by the alkoxide-based sol-gel process using spin-coating method on Pt/Ti/SiO2/Si substrate. The PST films annealed from 500C to 650C for 1h show a perovskite phase and dense microstructure with a smooth surface. The grain size and dielectric constant of PST films increases with the increase in annealing temperature, which reduces the SiO2 equivalent thickness of the PST film. The crystallinity or internal strain in the PST thin films analyzed from the diffraction-peak widths correlate well with the decrease in the dielectric losses. The dielectric constants and dielectric loss (%) of the PST films annealed at 650c (teq : 0.89 nm) were 549 and 0.21%, respectively.

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저온 형성 가능한 "졸겔 ZnO / 은 나노선" 복합 투명전도막 (Low Temperature Processed Transparent Conductive Thin Films Based on Sol-Gel ZnO / Ag Nanowire)

  • 신원중;김보석;문찬수;조원기;백승재
    • Current Photovoltaic Research
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    • 제2권3호
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    • pp.110-114
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    • 2014
  • We propose a low temperature sol-gel ZnO/Ag nanowire composite thin film to fulfill low temperature and low cost requirements, which are essential criteria in future flexible electronic devices. In this proposed thin film, Ag nanowire plays the role of electrical conduction, and sol-gel ZnO provides a structural medium with a high visible transmittance. Low temperature restriction in the sol-gel fabrication process prevents sufficient oxidation of Zn acetate precursors, which were solved by a post-coating treatment with ultraviolet light irradiation. Composite thin film formation was performed by spin coating methods with a mixed precursor solution or in a sequential manner. We obtained an average visible transmittance larger than 85% and a sheet resistance smaller than $50{\Omega}/sq$. After optimization in a fabricated composite transparent conductive thin film with the thickness around 100 nm. Similar experimental demonstration in a flexible substrate (polyethyleneterephthalate) was successful, which implies a promising application opportunity of this technology.

A comprehensive study of spin coating as a thin film deposition technique and spin coating equipment

  • Tyona, M.D.
    • Advances in materials Research
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    • 제2권4호
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    • pp.181-193
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    • 2013
  • Description and theory of spin coating technique has been elaborately outlined and a spin coating machine designed and fabricated using affordable components. The system was easily built with interdisciplinary knowledge of mechanics, fluid mechanics and electronics. This equipment employs majorly three basic components and two circuit units in its operation. These include a high speed dc motor, a proximity sensor mounted at a distance of about 15 mm from a reflective metal attached to the spindle of the motor to detect every passage of the reflective metal at its front and generate pulses. The pulses are transmitted to a micro-controller which process them into rotational speed (revolution per minute) and displays it on a lead crystal display (LCD) which is also a component of the micro-controller. The circuit units are a dc power supply unit and a PWM motor speed controlling unit. The various components and circuit units of this equipment are housed in a metal casing made of an 18 gauge black metal sheet designed with a total area of 1, $529.2cm^2$. To illustrate the use of the spin-coating system, ZnO sol-gel films were prepared and characterized using SEM, XRD, UV-vis, FT-IR and RBS and the result agrees well with that obtained from standard equipment and a speed of up to 9000 RPM has been achieved.

양극산화처리를 통한 다공성 임플랜트 표면의 표면거칠기 증대에 대한 연구 (STUDY ON THE ENHANCING MICRO-ROUGHNESS OF POROUS SURFACED DENIAL IMPLANT THROUGH ANODIZATION)

  • 윤태호;송광엽
    • 대한치과보철학회지
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    • 제44권5호
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    • pp.617-627
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    • 2006
  • Statement of problem: HA has been used as a coating material on Ti implants to improve osteoconductivity. However. it is difficult to form uniform HA coatings on implants with complex surface geometries using a plasma spraying technique. Purpose : To determine if Ti6Al4V sintered porous-surfaced implants coated with HA sol-gel coated and hydrothermal treated would accelerate osseointegration. Materials and Methods : Porous implants which were made by electric discharge were used in this study. Implants were anodized and hydrothermal treatment or HA sol-gel coating was performed. Hydrothermal treatment was conducted by high pressure steam at $300^{\circ}C$ for 2 hours using a autoclave. To make a HA sol, triethyl phosphite and calcium nitrate were diluted and dissolved in anhydrous ethanol and mixed. Then anodized implant were spin-coated with the prepared HA sols and heat treated. Samples were soaked in the Hanks solution with pH 7.4 at $37^{\circ}C$ for 6 weeks. The microstructure of the specimens was observed with a scanning electron microscope (SEM), and the composition of the surface layer was analyzed with an energy dispersive spectroscope (EDS). Results : The scanning electron micrographs of HA sol-gel coated and hydrothermal treated surface did not show any significant change in the size or shape of the pores. After immersion in Hanks' solution the precipitated HA crystals covered macro- and micro-pores The precipitated Ca and P increased in Hanks' solution that surface treatment caused increased activity. Conclusion : This study shows that sol-gel coated HA and hydrothermal treatment significantly enhance the rate of HA formation due to the altered surface chemistry.

스크린 프린팅법으로 제작한 PZT 후막의 치밀화와 전기적 특성 (Densification and Electrical Properties of Screen-printed PZT Thick Films)

  • 박상만;이성갑
    • 한국전기전자재료학회논문지
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    • 제19권7호
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    • pp.667-672
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    • 2006
  • Ferroelectric $Pb(Zr_{0.52}Ti_{0.48})O_3$ (PZT(52/48)) thick films were fabricated by the screen-Printing method on the alumina substrates, and $PbTiO_3$ (PT) Precursor solution, which prepared by sol-gel method, was spin-coated on the PZT(52/48) thick films to obtain a densification. Its structural and electrical properties of the PZT(52/48) thick films with the treatment of PT precursor solution coating were investigated. The particle size of the thick films was increased with increasing the number of coatings and the thickness of the PZT-6 (6: number of coatings) films was about $60{\mu}m$. The relative dielectric constant increased and the dielectric loss decreased with increasing the number of PT sol coatings. The relative dielectric constant and dielectric loss of the PZT-6 thick film were 475 and 2 %, respectively. The remanent polarization, coercive field and breakdown strength of the PZT-6 film were $32.6{\mu}C/cm^2$, 15 kV/cm and 60 kV/cm, respectively.

Sol-Gel 법을 이용한 ITO박막의 제조 (Fabrication of ITO Thin Film by Sol-Gel Method)

  • 김지홍;이재호;김영환
    • 전기화학회지
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    • 제3권1호
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    • pp.11-14
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    • 2000
  • 가시광선 영역에서의 높은 투과성과 우수한 전도성을 가진 전도성 ITO박막은 그 전기적 광학적 특성에 의해서 태양 전기 기판의 전극 재료나 Display소자의 투명전극으로 개발되고 있다. 이들의 제작은 현재 sputtering이 주종을 이루나 이들의 높은 생산비를 절감할 목적으로 sol-ge떫을 이용하여 ITO박막을 만들었다. ITO제조용 sol은 유기질 sol로는 indium tri-iso-propoxide를 ethylene glycol monoethyl ether에 녹인 후 $SnCl_4$를 dopant로 사용하여 제조하였다. Acetyl acetone을 넣어 sol이 수화되는 현상을 억제하였다. 무기질 sol로는 indium acetate를 n-propanol에 용해하여 사용하였다. Spin 방법을 이용하여 코팅하였으며 $500^{\circ}C$에서 열처리하였다. 가시 광선 영역에서의 투과도는 $90\%$ 이상을 얻었으며 비저항은 $0.01\Omega{\cdot}cm$가 측정되었다.

졸겔 스핀 코팅에서 질산촉매가 티탄산연 박막의 물성에 미치는 영향 (The Effect of Nitric Acid Catalyst on the Properties of Lead Titanate Thin Films by Sol Gel Spin Coating)

  • 이전국;정형진;김종희
    • 한국세라믹학회지
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    • 제28권11호
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    • pp.859-864
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    • 1991
  • High quality lead titanate thin films were fabricated by spin coating on a silicon substrate. The resulting dried gel layers were uniform in thickness through 2$\times$2 $\textrm{cm}^2$ area, and polycrystalline perovskite structures developed almost crack free with a heat treatment above 50$0^{\circ}C$ in films with thickness above 360 nm. Metastable pyrochlore structures were observed in films with thickness of 160 nm when heat treated at 500 and $600^{\circ}C$, but these structure did not appear in films with thickness of 360 nm. The thickness dependence in crystal structure of films was studied. by varying the substrate condition and analyzing the interface between the film and substrate. In native oxide films on silicon stbstrates, amorphous dried gel layers were heterogeneously nucleated. Metastable cubic pyrochlore structure could be crystallized in amorphous native oxide.

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Synthesis and Dispersion Stabilization of Indium Tin Oxide Nanopowders by Coprecipitation and Sol-Gel Method for Transparent and Conductive Films

  • Cho, Young-Sang;Hong, Jeong-Jin;Kim, Young Kuk;Chung, Kook Chae;Choi, Chul Jin
    • 대한금속재료학회지
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    • 제48권9호
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    • pp.831-841
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    • 2010
  • Indium tin oxide (ITO) nanopowders were synthesized by coprecipitation and the sol-gel method to prepare a stable dispersion of ITO nano-colloid for antistatic coating of a display panel. The colloidal dispersions were prepared by attrition process with a vibratory milling apparatus using a suitable dispersant in organic solvent. The ITO coating solution was spin-coated on a glass panel followed by the deposition of partially hydrolyzed alkyl silicate as an over-coat layer. The double-layered coating films were characterized by measuring the sheet resistance and reflectance spectrum for antistatic and antireflective properties.