• 제목/요약/키워드: Sol-gel processes

검색결과 94건 처리시간 0.026초

반도체 공정에서 발생하는 폐실리콘 슬러지의 재활용을 통한 실리카 나노입자의 제조 및 합성법에 따른 형상 및 특성 비교 연구 (A Comparative Study on Morphologies and Characteristics of Silica Nanoparticles Recycled from Silicon Sludge Waste of Semiconductor Process Based on Synthesis Methods)

  • 김지원;사민기;추연룡;제갈석;김하영;김찬교;심형섭;윤창민
    • 유기물자원화
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    • 제31권3호
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    • pp.5-13
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    • 2023
  • 본 연구에서는 반도체 공정에서 발생하는 폐실리콘 슬러지를 활용하여 고부가가치의 실리카 나노입자로 합성하는 방법들에 대한 비교 연구를 수행하였다. 상세히는, 폐실리콘 슬러지 내에 존재하는 금속과 유기 불순물을 산세 처리를 통해 제거한 뒤 졸-겔법과 수열합성법을 통해 실리카 나노입자로 제조하였다. 두 가지 합성법을 통해 제조된 실리카 나노입자에 대한 다양한 형상 및 특성 분석을 진행하였다. 그 결과, 졸-겔법으로 제조된 실리카 나노입자는 순도가 높고 균일한 형상으로 합성되었으며, 수열합성법은 수율과 단순한 제조법의 이점을 확인할 수 있었다. 본 비교 연구는 폐실리콘 슬러지에서 실리카 나노입자를 제조하는 두 가지 합성법에 대한 상세한 실험 결과를 제시하여, 반도체 공정에서 발생하는 부산물을 활용한 고부가가치 소재 제조법 정립에 기여할 것으로 기대된다.

Synthesis And Ionic Conductivity of Siloxane Based Polymer Electrolytes with Propyl Butyrate Pendant Groups

  • Jalagonia, Natia;Tatrishvili, Tamara;Markarashvili, Eliza;Aneli, Jimsher;Grazulevicius, Jouzas Vidas;Mukbaniani, Omar
    • Korean Chemical Engineering Research
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    • 제54권1호
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    • pp.36-43
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    • 2016
  • Hydrosilylation reactions of 2.4.6.8-tetrahydro-2.4.6.8-tetramethylcyclotetrasiloxane with allyl butyrate catalyzed by Karstedt's, $H_2PtCl_6$ and Pt/C catalyst were studied and 2.4.6.8-tetra (propyl butyrate)-2.4.6.8-tetramethylcyclotetrasiloxane was obtained. The reaction order, activation energies and rate constants were determined. Ringopening polymerization of 2.4.6.8-tetra (propyl butyrate)-2.4.6.8-tetramethylcyclotetrasiloxane in the presence of $CaF_2$, LiF, KF and anhydrous potassium hydroxide in $60-70^{\circ}C$ temperature range was carried out and methylsiloxane oligomers with regular arrangement of propyl butyrate pendant groups were obtained. The synthesized products were studied by FTIR and NMR spectroscopy. The polysiloxanes were characterized by wide-angle X-ray, gel-permeation chromatography and DSC analyses. Via sol-gel processes of oligomers doped with lithium trifluoromethylsulfonate or lithium bis (trifluoromethylsulfonyl)imide, solid polymer electrolyte membranes were obtained. The dependences of ionic conductivity of obtained polyelectrolytes on temperature and salt concentration were investigated, and it was shown that electric conductivity of the polymer electrolyte membranes at room temperature changed in the range $3.5{\times}10^{-4}{\sim}6.4{\times}10^{-7}S/cm$.

알루미늄의 진공증발과 열산화에 의한 알루미나 복합분리막의 제조 및 특성분석 (Synthesis and Characterization of Alumina Composite Membrane by Al Evaporation and Thermal Oxidation)

  • 이동호;최두진;현상훈
    • 한국세라믹학회지
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    • 제32권3호
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    • pp.349-358
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    • 1995
  • The ceramic composite membrane was synthesized by thermal oxidation after evaporation of Al on the support prepared by slip casting process. Oxidation was performed at $700^{\circ}C$ and 80$0^{\circ}C$ under dry oxygen atmosphere. It was considered as optimum oxidation condition that the membrane showed a knudsen behaviro. A further oxidation resulted in an increase of gas permeability because top layer became densified. Then, a multi-layered composite membrane was synthesized through a sol-gel method, evaporation and thermal oxidation of Al coating processes. While the membrane was thermally stable up to 80$0^{\circ}C$, gas permeability was rapidly decreased even at a slight amount of deposition of Al.

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파인 물라이트 소결체에 대한 연구(II) (Studies on the Fine Sintered Mullite(II))

  • 김경용;김윤호;강선모;김병호;김석수
    • 한국세라믹학회지
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    • 제26권5호
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    • pp.631-636
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    • 1989
  • Submicron high-purity mullite powder was prepared by a colloidal sol-gel route. Boehmite and silica were the starting materials. 2wt% $\alpha$-Al2O3 or ZrO2 was used as a seeding material. The gelled powder was calcined at 130$0^{\circ}C$ for 100min and attrition milled for 3hrs. The mullite powder obtained was composed of submicrometer and uniform particles with a narrow size distribution. It was hot-pressed at 1$600^{\circ}C$ for 1hr under 10MPa or was sintered at 1$650^{\circ}C$ for 4hrs. The bulk densities of the products made by both processes were 3.14 and 3.12g/㎤. the mechanical, thermal and electrical properties of the sintered mullite were characterized by bending strength, thermal expansion coefficient, thermal conductivity, dielectric constant and dielectric loss, etc.

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Multi-mode Planar Waveguide Fabricated by a (110) Silicon Hard Master

  • Jung, Yu-Min;Kim, Yeong-Cheol
    • 한국전기전자재료학회논문지
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    • 제18권12호
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    • pp.1106-1110
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    • 2005
  • We fabricated (110) silicon hard master by using anisotropic wet etching for embossing. The etching chemical for the silicon wafer was a TMAH $25\%$ solution. The anisotropic wet etching produces a smooth sidewall surface and the surface roughness of the fabricated master is about 3 nm. After spin coating an organic-inorganic sol-gel hybrid material on a silicon substrate, we employed hot embossing technique operated at a low pressure and temperature to form patterns on the silicon substrate by using the fabricated master. We successfully fabricated the multi-mode planar optical waveguides showing low propagation loss of 0.4 dB/cm. The surface roughness of embossed patterns was uniform for more than 10 times of the embossing processes with a single hydrophobic surface treatment of the silicon hard master.

Effect of Seeding Layers on Preparation of PLZT Thin Films by Sol-Gel Method

  • Hirano, Tomio;Kawai, Hiroki;Suzuki, Hisao;Kaneko, Shoji;Wada, Tatsuya
    • The Korean Journal of Ceramics
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    • 제5권1호
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    • pp.50-54
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    • 1999
  • $(Pb_xLa_{1-x}) (Zr_yTi_{1-y})O_3$ (PLZT) thin films with electrooptic effect are promising for the optical application such as display or light shutter. However, it is difficult to use inexpensive and transparent glass substrates because the conventional process for preparation of PLZT requires temperatures above $600^{\circ}C$. In order to deposit a perovskite PLZT thin films at low processing temperatures through alkoxide route, we have offered several seeding processes which reduce the activation energy for crystallization. In this study, we optimized the stacking structure of multilayered PLZT for obtaining single phase perovskite at lower temperatures. As a result, ferroelectric PLZT thin films with different compositions were successfully prepared at a temperature as low at $500^{\circ}C$.

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초임계 건조에 의한 실리카 에어로겔의 저압 합성 (Low Pressure Synthesis of Silica Aerogels by Supercritical Drying)

  • 김동준;현상훈
    • 한국세라믹학회지
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    • 제33권5호
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    • pp.485-494
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    • 1996
  • Silica Aerogels with the density and porosity of 0.1g/cm3 and 96% were synthesized by two different supercri-tical drying processes (i.e additional solvent and intial pressure methods) Isoptopanol was chosen as sol-gel and supercritical drying solvents in order to synthesize aerogels at the lower temperature and pressure because the critical values of isopropanol are lower than those of methanol and ethanol commonly used. The P-V-T relationship of isopropanol was experimentally described for optimizing supercritical drying conditions such as the amount of extra solvent and supercritical drying temperature and pressure. In the addional solvent method monolithic and transparent aerogels were obtained by supercritical drying at 25$0^{\circ}C$ and 900 psing after 40% of the reactor volume was filled with isopropanol. Crack-free aerogels were synthesized at 25$0^{\circ}C$ and 1100~1200 psig by the initial pressure method with an intial nitrogen gas pressure of 400 psig and the isopropanol amount of 5% of the reactor volume.

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SYNTHESIS OF SILICA-COATED Au WITH Ag, Co, Cu, AND Ir BIMETALLIC RADIOISOTOPE NANOPARTICLE RADIOTRACERS

  • Jung, Jin-Hyuck;Jung, Sung-Hee;Kim, Sang-Ho;Choi, Seong-Ho
    • Nuclear Engineering and Technology
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    • 제44권8호
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    • pp.971-976
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    • 2012
  • Silica-coated Au with Ag, Co, Cu, and Ir bimetallic radioisotope nanoparticles were synthesized by neutron irradiation, after coating $SiO_2$ onto the bimetallic particles by the sol-gel St$\ddot{o}$ber process. Bimetallic nanoparticles were synthesized by irradiating aqueous bimetallic ions at room temperature. Their shell and core diameters were recorded by TEM to be 100 - 112 nm and 20 - 50 nm, respectively. The bimetallic radioisotope nanoparticles' gamma spectra showed that they each contained two gamma-emitting nuclides. The nanoparticles could be used as radiotracers in petrochemical and refinery processes that involve temperatures that would decompose conventional organic radioactive labels.

Chemical Solution Deposition of InGaZnO Thin Films As Active Channel Layers of Thin-Film Transistors

  • Son, Dae-Ho;Kim, Jung-Hye;Kim, Dae-Hwan;Sung, Shi-Joon;Jung, Eun-Ae;Kang, Jin-Kyu;Ha, Ki-Ryong
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.927-930
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    • 2009
  • We studied the solution processes of IGZO thin films and investigated the electrical characteristics of thin film transistor (TFT) with sol-gel processed InGaZn-oxide active semiconductor layer. In particular, the effect of composition variation and post annealing temperature were studied by using solutions having various metal cation ratios to optimize transistor performance.

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자성 및 발광 특성이 조절 가능한 다기능 코어/중간체/쉘 나노 입자 합성 (Synthesis of the Multifunctional Core/Intermediate/Shell Nanoparticles: Tunable Magnetic and Photoluminescence Properties)

  • 김문경;김세윤;문경석;신원호;정형모
    • 한국분말재료학회지
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    • 제26권6호
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    • pp.463-470
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    • 2019
  • Fe3O4/SiO2/YVO4:Eu3+ multifunctional nanoparticles are successfully synthesized by facile stepwise sol-gel processes. The multifunctional nanoparticles show a spherical shape with narrow size distribution (approximately 40 nm) and the phosphor shells are well crystallized. The Eu3+ shows strong photoluminescence (red emission at 619 nm, absorbance at 290 nm) due to an effective energy transfer from the vanadate group to Eu. Core-shell structured multifunctional nanoparticles have superparamagnetic properties at 300 K. Furthermore, the core-shell nanoparticles have a quick response time for the external magnetic field. These results suggest that the photoluminescence and magnetic properties could be easily tuned by either varying the number of coating processes or changing the phosphor elements. The nanoparticles may have potential applications for appropriate fields such as laser systems, optical amplifiers, security systems, and drug delivery materials.