• 제목/요약/키워드: Soft magnetic thin film

검색결과 64건 처리시간 0.027초

RF Integrated Electromagnetic-Noise Filters Incorporated with Nano-granular Co41Fe38AI13O8 Soft Magnetic Thin Films on Coplanar Transmission Line

  • Sohn, Jae-Cheon;Yamaguchi Masahiro;Lim, Sang-Ho;Han, Suk-Hee
    • Journal of Magnetics
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    • 제10권4호
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    • pp.163-170
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    • 2005
  • The RF integrated noise filters are fabricated by photolithography. The stack for the electromagnetic noise filters consists of the nano-granular ($Co_{41}Fe_{38}AI_{13}O_8$) soft magnetic film / $SiO_2$ / Cu transmission line / seed layer (Cu/Ti) / $SiO_2$-substrate. A good signal-attenuation feature along with a low signal-reflection feature is observed in the present filters. Especially in the noise filter incorporated with a $Co_{41}Fe_{38}AI_{13}O_8$ magnetic film with lateral dimensions of $2000{\mu}m$ wide, 15 mm long and $1{\mu}m$ thick, the maximum magnitude of signal attenuation reaches -55 dB, and the magnitude of signal reflection is below -10 dB in the overall frequency range. And this level of signal attenuation is much larger than that of a noise filter incorporated with a Fe magnetic film.

Thickness-dependent magnetic domain structures of Co ultra-thin film investigated by scanning transmission X-ray microscopy

  • Yoon, Ji-Soo;Kim, Namdong;Moon, Kyoung-Woong;Lee, Joo In;Kim, Jae-Sung;Shin, Hyun-Joon;Kim, Wondong
    • Current Applied Physics
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    • 제18권11호
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    • pp.1185-1189
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    • 2018
  • Thickness-dependent magnetic domain structure of ultrathin Co wedge films (0.3 nm-1.0 nm) sandwiched by Pt layers was investigated by scanning transmission x-ray microscopy (STXM) employing X-ray magnetic circular dichroism (XMCD), utilizing elliptically polarized soft x-rays and electromagnetic fields, with a spatial resolution of 50 nm. The magnetic domain images measured at the Co $L_3$ edge showed the evolution of the magnetic domain structures from maze-like form to the bubble-like form as the perpendicular magnetic field was applied. The asymmetric domain expansion of a 500 nm-scale bubble domain was also measured when the in-plane and perpendicular external magnetic field were applied simultaneously.

OBSERVATION OF THE DOMAIN STRUCTURES IN SOFT MAGNETIC ${(Fe_{97}Al_3)}_{85}N_{15}/Al_2O_3$ MULTILAYERS

  • Stobiecki, T.;Zoladz, M.;Roell, K.;Maass, W.
    • 한국자기학회:학술대회 개요집
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    • 한국자기학회 2002년도 동계연구발표회 논문개요집
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    • pp.14-15
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    • 2002
  • Iron nitride alloy films prepared in the form of laminated ${(Fe_{97}Al_3)}_{85}N_{15}/Al_2O_3$ multilayers (Ml's) due to excellent soft magnetic properties and high saturation magnetization [1, 2] are very promising materials for poles and shields in ultra high density thin film heads. The present work concerns the ferromagnetic (FM) coupling effect as a function of the thickness of $Al_2O_3$ spacers by analysis of the magnetic domain structure.

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Mn-Zn-Fe-O 금속타깃을 이용한 수직자기기록디스크의 하지연자성층용 Mn-Zn ferrite 박막제작 (Preparation for Mn-Zn Ferrite Soft Magnetic Underlayer Perpendicular Magnetic Recording Disk using Mn-Zn-Fe-O Metal Target)

  • 공석현;김경환
    • 한국전기전자재료학회논문지
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    • 제19권9호
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    • pp.883-887
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    • 2006
  • In order to attain high-rate deposition of Mn-Zn ferrite thin film for soft magnetic underlayer in perpendicular magnetic recording media, a reactive sputtering using powder-metal targets under the mixture gas of Ar and $O_{2}$ was performed. It was succeeded that Mn-Zn ferrite films with (111) crystal orientation were deposited on Pt(111) underlayer without any annealing process. The film revealed 3.4 kG of 4 ${\pi}Ms$, 70 Oe of coercivity. The deposition rate of the new method was 16 times as high as that of the conventional method using ferrite target.

Magnetic Properties of Nanocrystalline CoW Thin Film Alloys Electrodeposited from Citrate Baths

  • Park, Doek-Yong;Ko, Jang-Myoun
    • 전기화학회지
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    • 제6권4호
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    • pp.236-241
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    • 2003
  • Magnetic CoW thin film alloys were electrodeposited from citrate baths to investigate the resulting microstructure and magnetic properties. Deposit tungsten (W) content in the films electrodeposited at $70^{\circ}C$ were independent of current density, while coercivity decreased from hard $(H_{c,//}\~150\;Oe\;and\;H_{c.{\bot}}\;\~240\;Oe)$ to soft magnetic properties $(H_{c,//}\~20\;Oe\;and\;H_{c.{\bot}}\;\~30\;Oe)$ with increasing current densities from $10\;to\;100mA{\cdot}cm^2$, with deposit W content $(\~40\%)$ relatively unaffected by the applied current density. X-ray diffraction analysis indicated that hcp $Co_3W$ phases [(200), (201) and (220) planes] in the CoW films electrodeposited at $70^{\circ}C\;and\;10mA{\cdot}cm^{-2}$ were dominant, whereas amorphous CoW phases with small amount of hcp $Co_3W$ [(002) planes] were dominant with deposition at $70^{\circ}C\;and\;100mA{\cdot}cm^{-2}$. At intermediate current densities $(25\;and\;50mA{\cdot}cm^{-2}),\;hop\;Co_3W$ phases [(200), (002), (201) and (220)] were observed. The average grain size was measured to be 30 nm from Sheller formula. It is suggested that the change of the deposit coercivities in the CoW thin films electrodeposited at $70^{\circ}C$ is attributed to the change of microstructures with varying the current density. Nanostructured $Co_3W/amorphous-CoW$ multilayers were fabricated by alternating current density between 10 and $100 mA{\cdot}cm^{-2}$, varying the individual layer thickness. The magnetic properties of $Co_3W/amorphous-CoW$ multilayers were strongly dependent on the thickness of the alternating hard and soft magnetic thin films. The nanostructured $Co_3W/amorphous-CoW$ multilayers exhibited a shift from low to high coercivities suggesting a strong coupling effect.

Nano-Granular Co-Fe-AI-O Soft Ferromagnetic Thin Films for GHz Magnetic Device Applications

  • Sohn, Jae-Cheon;Byun, Dong-Jin
    • 한국세라믹학회지
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    • 제43권3호
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    • pp.143-147
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    • 2006
  • Co-Fe-Al-O nanogranular thin films were fabricated by RF-magnetron sputtering under an $Ar+O_2$ atmosphere. High resolution transmission electron microscopy revealed that the Co-Fe-Al-O films are composed of bcc (Co, Fe) nanograins finer than 5 nm and an Al-O amorphous phase. A very large electrical resistivity of $374{\mu}{\Omega}cm$ was obtained, together with a large uniaxial anisotropy field of 50 Oe, a hard axis coercivity of 1.25 Oe, and a saturation magnetization of 12.9 kG. The actual part of the relative permeability was measured to be 260 at low frequencies and this value was maintained up to 1.3 GHz. The ferromagnetic resonance frequency was 2.24 GHz. The resulting Co-Fe-Al-O nanogranular thin films with a high electrical resistivity and high resonance frequency are considered to be suitable for GHz magnetic device applications.

비정질 CoZrNb 박막의 불균일 구조와 고주파 자기특성에 관한 연구 (Study on Heterogeneous Structures and High-Frequency Magnetic Properties Amorphous CoZrNb Thin Films)

  • 정인섭;허재헌
    • 한국자기학회지
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    • 제1권2호
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    • pp.31-36
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    • 1991
  • 스퍼터링에 의해 형성된 비정질 Co/sub 87/Zr/sub 4/Nb/sub 9/ 박막을 TEM과 EDS로 분석하여 박막의 구조적 그리고 저성적 불균일성을 관찰하였다. 특히 기판 bias를 가한 상태에서 제조된 박막을 회전 자장 열처리했을 때는 Co-rich 지역과 (Zrnb) oxied-rich 지역의 조대한 조직으로 분리되었으며, 이러한 박 막의 자기적 특성은 'ultra-soft'한 성질을 나타내었다. Ulta-soft함 박막은 H/sub c/=0.18 Oe, H/sub k/ = 0.55 Oe, M/sub r//M/sub s/=0.75의 자기적 특성과 overdamping된 고주파특성, 그리고 외부자계에 대한 자화율 변화곡선이 가역적이고 연속적이라는 특이한 현상을 보인다. 조성적으로 불균일한 박막의 ultra-soft 한 특성은 Co-rich 입자들이 exchange coupling energy와 magnetostatic coupling energy를 최소화 하기 위해 만드는 vortex형의 자화분포로써 설명되었다. 즉 vortex 는 여러개의 co-rich 입자들로 형성 되어있는 것으로 추정되며, 수평, 수직방향으로의 반자장 계수(demagnetizing factor)가 각각 flux closure 와 flux reversal에 의해 무시되기 때문에 vortex로 부터 CoZrNb 박막의 ultra-soft 특성을 설명할 수 있었다.

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