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http://dx.doi.org/10.4313/JKEM.2006.19.9.883

Preparation for Mn-Zn Ferrite Soft Magnetic Underlayer Perpendicular Magnetic Recording Disk using Mn-Zn-Fe-O Metal Target  

Kong, Sok-Hyun (삼선종합기술원)
Kim, Kyung-Hwan (경원대학교 전기정보공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.19, no.9, 2006 , pp. 883-887 More about this Journal
Abstract
In order to attain high-rate deposition of Mn-Zn ferrite thin film for soft magnetic underlayer in perpendicular magnetic recording media, a reactive sputtering using powder-metal targets under the mixture gas of Ar and $O_{2}$ was performed. It was succeeded that Mn-Zn ferrite films with (111) crystal orientation were deposited on Pt(111) underlayer without any annealing process. The film revealed 3.4 kG of 4 ${\pi}Ms$, 70 Oe of coercivity. The deposition rate of the new method was 16 times as high as that of the conventional method using ferrite target.
Keywords
Mn-Zn ferrite; Perpendicular magnetic recording media; Reactive sputtering;
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