• Title/Summary/Keyword: Soft magnetic thin film

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A Study of Shielding Property of Magnetic Field for the Film Impregnated with Soft Magnetic Powder (연자성 합금분말을 함침시킨 필름의 자계 차폐 특성 연구)

  • Park, Jong-Hyun;Ra, Keuk-Hwan;Kang, Eun-Kyun;Kim, Jin-Woo
    • Journal of the Institute of Electronics and Information Engineers
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    • v.51 no.1
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    • pp.211-218
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    • 2014
  • In this paper the magnetic field properties of the soft magnetic alloys (Fe-Si-Cr and Fe-Ni-Cr) are studied in advance for the development of electro-magnetic shielding films, which could be used in the IT Devices (NFC, mobile phone, computer, etc.).As a result each of the selected soft magnetic alloy melts of the corresponding compositions is water-dispersed into the disk-shaped grains, which are soaked in polymer resin, and of which two types of thin film of thickness 0.1mm and 1mm are made by passing through the heating calendar roller. And the magnetic permeability and the shielding effectiveness of the polymer films containing the soft magnetic alloy grains are measured over the whole frequency bands from the low frequency to 10GHz. Before the experiments of the soft magnetic alloy, a special equation is proposed to estimate the permeability of the alloy, and the equation is verified with the pre-published data by MATLAB, and from which the most optimal compositions can be decided. And the SE(Shielding Effectiveness) of the polymer films containing the soft magnetic alloy grains is simulated by the HFSS.

Magnetic and Magnetostrictive Properties of Nanogranular Co-Fe Based Alloys: A Particular Emphasis on High Frequency Applications

  • Sohn, J.C.;Byun, D.J.;Lim, S.H.
    • Journal of the Korean Magnetics Society
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    • v.13 no.4
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    • pp.133-154
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    • 2003
  • A comprehensive review is given in this article on magnetic and magnetostrictive properties of nanogranular Co-Fe based alloys, with a particular emphasis on high frequency applications. Structural and physical properties are firstly described, followed by magnetic and magnetostrictive properties. Materials of both thin film and bulk forms are considered. A detailed description on high frequency characteristics of Co-Fe based soft magnetic thin films is then presented.

The Magnetic Properties of Co-Ni-Fe-N Soft Magnetic Thin Films

  • Kim, Y. M.;Park, D.;Kim, K. H.;Kim, J.;S. H. Han;Kim, H. J.
    • Journal of Magnetics
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    • v.5 no.4
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    • pp.120-123
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    • 2000
  • Co-Ni-Fe-N thin films were fabricated by a $N_2$ reactive rf magnetron sputtering method. The nitrogen partial pressure ($P_{N2}$) was varied in the range 0~10% . As$P_{N2}$ increases in this range, the saturation magnetization $B_s$ linearly decreases from 19.8 kG to 14 kG and the electrical resistivity ($\rho$) increases from 27 to 155 $\mu\Omegacm$. The coercivity $H_c$ exhibits the minimum value at 4% $P_{N2}$. The magnetic anisotropy fields ($H_k$) are in the range of 20$\sim$50 Oe. High frequency characteristics of $(Co_{22.2}Ni_{27.6}Fe_{50.2})_{100-x}N_x$ films are excellent in the range of 3$\sim$5% of $P_{N2}$. In particular, the effective permeability of the film fabricated at 4% $P_{N2}$ is 800, which is maintained up to 600 MHz. This film also shows Bs of 17.5 kG, $H_c$/ of 1.4 Oe, resistivity of 98$\mu\Omegacm$ and $H_k$ of about 25 Oe. Also, the corrosion resistance of $(Co_{22.2}Ni_{27.6}Fe_{50.2})_{100-x}N_x$ films was imp roved with increasing N concentration.

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THE MAGNETIC PROPERTIES OF Co-Ni-Fe-N SOFT MAGNETIC THIN FILMS

  • Kim, Y. M.;Park, D.;Kim, K. H.;Kim, J.;S. H. Han;Kim, H. J.
    • Proceedings of the Korean Magnestics Society Conference
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    • 2000.09a
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    • pp.492-499
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    • 2000
  • Co-Ni-Fe-N thin films were fabricated by a N$\sub$2/ reactive rf magnetron sputtering method. The nitrogen partial pressure (P$\sub$N2/) was varied in the range of 0∼10%. As P$\sub$N2/ increases in this range, the saturation magnetization (B$\sub$s/) linearly decreases from 19.8 kG to 14 kG and the electrical resistivity ($\rho$) increased from 27 to 155 ${\mu}$$\Omega$cm. The coercivity (H$\sub$c/) exhibits the minimum value at 4% of P$\sub$N2/. The magnetic anisotropy (H$\sub$k/) are in the range of 20∼50 Oe. High frequency characteristics of (Co$\sub$22.2/Ni$\sub$27.6/Fe$\sub$50.2/)$\sub$100-x/N$\sub$x/ films are excellent in the range of 3∼5% of P$\sub$N2/. Especially the effective permeability of the film fabricated at 4% of P$\sub$N2/ is 800, which is maintained up to 600 MHz. This film also shows Bs of 17.5 kG, H$\sub$c/ of 1.4 Oe, resistivity of 98 $\Omega$cm and H$\sub$k/ of about 25 Oe. Also, the corrosion resistance of (Co$\sub$22.2/Ni$\sub$27.6/Fe$\sub$50.2/)$\sub$100-x/N$\sub$x/ were improved with the increase in N concentration.

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Phase transformation and magnetic properties of NiFe thin films on Si(100) wafer and SiO2/Si(100) substrate by co-sputtering (Si(100) wafer와 SiO2/Si(100) 기판에 동시 스퍼터링법으로 증착된 NiFe 합금 박막의 상변화 및 자기적 특성)

  • Kang, Dae-Sik;Song, Jong-Han;Nam, Joong-Hee;Cho, Jeong-Ho;Chun, Myoung-Pyo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.20 no.5
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    • pp.216-220
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    • 2010
  • Ni-Fe alloys have various applications such as thin film inductor, thin film transformer, magnetic head's shield case, etc. Magnetic properties of Ni-Fe thin films depend on the process parameters such as thickness, contents, deposition rate, substrates, etc. In this study, NiFe films with a thickness of about 150nm were deposited on Si(100) wafer and $SiO_2$/Si(100) substrate at room temperature by a DC magnetron co-sputtering using Fe and Ni targets. Their phase formation and magnetic properties as a function of annealing temperature were investigated with XRD, FE-SEM and VSM. The assputtered films have BCC structure. With increasing annealing temperature, NiFe thin film for $SiO_2$/Si(100) substrate transformed completely from BCC to FCC phase above $500^{\circ}C$, but some BCC phase remained above $500^{\circ}C$ on Si(100) wafer. For samples annealed at $450^{\circ}C$, squareness ratio of NiFe thin film shows peak value and its saturation magnetization is around 0.0118 emu, which means that the optimum annealing temperature of NiFe thin film seems to be $450^{\circ}C$. The saturation magnetization of films decreased rapidly above the annealing temperature of $500^{\circ}C$ due to phase transformation from BCC to FCC phase.

Fabrication of RF Inductor Using FeTaN Patterned Soft Magnetic Films (Patterned FeTaN 연자성 박막을 이용한 RF inductor의 제조)

  • Bae, Seok;Kim, Choong-Sik;Ryu, Sung-Ryong;Nam, Seoung-Eui;Kim, Hyoung-June;Song, Jae-Sung;Yamaguchi, Masahiro
    • Journal of the Korean Magnetics Society
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    • v.11 no.6
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    • pp.239-244
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    • 2001
  • Recently, RF inductor having researched by many workers, we fabricated and investigated properties of RF inductors. In order to improve the Q-factor (Quality), we try to apply the patterned Fe$_{78.81}$Ta$_{8.47}$N$_{12.71}$ soft magnetic thin film of 5000 which shows magnetic anisotropy of 30 Oe. Thus, patterned magnetic film was artificially increased magnetic anisotropy lead to increasing of ferro-magnetic resonance frequency up to GHz band. Coil as part of inductor was fabricated by lift off process. The dimension of RF inductor was designed 47un, rectangular shape, and measured properties. In the case of Ti/Ag air core type inductor shows Q of 9, inductance of 8.4 nH at 2 GHz. Magnetic film employed inductor shows inductance of 9 nH and FMR resonance frequency was 700 MHz.

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A Study on the Magnetic Properties of the Co-Ni-P thin Plate by Electroless Plating (무전해도금법에 의한 Co-Ni-P 박막의 자기적특성에 관한 연구)

  • Kim, C.W.;Lee, C.;Yoon, S.R.;Joung, I.
    • Korean Journal of Materials Research
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    • v.5 no.8
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    • pp.1013-1019
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    • 1995
  • The thin plate of Co-Ni-P was deposited on the polyester film by the electroless plating method. Through present experiments, deposition rates and metal compositions of the plates were determined according to compositions of solution, pH and temperature. Also, magnetic properties of plates were examined according to metal compositions. Considering magnetic properties and deposition rates of electroless plating, the best condition was obtained as pH of 8.5 and 90℃. It was observed that metal compositions were evidently varied by the pH of solutions and the concentration of complex agents. However. they were not affected by other factors. At the optimum condition, the composition of the plate was Co(78%), Ni(16%), and P(6%). Also, it was found that the coercive force was 370 Oe, and squareness was 0.65 at this condition. Magnetic properties (hard or soft) of thin plates were determined by metal compositions. Therefore. the plate became soft magnetic plate as the composition of nickel increased over 30 per cents. The crystal structure of the soft magnetic plate was found to be amorphous in which it was strongly oriented to the (111)phahe of nickel. On the ohter hand, the hard magnetic place was found to be hcp crystalline of α-cobalt which was oriented to the (101)phase of cobalt and the (100)phase of cobalt.

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An Electrochemical Analysis on the Alloy Deposition of 80Ni-20Fe Permalloy Thin Film (80Ni-20Fe Permalloy 박모 동시석출 기구에 관한 전기화학적 고찰)

  • Lee, K. H.;Kang, Tak;Ra, H. Y.
    • Journal of the Korean institute of surface engineering
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    • v.15 no.1
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    • pp.11-18
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    • 1982
  • 80% Ni-Permalloy is soft magnetic material with high initial permeability and low magnetic coercive force Hc, and is used to computer memory cores and minirelays of communication e-ngineering. In this paper 80 Permalloy thin film on copper cathode was alloy-deposited from Watts so-lution contatining FeSO4$.$7H2O. The amount of FeSO4$.$7H2O in the solution, pH, temperature of the solution and plating current density were varied as parameters and the resulting comp-osition changes of deposited film were analyzed electrochemically with respect to the parame-ters. From the above procedure electroplating conditions for deposition of 80 Permalloy were est-ablished as following: 17-21 g/$\ell$ of FeSO4$.$7H2O in Watts solution, current density 1.0-2.0 Amp/dm2, pH 2.5-3.0 and temperature range of 50-60$^{\circ}C$.

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Inductive Micro Thin Film Sensor for Metallic Surface Crack Detection (금속 표면결함 검출용 자기유도 마이크로 박막 센서)

  • Kim, Ki-Hyeon
    • Journal of the Korean Society for Nondestructive Testing
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    • v.28 no.5
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    • pp.395-400
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    • 2008
  • Alternating magnetic field was used for detection of surface flaws on nonmagnetic and magnetic metallic specimens. The nondestructive sensor probe was composed of the planar coil with inductive magnetic thin film yoke as a sensing component and a single straight typed exciting coil. The planar inductive coil sensor with magnetic yoke was fabricated by sputtering, electroplating, dry etching and photolithography process. The alternative currents with the range of 0.1A to 1.0A (0.7 MHz to 1.8 MHz) were applied to the exciting coil. The specimens were prepared with the slit shaped artificial surface flaws (minimum depth and width; 0.5 mm) on metallic plate (Al; nonmagnetic metal and FeC; magnetic metal). The detected signal for the positions and shapes of surface flaws on specimens were obtained with high sensitivity and high signal to ratio. The measured output signals by the non-contacted scanning on surface of FeC specimen with micron-sized crack were converted to the images of the flaws. And these results were compared with the optical images, respectively.