• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.32-32
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• 2011

Plasma etching is used in microelectronic processing for patterning of micro- and nano-scale devices. Commonly, optical emission spectroscopy (OES) is widely used for real-time endpoint detection for plasma etching. However, if the viewport for optical-emission monitoring becomes blurred by polymer film due to prolonged use of the etching system, optical-emission monitoring becomes impossible. In addition, when the exposed area ratio on the wafer is small, changes in the optical emission are so slight that it is almost impossible to detect the endpoint of etching. For this reason, as a simple method of detecting variations in plasma without contamination of the reaction chamber at low cost, a method of measuring plasma impedance is being examined. The object in this research is to investigate the suitability of using plasma impedance monitoring (PIM) with statistical approach for real-time endpoint detection of $SiO_2$ etching. The endpoint was determined by impedance signal variation from I-V monitor (VI probe). However, the signal variation at the endpoint is too weak to determine endpoint when $SiO_2$ film on Si wafer is etched by fluorocarbon plasma on inductive coupled plasma (ICP) etcher. Therefore, modified principal component analysis (mPCA) is applied to them for increasing sensitivity. For verifying this method, detected endpoint from impedance analysis is compared with optical emission spectroscopy (OES). From impedance data, we tried to analyze physical properties of plasma, and real-time endpoint detection can be achieved.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.213-213
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• 2011

DC arc plasmatron is powerful plasma source to apply etching and texturing processing. Even though DC arc plasmatron has many advantages, it is difficult to apply an industry due to the small applied area. To increase an effective processing area, we suggest a DC-RF hybrid plasma system. The DC-RF hybrid plasma system was designed and made. This system consists of a DC arc plasmatron, RF parts, reaction chamber, power feeder, gas control system and vacuum system. To investigate a DC-RF hybrid plasma, we used a Langmuir probe, OES (Optical emission spectroscopy), infrared (IR) light camera. For RF matching, PSIM software was used to simulate a current of an impedance coil. The results of Langmuir probe measurements, we obtain a homogeneous plasma density and electron temperature those are about $1{\times}1010$ #/cm3 and 1~4 eV. The DC-RF hybrid plasma source is applied for plasma etching experimental, and we obtain an etching rate of 10 ${\mu}m$/min. through a 90 mm of reaction chamber diameter.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.320-320
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• 2013

Film thickness monitoring with plasma impedance monitoring (PIM) is demonstrated for small area $SiO_2$ RF plasma etching processes in this work. The chamber conditions were monitored by the impedance signal variation from the I-V monitoring system. Moreover, modified principal component analysis (mPCA) was applied to estimate the $SiO_2$ film thickness. For verification, the PIM was compared with optical emission spectroscopy (OES) signals which are widely used in the semiconductor industry. The results indicated that film thickness can be estimated by 1st principal component (PC) and 2nd PC. Film thickness monitoring of small area $SiO_2$ etching was successfully demonstrated with RF plasma harmonic impedance monitoring and mPCA. We believe that this technique can be potentially applied to plasma etching processes as a sensitive process monitoring tool.

• Journal of the Korean Wood Science and Technology
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• v.36 no.6
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• pp.49-58
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• 2008

This research was carried out to use green tea leaves powder for scavenging effects of volatile organic compounds on the UV varnishes and adhesives of fancy cherry veneer overlaid on the PF resin bonded Meranti plywood. The results are as follows: 1) Green tea leaves contained 9.85% of polyphenol compounds. 2) FT-IR results showed green tea leaves had effects to react with benzaldehyde and ethyl hexyl alcohol to form a chemical bond. 3) 2.5% of green tea leaves powder content was proper for scavenging effect on the UV varnishes and adhesives of fancy veneer overlaid on the PF resin bonded plywood 4) 20 liters small chamber test indicated excellent emission speed results such as $0.089mg/m^2hr$ of TVOC and $0.001mg/m^2hr$ of HCHO (on 7th day), as compared with standard (less than $0.1mg/m^2hr$ of TVOC and $0.015mg/m^2hr$ of HCHO emission are the excellent grade).

• Korean Journal of Environmental Agriculture
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• v.31 no.4
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• pp.375-377
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• 2012

BACKGROUND: Hairy ventch (Vicia villosa) is a good green manure for supplying nitrogen in arable soil. Ammonia emission from rice fields can occur, and the degree of this emission can be great. However, quantitative information of ammonia emission from paddy soil using green manure is required to obtain emission factors for rice cropping in Korea. METHODS AND RESULTS: Ammonia emission from flooding soil with different application rate of hairy vetch was measured using the closed chamber method. For this study, hairy vetch was applied at rates of 0 (control), 500 (H500), 1000 (H1000), 2000 (H2000), and 3000 (H3000) kg/ha (fresh matter basis). This experiment was conducted for 54 days under flooding condition. The total NH3 emission throughout the experiment period was 0.32, 0.54, 1.20, 4.20, and 6.20 kg/ha for control, H500, H1000, H2000, and H3000, respectively. The ratio of NH3 emission to applied nitrogen by hairy vetch for each treatment was 0.7, 1.4, 3.2, and 3.2% for H500, H1000, H2000, and H3000, respectively. CONCLUSION(S): A very small amount of ammonia emission was recorded in the present study. Therefore, the use of hairy vetch in paddy field instead of chemical fertilizer can reduce ammonia emissions.

• Korean Journal of Soil Science and Fertilizer
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• v.28 no.2
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• pp.183-190
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• 1995

Various factors such as sampling height in the chamber, sampling interval, sampling time at daytime and the effects of pedoturbation on methane emission during chamber installation were evaluated using a simplified closed static chamber method to measure methane flux in paddy soils. Sampling height of the chamber for representative samples was 65cm. An additional DC fan was required to attain an even methane gradient in the chamber. Considering the change of methane concentration and air temperature in the chamber, sampling is recommended to finish within 30 minutes after starting sampling. The aim of setting DC fan in the chamber was to get the thermal equilibrium in the chamber as well as the representative samples. Suitable time to collect the gas samples representing the day's methane flux was 0900~1200 hours. Gas sampling was possible even after installation of small chambers if the elapsed time was more than 6 hours and supporting stand would be to be added to minimize pedoturbation.

• Land and Housing Review
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• v.10 no.2
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• pp.45-51
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• 2019

The purpose of this study was to examine the performance of formaldehyde removal from building materials using catechin contained in ginkgo leaf. A small chamber method was used to set up one control group and three experimental groups. As a result, it showed a reduction of formaldehyde from at least 73.5% to 77% when it was increased by 0.4g compared to the control (0g). In addition, it was confirmed by linear regression analysis that the amount of ginkgo leaf and the amount of formaldehyde emission were negatively correlated. Therefore, it was confirmed that the amount of formaldehyde emission was affected by ginkgo leaf.

• Transactions on Electrical and Electronic Materials
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• v.1 no.2
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• pp.1-6
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• 2000

This article presents the experiments and considerations possible about gate etching in polysilicon when oxygen gas is added in chamber, We propose the novel study with optical emission spectroscopy in polysilicon etching. It is shown that added oxygen gases play an important role in enhencement of density in chlorine gases as a scavenger of silicon from SiCl$\_$x/. And a small amount of Si-O bonds are deposited and then the deposited thin film protect silicon dioxyde against reaction chlorine with silicon in SiO$_2$. Consequently, we can improve the selectivity of polysilicon the silicon dioxide, which is clearly explained in this model.

• Journal of Korean Society for Atmospheric Environment
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• v.25 no.1
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• pp.38-45
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• 2009

Since the seventies and the oil crisis, energy-saving measures have led to a reduction in the ventilation of room. The use of synthetic materials which emit various chemical substances had led to an increase in the concentration of indoor pollutants. "Sick building syndrome (SBS)" and "Sick house syndrome (SHS)" are worldwide problems. Also, the number of complaints about indoor air pollution caused by VOCs (Volatile organic compound) and HCHO (Formaldehyde) has increased. It is important that evaluating and understanding emission of indoor air pollutant from building materials. The object of this study was to evaluate emission test method for flooring such as wood based flooring, carpet tile, rubber tile, PVC sheet and tile, and to determine emission of TVOC and form-aldehyde. The quantity of TVOC and carbonyl compounds emission were sampled and measured by Tenax TA and gas chromatography/mass spectrometry (GC/MSD), 2,4-DNPH cartrige with ozone scrubber and high performance liquid from flooring. The TVOC concentration emitted from carpet tile was ($7.419\;mg/m^2 h$) the highest among 5 groups of test materials. In wood based flooring and PVC tile, the emitted concentration of toluene was high. And the dodecane emission was highest in carpet. The concentration of TVOC decreased by an increase in emission test period. After 7 days, the concentration of TVOC from floorings were about 50% below of the concentration at the first day. TVOC emission from wood based flooring, carpet tile, rubber tile, PVC sheet and tile were decreased in 28 days and remained steady after about 15 days. The concentration of formaldehyde emission from floorings showed extremely low.

• Analytical Science and Technology
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• v.23 no.3
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• pp.255-260
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• 2010

The Ministry of Environment simultaneously revised testing methods and emission standards of adhesives product on the "Law of indoor air quality management" for the effective management of the building materials releasing pollutants in great quantities. Accordingly, it is impossible to compare original standards with revised standards directly. The influences of each factor of the revised testing methods of adhesive product on the emission rate of pollutants are reviewed through comparing with the original testing method. Through this study, revised pollutant emission control standards were assessed. With the result that it is found that emission rate of adhesives product is weakened two and half times by changing test period and the emission rate resulting from changing drying time has little difference. As a result of comparing TVOC emission standards with the original testing method considering the modification of testing methods, it is found that the emission standard through this revision is strengthened about 2.1 times more than that of present testing method.