• 한국전기전자재료학회논문지
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• 제14권9호
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• pp.707-713
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• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was requirdfo the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gest thinner, micro-scratches are becoming as major defects. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}{\textrm}{m}$ point of use (POU) filter, which is depth-type filter and has 80% filtering efficiency for the 1.0${\mu}{\textrm}{m}$ size particle. In this paper, we studied the relationship between defect generation and polished wafer counts to understand the exact efficiency fo the slurry filteration, and to find out the appropriate pad usage. Our experimental results showed that it sis impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the slurry flow rate, and to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of depth type filter.

• 한국축산시설환경학회지
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• 제20권4호
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• pp.195-200
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• 2014

Liquid fertilization of pig manure slurry is very useful treatment method to recycle organic waste matter as a valuable fertilizer. The solids precipitate and accumulated at the bottom of liquid fertilization tank. The content of nitrogen and phosphate are higher in sediment than pig manure slurry. The pH of sediment was 7.53. S-COD/T-COD ratio of pig manure slurry and sediment were 0.477, 0.29, respectively. The moisture content of sediment of pig manure slurry and sediment were 80.45~83.82%, 97%, respectively. The content of organic matter of sediment was 8.79~10.56%. The content of nitrogen and phosphate of sediment and pig manure slurry were 9,000~11,100 mg/L, 9,100~11,100 mg/L, respectively. The particle size of pig manure slurry was distributed from 2 mm to 0.125 mm. On the other hand. the particle size of sediment was under 0.125 mm.

• Nuclear Engineering and Technology
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• 제55권11호
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• pp.4213-4227
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• 2023

Computer Automated Radioactive Particle Tracking (CARPT) technique has been successfully utilized to measure the velocity profiles and mixing parameters in different multiphase flow systems where a single radioactive tracer is used to track the tagged phase. However, many industrial processes use a wide range of particles with different physical properties where solid particles could vary in size, shape and density. For application in such systems, the capability of current single tracer CARPT can be advanced to track more than one particle simultaneously. Tracking multiple particles will thus enable to track the motion of particles of different size shape and density, determine segregation of particles and probing particle interactions. In this work, a newly developed Multiple Radioactive Particle Tracking technique (M-RPT) used to track two different radioactive tracers is demonstrated. The M-RPT electronics was developed that can differentiate between gamma counts obtained from the different radioactive tracers on the basis of their gamma energy peak. The M-RPT technique was validated by tracking two stationary and moving particles (Sc-46 and Co-60) simultaneously. Finally, M-RPT was successfully implemented to track two phases, solid and liquid, simultaneously in three phase slurry bubble column reactors.

• International Journal of Air-Conditioning and Refrigeration
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• 제13권4호
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• pp.175-183
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• 2005

The present study has been conducted for manufacturing MPCM (microencapsulated phase change material) slurry with in-situ polymerization and proving their applicabilities for cooling system. The tetradecane as a core material of MPCM is coated with melamine. The produced capsules are observed by the optical microscope and SEM for superficial shapes and analysed their properties by DSC and particle size distribution by FA particle analyzer. It is found that narrow size distribution in 1 to $10{\mu}m$ is resulted in $5{\mu}m$ of average diameter and $9^{\circ}C$ melting temperature. The durability of MPCM capsules is tested with various types of pumps such as centrifugal, peristaltic, and mono. For the centrifugal and peristaltic pumps the breakage fraction of the capsules is resulted within $6\%$ during 10,000 cycles, while the mono is over $8\%$. The cooling system, which has adopted MPCM slurry as a medium for transporting cold thermal energy, is designed to investigate the performance of newly developed coolant. The discharging times of cold energy in circulating 10 and $20wt\%$ MPCM slurry are lasted to 105 and 285 minutes, respectively.

• 한국입자에어로졸학회지
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• 제9권4호
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• pp.261-269
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• 2013

The chemical mechanical polishing (CMP) process is widely used in semiconductor manufacturing process for planarization of various materials and structures. Point-of-use (POU) filters are used in most of the CMP processes in order to reduce the unwanted micro-scratches which may result in defects. The performance of the POU filter is depends on type and size of the abrasives used during cleaning process. For this reason, there is a need to evaluate POU filters for their filtration efficiency (FE) with different types of abrasives. In this study, we developed filter test system to evaluate the FE of POU using ceria and silica abrasives (slurry). The POU filter is roll type capsule filter with retention size of 0.2 ${\mu}m$. Two POU filters of different make are evaluated for FE. We observed that both POU filters show similar filtration efficiency for silica and ceria slurry. Results reveal that the ceria slurry and the colloidal silica particle are removed not only by mechanical way but also hydrodynamic and electrostatic interaction way.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.166-169
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• 2003

In this study, we evaluated the characteristics by the addition of 3 different kinds of nonionic surfactant to improve the dispersion stability of slurries. Slurry stability is an issue in any industry in which settling of particles can result in poor performance. So we observed the variation of particle size and settling rate when the concentration and addition time of surfactant are changed. When the surfactant is added after milling process, the particle size and pH became low. It is supposed that the particle agglomeration was disturbed by adsorption of surfactant on alumina abrasive. The settling rate was relatively stable when nonionic surfactant is added about 0.1~1.0 wt%. When molecular weight(MW) is too small like Brij 35, it was appeared low effect on dispersion stability. Because it can't prevent coagulation and subsequent settling with too small MW. The proper quality of MW for slurry stability was presented about 500,000. Consequently, the addition of nonionic surfactant to alumina slurry has been shown to have very good effect on slurry stabilization. If we apply this results to copper CMP process, it is thought that we will be able to obtain better yield.

• Geomechanics and Engineering
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• 제13권2호
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• pp.319-331
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• 2017

This vacuum preloading combined with polyacrylamide (PAM) flocculation was proposed to separating solid-liquid in waste slurry and to improving bearing capacity of soft soil ground. By using waste slurry taken from drilled shaft construction site in Shanghai, China, a series of settling column tests with four typical flocculants and one normal for waste slurry were carried out for comparative analysis. The optimal amounts for each flocculant were obtained from the column tests. Then, model tests on vacuum preloading with anionic polyacrylamide (APAM) flocculation and without flocculants were carried out. The out of water and the settlement of slurry surface ground were monitored during the model tests, and the changes in water content, particle-size and pore-size distributions in different positions after the model tests were measured and discussed. It is found that water content of the waste slurry without APAM flocculation changed from 204 to 195% by 24 hours standing and 15 hours vacuum preloading, while the water content of the waste slurry with APAM flocculation was declined from 163 to 96% by 24 hours standing, and was further reduced into 37% by 136 hours vacuum preloading, which shows that the combined method is feasible and effective.

• Korea-Australia Rheology Journal
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• 제13권1호
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• pp.47-54
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• 2001

Prediction of the maximum packing volume fraction with non-spherical particles has been one of the important problems in powder technology. The sphericity of fly ash particles depending on the particle diameter was measured by means of a CCD image processing instrument. An algorithm to predict the maximum packing volume fraction with non-spherical particles is proposed. The maximum packing volume fraction is used to predict the slurry viscosity under well dispersed conditions. For this purpose, Simha's cell model is applied for concentrated slurry with wide particle size distribution. Also, Usui's model developed for aggregative slurries is applied to predict the non-Newtonian viscosity of dense fly ash - water slurry. It is certified that the maximum packing volume fraction for non-spherical particles can be successfully used to predict slurry viscosity. The pressure drop in a pipe flow is predicted by using the non-Newtonian viscosity of dense fly ash-water slurry obtained by the present model. The predicted relationship between pressure drop and flow rate results in a good agreement with the experimented data obtained for a test rig with 50 mm inner diameter tube. Base on the design procedure proposed in this study, a feasibility study of fly ash hydraulic transportation system from a coal-fired power station to a controlled deposit site is carried out to give a future prospect of inexpensive fly ash transportation technology.

• 한국추진공학회지
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• 제13권3호
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• pp.34-40
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• 2009

카본슬러리 연료 제조 시 카본의 분산안정성에 미치는 공정변수의 영향을 조사하였다. 카본슬러리연료의 분산안정성은 위치별 입도분석, 카본함량 분석, 그리고 원심분리 후 분산상태 관찰을 통해서 측정하였다. 여러 종류의 첨가제를 적용한 결과, NB463S84 사용시 분산성과 분산안정성이 가장 우수한 것을 알 수 있었다. NB463S84와 비슷한 작용기를 가지는 PIBSI를 합성하였으며, 이를 카본슬러리 연료에 적용하여 유사한 분산안정도를 얻었다. 끝으로 g 규모에서 얻은 제조 조건을 kg 규모 제조에 적용하여 카본슬러리 연료의 실용화 가능성을 확인하였다.

• 한국해양공학회:학술대회논문집
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• 한국해양공학회 2001년도 추계학술대회 논문집
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• pp.160-163
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• 2001

In order to develop a nodule conveying system through a flexible pipe out of the deep-seabed manganese nodule miner, an experimental study of the solid-water slurry flow in vertical pipe is performed as the first stage of total experiments. Hydraulic characteristics of the pipe slurry flow such as slip velocity, transport concentration and pressure gradient are investigated for the size of particle, load ratio, and flow rate of water. The higher the load ratio is, the larger the transport concentration and pressure gradient become. The bigger the size of particles is, the larger the pressure gradient becomes. The effectiveness of the flow rate to hydraulic performance is also investigated. This results are to be used for designing crusher and pump, and operating the conveying device.