• Tribology and Lubricants
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• v.30 no.3
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• pp.139-145
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• 2014

Nowadays, most micro-patterns are manufactured during flow line production. However, a conventional rotary chemical mechanical polishing (CMP) system has a limited throughput for the fabrication of large and flexible electronics. To overcome this problem, we propose a novel linear roll-CMP system for the planarization of large-area electronics. In this paper, we present a statistical analysis on the linear roll-CMP process of copper-clad laminate (CCL) to determine the impacts of process parameters on the material removal rate (MRR) and its non-uniformity (NU). In the linear roll-CMP process, process parameters such as the slurry flow rate, roll speed, table feed rate, and down force affect the MRR and NU. To determine the polishing characteristics of roll-CMP, we use Taguchi's orthogonal array L16 (44) for the experimental design and F-values obtained by the analysis of variance (ANOVA). We investigate the signal-to-noise (S/N) ratio to identify the prominent control parameters. The "higher is better" for the MRR and "lower is better" for the NU were selected for obtaining optimum CMP performance characteristics. The experimental and statistical results indicate that the down force and roll speed mainly affect the MRR and the down force and table feed rate determine the NU in the linear roll-CMP process. However, over 186.3 N of down force deteriorates the NU because of the bending of substrate. Roll speed has little relationship to the NU and the table feed rate does not impact on the MRR. This study provides information on the design parameter of roll-CMP machine and process optimization.

• Journal of the Korea Concrete Institute
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• v.21 no.1
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• pp.3-11
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• 2009

The increased demand and consumption of coal has intensified problems associated with disposal of solid waste generated in utilization of coal. Major utilization of coal by-products has been in construction-related applications. Since fly ash accounts for the part of the production of utility waste, the majority of scientific investigations have focused on its utilization in a multitude of use, while little attention has been directed to the use of bottom ash. As a consequence of this neglect, a large amount of bottom ash has been stockpiled. However, the need to obtain safe and economical solution for its proper utilization has been more urgent. The study presented herein is designed to ascertain the performance characteristics of bottom ash, as autoclaved lightweight foamed concrete product. The laboratory test results indicated that tobermorite was generated when bottom ash was used as materials for hydro-thermal reaction. According to the analysis of variance, at the fresh state, water ratio affects on flow and slurry density of autoclaved lightweight foamed concrete, but foam ratio influences on slurry density, while, at the hardened state, foam ratio affects on the density of dry and the compressive strength but doesn't affect on flexural and tensile strength. In the results of response surface analysis, to obtain target performance, the most suitable mix condition for lightweight foamed concrete using bottom ash was water ratio of 70$\sim$80% and foaming ratio of 90$\sim$100%.

• Journal of Energy Engineering
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• v.6 no.1
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• pp.96-103
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• 1997

Coal gasification experiments were performed to characterize the bench scaled unit of 0.5∼1.0 T/D entrained coal gasifier developed by KIER. Datong coal from China was selected for this study. The system was operated at the temperature range of 1300∼1550$^{\circ}C$, with 62.5% of coal water mixture on the basis of dry coal. Oxygen and slurry mixture were preheated prior to feeding into burner and the ratio of oxygen/coal was in the range of 0.8∼1.2. In the preparation of coal water mixture, 0.3 wt% of CWM1002 and 0.05 wt% of NaOH wire added to reduce viscosity as well as to enhance theological properties of slurry. The resultant gaseous products consist primarily of hydrogen, carbon monoxide, carbon dioxide, and minor amounts of methane. Formation of H$_2$and CO was increased, while CO$_2$was decreased as the reacting temperature being increased due to the char-CO$_2$reaction. Maximum production of H$_2$and CO occurred in the O$_2$/coal ratio of 0.9 at 1530$^{\circ}C$. Heating values of product gases were in the range of 1700∼2400 kcal/N㎥.

• Plant Journal
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• v.14 no.4
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• pp.39-47
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• 2018

In this research, when the output of the standard coal-fired thermal power plant operating continuously at the rated output of 500 MW is changed to operate at 300 to 500 MW, the amount of sulfur oxide produced and the amount of sulfur oxide in the absorption tower of desulfurization equipment and proposed an extra liquid to gas ratio improvement inversely proportional to the output. In order to calibrate the combustion efficiency at low power, the ratio of sulfur oxides relative to the amount of combustion gas is increased as the excess air ratio is increased. When the concentration of sulfur oxide at the inlet of the desulfurization absorber was changed from 300 to 500 ppm along with the output fluctuation. The liquid to gas ratio of limestone slurry and combustion gas was changed from 10.99 to 16.27. Therefore, if the concentration of sulfur oxides with output of 300 MW is x, The following correlation equation is recommended for the minimum required flow rate of slurry for the reduction of surplus energy due to the increase of the liquid weight at low load. $y1[m^3/sec]=0.11x+3.74$

• Journal of Korean Society of Environmental Engineers
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• v.27 no.2
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• pp.163-169
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• 2005

Photocatalytic oxidation of Cu(II)-EDTA has been studied using solar/$TiO_2$ photocatalysis as an energy source. Photocatalysis efficiency on the treatment of Cu(II)-EDTA was investigated using different types of solar collectors as well as by variation of the angles of solar collector solar light intensities, flow rates, and areas of solar collector. effect of $H_2O_2$ and types of $TiO_2$ catalyst on the treatment of Cu(II)-EDTA was also investigated. Removal of Cu(II) and DOC was favorable with a hemispherical collector than with a flat collector Removal of Cu(II) and DOC increased with increasing angles of solar collector up to $38^{\circ}$. Slurry type $TiO_2$ showed four-times higher removal efficiency than immobilized type $TiO_2$. Removal of both Cu(II) and DOC at a clear sky of solar light intensity ranging from 0.372 to $2.265\;mW/cm^2$ was greater than removal at a cloudy day of solar light intensity ranging from 0.038 to $1.129\;mW/cm^2$. From the result of this research that the removal efficiency of Cu(II) and DOC increased as the solar light intensity increased, it can be inferred that quantum yield in the destruction of Cu(II)-EDTA may directly related with the solar light intensity. Removal of Cu(II) increased as increasing the area of solar collector and was similar at lower flow rates white removal of Cu(II) was interfered at higher flow rates. When immobilized $TiO_2$ was used, removal efficiency of Cu(II) increased in the presence of $H_2O_2$ while negligible effect was found in the use of $TiO_2$ slurry.

• Journal of the Korean GEO-environmental Society
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• v.19 no.2
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• pp.5-12
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• 2018

Underground cavities could induce road subsidence, which have been frequently observed in urban areas. Therefore, adequate backfilling materials and the restoring methods of the cavities are required to prevent the road subsidence. The objective of this paper is to evaluate the suitability of backfilling methods using foaming lightweight grouting materials considering the flow values, unit weights, and air contents at slurry and expanded states, and unconfined compressive strengths. The grouting materials consist of water, cement, and foaming agent whose proportions of water, cement, and foaming agent are 25: 25: 1.0 and 25: 25: 1.2. The flow values of the two materials are greater than 200 mm, and their unconfined compressive strengths at 28 days age are smaller than 1.3 MPa. From the results, the two proportions of materials are expected to be effectively used as a backfilling material. However, the material components should be carefully mixed because poor mix of these materials could induce non-homogeneous distribution of air bubbles. The unexpectedly non-homogeneous distribution of air bubbles may induce significant cracks or additional cavities.

• Korean Chemical Engineering Research
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• v.58 no.3
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• pp.466-473
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• 2020

Fabric current collector can be a promising electrode material for Capacitive Deionization (CDI) system that can achieve energy-efficient desalination of water. The one of the most attractive feature of the fabric current collector is its high tensile strength, which can be an alternative to the low mechanical strength of the graphite foil electrode. Another advantage is that the textile properties can easily make shapes by simple cutting, and the porosity and inter-fiber space which can assist facile flow of the aqueous medium. The fibers used in this study were made of woven structures using a spinning yarn using conductive LM fiber and carbon fiber, with tensile strength of 319 MPa, about 60 times stronger than graphite foil. The results were analyzed by measuring the salt removal efficiency by changing the viscosity of electrode slurry, adsorption voltage, flow rate of the aqueous medium, and concentration of the aqueous medium. Under the conditions of NaCl 200 mg/L, 20ml/min and adsorption voltage 1.5 V, salt removal efficiency of 43.9% in unit cells and 59.8% in modules stacked with 100 cells were shown, respectively. In unit cells, salt removal efficiency increases as the adsorption voltage increase to 1.3, 1.4 and 1.5 V. However, increasing to 1.6 and 1.7 V reduced salt removal efficiency. However, the 100-cell-stacked module showed a moderate increase in salt removal efficiency even at voltages above 1.5 V. The salt removal rate decreased when the flow rate of the feed was increased, and the salt removal rate decreased when the concentration of the feed was increased. This work shows that fabric current collector can be an alternative of a graphite foil.

• Journal of the Korea Concrete Institute
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• v.18 no.6 s.96
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• pp.811-817
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• 2006

The primary purpose of this study is to estimate the guaranteed strength and construction quality of the combined high flowing concrete which is used in the slurry wall of underground LNG storage tank. The required compressive strength of this type of concrete become generally known as a non economical value because it is applied the high addition factor for variation coefficients and low reduction factor under water concrete. Therefore, after estimation of the construction quality and guaranteed strength in actual site work, this study is to propose a suitable equation to calculate the required compressive strength in order to improve its difference. Application results in actual site work are shown as followings. The optimum nix design proportion is selected that has water-cement ratio 51%, sand-aggregate ratio 48.8%, and replacement ratio 42.6% of lime stone powder by cement weight. Test results of slump flow as construction quality give average 616~634mm. 500mm flowing time and air content are satisfied with specifications in the rage of 6.3 seconds and 4.0% respectively. Results of strength test by standard curing mold show that average compressive strength is 49.9MPa, standard deviation and variation coefficients are low as 1.66MPa and 3.36%. Also test results by cored cylinder show that average compressive strength is 66.4MPa, standard deviation and variation coefficients are low as 3.64MPa and 5.48%. The guaranteed strength ratio between standard curing mold and cored cylinder show 1.23 and 1.32 in the flanks. It is shown that applied addition factor for variation coefficients and reduction factor under water concrete to calculate the required compressive strength is proved very conservative. Therefore, based on these results, it is proposed new equation having variation coefficients 7%, addition factor 1.13 and reduction factor 0.98 under water connote.

• Journal of the Korean Society of Groundwater Environment
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• v.2 no.1
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• pp.1-8
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• 1995

Wastes produce groundwater contamination, offensive odor, and hazardous gases. This study investigates the contamination of groundwater at the Seokdae waste landfill area and seeks the desirable ways to minimize the groundwater contamination. Groundwater levels, water chemistry and aquifer characteristics of wells were examined around the Seokdae waste landfill. The water chemistry of the Dong stream, the groundwater distribution and flow were also studied. The results of this research show that the estimated quantity of the percolation from the landfill base to the ground is 520 ㎥/day and the extent of groundwater contamination is about 1-1.5 km from the center of the waste landfill. The groundwater contains heavy metals and other toxic elements. The conservation and management of the groundwater of the waste landfill need several monitoring wells to check the quantity and quality of groundwater, pumping wells to extract the contaminated groundwater, and slurry walls to protect the movement of contaminated groundwater.

• Transactions on Electrical and Electronic Materials
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• v.12 no.2
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• pp.56-59
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• 2011

The characterization of the chemical mechanical polishing (CMP) process for undensified phophosilicate glass (PSG) film is reported using design of experiments (DOE). DOE has been used by experimenters to understand the relationship between the input variables and responses of interest in a simple and efficient way, and it typically is beneficial for determining the appropriatesize of experiments with multiple process variables and making statistical inferences for the responses of interest. The equipment controllable parameters used to operate the machine consist of the down force of the wafer carrier, pressure on the back side wafer, table and spindle speeds (SS), slurry flow (SF) rate, pad condition, etc. None of these are independent ofeach other and, thus, the interaction between the parameters also needs to be understoodfor improved process characterization in CMP. In this study, we selected the five controllable equipment parameters the most recommendedby process engineers, viz. the down force (DF), back pressure (BP), table speed (TS), SS, and SF, for the characterization of the CMP process with respect to the material removal rate and film uniformity in percentage terms. The polished material is undensified PSG which is widely used for the plananization of multi-layered metal interconnects. By statistical modeling and the analysis of the metrology data acquired from a series of $2^{5-1}$ fractional factorial designs with two center points, we showed that the DF, BP and TS have the greatest effect on both the removal rate and film uniformity, as expected. It is revealed that the film uniformity of the polished PSG film contains two and three-way interactions. Therefore, one can easily infer that process control based on a better understanding of the process is the key to success in current semiconductor manufacturing, in which the size of the wafer is approaching 300 mm and is scheduled to continuously increase up to 450 mm in or slightly after 2012.