• Journal of the Microelectronics and Packaging Society
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• v.19 no.1
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• pp.61-66
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• 2012

Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.94-94
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• 2003

최근, 새로운 전자재료로서 GaN 분말의 합성과 응용에 관한 연구가 많이 이루어지고 있다. CaN 분말은 열처리 과정 중 분해를 방지하기 위한 표면 보호용 소재, CaN 박막 또는 벌크 결정을 성장하기 위한 precursor 및 대면적 평판표시소자 제작을 위한 전기발광소자용 소재 등에 적용되고 있다. 일반적으로 100$0^{\circ}C$ 이상의 온도에서Ga과 NH$_3$를 반응시키거나, Ga이 포함된 화합물반도체 또는 산화물 및 질산염 등을 NH$_3$ 분위기에서 가열시켜 GaN 분말을 합성시키고 있다. 본 논문에서는 출발물질로서 GaOOH를 채택하고, 이를 NH$_3$ 가스를 흘리면서 가열 반응시켜 GaN 분말을 합성하고 X선 회절분석 방법을 사용하여 GaN의 합성에 대한 반응기구를 조사하였다. GaN 분말을 합성하기 위하여 GaOOH 분말 1g을 석영 용기에 담아 석영 반응관 내에 위치시키고, 반응관 내부를 $10^{-3}$ torr의 진공으로 배기한 후 $N_2$를 주입하면서 전기로의 온도를 1$0^{\circ}C$/min으로 승온시켰다. 반응온도는 300~l17$0^{\circ}C$의 범위에서 변화시켰고, 반응시간은 10분부터 24시간까지 변화시켰으며, NH$_3$의 유량은 300~700 sccm의 범위에서 변화시켰다. GaN의 반응역학을 조사하기 위하여 X선 회절도에서 특정 성분의 회절강도는 시료 내에 포함된 특정 성분의 량에 직접 비례한다고 가정하고, 2$\theta$=37$^{\circ}$부근에서 관찰되는 GaN의 (101)면에 의한 회절강도를 측정하고, 이를 GaN의 생성량으로 고려하였다.}C$로 소결 하였다. coating 결과 박리현상은 없었으나, 표면과 단면의 SEM분석결과 다소 porous한 박막층이 형성되었으며, Ca이온이 지지체로 permeation되는 현상이 발생하였다. 이와 같은 결과로부터 보다 치밀한 박막생성을 위해, slurry 제조조건을 변화시켰으며, Ca이온의 migration을 막기 위해 barrier layer를 이용하였다 완전 소결된 지지체는 가스투과도와 전기전도도측정을 통하여 특성을 평가하였다.였다.다.m이하의 NH$_3$ 가스를 검출할 수 있었다.기 화강암 관입 이전에 좌수향 전단 운동에 의해 부분적으로 재활성 되었으며, 후기 화강암의 관입 이후에 재차 우수향 전단운동으로 활성화 되었음을 알 수 있다. 이상의 결과를 종합하면 호남전단대는 쥬라기 중기에 발생한 광역적인 우수향의 연성전단운동이나, 운동 특성은 연속적이기 보다는 단속적으로 일어난 것으로 생각된다.리 폐 관류는 정맥주입 방법에 비해 고농도의 cisplatin 투여로 인한 다른 장기에서의 농도 증가 없이 폐 조직에 약 50배 정도의 고농도 cisplatin을 투여할 수 있었으며, 또한 분리 폐 관류 시 cisplatin에 의한 직접적 폐 독성은 발견되지 않았다이 낮았으나 통계학적 의의는 없었다[10.0%(4/40) : 8.2%(20/244), p>0.05]. 결론: 비디오흉강경술에서 재발을 낮추기 위해 수술시 폐야 전체를 관찰하여 존재하는 폐기포를 놓치지 않는 것이 중요하며, 폐기포를 확인하지 못한 경우와 이차성 자연기흉에 대해서는 흉막유착술에 더 세심한 주의가 필요하다는 것을 확인하였다. 비디오흉강경수술은 통증이 적고, 입원기간이 짧고, 사회로의 복귀가 빠르며, 고위험군에 적용할 수 있고, 무엇보다도 미용상의 이점이 크다는 면에서 자연기흉에 대해 유용한 치료방법임에는 틀림이 없으나 개흉술에 비

• Applied Chemistry for Engineering
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• v.26 no.6
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• pp.674-680
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• 2015

A solvent-soluble polyimide (PI) polymeric binder was synthesized by a two-step reaction for silicon (Si) anodes for lithium-ion batteries. Polyamic acid was first prepared through ring opening between two monomers, bicyclo[2,2,2]oct-7-ene-2,3,5,6-tetracarboxylic dianhydride (BCDA) and 4,4-oxydianiline (ODA), followed by condensation reaction. Using the synthesized PI polymeric binder (molecular weight = ~10,945), the coating slurry was then prepared and Si anode was fabricated. For the control system, Si anode based on polyvinylidene fluoride (PVDF, molecular weight = ~350,000) having the same constituent ratio was prepared. During precycling, PI polymeric binder revealed much improved discharge capacity ($2,167mAh\;g^{-1}$) compared to that of using PVDF polymeric binder ($1,740mAh\;g^{-1}$), while the Coulombic efficiency of two systems were similar. PI polymeric binder improved the cycle retention ability during cycles compared to that of using PVDF, which is attributed to an improved adhesion property inside Si anode diminishing the dimensional stress during Si volume changes. The adhesion property of each polymeric binder in Si anode was confirmed by surface and interfacial cutting analysis system (SAICAS) (Si anode based on PI polymeric binder = $0.217kN\;m^{-1}$ and Si anode based on PVDF polymeric binder = $0.185kN\;m^{-1}$).

• Journal of Korean Society of Environmental Engineers
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• v.31 no.10
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• pp.927-932
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• 2009

Toxic and recalcitrant organic pollutants in wastewaters can be effectively treated when advanced oxidation and biodegradation are combined, ideally with intimate coupling, in which both processes occur simultaneously in the same system. One means to achieve intimate coupling is to coat nanoscale $TiO_2$ on the outside of macroporous biofilm carriers. This study investigated the kinetics of photocatalysis with $TiO_2$-coated porous carriers. The carriers were made of polyvinyl alcohol (PVA) and coated with $TiO_2$ using a low-temperature sol-gel process. The $TiO_2$-coated carriers catalyzed the oxidation of methylene blue (MB) effectively under irradiation of UV light. The overall reaction rate with adsorption and photolysis saturated at high MB concentration, and approached the adsorption rate, which was first order for all MB concent rations. This result indicates that adsorbed MB may have slowed photocatalysis by blocking active sites for photocatalysis. The overall kinetics could be described by a quasi-Langmuir model. The estimated maximum specific (per unit mass of $TiO_2$) transformation rate of MB by the $TiO_2$-coated carriers was four times larger than that obtained from slurry-$TiO_2$ reactors. This observation demonstrated that the $TiO_2$ present as a coating on the carriers maintained high efficiency for transforming recalcitrant organic matter via photocatalysis. These findings serve as a foundation for advancement of an intimate coupling of photocatalysis to biodegradation.

• Fire Science and Engineering
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• v.15 no.1
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• pp.23-33
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• 2001

The utility tunnels are the important facility as a mainstay of country because of the latest communication developments. However, the utilities tunnel is difficult to deal with in case of a fire accident. When a cable burns, the black smoke containing poisonous gas will be reduced. This black smoke goes into the tunnel, and makes it difficult to extinguish the fire. Therefore, when there was a fire in the utility tunnel, the central nerves of the country had been paralyzed, such as property damage, communication interruption, in addition to inconvenience for people. This paper is based on the fire occurred in the past, and reenacting the fire by making the real utilities tunnel model. The aim of this paper is the scientific analysis of the character image of the fire, and the verification of each fire protection system whether it works well after process of setting up a fire protection system in the utilities tunnel at a constant temperature. The fire experiment was equipped with the linear heat detector, the fire door, the connection water spray system and the ventilation system in the utilities tunnel. Fixed portion of an electric power supply cable was coated with a fire retardant coating, and a heating tube was covered with a fireproof. The result showed that the highest temperature was $932^{\circ}c$ and the linear heat detector was working at the constant temperature, and it pointed at the place of the fire on the receiving board, and Fixed portion of the electric power supply cable coated with the fire retardant coating did not work as the fireproof. The heating tube was covered with the fireproof about 30 minutes.

• Journal of the Korean Electrochemical Society
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• v.6 no.1
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• pp.41-47
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• 2003

For the development of low temperature anode-supported planar solid oxide fuel cell, the planar anode supports with the thickness of 0.8 to 1 mm and the area of 25, 100 and $150\;cm^2$ were fabricated by the tape casting method. The strength, porosity, gas permeability and electrical conductivity of the planar anode support were measured. The porosity of anode supports sintered at $1400^{\circ}C$ and then reduced in$H_2$ atmosphere was increased from $45.8\%\;to\;53.9\%$. The electrical conductivity of the anode support was $900 S/cm\;at\; 850^{\circ}C$ and its gas permeability was 6l/min at 1 atm in air atmosphere. The electrolyte layer and cathode layer were fabricated by slurry dip coating method and then had examined the thickness of $10{\mu}m$ and the gas permeability of 2.5 ml/min at 3 atm in air atmosphere. As preliminary experiment, cathode multi-layered structure consists of LSM-YSZ/LSM/LSCF. At single cell test using the electrolyte layer with thickness of 20 to $30{\mu}m$, we achieved $300\;mA/cm^2$ and 0.6V at $750^{\circ}C$

• Korean Journal of Soil Science and Fertilizer
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• v.26 no.3
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• pp.197-203
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• 1993

Greenhouse experiments were conducted to avaluate strain competition, nodulation, patterns of nodule occupancy and population changes of Bradyrhizobium sp. strain HCR-46 $str^{r}cep^{r}$ and CB756 $str^{r}rif^{r}$ in the rhizosphere of peanut(Arachis hypogaea L.) under different root temperatures. Inoculated with two strains using seed coating with peat slurry under different root temperatures, population of each strain in the rhizosphere increased with plant growth and multiplication rate of inoculum in the unit weight of root were showed the highest from 10 to 15days after sowing. The multiplication rate of inoculum in the rhizosphere was $28^{\circ}C$>$34^{\circ}C$>$22^{\circ}C$. The density of HCR-46 $str^{r}cep^{r}$ was more increased than that of CB756 $str^{r}rif^{r}$ under $22^{\circ}C$ and $28^{\circ}C$. While the density of two strains showed no difference under $34^{\circ}C$. Inoculated with HCR-46 $str^{r}cep^{r}$ and CB756 $str^{r}rif^{r}$, respectively at 22, 28 and $34^{\circ}C$, nodulation of each strain was dominated in its inoculation portion. Inoculated with the mixture of HCR-46 $str^{r}cep^{r}$ and CB756 $str^{r}rif^{r}$, occupancy rate of HCR-46 $str^{r}cep^{r}$ was dominated over that of CB756 $str^{r}rif^{r}$ at $22^{\circ}C$ and $28^{\circ}C$, but that was similar between them at $34^{\circ}C$. Dry mass, nodulation, nitrogen content per plant and nitrogenase activity showed higher at $28^{\circ}C$ than at $32^{\circ}C$ and $22^{\circ}C$, while those were higher in HCR-46 $str^{r}cep^{r}$ and mixing HCR-46 $str^{r}cep^{r}$ with CB756 $str^{r}rif^{r}$ than in CB756 $str^{r}rif^{r}$.