• Title/Summary/Keyword: Slit Mask

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Improvement of Slit Photolithography Process Reliability for Four-Mask Fabrication process in TFT LCDs

  • Min, Tae-Yup;Qiu, Haijun;Wang, Zhangtao;Gao, Wenbao;Choi, Sang-Un;Lee, Sung-Kyu
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.851-854
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    • 2008
  • In order to reduce the manufacturing cost of TFT LCDs and cut down an amount facilities invested, there are many LCD panel makers contributes to convert the current Five-mask manufacturing process into the noble Four-mask fabrication process. We optimized the slit mask to improve the poor process reliability.

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Improvement of Ion Beam Resolution in FIB Process by Selective Beam Blocking (선택적 빔 차단을 통한 집속이온빔 가공 정밀도 향상)

  • Han, Min-Hee;Han, Jin;Kim, Tae-Gon;Min, Byung-Kwon;Lee, Sang-Jo
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.8
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    • pp.84-90
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    • 2010
  • In focused ion beam (FIB) fabrication processes the ion beam intensity with Gaussian profile has a drawback for high resolution machining. In this paper, the fabrication method to modify the beam profile at substrate using silt mask is proposed to increase the machining resolution at high current. Slit mask is utilized to block the part of beam and transmit only high intensity portion. A nano manipulator is utilized to handle the silt mask. Geometrical analysis on fabricated profile through silt mask was conducted. By utilizing proposed method, improvement of machining resolution was achieved.

Thermal Deformation Analysis of Shadow Mask : Temperature Distribution (쉐도우마스크의 열변형 해석 -온도분포)

  • 김현규;천현태;임세영
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.17 no.10
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    • pp.2574-2581
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    • 1993
  • A Shadow mask in C. R. T. (Cathod Ray Tube) undergoes a temperature increase due to impinging electron beams emitted from guns, and thermal deformation from such temperature rise may cause the electron beams to island on the panel, and thus give rise to depolarization. Hence the analysis of temperature distribution for a shadow mask is an important procedure for designing the shadow mask. In this paper, we are concerned with nonlinear finite element analysis of the temperature distribution on a shadow mask. First of all, we replace shadow mask, containing numerous apertures of a slit type, by an orthotropic shell without apertures, and calculate the apparent thermal conductivities. Because of thermal radiation, which is one of the major heat transfer mechanism for shadow masks, the resulting finite element equation is nonlinear and solved by the Newton method. Finally numerical examples are illustrated for a 21" FST(Full Square Tube) shadow mask, and followed by discussion.sion.

Analysis of Tension Mask Thermal Deformations under Localized Heating and Prediction of Electron Beam Landing Shifts (국부가열에 의한 Tension Mask 의 열변형 해석 및 전자빔의 오착 예측)

  • Shin, Woon-Seo;You, Se-Jonn;Jang, Bo-Woong
    • Journal of the Korean Society for Precision Engineering
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    • v.16 no.8
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    • pp.138-148
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    • 1999
  • Thermal deformations of tension mask under localized heating are analyzed using finite element method and electron beam landing shifts are predicted by the analysis results. In CRT, electron beam landing shifts due to thermal deformations of the tension mask make the color purity of screen worse. In order to get the final results of thermal deformations, firstly the tension processes of the mask and following welding processes between the tensional mask and rail must be analyzed sequentially. And then, nonlinear transient thermo-elastic finite element analysis is performed on every part inside CRT including tension mask, wherein thermal radiation is a main heat transfer mechanism. Because the tension mask has numerous slits, the effective thermal conductivity and effective and effective elastic modulus is calculated, and the tension mask is modeled as a shell without slits. From the displacement results of tension mask, electron beam landing shifts is calculated directly. Experiments are performed to confirm our analysis results. Temperature distributions and beam landing shifts of tension mask are measured and the results are in good agreement with those of analyses.

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Software of Slit-Viewing Camera Module for IGRINS (Immersion GRating INfrared Spectrograph)

  • Lee, Hye-In;Pak, Soojong;Lee, Jae-Joon;Mace, Gregory;Jaffe, Daniel T.
    • The Bulletin of The Korean Astronomical Society
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    • v.41 no.2
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    • pp.66.1-66.1
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    • 2016
  • We developed an observation control software for the IGRINS (Immersion Grating Infrared Spectrograph) silt-viewing camera module, which points the astronomical target onto the spectroscopy slit and sends tracking feedbacks to the telescope control system. The point spread function (PSF) is not always symmetric. In addition, bright targets are easily saturated and shown as a donut shape. It is not trivial to define and find the center of the asymmetric PSF especially on a slit mask. We made a center balancing algorithm (CBA) following the concept of median. The CBA derives the expected center position along the slit-width axis by referencing the stray flux ratios of both upper and lower sides of the slit. We compared efficiencies of the CBA and those of a two-dimensional Gaussian fitting (2DGA) through simulations from observation images in order to evaluate the center finding algorithms. Both of the algorithms are now applied in observation and users can select the algorithm.

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Development Process for Slit Mask Exchanger Mechanism Prototype (SMEM-P) of the Giant Magellan Telescope Multi-object Astronomical and cosmological Spectrograph (GMACS)

  • Lee, Hye-In;Cook, Erika;Ji, Tae-Geun;Byeon, Seoyeon;Pak, Suehee;Cynthia, Froning;Marshall, Jennifer;Depoy, Darren L.;Pak, Soojong
    • The Bulletin of The Korean Astronomical Society
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    • v.43 no.1
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    • pp.68.4-69
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    • 2018
  • GMACS is one of the instruments for the Giant Magellan Telescope (GMT) which will provide wide field, multi-object, moderate resolution spectroscopy of faint targets. KHU (Kyung Hee University) is in charge of control software of GMACS. As a first step, the Slit Mask Exchange Mechanism Prototype (SMEM-P) will be used as a preliminary example to make development process between electronics and high level software. Recently, we have developed a sample program to communicate with low level devices via EtherCAT. It is expected to be a mockup design for software and control system of GMACS. In this poster, we show the development process and test operation results of control software for SMEM-P.

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Acoustic Nonlinearity of Narrow-Band Surface Wave Generated by Laser Beam with Line-Arrayed Slit Mask (선배열 슬릿마스크를 이용한 협대역 레이저 여기 표면파의 음향 비선형성)

  • Choi, Sung-Ho;Nam, Tae-Hyung;Lee, Tae-Hun;Kim, Chung-Seok;Jhang, Kyung-Young
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.34 no.12
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    • pp.1877-1883
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    • 2010
  • We examined the mechanism of generation of higher harmonics by theoretically analyzing the frequency characteristics of a narrow-band surface wave generated by a laser beam with line-arrayed slit masks. We experimentally analyzed the effects of slit opening width and laser intensity on the acoustic nonlinearity of aluminum 6061-T6 alloy by using single-slit and line-arrayed slit masks. The magnitude of the harmonic wave depended on the slit opening width. In our experiment, we generated a 1.75-MHz surface wave by using an arrayed slit with intervals of 1.67 mm. The magnitude of the second harmonic component decreased about by 80% when the slit opening width was increased from 0.5 mm to 1.0 mm. In addition, the relationship between the magnitudes of the fundamental and the second harmonic wave showed good linearity, which agreed well with the typical behavior of acoustic nonlinearity.

Generation of Lens surface by moving mask lithography (가변 속도 이동식 마스크를 이용한 렌즈 곡면 형성)

  • Lee Joon-Sub;Park Woo-Jae;Song Seok-Ho;Oh Cha-Hwan;Kim Pill-Soo
    • Korean Journal of Optics and Photonics
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    • v.16 no.6
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    • pp.508-515
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    • 2005
  • We propose a fabrication method for refractive lens by variable velocity moving mask lithography and slit pattern. Distribution of exposure dose should be controlled for the curved photoresist surface that works as a refractive surface. We analyze theoretically the distribution of exposure dose by change of moving velocity, moving direction of mask and the shape of mask pattern, and confirm for the curved surface experimentally. The lens could have sag height of a few of hundreds ${\mu}m$, by using thick photoresist or Deep RIE process.

Assessment of Plastic Deformation in Al6061 Alloy using Acoustic Nonlinearity of Laser-Generated Surface Wave (레이저 여기 표면파의 음향비선형성을 이용한 Al6061 합금의 소성변형 평가)

  • Kim, Chung-Seok;Nam, Tae-Hyung;Choi, Sung-Ho;Jhang, Kyung-Young
    • Journal of the Korean Society for Nondestructive Testing
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    • v.32 no.1
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    • pp.20-26
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    • 2012
  • The objective of this study is to assess plastic deformation in aluminium alloy by acoustic nonlinearity of laser-generated surface waves. A line-arrayed laser beam made by high-power pulsed laser and mask slits is utilized to generate the narrowband surface wave and the frequency characteristics of laser-generated surface waves are controlled by varying the slit opening width and slit interval of mask slits. Various degrees of tensile deformation were induced by interrupting the tensile tests so as to obtain aluminum specimens with different degrees of plastic deformation. The experimental results show that the acoustic nonlinear parameter of a laser-generated surface wave increased with the level of tensile deformation and it has a good correlation with the results of micro-Vickers hardness test and electron backscatter diffraction (EBSD) test. Consequently, acoustic nonlinearity of laser-generated surface wave could be potential to characterize plastic deformation of aluminum alloy.

Fabrication of High-T$_c$ Superconducting Josephson Junctions by Ar lon Milling and E-Beam Lithography (Ar 이온빔 식각과 전자선리소그래피 방벙으로 제작한 고온초전도 조셉슨 접합)

  • Lee, Moon-Chul;Kim, In-Seon;Lee, Jeong-O;Yoo, Kyung-Hwa;Park, Yong-Ki;Park, Jong-Chul
    • 한국초전도학회:학술대회논문집
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    • v.9
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    • pp.91-94
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    • 1999
  • A new type of high-T$_c$ superconducting Josephson junctions has been prepared by Ar ion beam etching and electron beam lithography. YBa$_2Cu_3O_{7-x}$ (YBCO) films deposited on (001) SrTiO$_3$ single crystal substrate by pulsed laser deposition were patterned by Ar ion milling with photolithography. The narrow slit with a electroresist mask, about 1000 ${\AA}$ wide, was constructed over a 3 ${\sim}$ 5 ${\mu}$m bridge of a 1200-${\AA}$-thick YBCO film by electron beam lithography. The slit was then etched by the Ar ion beam to form a damaged 600-${\AA}$-thick YBCO. Thus prepared structure forms an S-N-S (YBCO - damaged YBCO - YBCO) type Josephson junctions. Those junctions exhibit RSI-like I-V characteristics at 77 K. The properties of the Josephson junctions such as I$_c$ R$_N$, and J$_c$ were characterized.

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