• 한국전기전자재료학회논문지
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• 제32권6호
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• pp.516-521
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• 2019

The top seeded solution growth (TSSG) method is an alternative technique to grow high-quality SiC crystals that has been actively studied for the last two decades. However, the TSSG method has different issues that need to be resolved when compared to the commercial SiC crystal growing method, i.e., physical vapor transport (PVT). A particular issue of the TSSG method of results from the presence of liquid droplets on the grown crystal that can remain even after crystal growth; this induces residual stress on the crystal surface. Hence, the residual droplet causes several unwanted effects on the crystal such as the initiation of micro-cracks, micro-pipes, and polytype inclusions. Therefore, this study investigated the formation of the residual droplet through multiphysics simulations and lead to the development of a liquid droplet removal method. As a result, we found that although residual liquid droplets significantly apply residual stress on the grown crystal, these could be vaporized by adopting thermal annealing processes after the relevant crystal growing steps.

• 한국결정성장학회지
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• 제10권4호
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• pp.286-291
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• 2000

수직 Bridgman법으로 $Cd_{1-x}Mn_{x}Te$ 단결정을 성장시켜 자기장과 파장을 변화시키면서 Faraday회전을 측정하였다. Verdet 상수값은 포톤의 에너지가 높은 쪽으로 이동함에 따라 흡수단 근처에서 최대였고, 조성비 x에 따라 증가하다가 x=0.40 이상에서 감소하였다. $Cd_{1-x}Mn_{x}Te$ 단결정을 Faraday 소자로 이용할 경우, 흡수단 근처에서 Faraday 회전이 가장 크게 일어나는 $Cd_{0.60}Mn_{0.38Te}$ 단결정이 적합하고,광원으로 He-Ne레이저를 사용할 경우에는 $Cd_{0.62}Mn_{0.40}Te$ 단결정이 유용함을 알 수 있었다.

• 한국전기전자재료학회논문지
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• 제32권6호
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• pp.522-527
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• 2019

In order to fabricate high-quality SiC substrates for power electronic devices, various single crystal growing methods were prepared. These include the physical vapor transport (PVT) and top seeded solution growth (TSSG) methods. All the suggested SiC growth methods generally use induction-heating furnaces. The temperature distribution in this system can be easily adjusted by changing the hot-zone design. Moreover, precise temperature control in the induction-heating furnace is favorably required to grow a high-quality crystal. Therefore, in this study, we analyzed the heat transfer in these furnaces to grow SiC crystals. As the growth temperature of SiC crystals is very high, we evaluated the effect of radiation heat transfer on the temperature distribution in induction-heating furnaces. Based on our simulation results, a heat transfer strategy that controls the radiation heat transfer was suggested to obtain the optimal temperature distribution in the PVT and TSSG methods.