Browse > Article
http://dx.doi.org/10.4313/JKEM.2019.32.6.522

Effect of Radiation Heat Transfer on the Control of Temperature Gradient in the Induction Heating Furnace for Growing Single Crystals  

Park, Tae-Yong (Energy Efficient Materials Center, Korea Institute of Ceramic Engineering and Technology)
Shin, Yun-Ji (Energy Efficient Materials Center, Korea Institute of Ceramic Engineering and Technology)
Ha, Minh-Tan (Energy Efficient Materials Center, Korea Institute of Ceramic Engineering and Technology)
Bae, Si-Young (Energy Efficient Materials Center, Korea Institute of Ceramic Engineering and Technology)
Lim, Young-Soo (Department of Materials System Engineering, Pukyong National University)
Jeong, Seong-Min (Energy Efficient Materials Center, Korea Institute of Ceramic Engineering and Technology)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.32, no.6, 2019 , pp. 522-527 More about this Journal
Abstract
In order to fabricate high-quality SiC substrates for power electronic devices, various single crystal growing methods were prepared. These include the physical vapor transport (PVT) and top seeded solution growth (TSSG) methods. All the suggested SiC growth methods generally use induction-heating furnaces. The temperature distribution in this system can be easily adjusted by changing the hot-zone design. Moreover, precise temperature control in the induction-heating furnace is favorably required to grow a high-quality crystal. Therefore, in this study, we analyzed the heat transfer in these furnaces to grow SiC crystals. As the growth temperature of SiC crystals is very high, we evaluated the effect of radiation heat transfer on the temperature distribution in induction-heating furnaces. Based on our simulation results, a heat transfer strategy that controls the radiation heat transfer was suggested to obtain the optimal temperature distribution in the PVT and TSSG methods.
Keywords
SiC; Singe crystal growth; Induction heating furnace; Radiation heat transfer; Simulation;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Grand View Research, Silicon Carbide Market Size, Share & Trend Analysis Report, www.grandviewresearch.com/industryanalysis/silicon-carbide-market (2019).
2 Y. M. Tairov and V. F. Tsvetkov, J. cryst. Growth, 43, 209 (1978). [DOI: https://doi.org/10.1016/0022-0248(78)90169-0]   DOI
3 A. A. Lebedev and V. E. Chelnokov, Semiconductors, 33, 999 (1999). [DOI: https://doi.org/10.1134/1.1187823]   DOI
4 C. B. Carter and M. G. Norton, Ceramic Materials Science and Engineering (Springer, New York, 2007) p. 508.
5 D. H. Hofmann and M. H. Muller, Mater. Sci. Eng., B, 61, 29 (1999). [DOI: https://doi.org/10.1016/S0921-5107(98)00440-1]   DOI
6 Y. Yamamoto, S. Harada, K. Seki, A. Horio, T. Mitsuhashi, and T. Ujihara, Appl. Phys. Express, 5, 115501 (2012). [DOI: https://doi.org/10.1143/APEX.5.115501]   DOI
7 J. Y. Yoon, M. H. Lee, Y. Kim, W. S. Seo, Y. G. Shul, W. J. Lee, and S. M. Jeong Jpn. J. Appl. Phys., 56, 065501 (2017). [DOI: https://doi.org/10.7567/JJAP.56.065501]   DOI
8 J. E. Lee, B. G. Kim, J. Y. Yoon, M. T. Ha, M. H. Lee, Y. Kim, W. S. Seo, H. J. Choi, W. J. Lee, and S. M. Jeong, Ceram. Int., 42, 11611 (2016). [DOI: https://doi.org/10.1016/ j.ceramint. 2016.04.060]   DOI
9 Z. C. Feng, SiC Power Materials: Devices and Applications (Springer, Heidelberg, 2004) p. 6.
10 S. A. Sakwe, M. Stockmeier, P. Hens, R. Muller, D. Queren, U. Kunecke, K. Konias, R. Hock, A. Magerl, M. Pons, A. Winnacker, and P. Wellmann, Phys. Status Solidi B, 245, 1239 (2008). [DOI: https://doi.org/10.1002/pssb.200743520]   DOI
11 J. Y. Yoon, M. H. Lee, W. S. Seo, Y. G. Shul, and S. M. Jeong, J. Kor. Cryst. Growth Cryst. Technol., 26, 8 (2016). [DOI: https://doi.org/10.6111/JKCGCT.2016.26.1.008]   DOI
12 F. Mercier, J. M. Dedulle, D. Chaussende, and M. Pons, J. Cryst. Growth, 312, 115 (2010). [DOI: https://doi.org/10.1016/j.jcrysgro.2009.10.007]
13 F. Wang, L. Cheng, H. Mei, Q. Zhang, and L. Zhang, Int. J. Thermophys., 35, 62 (2014). [DOI: https://doi.org/10.1007/s10765-013-1533-9]   DOI
14 V. Rudnev, D. Loveless, and R. L. Cook, Handbook of Induction Heating, Second Edition (CRC press, 2017) p. 60.
15 H. O. Pierson, Handbook of Carbon, Graphite, Diamond and Fullerenes (William Andrew, 1993) p. 61.
16 L. Biasetto, M. Manzolaro, and A. Andrighetto, Eur. Phys. J. A, 38, 167 (2008). [DOI: https://doi.org/10.1140/epja/i2008-10666-6]   DOI
17 S. K. Seo, J. S. Roh, G. H. Kim, S. H. Chi, and E. S. Kim, Korean J. Mater. Res., 18, 645 (2008). [DOI: https://doi.org/10.3740/MRSK.2008.18.12.645]   DOI
18 K. Kusunoki, Y. Kishida, and K. Seki, Mater. Sci. Forum, 963, 85 (2018). [DOI: https://doi.org/10.4028/www.scientific.net/MSF.963.85]   DOI