• 제목/요약/키워드: Silver sputtering

검색결과 37건 처리시간 0.024초

유체 플라즈마 방식을 사용한 은 나노파티클의 합성 (Synthesis of Silver Nano-particles by the Solution Plasma Sputtering Method)

  • 유승철;신홍직;최원석
    • 전기학회논문지P
    • /
    • 제65권3호
    • /
    • pp.216-218
    • /
    • 2016
  • In this study, we used not chemical and physical synthesis method but the solution plasma sputtering method in the synthesis of silver nano-particles. Synthesis of all the silver nano-particles was conducted for 1hour in 360 ml of distilled water and characteristics of changing the input voltage and frequency of the synthesised silver nano-particles by using the solution plasma sputtering method were analyzed through FE-SEM(Field Emission-Scanning Electron Microscope). We changed the input voltage from 8 kV to 10 kV in steps of 1 kV, input frequency from 20 kHz to 30 kHz in steps of 5 kHz in the solution plasma reactor with the advanced device which can control the DC voltage and frequency. We confirmed that the size of silver nano-particles were larger according to the change of the input voltage and frequency.

유기 은 착체 화합물을 코팅용액으로 사용하여 연속적인 담금코팅방법에 의한 은 안정화층 제조 (Preparation of silver stabilizer layer on coated conductor by continuous dip coating method using organic silver complexes)

  • 이종범;김지철;박신근;김병주;김재근;이희균;홍계원
    • 한국초전도ㆍ저온공학회논문지
    • /
    • 제12권1호
    • /
    • pp.1-5
    • /
    • 2010
  • Silver stabilizing layer of coated conductor has been prepared by dip coating method using organic silver complexes containing 10 wt% silver as a starting material. Coated silver complex layer was dried in situ with hot air and converted to crystalline silver by post heat treatment in flowing oxygen atmosphere. A dense continuous silver layer with good surface coverage and proper thickness of 230 nm is obtained by multiple dip coatings and heat treatments. The film heat treated at $500^{\circ}C$ showed good mechanical adhesion and crystallographic property. The interface resistivity between superconducting YBCO layer and silver layer prepared by dip coating was measured as $0.67\;{\times}\;10^{-13}\;{\Omega}m^2$. Additional protecting copper layer with the thickness of $20\;{\mu}m$ was successfully deposited by electroplating. The critical current measured with the specimen prepared by dip coating and sputtering on same quality YBCO layer showed similar value of ~140 A and proved its ability to replace sputtering method for industrial production of coated conductor.

Fabrication of Ultra-smooth 10 nm Silver Films without Wetting Layer

  • Devaraj, Vasanthan;Lee, Jongmin;Baek, Jongseo;Lee, Donghan
    • Applied Science and Convergence Technology
    • /
    • 제25권2호
    • /
    • pp.32-35
    • /
    • 2016
  • Using conventional deposition techniques, we demonstrate a method to fabricate ultra-smooth 10 nm silver films without using a wetting layer or co-depositing another material. The argon working pressure plays a crucial role in achieving an excellent surface flatness for silver films deposited by DC magnetron sputtering on an InP substrate. The formation of ultra-smooth silver thin films is very sensitive to the argon pressure. At the optimum deposition condition, a uniform silver film with an rms surface roughness of 0.81 nm has been achieved.

D.C. magnetron sputter를 이용한 Ag layer 건식 도금층의 특성 평가 국제 표준화에 대한 연구 (A Study on the standardize the characteristic evaluation of DC magnetron sputtered silver coatings for engineering purposes)

  • ;최진혁;임태관;정명준;이수완
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2015년도 추계학술대회 논문집
    • /
    • pp.249-249
    • /
    • 2015
  • Silver films have been of considerable interest for years due to their better performance relative to other metal films for engineering applications. A series of multi-layer silver coatings with different thickness (i.e. 0.3 um to 1.5 um) were prepared on Aluminium substrate containing copper undercoat by direct current (DC) magnetron sputtering method. For the comparative purpose, similar thickness silver coatings were prepared by electrolytic deposition method. Microstructural, morphological, and mechanical characteristics of the silver coatings were evaluated by means of scanning electron microscope (SEM), X-ray diffraction (XRD), Surface roughness test, microhardness test and nano-scratch test. From the results, it has been elucidated that the silver films prepared by DC magnetron sputtering method has superior properties in comparison to the wet coating method. On the other hand, DC magnetron sputtering method is relatively easier, faster, eco-friendly and more productive than the electrolytic deposition method that uses several kinds of hazardous chemicals for bath formulation. Therefore, a New Work Item Proposal (NWIP) for the test methods standardization of DC magnetron sputtered silver coatings has recently been proposed via KATS, Korea and a NP ballot is being progressed within a technical committee "ISO/TC107-metallic and other inorganic coating".

  • PDF

THE EFFECT OF AN APPLIED BIAS UPON THE REFLECTANCE AND ADHESION OF SILVER FILMS BEING SPUTTER-DEPOSITED ON POLYESTER SUBSTRATE

  • Ri, Eui-Jae;Hoang, Tae-Su
    • 한국표면공학회지
    • /
    • 제32권3호
    • /
    • pp.257-264
    • /
    • 1999
  • Thin reflective films are synthesized by using PVD methods with a bright metal of Al or Ag. For purposes of improving the reflectance and adhesion of such films particularly, substrate bias was applied during sputtering (namely, ion-plating) to enhance the deposition process with higher energy. And we succeeded in fabricating a quality silver film which possesses an adhesion of $85{\;}Kg/\textrm{cm}^2$ and a high reflectivity of more than 96%. Both of reflectivity and adhesion are better in case of bias sputtering as controlled than nonbias sputtering, particularly the bias of 50-100 V showed most effective. The microstructures of sample films were examined by using various equipments and the XRD spectrum in particular showed that <111> direction is the preferred growth orientation.

  • PDF

Influence of sputtering parameter on the properties of silver-doped zinc oxide sputtered films

  • S. H. Jeong;Lee, S. B.;J.H. Boo
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2003년도 추계학술발표회초록집
    • /
    • pp.58-58
    • /
    • 2003
  • Silver doped ZnO (SZO) films were prepared by rf magnetron sputtering on glass substrates with extraordinary designed ZnO target. With the doping source for target, use AgNO$_3$ powder on a various rate (0, 2, and 4 wt.%). We investigated dependence of coating parameter such as dopant content in target and substrate temperature in the SZO films. The SZO films have a preferred orientation in the (002) direction. As amounts of the Ag dopant in the target were increased, the crystallinity and the transmittance and optical band gap were decreased. And the substrate temperature were increased, the crystallinity and the transmittance were increased. But the crystallinity and the transmittance of SZO films were retrograde at 200$^{\circ}C$. Upside facts were related with composition. In addition, the Oxygen K-edge features of the SZO films were investigated by using near edge X-ray absorption fine structure (NEXAFS) spectroscopy. Changes of optical band gap of the SZO films were explained compared with XRD, XPS and NEXAFS spectra.

  • PDF

Polyester 상에서 Sputter 증착되는 고 밀도 은경 박막의 물리적 특성에 미치는 공정조건 변화의 효과 (The Effect of Various Process Conditions on the Physical Properties of Dense Silver Films, Prepared by Using Sputter Deposition on Polyester Substrate)

  • 리의재;황태수
    • 한국재료학회지
    • /
    • 제9권7호
    • /
    • pp.707-714
    • /
    • 1999
  • 형광등으로 사용되는 전기 에너지의 40%를 절약할 수 있는 방법으로서 그 반사값을 특수 은 반사박막으로 처리하여 고효율 및 내구성을 갖는 기술이 최근에 알려지고 있다. 이 박막들은 sputtering법을 이용한 것으로 주로 미국에서 생산되어지고 있다. 한편. evaporation 법으로 제작된 은 박막들은 일반적으로 반사효율에는 별문제가 없으나 부착력이 떨어지는 단점이 있다. 우리는 수년간 polyester를 기판으로 하고 몇가지 PVB 방법을 동원하여 고 반사율 및 부착력을 갖는 은경 박막을 확보하기 위해 연구를 해왔다. 그 결과, evaporation 법으로 제작된 은 박막은 96.4%의 반사율을 보이나 부착력은 $12 Kg/\textrm{cm}^2$에 불과함을 확인하였고. sputter 법으로 제작한 시편들의 반사율은 96.3 %로 비슷하였으나 부착력이 /$20 Kg\textrm{cm}^2$로 거의 두배로 뛰어올라 sputter법의 공정조건이 그 결과박막들의 물리적 특성에 미치는 긍정적 영향을 확인할 수 있었다. X-선 회절 분석결과 sputter의 경우에 (111)면이 우선성장함을 알 수 있었고, 시편의 단면으로부터 관찰된 치밀한 columnar 구조가 부착력을 향상시키고 있음이 확인되었다.

  • PDF

나노 은 입자 세정법을 이용한 무기 악취물질의 제거 (Removal of Inorganic Odorous Compounds by Scrubbing Techniques using Silver Nano-particles)

  • 신승규;;송지현
    • 한국대기환경학회지
    • /
    • 제24권6호
    • /
    • pp.674-681
    • /
    • 2008
  • Silver as a metal catalyst has been used to remove odorous compounds. In this study, silver particles in nano sizes ($5{\sim}30nm$) were prepared on the surface of $NaHCO_3$, the supporting material, using a sputtering method. The silver nano-particles were dispersed by dissolving $Ag-NaHCO_3$ into water, and the dispersed silver nano-particles in the aqueous phase was applied to remove inorganic odor compounds, $NH_3$ and ${H_2}O$, in a scrubbing reactor. Since ammonia has high solubility, it was removed from the gas phase even by spraying water in the scrubber. However, the concentration of nitrate (${NO_3}^-$) ion increased only in the silver nano-particle solution, implying that the silver nano-particles oxidized ammonia. Hydrogen sulfide in the gas phase was rapidly removed by the silver nano-particles, and the concentration of sulfate (${SO_4}^{2-}$) ion increased with time due to the oxidation reaction by silver. As a result, the silver nano-particles in the aqueous solution can be successfully applied to remove odorous compounds without adding additional energy sources and producing any harmful byproducts.

IGZO, ZnO, AZO OMO 구조의 Ag두께 변화에 따른 투과율과 에너지 밴드 갭의 변화 (Change in the Energy Band Gap and Transmittance IGZO, ZnO, AZO OMO Structure According to Ag Thickness)

  • 이승민;김홍배;이상렬
    • 한국전기전자재료학회논문지
    • /
    • 제28권3호
    • /
    • pp.185-190
    • /
    • 2015
  • In this study, we fabricated the indium gallium zinc oxide (IGZO), zinc oxide (ZnO), aluminum zinc oxide (AZO). oxide and silver are deposited by magnetron sputtering and thermal evaporator, respectively transparency and energy bandgap were changed by the thickness of silver layer. To fabricate metal oxide metal (OMO) structure, IGZO sputtered on a corning 1,737 glass substrate was used as bottom oxide material and then silver was evaporated on the IGZO layer, finally IGZO was sputtered on the silver layer we get the final OMO structure. The radio-frequency power of the target was fixed at 30 W. The chamber pressure was set to $6.0{\times}10^{-3}$ Torr, and the gas ratio of Ar was fixed at 25 sccm. The silver thickness are varied from 3 to 15 nm. The OMO thin films was analyzed using XRD. XRD shows broad peak which clearly indicates amorphous phase. ZnO, AZO, OMO show the peak [002] direction at $34^{\circ}$. This indicate that ZnO, AZO OMO structure show the crystalline peak. Average transmittance of visible region was over 75%, while that of infrared region was under 20%. Energy band gap of OMO layer was increased with increasing thickness of Ag layer. As a result total transmittance was decreased.