• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.7
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• pp.26-33
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• 1999

In order to examine the effect of beam location n the performance of bridge type piozoresistive silicon accelerometer, three sensors having different location of beams were simulated by FEN(finite element method) and fabricated by RIE(reactive ion etching) and KOH etching method using SDB(silicon direct bonding) wafer, Results of the FEM simulation present that the 1st resonace frequency and Z axis sensitivity of each sensor are identical but the 2nd, and the 3rd resonace frequency and X, Y axis sensitivity are different. Even though the 1st resonance frequency and Z axis sensitivity measured from fabricated sensors do not perfectly coincide with each other, all 3 type sensors present 180 ~ 220N/G of Z sensitivity at 5 V supply voltage and 1.3 ~ 1.7kHz of the 1st resonance frequency and about 2% of lateral sensitivity.

• Journal of the Korean association of regional geographers
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• v.21 no.3
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• pp.489-502
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• 2015

Sometimes called the Silicon Fen, the Cambridge cluster is well known as the most innovative hi-tech cluster in the world. This paper attempts to explore the evolutionary dynamics of the Cambridge cluster, drawing upon the triple-helix approach. To understand the evolutionary dynamics of the Cambridge cluster, it is important to examine the role and impact of the University of Cambridge, which is conceived as one of the best higher educational institutions in the world. The Cambridge cluster has been evolved on the basis of a strong university-industry relationship. University spin-outs have a long tradition in Cambridge with the history of more than a century, and they have played a critical role in making the cluster more innovative. Business networks and social capital molded for a long time in the region become a foundation for active local spin-out activities. However, since 2000 the central government started steadily to require British universities to be an entrepreneurial university, with the purpose of the reduction of university subsidies. As a result of this, spin-out activities in the Cambridge cluster show a sharp decline, which is a factor of threatening the dynamic evolution of the cluster.