• Transactions on Electrical and Electronic Materials
• /
• v.7 no.4
• /
• pp.157-162
• /
• 2006

Chemical-mechanical polishing (CMP), one of the dominant technology for ULSI planarization, is used to flatten the micro electro-mechanical systems (MEMS) structures. The objective of this paper is to achieve good planarization of the deposited film and to improve deposition efficiency of subsequent layer structures by using surface-micromachining process in MEMS technology. Planarization characteristic of poly-Si film deposited on thin oxide layer with MEMS structures is evaluated with different slurries. Patterns used for this research have shapes of square, density, line, hole, pillar, and micro engine part. Advantages of CMP process for MEMS structures are observed respectively by using the test patterns with structures larger than 1 urn line width. Preliminary tests for material selectivity of poly-Si and oxide are conducted with two types of silica slurries: $ILD1300^{TM}\;and\;Nalco2371^{TM}$. And then, the experiments were conducted based on the pretest. A selectivity and pH adjustment of slurry affected largely step heights of MEMS structures. These results would be anticipated as an important bridge stone to manufacture MEMS CMP slurry.

• Journal of Korean Society of Occupational and Environmental Hygiene
• /
• v.10 no.1
• /
• pp.104-114
• /
• 2000

This study was carried out to estimate current status of dust concentrations in the factories producing non-metallic products in Korea. Data were gathered from the environmental monitoring reports by 40 workplace environmental monitoring institutes and the questionnaire designed for the study by the authors. A total of 1838 dust samples from 368 plants were obtained from the reports and were analyzed with no data modifications. But data on asbestos, rock wool, and welding fumes were excluded in this evaluation. The factories were classified into eight groups according to the standard industrial classification scheme in Korea. The results of this study were as follows; 1. The factories included were glass, non-refractory ceramic, refractory ceramic ware, structural non-refractory clay and ceramic, cement and lime, articles of concretes, and stone. Mean(geometric mean) concentrations of total dust samples ranged from $1.75(0.84)mg/m^3$ to $5.87(2.84)mg/m^3$. Statistically significantly higher dust concentrations were found in the cement and lime industries compared with other industries. 2. The non-compliance rates were 15.2% in glass and 20.6% in other non-metallic mineral products industries. Although all institutions surveyed utilized the identical sampling and classification scheme for dusts as specified in the current occupational exposure limits, wide discrepancies were found in collecting samples and classifying dusts. Further problems were discovered in classifying dusts. A dust sample collected could be classified into any of the three groups regardless of silica content. The results of this study showed that dust concentrations in the non-metallic products industries varied widely. Also discovered was classification errors of dust types among workplace monitoring institutes. These errors could adversely affect the results of exposure assessments and the true nature of dust hazards. Further, no institutions performed respirable dust sampling and analysis of crystalline silica. In order to correct these malpractices, current standards of occupational exposure limits should be revised and tight supervision by the Ministry of Labour be suggested.

• Journal of Conservation Science
• /
• v.25 no.4
• /
• pp.439-450
• /
• 2009

The purpose of this study is to find out characteristics of the fillers made by epoxy resin (L-30) and filling epoxy resin (L-50) with talc, quartz sand and wollastonite with different mixture ratio of 5%, 50%, 80%, 120%, and 150%. The viscometer and colorimeter were used to measure the viscosity and chromaticity of the fillers. Additionally, IC and SEM were used to reveal characteristics of the filler, and checked ultrasonic wave velocity, compressive strength and contact angle to estimate the stability between the filler and stones which are essential for conservation treatments. The filler mixed with the talc had the lowest value in the ultrasonic wave velocity analysis, and its compressive strength decreased as the mixing rate of talc increased. On the other hand, wollastonite had higher values than others in the ultrasonic wave velocity and the compressive strength regardless of epoxy resin type, also, these values increased as mixing rate increased. The properties of the filler, which include the granularity and shape, have influence on characteristics of the stone conservation adhesives. Thus, the filler type, characteristic, and mixture ratio must be considered for effective conservation treatment.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.16 no.7
• /
• pp.4960-4968
• /
• 2015

In this study to improve the chloride durability of the shotcrete structure depending on types and contents of mineral admixture chloride resistance was evaluated by NT BUILD 492 of european test standards. It was also evaluated with the mechanical properties such as static strength and chloride penetration resistance. For shotcrete mixed crushed stone aggregate of the maximum size 10mm of coarse aggregates was produced. Based on 28days compression strength the variable mixed with 15% silica fume showed the highest strength in 67.55MPa. As the content of fly ash and blast furnace slag increased, the strength lowered. In the chloride penetration resistance test, OPC showed "high grade" and In the case of admixture, the penetration resistance tended to increase in all variables except the fly ash. In order to evaluate the service life, the accelerated chloride penetration test was conducted by the standards of KCL, ACI, FIB. Test results were obtained with the lowest spreading factor in a variable mixed with silica fume of 15%. At the KCI standards, It was found to have a service life of about 65 years and at the FIB standards, It was found to have a service life of 131 years. Among standards, the service life of KCI standard in all of the variables was evaluated as the lowest.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.32 no.6
• /
• pp.477-482
• /
• 2019

This study investigated the influence of the viscoelastic property of slag when producing glass fiber, MFS631 with 60% of manganese slag, 30% of steel slag, and 10% of silica stone. To fabricate the MFS631 glass bulk, slag materials were placed in an alumina crucible, melted at $1,550^{\circ}C$ for 2 h, and then annealed at $600^{\circ}C$ for 2 h. It was found that glass is non-crystalline through X-ray diffraction analysis. MFS631 fiber was produced at speed in the range of 100~300 rpm at $1,150^{\circ}C$. The loss modulus (G") and storage modulus (G') of the produced glass fiber were evaluated at high temperatures. G' and G" of MFS631 were greater than $893^{\circ}C$, and the modulus value was 136,860 pa. This is similar to the results of a general E-glass fiber graph. Therefore, it was concluded that its spinnability is similar to that of E-glass fiber; therefore, it can be commercialized.

• Korean Journal of Soil Science and Fertilizer
• /
• v.41 no.4
• /
• pp.239-246
• /
• 2008

This research tried to find out the optimum fabrication method of calcined clay granules comprising zeolite. Kaolin clay and natural zeolite powder were used as raw materials of calcined clay, and silica stone powder was used for controlling the porosity of the granules. The granulation was performed with two kinds of granulators: a pan granulator and a high-shear mixer granulator. Various granules were fabricated by the mixing ratios and the rotation speeds of the granulators, and were heated from 400 to $700^{\circ}C$ at $100^{\circ}C$ interval. The crushing strength, pore size distribution, and CEC of the granules were measured. The evaluation method for the resistance of granules to human treading was created and the tests were conducted at dry and wet conditions. The resistance and crushing strength improved in proportion to the rotation speed of the granulator and the heating temperature, but the CEC decreased. The pellet made by the pan granulator did not have the strength against treading upon heating to below $700^{\circ}C$, but the pellet made by the high-shear mixer granulator endured the treading test upon heating to over $500^{\circ}C$

• Korean Journal of Materials Research
• /
• v.28 no.12
• /
• pp.763-768
• /
• 2018

In this study, glass fibers are fabricated via a continuous spinning process using manganese slag, steel slag, and silica stone. To fabricate the glass fibers, raw materials are put into an alumina crucible, melted at $1550^{\circ}C$ for 2 hrs, and then annealed at $600^{\circ}C$ for 2 hrs. We obtain a black colored glass. We identify the non-crystalline nature of the glass using an XRD(x-ray diffractometer) graph. An adaptable temperature for spinning of the bulk marble glass is characterized using a high temperature viscometer. Spinning is carried out using direct melting spinning equipment as a function of the fiberizing temperature in the range of $1109^{\circ}C$ to $1166^{\circ}C$, while the winder speed is in the range of 100rpm to 250rpm. We investigate the various properties of glass fibers. The average diameters of the glass fibers are measured by optical microscope and FE-SEM. The average diameter of the glass fibers is $73{\mu}m$ at 100rpm, $65{\mu}m$ at 150rpm, $55{\mu}m$ at 200rpm, and $45{\mu}m$ at 250rpm. The mechanical properties of the fibers are confirmed using a UTM(Universal materials testing machine). The average tensile strength of the glass fibers is 21MPa at 100rpm, 31MPa at 150rpm, 34MPa at 200rpm, and 45MPa at 250rpm.

• Analytical Science and Technology
• /
• v.27 no.3
• /
• pp.172-180
• /
• 2014

Fenpyrazamine which is a pyrazole fungicide class for controlling gray mold, sclerotinia rot, and Monilinia in grapevines, stone fruit trees, and vegetables has been registered in republic of Korea in 2013 and the maximum residue limits of fenpyrazamine is set to grape, peach, and mandarin as 5.0, 2.0, and 2.0 mg/kg, respectively. Very reliable and sensitive analytical method for determination of fenpyrazamine residues is required for ensuring the food safety in agricultural products. Fenpyrazamine residues in samples were extracted with acetonitrile, partitioned with dichloromethane, and then purified with silica-SPE cartridge and eluted with hexane and acetone mixture. The purified samples were determined by HPLC-UVD and confirmed with LC-MS and quantified using external standard method. Linear range of fenpyrazamine was between $0.1{\sim}5.0{\mu}g/mL$ with the correlation coefficient (r) 0.999. The average recovery ranged from 71.8 to 102.7% at the spiked level of 0.05, 0.5, and 5.0 mg/kg, while the relative standard deviation was between 0.1 and 7.3%. In addition, limit of detection and limit of quantitation were 0.01 and 0.05 mg/L, respectively. The results revealed that the developed and validated analytical method is possible for fenpyrazamine determination in agricultural product samples and will be used as an official analytical method.