• 대한화장품학회지
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• 제13권1호
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• pp.15-28
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• 1987

Silica spheres were prepared by interfacial reaction method. Factors in-fluencing to the mean particle size and specific surface area of silica spheres were investigated. The experiment about the surface modification of silica spheres was carried out. It was observed that silica spheres have characteristics of the spherical shape with the vacancy in the inner side, high surface area, and reaction tendency by many silanol group. The mean particle size of silica spheres is dependent on the surfactant concentration and W/O ratio. The specific surface area is influenced by SiO2/Na2O mole ratio in sodium silicate. Silica spheres coated with titanium dioxide or zirconium dioxide improve the UV protection effect. Titanate and silane coupling agent make chemical bond with silica surface and improve the organophile and the dispersibility of silica spheres.

• 한국산업보건학회지
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• 제25권1호
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• pp.36-44
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• 2015

Objectives: This study aimed to elucidate the physicochemical properties of silica powder and airborne particles as by-products generated from fabrication processes to reduce unknown risk factors in the semiconductor manufacturing work environment. Materials and Methods: Sampling was conducted at 200 mm and 300 mm semiconductor wafer fabrication facilities. Thirty-two powder and airborne by-product samples, diffusion(10), chemical vapor deposition(10), chemical mechanical polishing(5), clean(5), etch process(2), were collected from inner chamber parts from process and 1st scrubber equipment during maintenance and process operation. The chemical composition, size, shape, and crystal structure of silica by-product particles were determined by using scanning electron microscopy and transmission electron microscopy techniques equipped with energy dispersive spectroscopy, and x-ray diffractometry. Results: All powder and airborne particle samples were composed of oxygen(O) and silicon(Si), which means silica particle. The by-product particles were nearly spherical $SiO_2$ and the particle size ranged 25 nm to $50{\mu}m$, and most of the particles were usually agglomerated within a particle size range from approximately 25 nm to 500 nm. In addition, the crystal structure of the silica powder particles was found to be an amorphous silica. Conclusions: The silica by-product particles generated from the semiconductor manufacturing processes are amorphous $SiO_2$, which is considered a less toxic form. These results should provide useful information for alternative strategies to improve the work environment and workers' health.

• Elastomers and Composites
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• 제58권4호
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• pp.179-190
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• 2023

The effect of the particle size and silica structure on the wear behavior of Silica/Styrene-Butadiene Rubber (SBR) compounds was investigated using a blade-type abrader and the findings were compared with those obtained with an Akron abrader. The compensated characteristic parameter (Ψ_c), which was the contributory factor of the combined effect of the particle size and filler structure, was introduced. This parameter was found to exhibit a linear relationship with the Young's modulus. The Young's modulus correlated more with Ψ_c than the uncompensated characteristic parameter (Ψ) modeled for carbon black. The wear rate and volume loss measured using a blade-type abrader and Akron abrader were respectively observed to be inversely proportional to Ψ_c, that is, the wear resistance of Silica/SBR compound improved as the particle size became smaller and the silica structure became intricate. The coefficient of determination (R²) obtained from the linear relationship between Ψ_c and wear rate was higher than those between Ψ_c and volume loss for the Silica/SBR compound. Thus, the blade-type abrader exhibited high potential to be used for accurately evaluating the effect of particle size and structural properties of silica on the wear behavior of SBR compounds.

• 한국재료학회지
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• 제21권3호
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• pp.156-160
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• 2011

FePt nanoparticles suspension was synthesized by reduction of platinum acetylacetonate and decomposition of iron pentacarbonyl in the presence of oleic acid and oleyl amine. FePt nanoparticles were coated on a substrate by convective assembly from the suspension. To prevent the coalescence during the annealing of FePt nanoparticles double convective coatings were tried. First convective coating was for silica particle assembly on a silicon substrate and second one was for FePt nanoparticles on the previously coated silica layers. It was observed by scanning electron microscopy (SEM) that FePt nanoparticles were dispersed on the silica particle surface. After annealing at $700^{\circ}C$ for 30 minutes under nitrogen atmosphere, FePt nanoparticles on silica particles were maintained in a dispersed state with slight increase of particle size. On the contrary, FePt nanoparticles that were directly coated on silicon substrate showed severe particle growth after annealing due to the close-packing of nanoparticles during assembly. The size variation during annealing was also verified by X-ray diffractometer (XRD). It was suggested that pre-coating, which offered solvent flux oppose to the capillary force between FePt nanoparticles, was an effective method to prevent coalescence of nano-sized particles under high temperature annealing.

• 대한기계학회논문집B
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• 제23권9호
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• pp.1139-1150
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• 1999

The evolution of silica aggregate particles in coflow diffusion flames has been studied experimentally using light scattering and thermophoretic sampling techniques. The measurements of scattering cross section from $90^{\circ}$ light scattering have been utilized to calculate the aggregate number density and volume fraction using with combination of measuring the particle size and morphology through the localized sampling and a TEM image analysis. Aggregate or particle number densities and volume fractions were calculated using Rayleigh-Debye-Gans and Mie theory for fractal aggregates and spherical particles, respectively. Of particular interests are the effects of flame temperature on the evolution of silica aggregate particles. As the flow rate of $H_2$ increases, the primary particle diameters of silica aggregates have been first decreased, but, further increase of $H_2$ flow rate causes the diameter of primary particles to increase and for sufficiently larger flow rates, the fractal aggregates finally become spherical particles. The variation of primary particle size along the upward jet centerline and the effect of burner configuration have also been studied.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.561-562
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• 2006

The purpose of this study was to investigate the root cause of adhesion of silica and ceria particles during Poly-Si, TEOS, and SiN CMP process, respectively. The zeta-potentials of abrasive particles and wafers were observed negative surface charges in the alkaline solutions. SAC and STI patterned wafers have intermediate values of their composition surface's zeta potentials. The theoretical interaction force and adhesion force of silica and ceria particle were calculated in solution with acidic, neutral and alkaline pH. A stronger attractive force was calculated for silica and ceria particles on wafers in acidic solutions than in alkaline solutions. The theoretical interaction forces of the SAC and STI patterned wafers have intermediate values of their constitution wafer's values. The adhesion forces is observed lower values in alkaline solutions than in acidic solutions. And the ceria particle has lower adhesion than that of the silica particle.

• 공업화학
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• 제21권6호
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• pp.670-675
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• 2010

나노실리카볼 입자를 합성하고 표면에 비닐기를 부여하는 합성 연구를 통해 다양한 크기로 조절이 된 유-무기하이브리드 입자인 비닐-나노실리카볼이 합성되었다. 다양한 크기의 비닐-나노실리카볼 입자를 상업적으로 적용되고 있는 아크릴-멜라민 클리어코트에 후첨시키고 경화시켰을 때, 클리어코트의 광택도 증가 및 유지 특성에 대해 연구하였다. 실리카볼 입자가 250 nm 정도인 경우 Matting effect에 의한 광택도 감소가 관측되었으나 20~30 nm로 작아지면 광택도 유지 효과가 약 7%까지 증가하였다. 나노실리카볼 대신 상업용 친수 실리카 Aerosil 200 (Hydrophilic fumed silica, 평균입도 12 nm, Degussa)을 사용하여 비닐- fumed 실리카 화합물을 합성하여 클리어코트에 적용하면 광택도 유지 효과가 약 2% 정도만 증가하였다.

• 한국산업보건학회지
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• 제5권2호
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• pp.212-225
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• 1995

This study was performed in a diatomite factory located at Pohang City, Kyeongsangbuk-Do. The major objectives were to evaluate sampling and analytical methods of diatomaceous earth dust. Concentrations of total and respirable diatomaceous earth dust were measured. Size distribution of dust was analyzed by a personal cascade impactor and the particle size analyzer which is an application of multiple diffraction method. Also crystalline silica in respirable and total dust samples was analyzed quantitatively by X-ray diffraction and Fourie Transform Infrared Spectroscopy(FTIR). The results were as follows: The airborne total and respirable dust concentrations, particle size distribution, and cristalline silica(quartz) concentrations showed approximately a log-normal distribution. The means of totaldust concentrations at flour maufacturing, fire brick grinding and packaging processes exceeded the Korean and American Conference of Governmental Industrial Hygienists standards, $10mg/m^3$. The size distribution of diatomaceous earth dust was log-normal and identified as the rspirable particle mass and thoracic particle mass. The crystalline silica in respirable and total dust samples was identified to quartz and contained about 10 % in those samples. Finally, it is necessary to study the applicability of multiple diffraction for particle size distribution to compare the ACGIH's size selective sampling with other materials containing crystalline silica. Also, advanced quantitative study to X-ray diffraction and FTIR methods shoud be carried out 10 verify general and specific characteristics for respirable crystalline silica.

• 수산해양기술연구
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• 제49권4호
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• pp.492-499
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• 2013

The characteristics of abrasive wear of the rubber matrix composites filled with nano sized silica particles were investigated at ambient temperature by pin-on-disc friction test. The range of volume fraction of silica particles tested are between 11% to 25%. The cumulative wear volume and friction coefficient of these materials on particle volume fraction were determined experimentally. The major failure mechanisms were lapping layers, deformation of matrix, ploughing, deboding of particles and microcracking by scanning electric microscopy photograph of the tested surface. The cumulative wear volume showed a tendency to increase nonlinear with increase of sliding distance. As increasing the silica particles of these composites indicated higher friction coefficient.

• 수산해양기술연구
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• 제51권3호
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• pp.454-460
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• 2015

The present study is undertaken to evaluate the effect of volume fraction on the results of Charpy impact test for the rubber matrix filled with nano sized silica particles composites. The Charpy impact tests are conducted in the temperature range $0^{\circ}C$ and $-10^{\circ}C$. The range of volume fraction of silica particles tested are between 11% to 25%. The critical energy release rate $G_{IC}$ of the rubber matrix composites filled with nano sized silica particles is affected by silica volume fraction and it is shown that the value of $G_{IC}$ decreases as volume fraction increases. In regions close to the initial crack tip, fracture processes such as matrix deformation, silica particle debonding and delamination, and/or pull out between particles and matrix which is ascertained by SEM photographs of Charpy impact fracture surfaces.