• 제목/요약/키워드: Sidewall Design

검색결과 62건 처리시간 0.029초

$CH_4/H_2$유도결합 플라즈마를 이용한 InP의 건식 식각에 관한 연구 (Reactive Ion Etching of InP Using $CH_4/H_2$ Inductively Coupled Plasma)

  • 박철희;이병택;김호성
    • 한국진공학회지
    • /
    • 제7권2호
    • /
    • pp.161-168
    • /
    • 1998
  • Taguchi가 제안한 강건설계 및 연구자의 주관에 의존하는 통상적인 실험방법을 병 행하여 CH4/H2 유도결합 고밀도 플라즈마를 이용한 InP 소재의 반응성이온에칭에 있어 공 정변수들이 식각특성에 미치는 영향을 분석하고 적정조건을 도출하였다. 연구 결과 ICP전력 은 표면거칠기와 측벽수직도, bias 전력은 식각속도와 수직도에, CH4분율은 수직도와 식각 속도, 석영창과 시료 사이의 거리는 표면 거칠기에 영향을 주는 변수로 작용하였고, 식각속 도에 가장 크게 영향을 주는 변수는 공정압력임을 알 수 있었다. 결과적으로 ICP Power 700W, bias Power 150W, 시편/coil 거리 14cm, 압력 7.5mTorr, 15% $CH_4$의 적정조건에서 시간당 약 3.1$\mu\textrm{m}$의 식각속도와 미려한 표면을 얻어, 기존의 반응성 이온 식각(RIE)과 비교하 여 1.5배 이상의 식각속도를 얻을 수 있었다.

  • PDF

자동차 진동해석을 위한 자동차 현가계의 모델링 (Modeling of Automobile Suspension System for Analyzing Automobile Vibration)

  • 이태근;김병삼
    • 한국소음진동공학회논문집
    • /
    • 제15권2호
    • /
    • pp.135-147
    • /
    • 2005
  • As automobile technology advances, a smoother ride with less noise is desired. In order to achieve these purposes, a study on the vibration and noise produced by a moving automobile was carried out and a model for tire vibration characteristics which influence the ride performance was developed. The model was verified through simulations and experiments. The developed model was then applied to a half car model and automobile vibrations were analyzed. The effects of tire design parameters on the automobile vibration energy were investigated. The results from laboratory and field tests confirm the validity of the analytical model. The 17-DOF half-car model was built to analyze automobile vibration. The characteristics of the nonlinear model for a shock absorber were applied to this model. The results from the present 17-DOF half car model incorporating the analytical tire model with tire design parameters, were compared with the 5-DOF half car model where the tire was modeled with linear springs. The results of the 17-DOF model are close to the experimental results. Using the 17-DOF model, the influence of tire design parameter were considered. According to the analysis results, the vibrations at seat/body/wheel were predicted by simulation and experiment.

국민주택 규모의 공동주택 리모델링 계획안의 평가 (The Evaluation of the Proposal for Condominium Housing Remodeling in National Housing Scale($85m^2$))

  • 최정민
    • 한국실내디자인학회논문집
    • /
    • 제16권3호
    • /
    • pp.119-129
    • /
    • 2007
  • This study illustrates a prototype proposal and its evaluation for the development of floor plans in the condominium housing remodeling. For this I evaluated the survey of the residents of the 'K' town in Joonge-dong, Nowon-gu, Seoul, against the proposal which was developed based on the resident's pre-survey. The result includes that the residents' preference for community actions such as the removal of fences which are reviewed as negative, whereas the introduction of a fitness center and community facilities in the library are reviewed as positive. The residents preferred the open space by the piloti structure, although which is the wall column structure, where they anticipated a rest area, sports facilities, and bicycle drop-off spots. The sidewall proposal in the main building and the full use of the roof floor were underestimated in terms of design concept. The research also illustrated the residents' desired space planning options, those tending to use of space 'B type', personalization 'C type' and spatial size 'A type'. Residents responded positively to the introduction of the 'Alpha' space in which two households share one space that could be used for multiple purposes such as a rest area, an environment-friendly garden, and hobby room, etc, and also there is another possibility it plays an important role to the sociality in community.

타이어의 강성계수에 관한 고찰 (A Study on the Stiffness of Tire)

  • 이상선;반재삼;김항우;조규종
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 2002년도 춘계학술대회 논문집
    • /
    • pp.886-889
    • /
    • 2002
  • Finite Element Method for 3-D static loaded passenger car tire on the rigid surface is performed for studying the stiffness of tire to compare with experimental data. The tire elements used for FEM are defined each component to allow an easy change for the design parameters. Also, a hyperelastic material which is composed of tread and sidewall has been used to consider a large deformation of rubber components. The orthotropic characters of rubber-cord composite materials are used as well. The air pressure, a vertical and a lateral load are applied step by step and iterated by Modified Newton method for geometric and boundary condition nonlinear simulation. This study shows nonlinear analysis method for tire and the bearing capacity of tire due to the external force.

  • PDF

성덕댐 여수로 수리모형실험 연구 (Hydraulic Model Test for Seongduk Dam Spillway)

  • 장석환;최병규;구본웅;김성택
    • 한국수자원학회:학술대회논문집
    • /
    • 한국수자원학회 2006년도 학술발표회 논문집
    • /
    • pp.1313-1317
    • /
    • 2006
  • In this study, various hydraulic phenomena were analyzed from the dam model experiments and the analyzed results were compared with existing computation results. Sungduk dam model structures were constructed using Froude similarity law by 1:50 scale. From the measurements of hydraulic phenomena at spillway channel, an improvement method was trying to be suggested over shortcoming of existing design plan. The result of model experiment showed no big difference with that of each part's numerical interpretation. Sidewall overflows were observed, as water conveyance occurred due to the linear characteristics of spillways, which raised the necessity for improving the linear forms of spillways. Also, it was judged to be necessary improving load pressure and establishing protective structures at the riverbed grounds of downstream channels.

  • PDF

Etching Characteristics of Au Film using Capacitively Coupled CF4/Ar Plasma

  • Kim, Gwang-Beom;Hong, Sang-Jeen
    • 동굴
    • /
    • 제82호
    • /
    • pp.1-4
    • /
    • 2007
  • In this paper, the etching of Au films using photoresist masks on Si substrates was investigated using a capacitively coupled plasma etch reactor. The advantages of plasma etch techniques over current methods for Au metalization include the ability to simplify the metalization process flow with respect to resist lift-off schemes, and the ability to cleanly remove etched material without sidewall redeposition, as is seen in ion milling. The etch properties were measured for different gas mixing ratios of CF4/Ar, and chamber pressures while the other conditions were fixed. According to statistical design of experiment (DOE), etching process of Au films was characterized and also 20 samples were fabricated followed by measuring etch rate, selectivity and etch profile. There is a chemical reaction between CF4 and Au. Au- F is hard to remove from the surface because of its high melting point. The etching products can be sputtered by Ar ion bombardment.

새 국립중앙박물관 로튠다에서의 열환경 분석 (Analysis on Thermal Environment in the Rotunda of New National Museum of Korea)

  • 이승철;조영진;김두성;이재헌;김홍범
    • 설비공학논문집
    • /
    • 제15권1호
    • /
    • pp.32-39
    • /
    • 2003
  • Thermal comfort in the Rotunda which is high wide visiting space of the new national museum of Korea has been numerically investigated in this paper. To evaluate thor-mal comfort of the Rotunda, well-known indices, PMV and PPD were introduced. The results of present investigation show that thermal comfort is satisfied at the breathing zone of the visiting space. However a thermal stratification with $9^{\circ}C$ of temperature difference occurs along the height of the Rotunda which makes the thermal environment worse. For example, the PPD value reaches up to 50% in the 6th floor connection passage. Consequently, additional HVAC design factors should be considered in order to reduce the large thermal stratification.

SEG 공정 적용에 따른 Tr 특성 연구 (The study on the Transistor Performance with SEG Process)

  • 이성호;강성관;최재복;유용호;송보영;안주현;노용한
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
    • /
    • pp.167-168
    • /
    • 2007
  • Design Rule이 작아짐에 따라 Transistor performance 향상을 위한 여러 방안중 SEG 공정이 적용되고 있으며 이에 따른 Transistor 특성 연구 결과이다. SEG공정 적용시 SEG Profile에 따라 Transistor의 Short Channel Effect 열화가 발생하였고 그 원인은 Sidewall Facet발생으로 추정되며 이를 개선시 Tr 특성이 개선됨을 확인하였다.

  • PDF

브랜드 아파트의 단위평면 각 실의 경향분석 (Tendency of Each Space of Unit Plans for Brand Apartments)

  • 오혜경;홍이경
    • 한국실내디자인학회논문집
    • /
    • 제20권1호
    • /
    • pp.128-137
    • /
    • 2011
  • This study aims to examine each space characteristics of unit plans for brand apartments. Through construction companies' web-sites and real estate web-sites, all the apartment unit plans with $66m^2{\sim}164m^2$ unit among the brand apartments were analyzed. On the analysis of the apartment unit plans($66m^2{\sim}164m^2$) provided by top 8 construction companies from March 2004 to December 2008. The remarkable changes compared to existing apartments include an increase in the number of bays; front side allocation of bedrooms beside the main bedroom; installation of a vestibule, a dressing room, and a powder room; installation of built-in closets in bedrooms beside the main bedroom; and installation of a receipt spot on the sidewall in the balcony. Besides, as for minor opinions there were opinions of front side allocation of kitchen/dining room, back side allocation of the main bedroom, and installation of dressing room in bedrooms beside the main bedroom. Therefore, construction companies should pay attention to research result about the unit area ranges of apartment unit plans, and reflect it positively to develop apartment unit plans to satisfy consumers.

Design and Analysis of Refractometer Based on Bend Waveguide Structure with Air Trench for Optical Sensor Applications

  • Ryu, Jin Hwa;Lee, Woo-Jin;Lee, Bong Kuk;Do, Lee-Mi;Lee, Kang Bok;Um, Namkyoung;Baek, Kyu-Ha
    • ETRI Journal
    • /
    • 제36권5호
    • /
    • pp.841-846
    • /
    • 2014
  • This study proposes a novel optical sensor structure based on a refractometer combining a bend waveguide with an air trench. The optical sensor is a $1{\times}2$ splitter structure with a reference channel and a sensing channel. The reference channel has a straight waveguide. The sensing channel consists of a U-bend waveguide connecting four C-bends, and a trench structure to partially expose the core layer. The U-bend waveguide consists of one C-bend with the maximum optical loss and three C-bends with minimum losses. A trench provides a quantitative measurement environment and is aligned with the sidewall of the C-bend having the maximum loss. The intensity of the output power depends on the change in the refractive index of the measured material. The insertion loss of the proposed optical sensor changes from 3.7 dB to 59.1 dB when the refractive index changes from 1.3852 to 1.4452.