• Design & Manufacturing
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• v.14 no.2
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• pp.56-61
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• 2020

Recently, research for machining next-generation micro semiconductor processes and micro patterns has been actively conducted. In particular, it is applied to various industrial fields depending on the machining method in the case of FIB (Focused ion beam) milling. In this study, intends to deal with FIB milling machining technology for ultra-precision diamond tool fabrication technology. Ultra-precision diamond tools require nano-scale precision, and FIB milling is a useful method for nano-scale precision machining. However, FIB milling has a problem of Gaussian characteristics that are differently formed according to the beam current due to the input of an ion beam source, and there are process conditions to be considered, such as a side clearance angle problem of a diamond tool that is differently formed according to the tilting angle. A series of process steps for fabrication a ultra-precision diamond tool were studied and analyzed for each process. It was confirmed that the effect on the fabrication process was large depending on the spot size of the beam and the current of the beam as a result of the experimental analysis.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.10 no.4
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• pp.55-64
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• 2001

In this study, hemisphere and cylindrical shapes were machined for different tool paths and machining conditions with ball endmill cutters. Tool deflection, cutting forces and shape accuracy were measured according to the inclination position of the sculptured surface. As the decreasing of inclination position angle, the tool deflection was increased due to the decreased cutting speed when the cutting edge is approaching toward the center. Tool deflection when upward cutting is obtained less than that of downward cutting and down-milling in upward cutting showed the least tool deflection for the sculptured surface. Roundness values were found in least roundness error when down-milling in upward cutting. It is obtained the very little difference between 90。and 45。 of inclination position angle. The best surface roughness value was obtained in upward up-milling and showed different tendency with tool deflection and cutting force. For down-milling, the cutting resistance of the side wall direction is larger than that of feed direction. Therefore, this phenomenon which is received over cutting resistance can be caused of chatter.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.8
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• pp.899-904
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• 2011

This This study aims to verify burr formation and to remove the burrs in micro-channel fabrication using micro-machining tools. The machining processes are combined with micro-milling and magnetic abrasive deburring for AISI316 stainless steel. Depending on the micro-milling conditions that are applied, burrs are formed around the side walls. Magnetic abrasive deburring is used to remove these burrs. AISI316 stainless steel is a nonferrous material and its magnetic flux density, which is an important parameter for efficient magnetic abrasive deburring, is low. To enhance this magnetic flux density, we design and build a magnetic array table. The effect of removing burrs is evaluated via SEM and a surface tester.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.13 no.6
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• pp.17-22
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• 2004

A study for investigating the effects of the cutting conditions (radial depth of cut feed per tooth) and the number of tooth on the side wall of prismatically milled workpiece is described. This study is available not only for understanding the geometrical characteristics of the end milled side wall but also for finding the optimal cutting conditions. In this work, the side wall geometry was characterized by the straightness and the location of maximum peak point. Through this study, it was revealed that the geometrical characteristics of the end milled side wall are strongly related to the material removal per tooth and the number of tooth.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.1 no.1
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• pp.5-14
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• 2002

Hemisphere shapes were machined for different tool paths and machining conditions with ball endmill cutters. It was also found out how feedrate affect the precision of the machining and also tried to study the most suitable feedrate in specific cutting condition. Tool deflection, cutting forces and shape accuracy were measured according to the inclination position of the sculptured surface. As the decreasing of inclination position angle, the tool deflection was increased due to the decreased cutting speed when the cutting edge is approaching toward the center. Tool deflection when upward cutting IS obtained less than that of downward cutting and down-milling in upward cutting showed the least tool deflection for the sculptured surface. For down-milling, the cutting resistance of the side wall direction is larger than that of feed direction. It was found that the tool deflection is getting better as tool path is going to far from the center for convex surface.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.1
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• pp.1-7
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• 2011

Micromachining is gaining popularity due to recent advancements in MEMS(Micro Electro Mechanical Systems). Using conventional micromachining, it is relatively difficult to produce moving components in the order of microns. Photolithography for silicon material has high accuracy machining, but it has low aspect ratio. X-ray lithography has ultra high accuracy machining, but it has expensive cost. Micro-EDM(electro discharge machining) has been gaining popularity as a new alternative method to fabricate micro-structures. In this study, Micro-EDM machine is developed available for fabricate micro-structures and two processes such as side cut EDM and milling EDM is proposed. Several sets of experiment results have been performed to study the characteristics of the machining process.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.8 no.3
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• pp.83-91
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• 1999

In this paper, we suggest a virtual machining system that can simulate cutting forces of ball end milling at the stage of part design. Cutting forces, here, are estimated from the machanistic model that uses the concept of specific cutting farce coefficient. To this end, we need undeformed chip thickness which is used for calculating chip load. It is derived from the Z-map data of a CAD model. That is, chip load is the height difference between the cutting tool and the workpiece at an arbitrary position. The tool contact point is referred from the cutter location data. On the other hand, the workpiece height is acquired from the Z-map model of a CAD data. From the experimental verification, we can simulate machining process effectively to the slot and the side cutting of ball end mill.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.102-106
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• 1996

In the ball end-milling process of a 3-dimensional mold, it is important to select cutting conditions and tool path considering the geometrical shape of a workpiece to reduce machining time. In this study, experiments were performed to decide allowable feed rate not breaking stability of system for different geometrical shapes. It was found that downcut is more stable than upcutting in machining side wall and downward is preferable to upward in inclined part depending on the angle of the inclination and depth of cut.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.125-129
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• 1996

In this study, a method is proposed for the cutting force prediction of Ball-end milling process using Z-map is proposed. Any types of cutting area generated from previous cutting process can be expressed in z-map data. Cutting edge of a ball-end mill is divided into a set of finite cutting edges and the position of this edge is projected to the cross-section plane normal to the Z-axis. Comparing this projected position with Z-map data of cutting area and determining whether it is in the cutting region, total cutting force can be calculated by means of numerical integration. A series of experiments such as side cutting and upward/downard cutting was performet to verify the simulated cutting force.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.942-946
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• 1997

In this research,we suggest a virtual machining system that can simulate sutting forces at the stage of design. Cutting forces,here, are modeled form the machanistic model of the ball end milling. To this end, we need undeformed chip thickness which is used for calculating chip load. It is derived form the z-map data of a CAD model. That is, chip load is the height difference between the cutting tool contact point and the workpiece at arbitrary position. The tool contact point is referred from the cutter location. Form the experimental verification, we can simulate machining process effectively to the slot and the side cutting of ball end mill.