• Title/Summary/Keyword: SiO vapor

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Fabrication of Two-dimensional MoS2 Films-based Field Effect Transistor for High Mobility Electronic Device Application

  • Joung, DaeHwa;Park, Hyeji;Mun, Jihun;Park, Jonghoo;Kang, Sang-Woo;Kim, TaeWan
    • Applied Science and Convergence Technology
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    • v.26 no.5
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    • pp.110-113
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    • 2017
  • The two-dimensional layered $MoS_2$ has high mobility and excellent optical properties, and there has been much research on the methods for using this for next generation electronics. $MoS_2$ is similar to graphene in that there is comparatively weak bonding through Van der Waals covalent bonding in the substrate-$MoS_2$ and $MoS_2-MoS_2$ heteromaterial as well in the layer-by-layer structure. So, on the monatomic level, $MoS_2$ can easily be exfoliated physically or chemically. During the $MoS_2$ field-effect transistor fabrication process of photolithography, when using water, the water infiltrates into the substrate-$MoS_2$ gap, and leads to the problem of a rapid decline in the material's yield. To solve this problem, an epoxy-based, as opposed to a water-based photoresist, was used in the photolithography process. In this research, a hydrophobic $MoS_2$ field effect transistor (FET) was fabricated on a hydrophilic $SiO_2$ substrate via chemical vapor deposition CVD. To solve the problem of $MoS_2$ exfoliation that occurs in water-based photolithography, a PPMA sacrificial layer and SU-8 2002 were used, and a $MoS_2$ film FET was successfully created. To minimize Ohmic contact resistance, rapid thermal annealing was used, and then electronic properties were measured.

은 도핑 효과를 이용한 그래핀 투명 전도성 필름의 전기적 특성 향상

  • Jeong, Sang-Hui;Lee, Su-Il;Kim, Yu-Seok;Song, U-Seok;Kim, Seong-Hwan;Cha, Myeong-Jun;Park, Sang-Eun;Min, Gyeong-Im;Park, Jong-Yun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.566-566
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    • 2012
  • 그래핀(Graphene)은 모든 탄소 동소체의 기본구성 요소로 2 차원 결정구조를 가지며, 양자홀 효과(quantum Hall effect), 뛰어난 열 전도도, 고 탄성, 광학적 투과성 등과 같은 탁월한 물리적 성질을 보이는 물질이다. 이러한 그래핀의 우수한 특성은 전계 효과 트랜지스터(field effect transistor), 화학/바이오 센서, 투명 전극(transparent electrode) 등의 다양한 전자소자를 개발하는 응용 가능하다. 그 중, 그래핀 투명전극의 제조는 가장 응용가능성이 높은 분야이다. 현재 투명전극 물질로는 인듐-주석 산화물(indium tin oxide; ITO)가 널리 이용되고 있으나, 인듐의 고갈로 인한 공급부족 문제 및 고 생산비용, 휘어지지 않는 취성 등의 단점을 지니고 있다. 따라서, 우수한 광학적 투과성과 전기전도성을 지닌 그래핀이 ITO의 대체 물질로서 각광받고 있다.[1-5] 본 연구에서는 그래핀의 투명전도필름의 응용을 위해 면저항을 낮추기 위한 방법으로 화학적 도핑(doping)을 이용하였다. 그래핀은 구리(copper; Cu) 호일을 촉매로 사용하여 열 화학증착법(Thermal Chemical Vapor Deposition)을 이용하여 합성하였다. 합성된 그래핀은 PMMA(Poly(methyl methacrylate)) 전사법을 이용하여 산화실리콘(SiO2) 기판에 전사 후, 염화은(AgCl)과 클로로벤젠(C6H5Cl)으로 만든 콜로이드(colloid) 용액에 디핑(dipping)하여 그래핀에 은 입자를 도핑 하였다. 그 결과, 은 입자 도핑 농도에 따라 면저항이 감소하는 양상을 보였다. 제작된 그래핀 투명전도성 필름의 투과도는 자외선-가시광선-근적외선 분광법(UV-Vis-NIR spectroscopy)를 이용하여 측정하였고, 라만 분광법(Raman spectroscopy)을 통해 그래핀 필름의 질적 우수성과 성장 균일도를 조사하였다.

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Spinning Multi Walled Carbon Nanotubes and Flexible Transparent Sheet Film

  • Jang, Hun-Sik;Lee, Seok-Cheol;Kim, Ho-Jong;Jeong, In-Hyeon;Park, Jong-Seo;Nam, Seung-Hun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.200-200
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    • 2012
  • We investigated a flexible transparent film using the spinning multi-walled carbon nanotubes (MWCNTs). Spin-capable MWCNTs on iron catalyzed on a SiO2 wafer was grown by chemical vapor deposition, which was performed at $780^{\circ}C$ using C2H2 and H2 gas. The average diameter and length of MWCNTs grown on the substrate were ~15 nm and $250{\sim}300{\mu}m$, respectively. The MWCNT sheets were produced by continuously pulling out from well-aligned MWCNTs on a substrate. The MWCNT sheet films were produced simply by direct coating on the flexible film or grass. The thickness of sheet film was remarkably decreased by alcohol spraying on the surface of sheet. The alcohol splay increased transmittance and decreased electrical resistance of MWCNT sheet films. Single and double sheets were produced with sheet resistance of ~699 and ${\sim}349{\Omega}/sq$, respectively, transmittance of 81~85 % and 67~72%, respectively. The MWCNT sheet films were heated through the application of direct current power. The flexible transparent heaters showed a rapid thermal response and uniform distribution of temperature. In addition, MWCNT yarns were prepared by spinning a bundle of MWCNTs from vertically super-aligned MWCNTs on a substrate, and field emission from the tip and side of the yarns was induced in a scanning electron microscope. We found that the field emission behavior from the tip of the yarn was better than the field emission from the side. The field emission turn-on voltages from the tip and side of MWCNT yarns were 1.6 and $1.7V/{\mu}m$, respectively, after the yarn was subjected to an aging process. Both the configuration of the tip end and the body of the yarn were changed remarkably during the field emission. We also performed the field emission of the sheet films. The sheet films showed the turn on voltage of ${\sim}1.45V/{\mu}m$ during the field emission.

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Characteristics of Plasma Polymer Thin Films for Low-dielectric Application

  • Cho, S.J.;Boo, J.H.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.124-124
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    • 2011
  • This study investigated the interaction of varied plasma power with ultralow-k toluene-tetraethoxysilane (TEOS) hybrid plasma polymer thin films, as well as changing electrical and mechanical properties. The hybrid thin films were deposited on silicon(100) substrates by plasma enhanced chemical vapor deposition (PECVD) system. Toluene and tetraethoxysilane were utilized as organic and inorganic precursors. In order to compare the electrical and the mechanical properties, we grew the hybrid thin films under various conditions such as rf power of plasma, bubbling ratio of TEOS to toluene, and post annealing temperature. The hybrid plasma polymer thin films were characterized by Fourier transform infrared (FT-IR) spectroscopy, atomic force microscopy (AFM), nanoindenter, I-V curves, and capacitance. Also, the hybrid thin films were analyzed by using ellipsometry. The refractive indices varied with the RF power, the bubbling ratio of TEOS to toluene, and the annealing temperature. To analyze their trends of electrical and mechanical properties, the thin films were grown under conditions of various rf powers. The IR spectra showed them to have completely different chemical functionalities from the liquid toluene and TEOS precursors. Also, The SiO peak intensity increased with increasing TEOS bubbling ratio, and the -OH and the CO peak intensities decreased with increasing annealing temperature. The AFM images showed changing of surface roughness that depended on different deposition rf powers. An nanoindenter was used to measure the hardness and Young' modulus and showed that both these values increased as the deposition RF power increased; these values also changed with the bubbling ratio of TEOS to toluene and with the annealing temperature. From the field emission scanning electron microscopy (FE-SEM) results, the thickness of the thin films was determined before and after the annealing, with the thickness shrinkage (%) being measured by using SEM cross-sectional images.

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Development of Nano Ceramic Structures for HEPA Type Breathing Wall (HEPA Filter형 숨쉬는 벽체용 나노세라믹 여재개발)

  • Kim, Jong-Won;Ahn, Young-Chull;Kim, Gil-Tae
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.20 no.4
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    • pp.274-279
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    • 2008
  • In the perspective of saving energy in buildings, high performance of insulation and air tightness for improving the heating and the cooling efficiency has brought the positive effect in an economical view. However, these building energy saving technologies cause the lack of ventilation, which is the direct cause of increasing the indoor contaminants, and it is also very harmful to residents because they spend over 90% of their time in the indoor area. Therefore, the ventilation is important to keep indoor environment clean and it can also save energy consumption. In this study, a HEPA type breathing wall is designed as a passive ventilation system to collect airborne particles and to supply fresh outdoor air. To make fine porous structures, polymer nano fibers which were made by electro spinning method are used as a precursor. The nano fibers are coated with SiO2 nano particles and finally the HEPA type breathing wall is made by sintering in the electric furnace at $300\sim500^{\circ}C$. The pressure drops of nano ceramic structure are 8.2, 25.5 and 44.9 mmAq at the face velocity of 2.0, 5.9 and 8.8 cm/s, respectively. Also the water vapor permeability is $3.6g/m^2{\cdot}h{\cdot}mmHg$. In this research, the porous nano ceramic structures are obtained and the possibility for the usage of a material for HEPA type breathing wall can be obtained.

Fabrication of a robust, transparent, and superhydrophobic soda-lime glass

  • Rahmawan, Yudi;Kwak, Moon-Kyu;Moon, Myoung-Woon;Lee, Kwang-Ryeol;Suh, Kahp-Yang
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.86-86
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    • 2010
  • Micro- and nanoscale texturing and control of surface energy have been considered for superhydrophobicity on polymer and silicon. However these surfaces have been reported to be difficult to meet the robustness and transparency requirements for further applications, from self cleaning windows to biochip technology. Here we provided a novel method to fabricate a nearly superhydrophobic soda-lime glass using two-step method. The first step involved wet etching process to fabricate micro-sale patterns on soda-lime glass. The second step involved application of $SiO_x$-incorporated DLC to generate high intrinsic contact angle on the surface using chemical vapor deposition (CVD) process. To investigate the effect of surface roughness, we used both positive and negative micro-scale patterns on soda-limeglass, which is relatively hard for surface texturing in comparison to quartz or Pyrex glasses due to the presence of impurities, but cheaper. For all samples we tested the static wetting angle and transparency before and after 100 cycles of wear test using woolen steel. The surface morphology is observed using optical and scanning electron microscope (SEM). The results shows that negative patterns had a greater wear resistance while the hydrophobicity was best achieved using positive patterns having static contact angle up to 140 deg. with about 80% transparency. The overall experiment shows that positive patterns at etching time of 1 min shows the optimum transparency and hydrophobicity. The optimization of micro-scale pattern to achieve a robust, transparent, superhydrophobic soda-lime glass will be further investigated in the future works.

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Crystal Structure of a Benzene Sorption Complex of Dehydrated Fully $Cd^{2+}$-Exchanged Zeolite X

  • 김양;염영훈;최은영;김안나;한영욱
    • Bulletin of the Korean Chemical Society
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    • v.19 no.11
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    • pp.1222-1227
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    • 1998
  • The crystal structure of a benzene sorption complex of fully dehydrated Cd2+-exchanged zeolite X, Cd46Si100Al92O384·43C6H6 (a=24.880(6) Å), has been determined by single-crystal X-ray diffraction techniques in the cubic space group Fd3 at 21 ℃. The crystal was prepared by ion exchange in a flowing stream of 0.05 M aqueous Cd(NO3)2 for 3 d, followed by dehydration at 400 ℃ and 2 x 10-6 Torr for 2 d, followed by exposure to about 92 Torr of benzene vapor at 22 ℃. The structure was determined in this atmosphere and refined to the final error indices R1=0.054 and Rw=0.066 with 561 reflections for which I > 3σ(I). In this structure, Cd2+ ions are found at four crystallographic sites: eleven Cd2+ ions are at site 1, at the centers of the double six-oxygen rings; six Cd2+ ions lie at site I', in the sodalite cavity opposite to the double six-oxygen rings; and the remaining 29 Cd2+ ions are found at two nonequivalent threefold axes of unit cell, sites Ⅱ' (in the sodalite cavity ) and site Ⅱ (in the supercage) with occupancies of 2 and 27 ions, respectively. Each of these Cd2+ ions coordinates to three framework oxylkens, either at 2.173(13) or 2.224(10) Å, respectively, and extends 0.37 Å into the sodalite unit or 0.60 Å into the supercage from the plane of the three oxygens to which it is bound. The benzene molecules are found at two distinct sites within the supercages. Twenty-seven benzenes lie on threefold axes in the large cavities where they interact facially with the latter 27 site-Ⅱ Cd2+ ions (Cd2+-benzene center=2.72 Å; occupancy=27 molecules/32 sites). The remaining sixteen benzene molecules are found in 12ring planes; occupancy=16 molecules/16 sites. Each hydrogen of these sixteen benzenes is ca. 2.8/3.0 Å from three 12-ring oxygens where each is stabilized by multiple weak electrostatic and van der Waals interactions with framework oxygens.

An Algorithm Study to Detect Mass Flow Controller Error in Plasma Deposition Equipment Using Artificial Immune System (인공면역체계를 이용한 플라즈마 증착 장비의 유량조절기 오류 검출 실험 연구)

  • You, Young Min;Jeong, Ji Yoon;Ch, Na Hyeon;Park, So Eun;Hong, Sang Jeen
    • Journal of the Semiconductor & Display Technology
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    • v.20 no.4
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    • pp.161-166
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    • 2021
  • Errors in the semiconductor process are generated by a change in the state of the equipment, and errors usually arise when the state of the equipment changes or when parts that make up the equipment have flaws. In this investigation, we anticipated that aging of the mass flow controller in the plasma enhanced chemical vapor deposition SiO2 thin film deposition method caused a minute flow rate shift. In seven cases, fourier transformation infrared film quality analysis of the deposited thin film was used to characterize normal and pathological processes. The plasma condition was monitored using optical emission spectrometry data as the flow rate changed during the procedure. Preprocessing was used to apply the collected OES data to the artificial immune system algorithm, which was then used to process diagnosis. Through comparisons between datasets, the learning algorithm compared classification accuracy and improved the method. It has been confirmed that data characterized as a normal process and abnormal processes with differing flow rates may be discriminated by themselves using the artificial immune system data mining method.

Sensitivity Analysis for CAS500-4 Atmospheric Correction Using Simulated Images and Suggestion of the Use of Geostationary Satellite-based Atmospheric Parameters (모의영상을 이용한 농림위성 대기보정의 주요 파라미터 민감도 분석 및 타위성 산출물 활용 가능성 제시)

  • Kang, Yoojin;Cho, Dongjin;Han, Daehyeon;Im, Jungho;Lim, Joongbin;Oh, Kum-hui;Kwon, Eonhye
    • Korean Journal of Remote Sensing
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    • v.37 no.5_1
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    • pp.1029-1042
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    • 2021
  • As part of the next-generation Compact Advanced Satellite 500 (CAS500) project, CAS500-4 is scheduled to be launched in 2025 focusing on the remote sensing of agriculture and forestry. To obtain quantitative information on vegetation from satellite images, it is necessary to acquire surface reflectance through atmospheric correction. Thus, it is essential to develop an atmospheric correction method suitable for CAS500-4. Since the absorption and scattering characteristics in the atmosphere vary depending on the wavelength, it is needed to analyze the sensitivity of atmospheric correction parameters such as aerosol optical depth (AOD) and water vapor (WV) considering the wavelengths of CAS500-4. In addition, as CAS500-4 has only five channels (blue, green, red, red edge, and near-infrared), making it difficult to directly calculate key parameters for atmospheric correction, external parameter data should be used. Therefore, thisstudy performed a sensitivity analysis of the key parameters (AOD, WV, and O3) using the simulated images based on Sentinel-2 satellite data, which has similar wavelength specifications to CAS500-4, and examined the possibility of using the products of GEO-KOMPSAT-2A (GK2A) as atmospheric parameters. The sensitivity analysisshowed that AOD wasthe most important parameter with greater sensitivity in visible channels than in the near-infrared region. In particular, since AOD change of 20% causes about a 100% error rate in the blue channel surface reflectance in forests, a highly reliable AOD is needed to obtain accurate surface reflectance. The atmospherically corrected surface reflectance based on the GK2A AOD and WV was compared with the Sentinel-2 L2A reflectance data through the separability index of the known land cover pixels. The result showed that two corrected surface reflectance had similar Seperability index (SI) values, the atmospheric corrected surface reflectance based on the GK2A AOD showed higher SI than the Sentinel-2 L2A reflectance data in short-wavelength channels. Thus, it is judged that the parameters provided by GK2A can be fully utilized for atmospheric correction of the CAS500-4. The research findings will provide a basis for atmospheric correction of the CAS500-4 in the future.

Crystal Structure of a Methanol Sorption Complex of Dehydrated Partially Cobalt(Ⅱ)-Exchanged Zeolite A (부분적으로 Co(Ⅱ) 이온으로 치환한 제올라이트 A를 탈수한 후 메탄올을 흡착한 결정구조)

  • Jang, Se Bok;Han, Yeong Uk;Kim, Yang
    • Journal of the Korean Chemical Society
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    • v.38 no.5
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    • pp.339-344
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    • 1994
  • The crystal structure of a methanol sorption complex of dehydrated partially Co(II)-exchanged zeolite A, $Co_4Na_4-A{\cdot}6.5CH_3OH$ (a = 12.169(1) $\AA)$, has been determined by single-crystal X-ray diffraction techniques in the cubic space group Pm$\bar3$m at $21(1)^{\circ}C. $Co_4Na_4$-A was dehydrated at $360^{\circ}C\;and\;2{\times}10^{-6}$ torr for 2 days, followed by exposure to about 104 torr of methanol vapor at $22(1)^{\circ}C$ for 1 hr. The structure was refined to final error indices, $R_1$ = 0.061 and $R_2$ = 0.060 with 147 reflections, for which I > $3\sigma(I).$ In this structure, four $Co^{2+}$ ions and 1.5 $Na^+$ ions per unit cell lie at 6-ring positions: the $Na^+$ ions are recessed 0.44 $\AA$ into the sodalite unit and the Co(II) ions extend ca. 0.55 $\AA$ into the large cavity. 2.5 $Na^+$ ions lie in an 8-oxygen ring plane. The 6.5 methanol molecules are sorbed per unit cell. The 6.5 methanol oxygens, all in the large cavity, associate with the 4 $Co^{2+}$ ions and 2.5 $Na^+$ ions.

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